JPH081903B2 - Discharge electrode - Google Patents
Discharge electrodeInfo
- Publication number
- JPH081903B2 JPH081903B2 JP62042778A JP4277887A JPH081903B2 JP H081903 B2 JPH081903 B2 JP H081903B2 JP 62042778 A JP62042778 A JP 62042778A JP 4277887 A JP4277887 A JP 4277887A JP H081903 B2 JPH081903 B2 JP H081903B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- power source
- members
- electrode members
- electrode member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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- Plasma Technology (AREA)
- Physical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Description
【発明の詳細な説明】 〔発明の技術分野〕 本発明は高周波放電電極に係り、特に複数の電極部材
を有しこの電極部材を電源側とアース側とに切り換える
ことによりスパッタリングおよびエッチング等プラズマ
放電処理を行なうことを可能とした放電電極に関する。Description: TECHNICAL FIELD OF THE INVENTION The present invention relates to a high frequency discharge electrode, and more particularly to a plasma discharge such as sputtering and etching by having a plurality of electrode members and switching the electrode members between a power source side and a ground side. The present invention relates to a discharge electrode capable of performing treatment.
〔発明の技術的背景とその問題点〕 従来、スパッタリングやエッチングあるいはプラズマ
CVD等を行なうための放電電極には、種々のものが用い
られており、例えば、対向して配置された被処理物と電
極部材との間に高電圧を印加してマグネトロン放電を起
こさせてスパッタリング等の処理を行なうようにしたも
の等がある。[Technical background of the invention and its problems] Conventionally, sputtering, etching, or plasma
Various types of discharge electrodes are used for performing CVD or the like. For example, a high voltage is applied between an object to be processed and an electrode member which are arranged to face each other to generate a magnetron discharge. There is a device which is adapted to perform a process such as sputtering.
しかし、従来の放電電極においては通常の場合、スパ
ッタリングやエッチング等１種類の処理を行なうことが
できるのみであり、１つの放電電極を用いて他の処理を
行なうようにするには設計変更等が必要となり、瞬時に
切り換えて多数の処理を行なうことはできなかった。ま
た、電極間に印加される電圧は高周波電界においてガス
の種類、圧力等の条件が一定の場合、両電極の各面積の
比によって固定されるため、放電電力一定のまま印加電
圧を変えることができなかった。However, in the conventional discharge electrode, normally, only one kind of treatment such as sputtering and etching can be performed, and in order to perform another treatment using one discharge electrode, there is a design change or the like. It was necessary, and it was not possible to switch over instantly to perform a large number of processes. Further, the voltage applied between the electrodes is fixed by the ratio of the areas of both electrodes when the conditions such as gas type and pressure are constant in the high frequency electric field, so the applied voltage can be changed while the discharge power is constant. could not.
本発明は上記した点に鑑みてなされたもので、被処理
物がアース電位のままで電極のスイッチの切り換えをす
るだけで対向する各電極の面積比を変え、印加電圧を負
から正に変えることができ、スパッタやエッチング等種
々の処理を行なうことのできる放電電極を提供すること
を目的とするものである。The present invention has been made in view of the above point, and the area ratio of each opposing electrode is changed only by switching the switch of the electrode while the object to be processed is at the ground potential, and the applied voltage is changed from negative to positive. It is an object of the present invention to provide a discharge electrode capable of performing various treatments such as sputtering and etching.
上記目的を達成するため本発明に係る放電電極は、高
周波電界が印加される電源側電極部材と、アースされる
アース側電極部材とを対向して配置するとともに、これ
ら電極部材の間に複数の筒状電極部材を上記すべての電
極部材が近接するように配置し、上記各筒状電極部材を
上記電源側およびアース側にそれぞれ切り換えるスイッ
チを設けこの切換えにより互いに対向する電極の面積比
を変えるようにしたことをその特徴とするものであり、
電極部材面積の大きい方へ流れるという性質を有効に利
用したものである。In order to achieve the above object, the discharge electrode according to the present invention has a power source side electrode member to which a high frequency electric field is applied and an earth side electrode member to be grounded, which are arranged to face each other. The cylindrical electrode members are arranged so that all the electrode members are close to each other, and a switch for switching each of the cylindrical electrode members to the power source side and the ground side is provided to change the area ratio of the electrodes facing each other by this switching. The feature is that
This is an effective use of the property of flowing toward the larger electrode member area.
