JPH08195419A - Bare chip inspection machine - Google Patents

Abstract

PURPOSE: To obtain a bare chip inspection machine in which a bare chip continuity inspection device is protected from the vibration of a chip feed and discharge device. CONSTITUTION: A bare chip inspection machine 1 is provided with a bare chip continuity inspeciton device 4 in which a bare chip held by a suction chuck 35 is brought into contact with an inspection probe so as to perform a continuity inspection and with a chip feed and discharge device 2 which feeds un uninspected bare chip to the suction chuck and which discharges an inspected bare chip. In the bare chip inspection machine, the bare chip continuity inspection device 4 and the chip feed and discharge device 2 are installed respectively on separate stands 84, 83, and wheel mechanisms 11 and position fixing means are installed at the stands 84, 83.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bare chip inspection machine for conducting a continuity inspection with a bare chip alone. More specifically, the present invention relates to a bare chip inspecting apparatus including a bare chip continuity inspecting apparatus for conducting an inspection of bare chips and a supply / ejecting apparatus for supplying or ejecting bare chips to the bare chip inspecting apparatus.

[0002]

2. Description of the Related Art Conventionally, a bare chip manufactured by finely dividing (cutting) a semiconductor wafer is manufactured for the following reason.
It was not tested on its own. In other words, the bare chip itself is very small and is easily damaged, and therefore it is difficult to handle. Moreover, the interval between the bonding pads formed on the bare chip is set to a small value of several tens of microns to several hundreds of microns. Further, when the bare chip is brought into contact with the inspection probe for the continuity test, the contacted portion may be scratched, and the bare chip may be deteriorated. In this case, it is conceivable to manually inspect bare chips one by one without using an inspection machine that automatically conducts continuity inspection, but in this case, it is inefficient, and the bare chips are damaged to cause defective products. Is inevitable.

For this reason, the bare chip itself has not been subjected to a continuity test, but has been subjected to molding to complete an IC chip and then a final test as a finished product.

[0004]

However, when a defective product is found in the final inspection and the cause is due to the defective conduction of the bare chip, it is unnecessary to carry out the conductive inspection of the bare chip, which is unnecessary. It means that the manufacturing cost is allotted to the defective product. Therefore, there is a demand for the development of an inspection machine that can automatically conduct a continuity test with bare chips alone.
It is necessary to devise a method that does not transmit the vibration of the part for supplying and discharging the bare chip to the part for conducting the continuity inspection of the bare chip.

The present invention has been made in view of the above circumstances, and provides a bare chip inspection machine capable of protecting the bare chip inspection side from the vibration of the bare chip supply / discharge side, saving space, and having good maintainability. With the goal.

[0006]

In order to achieve the above object, the present invention provides a bare chip continuity inspection device for contacting a bare chip held on a chuck with an inspection probe to conduct a continuity test, and an uninspected bare chip on the chuck. It is equipped with a supply and discharge device for supplying and discharging the inspected bare chip, and the bare chip continuity inspection device and the supply and discharge device are installed on different mounts, respectively, and moved to at least one of these mounts. Means and position fixing means are provided so that they can be separated from the other pedestal and the space between both pedestals can be opened and closed.

Further, in the bare chip inspection machine of the present invention, the frame on which the bare chip continuity inspection device is mounted and the frame on which the supply / discharge device are mounted are connected to each other via a vibration isolating member.

[0008]

Therefore, when the position of the gantry is fixed by the position fixing means, the positional relationship of each gantry becomes constant, and the bare chips are accurately transferred between the supply / discharge device and the continuity inspection device. In this state, when the supply / discharge device is started and the supply and discharge of bare chips are started, the mount on which this supply / discharge device is installed vibrates, but this vibration causes the mount on which the inspection device is installed. There is no direct transmission to the side. Further, when performing maintenance of the bare chip inspecting machine, a pedestal provided with a moving means is moved to leave an interval between the pedestals so that a worker can enter between the pedestals. In particular, according to the second aspect of the invention, since the vibration-proof member absorbs the propagation of vibrations, it is possible to more reliably prevent the propagation of vibrations before connecting the two mounts.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The structure of the present invention will be described in detail below with reference to the embodiments shown in the drawings.

1 and 2 show a bare chip inspection machine according to the present invention. The bare chip inspection machine 1 is configured to include a bare chip supply / discharge device 2, a centering device 3, a bare chip continuity inspection device 4, an inspection probe 5 (see FIG. 20), and the like. In this bare chip inspection machine 1, the bare chip continuity inspection device 4 functions as a bare chip positioning device.

The bare chip inspection machine 1 is installed on a pedestal 7 that moves along a rail 6. The gantry 7 is divided into a supply / discharge side pedestal 83 and an inspection side pedestal 84. The bare chip supply / discharge device 2 is installed on the supply / discharge side mount 83. The monitor 8 and a switch panel (not shown) are attached to the frame 83a of the frame 83 at predetermined positions. On the other hand, on the inspection side frame 84, the centering device 3 and the bare chip continuity inspection device 4 are installed. A tester stand 10 shown in FIG. 19 is housed inside the stand 7. The inspection probe 5 is attached to the tester device 9 supported by the tester base 10.

Each of the mounts 83, 84 is provided with a plurality of wheel mechanisms 11 as a moving means and is movably arranged on the rail 6. Position fixing means are provided on each of the mounts 83 and 84. To be more specific with reference to FIG. 21, the position fixing means is composed of a stopper that hits the wheel mechanism 11 on the rail 6 and a stopper that blocks the movement of the wheel when the wheel mechanism 11 is in contact with the stopper. The inspection side mount 84 is fixed by this position fixing means. Therefore, if this stopper is removed, the inspection side base 8
4 can be moved along the rail 6. Normal,
The inspection side mount 84 is fixed.

On the other hand, the supply / discharge side mount 83 is provided with a knock pin type positioning mechanism 12 as a position fixing means. The positioning mechanism 12 includes a horizontal knock pin 87 fixed to a connecting base 89 attached to a supply / discharge side mount 83 via a vibration isolating member, for example, a vibration isolating rubber 90.
b and a vertical knock pin 87a that moves up and down by an actuator, for example, an air cylinder 93c, are attached to the inspection side mount 84, and a horizontal hole 88 of a connecting holder 88 is attached.
b and the vertical hole 88a, respectively, and the inspection side mount 84
The supply / discharge side mount 83 is connected and fixed to the.

Concretely, the supply / discharge side mount 8 of the rail 6
3 is moved to fit the knock pin 87b into the horizontal hole 88b, and in this state, the cylinder 93 is driven to drive the knock pin 8b.
7a may be fitted into the vertical hole 88a, and the knock pin 87a
The dog 93b that moves together with the dog 93b is detected by the photosensor 93a fixed to the coupling holder 88 to confirm the fixing operation. According to this structure, the two mounts 8 are provided by the knock pins in the two directions.
The positions of 3, 84 are accurately determined, and the vibrations on the supply / discharge side mount 83 side are absorbed by the anti-vibration rubber 90 and are not directly transmitted to the inspection side mount 84 side.

As shown in FIG. 22, this position fixing means fixes a horizontal knock pin 87 'to a connection base 89 on the supply / discharge side mount 83 side, and a horizontal hole 88' in the connection holder on the inspection side mount 84 side. And the two pedestals 83, 8 in this state.
U-grooves 94 provided on both sides of the connecting plate 91 straddling 4
May be fitted to the bolt 92, and the bolts 92 may be tightened to fix the frames 83 and 84 via the vibration-proof rubber 90.

Although the supply / discharge side mount 83 is fixed to the inspection side mount 84 in this embodiment, the supply / discharge side mount 83 may be fixed to the floor. In this case, the vibration isolating member can be omitted by leaving a slight gap between the mounts 7, and at this time also, the vibration of the supply / discharge side mount 83 is prevented from being directly transmitted to the inspection side mount 84. can do. Further, a bracket is fixed to each of the mounts 83 and 84, and a knock pin 87 is attached to the side wall portion thereof.
There is also a case where it is connected so that it can be taken in and out in the vertical direction. In this case, one of the brackets is attached to the pedestal via the antivibration rubber. Further, position fixing means may be used in which adjusters capable of advancing and retracting are provided at the four corners of the pedestals 83 and 84 and fixed to the floor surface.

The bare chip supply / discharge device 2 supplies or discharges the bare chip 95 to the bare chip continuity inspection device 4 described later. The bare chip 95 is molded into a size of 2 mm × 4 mm, for example. A large number of bare chips 95, for example, 49 (7
(7 sheets x 7 rows) are arranged. And this tray 1
3 is a plurality of sheets, for example 4 sheets (2 sheets) on the pallet 14.
Sheets x 2 rows) are arranged side by side. The bare chips 95 are arranged on the tray 13 with the pattern surface on which the bonding pads are formed facing up. Therefore, the pattern surface of the bare chip is not scratched.

As shown in detail in FIGS. 3 to 5, the bare chip supplying / discharging device 2 comprises a magazine rack 15, a lifter 16, a pallet feeder 17, an XY robot 18, and the like. The magazine rack 15 can accommodate, for example, a maximum of 10 pallets 14 arranged vertically. The magazine rack 15 is attached to the lift plate of the lifter 16, and the magazine rack 15 as a whole is lifted and lowered by the lifter 16. Then, among the pallets 14 stored in the magazine rack 15, the pallets 14 located at a predetermined height are pulled out by the pallet feeder 17 and conveyed. On the other hand, the pallet 14 conveyed in the return direction by the pallet feeder 17 is pushed into the magazine rack 15 at this height position. At a predetermined position of the pallet 14, notches (not shown) are provided for engaging the hooking pieces 19 of the slider 85 of the pallet feeder 17 with the pallet 14. The hooking piece 19 fits in a notch with respect to the pallet 14 at the same height position and is caught in the moving direction of the slider 85. Therefore, in this case, the pallet feeder 17 can pull out the pallet 14. On the other hand, the hooking pieces 19 pass vertically through the cutouts of the pallets 14 when the magazine rack 15 moves up and down. Therefore, in this case, the hooking piece 19 does not interfere with the elevation of the magazine rack 15.

The pallet feeder 17 is arranged in the depth direction of the gantry 7, that is, in the direction of the arrow Y in the figure, and reaches a location 20 near the bare chip continuity inspection device 4 (hereinafter, this location is referred to as a delivery location). 14 is conveyed.
When the pallet feeder 17 conveys the pallet 14 to the delivery place 20, the pallet feeder 17 inserts a knock pin into the pallet 14 at the delivery place 20 and slightly lifts it to accurately position the pallet 14 and fix the position.

Two magazine racks 15, two lifters 16 and one pallet feeder 17 are installed, and they are arranged side by side in the width direction of the gantry 7, that is, in the direction of arrow X in the figure.

The XY robot 18 is an orthogonal robot. The XY robot 18 is arranged in a space above the gantry 7 and is fixed to the supply / discharge side pedestal 83. The XY robot 18 is provided with a pair of vacuum chucks 21 and 22. The chucks 21 and 22 are moved horizontally in a space where the pallet feeders 17, the centering device 3, and the bare chip continuity inspection device 4 are installed. .

Each of the vacuum chucks 21 and 22 is shown in FIG.
8 to 8, they are provided at a predetermined interval in the X direction. The chucking portion 23 of each of the vacuum chucks 21 and 22 (shown only on the chuck 22 side in FIG. 7) is formed by an inclined surface that spreads in a quadrangular pyramid shape as shown in FIG. 6B. Therefore, the chucking portion 23 contacts only the edge portion of the upper surface of the bare chip 95, and does not contact the pattern portion of the bare chip 95 to damage this portion. Then, of the respective vacuum chucks 21 and 22, the supply-side chuck 21 (the chuck illustrated on the left side in FIGS. 6 and 8) located on the right side in the X direction of the gantry 7 has the position of the bare chips arranged on the tray 13. The suction ports are provided at four positions so that the bare chip can be securely chucked even if the position is slightly deviated.

On the other hand, the discharge side chuck 22 (the chuck shown on the right side in FIGS. 6 and 8) located on the left side of the gantry 7 in the X direction has a suction port at one location as shown in FIG. 6C. It is provided. Since the discharge side chuck 22 takes out the inspected bare chip 95 ′ from the suction chuck 35 described later, the bare chip 95 is sucked in a state in which the bare chip is already accurately positioned. Therefore, there is no problem in chucking even with a single suction port. The vacuum chucks 21 and 22 are respectively connected to different actuators such as air cylinders 24 and 25, and are vertically moved independently of each other. Axis 2 of chucks 21 and 22
1a and 22a are supported by support plates 24a and 25a so as to be vertically movable, and are urged downward by springs 21b and 22b. Stoppers 21c and 22c are fixed to the shafts 21a and 22a to prevent them from coming off.
Further, the support plates 24a, 25a are also supported by the guide bar so as to be vertically movable, and are urged in the upward direction by springs.
Therefore, the chucks 21 and 22 are supported in a floating state, and even if the cylinders 24 and 25 have an overstroke, the chucks 24 and 25 descend only by a predetermined stroke.

A defective product pallet 26 and a spare pallet 27 are installed on the supply / discharge side mount 83. Defective product pallet 26 is used for each pallet feeder 17
In between, the preliminary pallets 27 are arranged on the inner side of the pallet feeder 17 located on the left side in the X direction.
Each pallet 26, 27 is placed on a pallet stand 28 shown in FIGS. 9 and 10 and positioned by a pair of pins 28a. Each pallet stand 28 is fixed to the supply / discharge side mount 83. In addition, each pallet 26, 2
The place where 7 is arranged may be exchanged, or each pallet 26, 27 may be arranged at another place. in this way,
The place where each pallet 26, 27 is arranged becomes a bare chip storage.

As shown in FIG. 11, the centering device 3 has a bare chip 95 mounted on the base plate 29.
Is lightly pressed simultaneously from four directions along the base plate 29 to roughly position the bare chip with respect to a reference position described later. Base plate 29
Is fixed to a camera stand 75 described later. A temporary positioning field 30 is set on the base plate 29. Then, four pressing pieces 31 are arranged so as to surround the temporary positioning field 30. Each pressing piece 3
1 can be moved toward or away from the temporary positioning field 30 by an actuator. For example, each pressing piece 3
1, ..., 31 are always pulled by a tension spring 32 in a direction approaching the temporary positioning field 30. Also, each pressing piece 3
Reference numerals 1 are respectively connected to pneumatic cylinders (not shown). Then, when air pressure is supplied to each pneumatic cylinder, each pressing piece 31 moves in the direction away from the temporary positioning field 30 against the spring force of the tension spring 32. Therefore,
The four pressing pieces 31 move toward and away from each other in a cross shape as a whole while simultaneously moving. In addition, the temporary positioning field 30
A vacuum suction port is provided below, and suction operation is performed at the time of positioning to maintain the positioning state of the bare chip 95, and when the chuck 21 sucks the bare chip 95, the suction is released. In addition, the pressing piece 31,
, 31 may be provisionally positioned by using a screw feed mechanism using a stepping motor. The centering device 3 is installed on the inspection side pedestal 84 because when the supply / discharge side pedestal 83 is moved for maintenance of the device or the like, a slight deviation is inevitable when the position of the supply / discharge side pedestal 83 is returned. This is to eliminate the effect of misalignment.

As shown in FIGS. 12 to 14, the bare chip continuity inspection device (bare chip positioning device) 4 comprises a chuck portion, a chuck position correction portion, a chuck vertical movement portion, an image processing portion and the like.

The chuck portion is composed of a rotating body 33, which serves as a rotating shaft installed substantially horizontally, a vertical rod 34, a pair of suction chucks 35, and the like. The rotating body 33 is arranged substantially horizontally and is rotatably attached to the support body 36 using a pair of bearings 37. Therefore, the rotating body 33 functions as a rotating shaft that can rotate accurately without rattling with respect to the support body 36. Further, at a position near the tip of the rotating body 33, as shown in FIG.
4 is rotatably mounted using a pair of bearings 38. Therefore, the vertical rod 34 rotates accurately without rattling with respect to the rotating body 33.

Adsorption chucks 35, 35 having the same structure are attached to the upper and lower ends of the vertical rod 34, respectively. Each suction chuck 35 is attached toward the outer side in the radial direction of the rotating body 33. Each suction chuck 35, 3
Reference numeral 5 is connected to a vacuum source / vacuum generator (not shown) and holds a work (bare chip or dummy chip) by using negative pressure.

Each suction chuck 35 has a built-in heater 39 and a temperature sensor 40 (only one of the suction chucks 35 is shown in the figure) for performing a bare chip temperature test. The heater 39 is arranged near the tip of the suction chuck 35 and warms the bare chip held by the suction chuck 35. The temperature sensor 40 is also arranged near the tip of the suction chuck 35 and detects the temperature of this portion. In this case, the temperature can be controlled more accurately than in the case where a temperature test is performed as a package, and heating can be performed in an extremely short time, and the test time can be significantly shortened. Further, a light shielding wall 98 is provided around the suction chuck 35 to prevent light from entering from the surroundings when the bare chip is pressed against the inspection probe and hitting the bare chip. Shading wall 9
8 is formed in a bank shape over the entire periphery of the suction chuck 35. The amount of protrusion of the light shielding wall 98 from the bare chip suction surface 35b prevents the needle chuck 78 from coming too close to the tip surface of the inspection probe 5 when the suction chuck 35 descends and approaches the inspection probe 5. Is set to a predetermined value to prevent The light shielding wall 98 regulates the approach movement of the suction chuck 35 with respect to the inspection probe 5 at a position having a sufficient margin with respect to the elastic limit of each needle 78. Further, the light shielding wall 98 surrounds the inspection probe 5 and the bare chip when they are in contact with each other, and blocks the incidence of light. Suction chuck 3
In the case of the present embodiment, 5 is a main body 99 provided with a suction hole 96 communicating with a vacuum source, a nozzle plate 97 constituting a nozzle portion for sucking the bare chip 95, and a cylindrical light shielding wall 98.
It consists of and. The light shielding wall 98 may be provided not only on the chuck side but also on the inspection probe 5 side.

This chuck portion is rotated as a whole by a reversing stepping motor (hereinafter, simply referred to as reversing motor) 41. In other words, the output side pulley 43 is fitted and fixed to the output shaft 41a via the gear box of the reversing motor 41 attached to the support plate 42. The output pulley 43 is connected to an input pulley 44 fitted and fixed to the shaft of the rotating body 33 by a belt 45, and the rotation of the output pulley 43 is accurately transmitted to the input pulley 44. The reversing motor 41 reciprocally rotates the rotating body 33 by 180 degrees to rotate each of the suction chucks 35.
Swap the upper and lower positions of. That is, the reversing motor 41
Turns each suction chuck 35 upside down. The belt 45 is a tension roller 45a as shown in FIG.
Although the tension is applied by means of, the rotating body 33 and the output shaft of the motor 41 may be directly connected. In this case, the pulley, belt,
The tension mechanism is unnecessary.

The chuck position correcting section is provided with a θ angle adjusting mechanism, X
It is composed of a direction adjusting mechanism, a Y direction adjusting mechanism, and the like.
The θ angle adjusting mechanism adjusts the rotation angle (hereinafter referred to as θ angle) of each suction chuck 35 around the θ axis with the vertical rod 34 as the θ axis. That is, the input side pulley 46 is fitted and fixed at a predetermined position in the middle of the vertical rod 34 that serves as the θ axis. The input side pulley 46 is connected by a belt 49 to an output side pulley 48 fitted and fixed to the output shaft 47a of the stepping motor 47.
The bottom surface of the plate 50 fixed to the rotating body 33 is shown in FIG.
As shown in 6, a tension mechanism 51 is attached. The tension mechanism 51 applies tension to the belt 49. Therefore, the rotation of the output pulley 48 is accurately transmitted to the input pulley 46. Stepping motor 47
Adjusts the θ angle of each suction chuck 35 by rotating the vertical rod 34 forward or backward by a desired angle.

The Y-direction adjusting mechanism moves the slide plate (hereinafter referred to as Y-side slide plate) 53 in the Y-direction with respect to the base plate 52 fixed to the inspection side mount 84.
That is, it is moved in the width direction of the gantry 84 shown by the arrow Y in the figure,
The position of each suction chuck 35 in the Y direction is adjusted. This Y-direction adjusting mechanism is provided on the base plate 52 in the Y-direction.
A rail (hereinafter, referred to as a Y-side rail) 54 fixed along the direction, and a slider (hereinafter, referred to as a Y-side rail) fixed to the bottom surface of the Y-side slide plate 53 and moving along the Y-side rail 54.
(Referred to as Y-side slider) 55 and Y-side slide plate 5
3, a stepping motor (hereinafter referred to as a Y-side motor) 56 fixed by using a bracket and the like.

A screw rod 57 arranged along the Y direction is connected to the output shaft of the Y-side motor 56. The screw rod 57 penetrates a slide box (hereinafter referred to as a Y-side box) 58 fixed on the base plate 52. The screw rod 57 and the Y-side box 58 are connected by a screw pair. Therefore, when the screw rod 57 rotates, the screw rod 57 moves in the axial direction with respect to the Y-side box 58 by a distance corresponding to the rotation speed. That is, Y
When the side motor 56 rotates normally or reversely, the Y side slide plate 53 moves in the arrow Y direction by a corresponding distance according to the rotation direction and the number of rotations of the Y side motor 56. Incidentally, reference numeral 59 in the drawing is a photo sensor. This photo sensor 5
9 detects the original position of the Y-side slide plate 53 with respect to the base plate 52. Therefore, the motor can be driven with the number of pulses based on this position to set the position.

The X-direction adjusting mechanism moves the slide plate (hereinafter referred to as the X-side slide plate) 60 with respect to the Y-side slide plate 53 in the X direction, that is, in the depth direction of the gantry 84 indicated by arrow X in the figure. , Each suction chuck 35
The position in the X direction is adjusted. The X-direction adjusting mechanism includes a rail (hereinafter, referred to as X-side rail) 61 fixed on the Y-side slide plate 53 along the X-direction,
A slider (hereinafter referred to as the X-side slider) 62 fixed to the bottom surface of the X-side slide plate 60 and moving along the X-side rail 61, and a stepping motor fixed to the X-side slide plate 60 using a bracket ( Below, X
63) and the like.

A screw rod 64 arranged along the X direction is connected to the output shaft of the X side motor 63. The screw rod 64 penetrates through a slide box (hereinafter, X side box) 65 fixed on the Y side slide plate 53. The screw rod 64 and the X-side box 65 are connected by a screw pair. Therefore, when the screw rod 64 rotates, the screw rod 64 moves in the axial direction with respect to the X-side box 65 by a distance corresponding to the rotation speed. That is, X
When the side motor 63 rotates forward or reverse, the X side motor 6
The Y-side slide plate 53 moves in the arrow X direction by a corresponding distance in accordance with the rotation direction and the number of rotations of 3. Since this movement is a feed by the screw rod 64, the occurrence of backlash is unavoidable, and the backlash is removed by adding a spring 60a and biasing it. Although illustration is omitted,
A similar spring is also provided on the Y side. Incidentally, reference numeral 66 in the drawing
Is a photo sensor. This photo sensor 66
The relative position of the X-side slide plate 60 with respect to the side slide plate 53 is detected.

The chuck vertical moving unit moves the chuck unit in the Z direction with respect to the vertical plate 67 fixed on the X-side slide plate 60, that is, in the vertical direction indicated by the arrow Z in the drawing, and raises the height of each chuck. It changes the size. The chuck vertical moving portion has rails (hereinafter referred to as Z-side rails) 73 fixed to the vertical plate 67 side along the vertical direction.
And a slider that moves along the Z-side rail 73 (hereinafter,
A Z-side slider 74), a lifting body 71 attached to the Z-side slider 74, a stepping motor (hereinafter referred to as the Z-side motor) 69 fixed to the vertical plate 67 using a bracket, and the like. ing. Z side motor 69
The output shaft of the screw rod 70 arranged along the vertical direction
Is connected. The screw rod 70 penetrates through the inside of the lifting body 71. The screw rod 70 and the lifting body 71 are connected by a screw pair. Therefore, when the screw rod 70 rotates, the lift 71 and the Z-side slider 74 move in the vertical direction with respect to the screw rod 70 by a distance corresponding to the number of rotations thereof. That is, when the Z-side motor 69 rotates normally or reversely, the elevating body 71 and the Z-side slider 74 move up or down by the corresponding distance in accordance with the rotation direction and the rotation speed. A plate 68 is attached to the elevating body 71 and the Z-side slider 74, and the support plate 42 is attached to the plate 68. Therefore, the chuck portion is also moved up and down integrally with the lifting body 71 and the Z-side slider 74. Incidentally, reference numeral 72 in the drawing is a photo sensor. The photo sensor 72 detects the original position of the lift 71. Therefore, the motor can be driven with the number of pulses based on this position to set the position.

As shown in FIGS. 17 and 18, the camera 76 of the image processing unit is attached to the camera stand 75 fixed on the inspection side mount 84, and is arranged above the suction chuck 35 so as to face it. ing. Therefore, this camera 76 is used for the suction chuck 3 located at the image processing location.
The surface of the bare chip or the dummy chip held by 5 can be photographed from above. The camera 76 is electrically connected to a controller equipped with a microcomputer, and supplies the image of a workpiece such as a bare chip taken by the camera as an image signal to the controller. Then, the controller computer-processes the image signal supplied from the camera 76 by using a known image processing method to recognize and store the position of the contact scratch of the dummy chip and the position of the bonding pad of the bare chip, which will be described later, and store the reference. The movement of the chuck part is controlled by determining the position and calculating the amount of error from this reference position to obtain the corrected movement amount. Since the image processing method performed by the controller is publicly known, the description of its specific content is omitted. Further, since the defect such as the chipping of the bonding pad of the bare chip can be detected before the inspection by the image signal, the wasteful work of inspecting the defective product can be eliminated.

The inspection probe 5 is arranged on the tester device 9 installed on the tester base 10, and the suction chuck 3
It is arranged below 5. The tester stand 10 is shown in FIG.
As shown in FIG. Therefore, the tester mount 10 can be exposed by unfixing the supply / discharge side mount 83 and moving it to widen the space between the supply / discharge side mount 83 and the inspection side mount 84. And in this state, maintenance of the tester device 9,
For example, the inspection probe 5 can be easily replaced. When the inspection probe 5 is replaced, the handle 77 is rotated to lower the height of the tester base 10,
After lowering the tester device 9, the inspection probe 5 is replaced.

The inspection probe 5 is, as shown in FIG.
The block portion 5b is connected to the handler base 7 of the tester device 9.
9 is fixed from below with screws 80, and the main body 5c is projected toward the suction chuck 35. This inspection probe 5
Is a number corresponding to the number of bonding pads on the bare chip,
For example, it has 60 needles 78. Each needle 78 is arranged corresponding to the bonding pad of the bare chip. Therefore, when the suction chuck 35 descends and the bare chip hits the inspection probe 5, each needle 78 contacts the corresponding bonding pad and is electrically connected. Further, the inspection probe 5 is provided with a guide plate 5a having a fine hole for guiding the needle 78 to a position corresponding to the bonding pad of the bare chip. In the figure, reference numeral 81 is a fixture ring, and reference numeral 82 is a PT plate.

The bare chip inspection machine 1 configured as described above operates as follows.

Prior to the continuity test of the bare chip, first,
A dummy chip is used to obtain a correction amount for positioning the bare chip inspection machine 1. The dummy chip is manufactured, for example, by cutting a glass plate having gold vapor-deposited on its surface to a size slightly larger than the bare chip, for example, a size of 4 mm × 6 mm. Of course, the dummy chip is not limited to this and may be any one that is easily scratched, such as a glass plate coated with magic ink.

The operator 86 directly puts a dummy chip (not shown) on the suction chuck 35 located above the bare chip continuity inspection device 4. Of course, the bare chip supply / discharge device 2 and the centering device 3 may be used. The dummy chip is sucked by the suction chuck 35 and securely held. Next, the operator 86 operates the reversing motor 41 to reverse each suction chuck 35, and moves the chuck 35 holding the dummy chip downward. As a result, the dummy chip faces the inspection probe 5. Each suction chuck 3 of the bare chip continuity inspection device 4
Since 5 is inverted in the vertical direction, the bare chip continuity inspection device 4 is compared to the case where each chuck is inverted in the horizontal direction.
The installation space can be kept small.

After that, the Z-side motor 69 of the vertical moving part of the chuck of the bare chip continuity inspection device 4 is operated to lower the suction chuck 35 until the light shielding wall 98 contacts the guide plate 5a of the probe 5, and the dummy chip is inspected. Needle 7
Contact 8. The dummy chip is placed on the suction chuck 35 by the hand of the operator 86, but since the dummy chip is formed in a large size, it reliably hits the inspection probe 5. Due to this contact, a large number of contact scratches indicating the position of the needle 78 of the inspection probe 5 are formed on the dummy chip.

Next, the Z side motor 6 of the chuck vertical moving portion
9 is operated to raise each suction chuck 35, and then the reversing motor 41 is operated to invert the vertical rod 34 to replace the upper and lower suction chucks 35, 35. As a result, the suction chuck 35 holding the dummy chip moves upward, and the dummy chip faces the camera 76 of the image processing unit. At this position, the camera 76 captures the contact surface of the dummy chip as an image signal, and the controller of the image processing unit performs image processing to recognize the position of each contact scratch. The position of each contact scratch corresponds to the position of each needle 78 of the inspection probe 5, and the image processing unit stores this position as a reference position. This treatment is carried out by utilizing at least two contact scratches, more preferably two contact scratches at both ends. here,
The dummy chip is removed from the suction chuck 35.

After this, the operator 86 operates the bare chip 9
5. Conduct the continuity test of 5. First, a case will be described in which a continuity test is performed on the bare chip 95 supplied from the pallet feeder 17 on the right side in the X direction, and the inspected bare chip 95 is transferred to the pallet feeder 17 on the left side in the X direction. The XY robot 18 moves the supply-side chuck 21 to the delivery place 20 of the right-side pallet feeder 17, further moves the supply-side chuck 21 downward, and among the bare chips arranged on the predetermined tray 13 on the pallet 14. Chuck one predetermined piece. Then, the XY robot 18 places the bare chip 95 on the temporary positioning area 30 of the centering device 3 by ascending the chuck 21, moving horizontally, and descending. When the bare chip 95 is placed on the temporary positioning area 30,
The centering device 3 cuts off the supply of compressed air. As a result, the four pressing pieces 31 approach each other in a cross shape, and the bare chip 9
5 is lightly pressed from four directions to temporarily position the bare chip 95. Then, when the supply of the compressed air to the centering device 3 is restarted, the four pressing pieces 31 are separated from the bare chip 95 in a cross shape.

Thereafter, the XY robot 18 chucks the bare chip 95 again by the chuck 21 on the supply side,
The chuck 21 is mounted on the suction chuck 35 on the upper side of the bare chip continuity inspection device 4 by ascending → horizontal movement → lowering. At this time, the previous bare chip 95 ′ placed on the suction chuck 35 is first taken out by the discharge-side chuck 22. Of course, in the first inspection, since there is no previous bare chip 95 ', this take-out operation is unnecessary. In this state, the pattern surface of the bare chip is on the upper side, and the controller performs computer processing on the image signal captured by the camera 76 to detect the position of each bonding pad.

Since the bare chip is temporarily positioned by the centering device 3, the deviation from the reference position is slight, and the position of the bonding pad of the bare chip 95 is surely within the visual field of the camera 76. And
The bare chip continuity inspection device 4 compares the stored reference position with the detected position of each bonding pad, and operates the vertical direction rod by operating the X-direction adjusting means, the Y-direction adjusting means, and the θ-direction adjusting means. 34 and suction chuck 3
5 is finely adjusted and moved to correct. Since the positional deviation of the bare chip 95 is automatically corrected by these means, it is not necessary for the operator 86 to adjust the positional deviation. Further, since the deviation of the position of the bare chip is corrected based on the position of the bonding pad, the cutting position of the bare chip is deviated and the position of the bonding pad is relatively displaced with respect to the contour of the bare chip, or Even if the contour of the bare chip has burrs at the time of cutting, the bare chip is well positioned. This position correction may be performed either before reversing the vertical rod 34 or during reversing / lowering. In the case of the present embodiment, after the position correction, the control is performed so as to move toward the inspection probe 5 side.

Therefore, when the position of the bonding pad coincides with the reference position, the reversing motor 41 is operated to reverse each suction chuck 35, and the Z-side motor 69 is operated to lower the suction chuck 35. As a result, the bonding pad of the bare chip 95 comes into contact with the needle 78 of the inspection probe 5 at an accurate position, and the continuity inspection is performed. in this case,
The light-shielding wall 98 on the periphery of the suction chuck 35 has the inspection plug 5
It is lowered until just before it comes into contact with the guide plate 5a to determine the descending feed amount, and thereafter, the feed amount is operated. Therefore, although the light shielding wall 98 is set so as not to contact the guide plate 5a, even if it hits, the light shielding wall 98 does not lower further and its descending is restricted. For this reason, the distance between the tip surface of the inspection probe 5 and the bare chip is always the set distance, and the bare chip 95 pushes the expensive needle 78 downward too much to buckle them or shorten their life significantly. It is possible to prevent contact failure due to insufficient contact amount with each needle 78. Also,
The light-shielding wall 98 surrounds the bare chip and each of the needles 78 and shields the light hitting the bare chip. Therefore, it is possible to prevent the positive and negative of the inspection signal from being switched by the light and prevent the inspection result from becoming abnormal.

Further, in this case, the chuck vertical moving section is
The suction chuck 3 is perpendicular to the tip surface of the inspection probe 5.
5 is lowered to bring the bonding pad of the bare chip into straight contact with the needle 78. Therefore, contact scratches are smaller than when the bonding pad is obliquely contacted with the needle 78, and the size of the contact scratches can be minimized. Further, even when the protrusion amount of each needle 78 of the inspection probe 5 varies, a so-called escape phenomenon of the needle 78 (a contact position is displaced when tilted) is prevented and the needle 78 and the bonding pad are favorably arranged. Can be contacted.

Further, since the heater 39 built in each suction chuck 35 directly heats the bare chip 95, the bare chip before the inspection can be smoothly heated to a temperature suitable for the continuity inspection. Therefore, it is not necessary to perform preheating before conducting this inspection in order to conduct the continuity inspection, and inspection can be performed by accurate temperature control.

When the bare chip continuity test is completed, the suction chuck 35 is lifted to separate the bare chip from the needle 78 of the inspection probe 5, and thereafter, the suction chuck 35 is inverted and the suction chuck 35 holding the bare chip is moved upward. Move to. Then, the inspected bare chips 95 ′ are chucked by the discharge side chuck 22 of the XY robot 18, and are arranged on the tray 13 on the pallet 14 waiting at the delivery place 20 of the left pallet feeder 17. This allows
The continuity test of one bare chip is completed.

As described above, the bare chip continuity inspection device 4
Has two suction chucks 35, and in practice, each suction chuck 35 is used together to alternately perform a conduction test of bare chips. That is, when the XY robot 18 mounts the bare chip 95 before the inspection on the suction chuck 35, the bare chip 95 ′ that has been subjected to the previous conduction test is mounted on the suction chuck 35. Therefore, the XY robot 18
First, the discharge side chuck 22 removes the inspected bare chip from the suction chuck 35, and then the supply side chuck 21 passes the uninspected bare chip to the suction chuck 35. Since the operation of the XY robot 18 can be made independent of the operation of the inspection device 4, the bare chip can be discharged and the next bare chip can be supplied during the inspection, and an efficient operation can be realized.

Then, the image processing section detects the position of the bonding pad of the bare chip passed to the upper suction chuck 35, and the chuck position correcting section corrects the deviation from the reference position. In this case, since the controller of the image processing unit has already stored the reference position, it is not necessary to reset the reference position using the dummy chip.

Thereafter, the bare chip continuity inspection device 4 reverses each suction chuck 35. In this state, the lower suction chuck 35 holds the position-corrected bare chip before the inspection, and the upper suction chuck 35 holds the bare chip after the inspection. After that, each suction chuck 35 is lowered, and the bare chip held by the lower suction chuck 35 is brought into contact with the inspection probe 5 to perform the continuity inspection. Then, when the continuity test is completed, each suction chuck 35 moves up. Next, the bare chip of the upper suction chuck 35 is exchanged from the inspected one to the uninspected one.
After that, the same procedure is repeated and the bare chip continuity test is automatically performed.

In the bare chip inspection machine 1 in this embodiment, three kinds of modes are set as the operation procedure of the continuity inspection.

First, the first mode will be described. This operation mode is implemented when the operator 86 operates the switch panel to select the first mode. First
In this mode, from the pallet feeder on the right side in the X direction (hereinafter referred to as the supply side pallet feeder in the description of the first mode) 17 to the left pallet feeder (hereinafter referred to as the discharge side pallet feeder in the description of the first mode).
Conduction inspection is performed while transferring the bare chips to 17, and bare chips in the trays (hereinafter referred to as spare trays) 13 on the spare pallet 27 are inspected and replenished by the number reduced by the detection of defective products.

More specifically, the supply-side pallet feeder 17 is the pallet 1 on which bare chips before inspection are mounted.
4 and the discharge side pallet feeder 17 is an empty pallet 14
Respectively to the delivery place 20. Further, the operator 86 prepares an empty tray as a tray (hereinafter referred to as a defective product tray) 13 on the defective product pallet 26 and a tray on which bare chips before inspection are arranged as a spare tray 13. .

After that, the XY robot 18 moves the tray (hereinafter referred to as the first tray) on the pallet 14 of the supply-side pallet feeder 17.
In the description of the mode, the bare chip is chucked from the supply side tray 13), and the bare chip is passed to the bare chip continuity inspection device 4 through the centering device 3. The XY robot 18 stores the location where the bare chip is chucked from the supply tray 13, and selects the bare chip in order from the end. And a continuity check is done,
As a result, when the bare chip is a passed product, the XY robot 18 places the bare chip on a tray (hereinafter referred to as a discharge side tray) 13 on the pallet 14 of the discharge side pallet feeder 17 in the description. Line up. X
The Y robot 18 stores the position where the bare chips are arranged on the discharge side tray 13, and arranges the good bare chips in order from the end.

On the other hand, when the result of the continuity inspection is unacceptable, the XY robot 18 arranges the inspected bare chips on the defective product tray 13. The XY robot 18 stores the position where the bare chips are arranged on the defective product tray 13, and arranges the defective bare chips in order from the end. And in this case X
The Y robot 18 chucks the bare chip of the spare tray 13 as a bare chip to be inspected next, and passes it to the bare chip continuity inspection device 4 via the centering device 3. And as a result of the inspection, if this bare chip is a good product,
The XY robot 18 uses the bare chip to eject the tray 13
Line up with and replenish the non-defective bare chips. On the other hand, if the inspection result is unacceptable, the same procedure is repeated until a good product is obtained. Of course, since there are usually few defects, there is little possibility of repeating it many times, but in any case, if defects continue, it is preferable to issue an alarm or the like and stop the operation because it is a problem in lot units.

Since four trays 13 are placed on each pallet 14, four feed trays 13 on the pallet 14 placed on the feed pallet feeder 17 are placed.
The continuity test of the bare chip is repeated until is empty. Then, when the four supply-side trays 13 are empty, the supply-side pallet feeder 17 stores the pallets 14 on which these empty trays 13 are placed in the magazine rack 15 from the delivery place 20, and the magazine racks 1
The next pallet 14 (having four trays 13 on which bare chips before inspection are placed) is moved from the magazine rack 15 to the delivery place 20 and the pallet 14 is exchanged. Similarly, also in the discharge side pallet feeder 17, when the pallet 14 at the delivery place 20 is filled with non-defective bare chips, the pallet 14 is accommodated in the magazine rack 15 and the pallet 14 on which the empty tray 13 is placed is placed in the magazine rack. Delivery place from within 15
And the pallet 14 is exchanged. The bare chip inspection machine 1 automatically conducts a continuity inspection of all bare chips supplied by the supply side pallet feeder 17.

When the operating procedure is set to the first mode,
Since the discharge side tray 13 has no empty portion, it is possible to collect the same number of passed inspection products in the same number and carry them to the next step.

Next, the second mode will be described. This operation mode is implemented when the operator 86 operates the switch panel to select the second mode. Second
In this mode, even if the bare chip is inspected, another tray 13
The non-defective bare chip is returned to the same position of the same tray 13 without being moved to the above step, and the non-defective item is not replenished even if a defective item appears.

That is, each pallet feeder 17 moves the pallet 14 on which bare chips before inspection are placed to the delivery place 20. Further, the operator 86 prepares an empty tray as the defective product tray 13. After that, the XY robot 18 first chucks a bare chip from a tray (hereinafter, referred to as a right tray) 13 on the pallet 14 of the pallet feeder 17 on the right side in the X direction, and passes the chip to the bare chip continuity inspection device 4 via the centering device 3. hand over. The XY robot 18 stores the position at which the bare chip is chucked from the right tray 13, and selects the bare chip in order from the end. Then, a continuity test is performed, and as a result, if this bare chip is a passing product, the XY robot 18 returns the non-defective bare chip to the original position of the right tray 13. On the other hand, if the result of the continuity check is unsuccessful, X
The Y robot 18 uses this bare chip as the defective product tray 13
Line up. The XY robot 18 stores the position where the bare chips are arranged on the defective product tray 13, and arranges the defective bare chips in order from the end.

When the continuity inspection of all bare chips on the four right trays 13 is completed, the right pallet feeder 17 causes the pallet 14 on which these trays 13 are placed.
Are stored in the magazine rack 15 from the delivery place 20.
In this case, the position where the defective bare chip of each tray 13 was placed remains empty. After that, the right pallet feeder 17 raises the magazine rack by one pallet to move the next pallet 1 from inside the magazine rack 15.
4 (the four trays 13 on which bare chips before inspection are arranged) are moved to the delivery place 20, and the pallet 14 is replaced.

When all the bare chips of the pallet 14 accommodated in the magazine rack 15 of the right pallet feeder 17 have been inspected, the bare chip inspection machine 1 then conducts the continuity inspection of the bare chips on the pallet 14 of the left pallet feeder 17. To start. Then, the same procedure as the above is repeated until the left pallet feeder 1
Pallet 1 stored in magazine rack 15 on the 7 side
For all 4, all bare chips are automatically inspected.

When the operating procedure is set to the second mode,
It is possible to carry out a continuity test by collecting bare chips for each lot and carry them to the next process without mixing bare chips between lots. Therefore, bare chip lot management is possible. Further, since each magazine rack 15 can accommodate a total of 20 pallets 14, unmanned operation for a long time can be performed while automatically inspecting a large amount of bare chips, and operation suitable for night operation can be performed. .

Next, the third mode will be described. This operation mode is executed when the operator 86 operates the switch panel to select the third mode. Third
In the mode (2), the non-defective bare chip after the inspection is returned to the same position on the same tray 13 as in the second mode, but when a defective product appears, the non-defective product is replenished.

That is, each pallet feeder 17 moves the pallet 14 on which the bare chips before the inspection are placed to the delivery place 20. The operator 86 also prepares an empty tray as the defective tray 13 and a tray on which bare chips before inspection are arranged as the spare tray 13.

After that, the XY robot 18 first chucks the bare chip from the right tray 13 and transfers it to the bare chip continuity inspection device 4 via the centering device 3. X
The Y robot 18 stores the position at which the bare chip is chucked from the right tray 13, and selects the bare chip in order from the end. And a continuity check is performed, and as a result,
If this bare chip is acceptable, XY robot 18
Returns the non-defective bare chip to the same position on the right tray 13.

On the other hand, when the result of the continuity test is unacceptable, the XY robot 18 arranges the bare chips on the defective product tray 13. The XY robot 18 is a defective tray 1.
The position where the bare chips are arranged in 3 is stored, and the defective bare chips are arranged in order from the end. Then, in this case, the XY robot 18 chucks the bare chip of the spare tray 13 as a bare chip to be inspected next, and passes it to the bare chip continuity inspection device 4 via the centering device 3. Then, as a result of the inspection, if this bare chip is non-defective, X
The Y robot 18 arranges the bare chips on the right tray 13 to replenish the non-defective bare chips. On the other hand, if the inspection result is unacceptable, the same procedure is repeated until a good product is obtained.

When the continuity inspection of all the bare chips on the four right trays 13 is completed, the right pallet feeder 17 delivers the pallets 14 on which these trays 13 are placed as in the case of the second mode. It is accommodated in the magazine rack 15 from the place 20. However, in the third mode, if a defective product appears, a good product is replenished,
The pallet 14 accommodated in the magazine rack 15 after the inspection is filled with non-defective products. After that, the right pallet feeder 17 replaces the pallet 14, and the bare chip inspection machine 1 automatically repeats the continuity inspection of the bare chips.

When the inspection of all the bare chips of the pallet 14 accommodated in the magazine rack 15 of the right pallet feeder 17 is completed, the bare chip inspection machine 1 then conducts the continuity inspection of the bare chips on the pallet 14 of the left pallet feeder 17. To start. Then, the above procedure is repeated to automatically inspect all the bare chips of the pallet 14 accommodated in the left magazine rack 15.

When the driving procedure is set to the third mode,
Since each tray 13 has no empty space, the same number of passed inspection products can be collected on the tray 13 and transported to the next process, and when both magazine racks 15 are combined, a total of 20 pallets 14 can be stored. Therefore, it is possible to drive suitable for long-time unmanned operation at night.

In the bare chip inspection machine 1 of this embodiment, the gantry 7 is divided into an inspection side pedestal 84 and a supply / discharge side pedestal 83,
The vibration-proof means, for example, a vibration-proof rubber, are connected to each other.
Therefore, the XY robot 18 and each pallet feeder 17
Can be prevented from being transmitted to the bare chip continuity inspection device 4 side, and the inspection-side mount 84 and the supply / discharge-side mount 83 are connected so as not to be displaced, and the positioning accuracy of the bare chip at the continuity inspection can be improved. Can be secured.
Further, since each of the mounts 83 and 84 can be moved on the rail 6, the bare chip inspection machine 1 needs only a minimum installation space, and the maintenance work can be easily performed. That is, by removing the knock pin which is the position fixing means of the supply / discharge side mount 83 and moving the supply / discharge side mount 83 to separate it from the inspection side mount 84, maintenance of the tester device 9 housed in the inspection side mount 84 is performed. Work can be done easily. Furthermore, by removing both the position fixing means of each of the mounts 83, 84, the entire bare chip inspection machine 1 can be moved.

The dummy chip can also be used to confirm the wear state of each needle 78 of the inspection probe 5. That is, while conducting a continuity test of the bare chip, by regularly using a dummy chip to check the condition of each contact scratch, the wear state of each needle 78 is confirmed and the contact between these and the bonding pad of the bare chip is checked. The state can be determined and the replacement time of the inspection probe 5 can be known.

Even if the inspection probe 5 is replaced during the conduction test of the bare chip, it is desirable to use the dummy chip to reset the reference position. When the inspection probe 5 is replaced, the position of the inspection probe 5 often delicately shifts before and after the replacement. Therefore, by resetting the reference position using the dummy chip after the replacement, the continuity test thereafter can be favorably restarted.

The above embodiment is one example of the preferred embodiment of the present invention, but the present invention is not limited to this, and various modifications can be made without departing from the gist of the present invention. For example, in this embodiment, the camera 76 of the image processing means is fixed to the camera stand 75.
The camera 76 may be installed so that it can be raised and lowered. In this case, by synchronizing the raising and lowering of the camera 76 with the raising and lowering of each suction chuck 35 of the bare chip continuity inspection device 4, the efficiency of the bare chip continuity inspection can be further improved.
That is, each suction chuck 35 descends and the lower chuck 3
While conducting the continuity inspection of the bare chip held by 5,
At the same time, the position of the bare pad bonding pad before the inspection held by the upper chuck 35 can be detected.

Further, in the present embodiment, the bare chip inspection apparatus 4 has two suction chucks 35 at both ends of the vertical rod 34, but the number of suction chucks 35 is not limited to this, and three or more suction chucks 35 are provided. The bare chip inspection device 4 may be configured by including the suction chuck 35. In this case, it is desirable to install the suction chucks 35 radially with respect to the rotating body 33 at equal intervals. Then, the vertical rod 34 is controlled so as to rotate by 120 ° at a corresponding angle, for example, when the three suction chucks 35 are provided. By increasing the number of suction chucks 35, the efficiency of the bare chip continuity inspection can be further increased.

Further, in this embodiment, the light shielding wall 98
However, it may be provided on the inspection probe 5 side, or may be provided on both the inspection probe 5 and the adsorption chuck 35.

In the present embodiment, the light shielding wall 98 functions as a needle buckling prevention stopper that restricts the movement of the suction chuck 35 toward the inspection probe 5, but the needle seat is provided separately from the light shielding wall 98. An anti-bending stopper may be provided. In this case, the needle buckling prevention stopper may be provided on either the inspection probe 5 side or the suction chuck 35 side, or may be provided on both the inspection probe 5 and the suction chuck 35.

Further, in the bare chip inspection machine 1 in this embodiment, three kinds of modes are set as the operation procedure of the continuity inspection, but it is not always necessary to set all these three kinds of operation modes, and only one of them is set. Of course, only the operation mode may be set, or any two operation modes may be set in combination.

Further, in this embodiment, the inspection probe 5 is arranged below each suction chuck 35, and each suction chuck 35 is lowered to bring the dummy chip or bare chip into contact with the inspection probe 5 from above. It is not always necessary to dispose the inspection probe 5 below each suction chuck 35, and for example, the inspection probe 5 may be disposed above or to the side of each suction chuck 35.

In this embodiment, the rotary shaft 35 is arranged horizontally and each suction chuck 35 is vertically inverted. However, each suction chuck 35 does not necessarily have to be vertically inverted. The suction chuck 35 may be inverted.

Although the image processing location is set above the inspection probe 5 in this embodiment, the image processing location does not necessarily have to be set above the inspection probe 5; It is desirable to determine the setting position according to the layout design of the bare chip inspection machine 1 such as setting the place.

[0085]

As described above, in the bare chip inspection machine to which the present invention is applied, the bare chip inspection device and the supply / discharge device are installed on different pedestals, and moving means is provided on at least one of these pedestals. Since the position fixing means is provided so that it can be separated from the other pedestal and the space between the two pedestals can be opened and closed, the vibration generated in the supply and discharge device is not directly transmitted to the bare chip inspection device side. For this reason, the positioning accuracy of the bare chip in the bare chip inspection device can be ensured, and the conduction inspection of the bare chip alone can be automated. Further, since at least one of the mounts can be moved, the space between the mounts can be widened, and the maintenance work can be easily performed between the mounts. On the other hand, when conducting a bare chip continuity test, the installation space of the bare chip tester can be minimized by bringing the mounts closer to each other.

Further, in the bare chip inspection machine according to the second aspect, the vibration-proof member surely absorbs the vibration, and the vibration on the gantry side on which the supply / discharge device is installed is directly transmitted to the gantry side on which the bare chip inspection device is installed. Since there is no such problem, these pedestals can be fixed and integrated while ensuring the positioning accuracy on the bare chip inspection device side.

[Brief description of drawings]

FIG. 1 is a perspective view showing a schematic configuration of an inspection machine to which the present invention is applied.

FIG. 2 is a plan view of the bare chip inspection machine of FIG.

3 is a plan view of a pallet feeder of the bare chip inspection machine of FIG.

FIG. 4 is a side view of the pallet feeder as seen from the direction of arrow IV in FIG.

5 is a front view of the pallet feeder as seen from the direction of arrow V in FIG.

6A and 6B are views showing the vacuum chuck and its periphery of the XY robot of the bare chip inspection machine of FIG. 1, FIG. 6A is a front view showing the entire chuck, FIG. 6B is a plan view showing the suction surface of the supply side vacuum chuck, and FIG. 8] is a plan view showing a suction surface of a discharge-side vacuum chuck.

7 is a side view of the vacuum chuck as seen from the direction of arrow VII in FIG.

8 is a plan view of the vacuum chuck of FIG.

9 is a front view of a pallet stand of the bare chip inspection machine of FIG. 1. FIG.

10 is a plan view of a defective product pallet as viewed in the direction of arrow X in FIG.

11 is a plan view of a centering device of the bare chip inspection machine of FIG. 1. FIG.

12 is a side view of the bare chip continuity inspection device of the bare chip inspection machine of FIG. 1. FIG.

13 is a rear view of the bare chip continuity inspection apparatus as seen from the direction of arrow XIII in FIG.

14 is a plan view of the bare chip continuity inspection apparatus of FIG.

15 is a cross-sectional view showing details of a chuck portion of the bare chip continuity inspection device in FIG.

16 is a cross-sectional view of the chuck section taken along the line XVI-XVI in FIG.

FIG. 17 is a front view showing a camera stand of the bare chip inspection machine of FIG. 1.

FIG. 18 is a plan view of the camera stand of FIG.

19 is a side view showing a tester stand of the bare chip inspection machine of FIG. 1. FIG.

FIG. 20 is a cross-sectional view showing an inspection probe of the bare chip inspection machine of FIG. 1.

FIG. 21 is a view showing an example of means for connecting the mounts,
(A) is a side view and (B) is a plan view.

FIG. 22 is a view showing another example of means for connecting the mounts,
(A) is a plan view and (B) is a side view.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Bare chip inspection machine 2 Chip supply / discharge device 3 Centering device 4 Bare chip continuity inspection device (bare chip positioning device) 5 Inspection probe 6 Rail 7 Frame 11 Wheel mechanism 12 Positioning mechanism 13 Tray 83 Supply / discharge side mount 84 Inspection side mount 95 Bare chip 95 ' Inspected bare chip

─────────────────────────────────────────────────── ───

[Procedure amendment]

[Submission date] May 10, 1995

[Procedure Amendment 1]

[Document name to be amended] Statement

[Name of item to be corrected] Brief description of the drawing

[Correction method] Change

[Correction content]

[Brief description of drawings]

FIG. 1 is a perspective view showing a schematic configuration of an inspection machine to which the present invention is applied.

FIG. 2 is a plan view of the bare chip inspection machine of FIG.

3 is a plan view of a pallet feeder of the bare chip inspection machine of FIG.

FIG. 4 is a side view of the pallet feeder as seen from the direction of arrow IV in FIG.

5 is a front view of the pallet feeder as seen from the direction of arrow V in FIG.

6A and 6B are views showing the vacuum chuck and its periphery of the XY robot of the bare chip inspection machine of FIG. 1, FIG. 6A is a front view showing the entire chuck, FIG. 6B is a plan view showing the suction surface of the supply side vacuum chuck, and FIG. 8] is a plan view showing a suction surface of a discharge-side vacuum chuck.

7 is a side view of the vacuum chuck as seen from the direction of arrow VII in FIG.

8 is a plan view of the vacuum chuck of FIG.

9 is a front view of a pallet stand of the bare chip inspection machine of FIG. 1. FIG.

10 is a plan view of a defective product pallet as viewed in the direction of arrow X in FIG.

11 is a plan view of a centering device of the bare chip inspection machine of FIG. 1. FIG.

12 is a side view of the bare chip continuity inspection device of the bare chip inspection machine of FIG. 1. FIG.

13 is a rear view of the bare chip continuity inspection apparatus as seen from the direction of arrow XIII in FIG.

14 is a plan view of the bare chip continuity inspection apparatus of FIG.

15 is a cross-sectional view showing details of a chuck portion of the bare chip continuity inspection device in FIG.

16 is a cross-sectional view of the chuck section taken along the line XVI-XVI in FIG.

FIG. 17 is a front view showing a camera stand of the bare chip inspection machine of FIG. 1.

FIG. 18 is a plan view of the camera stand of FIG.

19 is a side view showing a tester stand of the bare chip inspection machine of FIG. 1. FIG.

FIG. 20 is a cross-sectional view showing an inspection probe of the bare chip inspection machine of FIG. 1.

FIG. 21 is a view showing an example of means for connecting the mounts,
(A) is a plan view, (B) is a plan view showing essential parts, and (C) is
Side view, (D) shows the positional relationship between the knock pin and the dog
It is a figure .

FIG. 22 is a view showing another example of means for connecting the mounts,
(A) is a plan view and (B) is a side view.

[Explanation of symbols] 1 bare chip inspector 2 chip supply / discharge device 3 centering device 4 bare chip continuity inspection device (bare chip positioning device) 5 inspection probe 6 rail 7 mount 11 wheel mechanism 12 positioning mechanism 13 tray 83 supply / discharge side mount 84 inspection side Frame 95 Bare chip 95 'Inspected bare chip

[Procedure Amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0014

[Correction method] Change

[Correction content]

Concretely, the supply / discharge side mount 8 of the rail 6
3 moves the fitting the knock pin 87b in the horizontal hole 88b, the knock pin 8 drives the cylinder 93 c in this state
7a may be fitted into the vertical hole 88a, and the knock pin 87a
The dog 93b that moves together with the dog 93b is detected by the photosensor 93a fixed to the coupling holder 88 to confirm the fixing operation. According to this structure, the two mounts 8 are provided by the knock pins in the two directions.
The positions of 3, 84 are accurately determined, and the vibrations on the supply / discharge side mount 83 side are absorbed by the anti-vibration rubber 90 and are not directly transmitted to the inspection side mount 84 side.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shoichi Teshirogi 1015 Kamiodanaka, Nakahara-ku, Kawasaki City, Kanagawa Prefecture, Fujitsu Limited (72) Inventor, Shoichi Funaki 1015, Kamiodanaka, Nakahara-ku, Kawasaki City, Kanagawa Prefecture, Fujitsu Limited

Claims (2)

[Claims] 1. A bare chip continuity inspection device for conducting a continuity test by bringing a bare chip held by a chuck into contact with an inspection probe, and a supply / discharge device for supplying an uninspected bare chip to the chuck and discharging an inspected bare chip. And, the bare chip continuity inspection device and the supply and discharge device are respectively installed on separate pedestals, and at least one of these pedestals is provided with a moving means and a position fixing means, with respect to the other pedestal. A bare chip inspection machine characterized by being separable and opening / closing between both mounts. 2. The bare chip inspection machine according to claim 1, wherein a frame on which the bare chip continuity inspection device is mounted and a frame on which the supply / discharge device are mounted are connected via a vibration isolating member.