以下、本発明の実施例を図面を参照して説明する。 Embodiments of the present invention will be described below with reference to the drawings.
図面は本発明の実施例を示したもので、アースされた
アース側電極部材１と、電源２が接続され高電圧が印加
される電源側電極部材３とを互いに対向して配置し、上
記電源側電極部材３は、その周縁部が上方に立ち上げ形
成されている。上記各電極部材1,3の間には、上記立ち
上げ形成部分とほぼ同形の筒状を有する３つの筒状電極
部材4a,4b,4cが近接して配置されており、これら各筒状
電極部材4a,4b,4cには、上記電源側Ｒとアース側Ｅとに
切り換え接続されるスイッチS1，S2，S3がそれぞれ接続
されている。なお、上記筒状電極部材４は、本実施例に
おいては、３つであるが、これに限定されるものではな
く、２つあるいは４つ以上であってもよい。The drawings show an embodiment of the present invention in which a grounded electrode member 1 on the ground side and a power source electrode member 3 to which a power source 2 is connected and to which a high voltage is applied are arranged to face each other. The peripheral portion of the side electrode member 3 is formed so as to rise upward. Three tubular electrode members 4a, 4b, 4c having a tubular shape substantially the same as that of the rising formation portion are arranged close to each other between the electrode members 1, 3, and these tubular electrodes members 4a, 4b, the 4c, switches S 1, S 2, S 3 being connected switchable between the power source side R and the ground-side E are connected respectively. Although the number of the tubular electrode members 4 is three in this embodiment, the number of the tubular electrode members 4 is not limited to this and may be two or four or more.
さらに、上記各筒状電極部材4a,4b,4cおよび電源側電
極部材は、内部に発生させるプラスマを外部に洩らすこ
とのないように、少しの間隙をあけて配置されており、
また、この各電極部材3,4a,4b,4cにより囲まれた空間内
（プラズマ発生空間）に外部よりガスを導入できるよう
にしている。Further, each of the cylindrical electrode members 4a, 4b, 4c and the power supply side electrode member are arranged with a small gap so as not to leak the plasma generated inside to the outside,
Further, the gas can be introduced from the outside into the space (plasma generation space) surrounded by the electrode members 3, 4a, 4b, 4c.
本実施例においては、アース側電極部材１の下面側に
被処理物５を固定して、雰囲気ガスを導入するととも
に、電源２から高周波数電圧を印加することにより各電
極部材1,3,4に囲まれた空間内にプラズマが発生し、被
処理物５の下面側を処理するものである。In the present embodiment, the object 5 to be processed is fixed to the lower surface side of the earth side electrode member 1, an atmospheric gas is introduced, and a high frequency voltage is applied from the power source 2 to the electrode members 1, 3, 4 respectively. Plasma is generated in the space surrounded by and the lower surface side of the object to be processed 5 is processed.
このプラズマは、電極部材1,3の間にある筒状電極部
材4a,4b,4cの間のわずかな間隙からは洩れることがな
い。This plasma does not leak from the slight gap between the cylindrical electrode members 4a, 4b, 4c between the electrode members 1, 3.
ここで、被処理物の下面をA1，A1の対向電極面をAnと
すると、第１表に示すように、 A1の面積とAnの面積の大小によって、A1面にAnの材質が
スパッタされ成膜されたり、Et′ｇ（エッチング）され
たりすることがわかる。Here, the lower surface of A 1, the opposing electrode surfaces of A 1 of the workpiece when the A n, as shown in Table 1, It can be seen that depending on the size of the area of A 1 and the area of A n , the material of A n may be sputtered to form a film or Et′g (etch) on the A 1 surface.
したがって、A1とAnとの面積比を変化させれば、A1面
すなわち被処理物５のスパッタリングやエッチングを行
なうことが可能となる。本実施例においては、上記各ス
イッチS1，S2，S3を切り換えることにより、各筒状電極
部材4a,4b,4cをアース側あるいは電源側に切り換えて被
処理物５の面を処理するものである。このスイッチ切り
換えによるA1面の状態を第２表に示す。Therefore, if the area ratio of A 1 and A n is changed, it becomes possible to perform sputtering or etching of the A 1 surface, that is, the workpiece 5. In the present embodiment, by switching the respective switches S 1, S 2, S 3 , processing the surface of the object 5 by switching the cylindrical electrode member 4a, 4b, 4c to the ground side or the power source side It is a thing. Table 2 shows the state of the A 1 surface due to this switch change.
第２表を見ればわかるように、各スイッチS1，S2，S3
を切り換えて各筒状電極部材4a,4b,4cを電源側Ｒに接続
そるとA1面はエッチングされ、図面に示すように各スイ
ッチS1，S2，S3をすべてアース側Ｅに切換えるとＡ面は
スパッタリングされることになり、さらに、上方の筒状
電極部材4aのみをアース側Ｅにその他を電源側Ｒに切換
えればA1面は弱いエッチングが行なわれ、下方の筒状電
極部材4cのみを電源側Ｒに切換えればA1面は変化しない
ことになる。 As can be seen from Table 2, each switch S 1 , S 2 , S 3
And the cylindrical electrode members 4a, 4b, 4c are connected to the power source side R, the surface A 1 is etched, and all the switches S 1 , S 2 , S 3 are switched to the ground side E as shown in the drawing. The surfaces A and A will be sputtered, and if only the upper cylindrical electrode member 4a is switched to the ground side E and the others to the power source side R, the A 1 surface is weakly etched, and the lower cylindrical electrode 4a. If only the member 4c is switched to the power source side R, the surface A 1 does not change.
したがって、本実施例においては、各スイッチS1，
S2，S3を切り換えるだけで、A1面の種々の処理を行なう
ことが可能となり、エッチングの程度等も調節すること
ができる。Therefore, in this embodiment, each switch S 1 ,
By simply switching between S 2 and S 3 , various treatments on the A 1 surface can be performed, and the degree of etching can be adjusted.
以上述べたように本発明に係る放電電極は、対向して
配置された電源側電極部材とアース側電極部材との間分
に、複数の筒状電極部材を上記各電極部材が近接するよ
うに配置するとともに、上記各筒状電極部材を電源側お
よびアース側にそれぞれ切り換えるスイッチを設けて構
成され、上記スイッチの切り換えによりアース側と電源
側との電極部材の面積比を変化させるようにしたので、
スイッチを切り換えるだけで容易にスパッタリングある
いはエッチング等種々の処理を行なうことができる等の
効果を奏する。As described above, in the discharge electrode according to the present invention, a plurality of cylindrical electrode members are provided so as to be close to each other between the power supply side electrode member and the ground side electrode member which are arranged to face each other. In addition to the arrangement, switches are provided for switching each of the cylindrical electrode members to the power supply side and the ground side, and the area ratio of the electrode members on the ground side and the power supply side is changed by switching the switches. ,
There is an effect that various processes such as sputtering or etching can be easily performed only by switching the switch.
図面は本発明の一実施例を示す概略構成図である。 １……アース側電極部材、２……電源、３……電源側電
極部材、４……筒状電極部材、５……被処理物。The drawings are schematic configuration diagrams showing an embodiment of the present invention. 1 ... Earth side electrode member, 2 ... Power source, 3 ... Power source side electrode member, 4 ... Cylindrical electrode member, 5 ... Object to be processed.
Claims (1)
と、アースされるアース側電極部材とを対向して配置す
るとともに、これら電極部材の間に複数の筒状電極部材
を上記すべての電極部材が近接するように配置し、上記
各筒状電極部材を上記電源側およびアース側にそれぞれ
切り換えるスイッチを設けたことを特徴とする放電電
極。1. A power source side electrode member to which a high frequency electric field is applied and an earth side electrode member to be grounded are arranged to face each other, and a plurality of cylindrical electrode members are provided between these electrode members. A discharge electrode, wherein members are arranged so as to be close to each other, and a switch for switching each of the cylindrical electrode members to the power source side and the ground side is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62042778A JPH081903B2 (en) | 1987-02-27 | 1987-02-27 | Discharge electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62042778A JPH081903B2 (en) | 1987-02-27 | 1987-02-27 | Discharge electrode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63211629A JPS63211629A (en) | 1988-09-02 |
| JPH081903B2 true JPH081903B2 (en) | 1996-01-10 |
Family
ID=12645423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62042778A Expired - Lifetime JPH081903B2 (en) | 1987-02-27 | 1987-02-27 | Discharge electrode |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH081903B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6475353B1 (en) * | 1997-05-22 | 2002-11-05 | Sony Corporation | Apparatus and method for sputter depositing dielectric films on a substrate |
-
1987
- 1987-02-27 JP JP62042778A patent/JPH081903B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63211629A (en) | 1988-09-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |