JPH0818209A - Suction head for solder ball - Google Patents

Suction head for solder ball

Info

Publication number
JPH0818209A
JPH0818209A JP6144682A JP14468294A JPH0818209A JP H0818209 A JPH0818209 A JP H0818209A JP 6144682 A JP6144682 A JP 6144682A JP 14468294 A JP14468294 A JP 14468294A JP H0818209 A JPH0818209 A JP H0818209A
Authority
JP
Japan
Prior art keywords
plate
suction head
holes
electrodes
solder ball
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6144682A
Other languages
Japanese (ja)
Other versions
JP3196508B2 (en
Inventor
Seiji Sakami
省二 酒見
Shinichi Nakazato
真一 中里
Teruaki Kasai
輝明 笠井
Takatoshi Ishikawa
隆稔 石川
Kanji Yahiro
寛司 八尋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP14468294A priority Critical patent/JP3196508B2/en
Publication of JPH0818209A publication Critical patent/JPH0818209A/en
Application granted granted Critical
Publication of JP3196508B2 publication Critical patent/JP3196508B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3457Solder materials or compositions; Methods of application thereof

Landscapes

  • Manipulator (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Abstract

PURPOSE:To provide a suction head for solder balls capable of reliably positioning solder balls on the electrodes of electronic parts. CONSTITUTION:Holes are made as a matrix layout in the bottom portion 21 of a suction head 1. A plate 4A having holes opened is mounted tightly to the bottom surface of the bottom portion 21. By the vacuum suction inside the suction head 1, solder balls 10 are sucked to the holes by vacuum and are transferred to electrodes 33 of an electric part 30A. The plate 4A is formed by a material having a high lubricity such as fluororesin to which a solder ball cannot stick easily. Also to cope with the kinds of electronic parts 30A, various plates 4A having diversified holes are prepared and changed in accordance with the kind of electronic part 30A.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、半田ボールを真空吸着
して電子部品の電極上に搭載する半田ボールの吸着ヘッ
ドに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solder ball suction head for vacuum-sucking a solder ball and mounting it on an electrode of an electronic component.

【0002】[0002]

【従来の技術】電子部品の電極にバンプ(突出電極)を
形成する方法として、半田ボールを吸着ヘッドに真空吸
着して電子部品の電極上に移載し、その後、半田ボール
をリフロー装置の加熱炉において加熱して溶融・固化さ
せることによりバンプを形成する方法が知られている。
2. Description of the Related Art As a method for forming bumps (protruding electrodes) on electrodes of electronic parts, solder balls are vacuum-sucked by a suction head and transferred onto electrodes of electronic parts, and then the solder balls are heated by a reflow device. A method of forming bumps by heating and melting and solidifying in a furnace is known.

【0003】吸着ヘッドは、ケースの底部に吸着孔を多
数個形成して構成されており、このケースの内部を真空
ポンプなどの真空吸引手段により真空吸引して半田ボー
ルを吸着孔に真空吸着し、半田ボールを電子部品の電極
に位置合わせして電極上に着地させ、次いで真空吸着状
態を解除して吸着ヘッドを上昇させることにより電極上
に移載するようになっている。
The suction head is formed by forming a large number of suction holes at the bottom of the case. The inside of the case is vacuum-sucked by a vacuum suction means such as a vacuum pump to suck the solder balls in the suction holes. The solder balls are aligned with the electrodes of the electronic component and landed on the electrodes, and then the vacuum suction state is released and the suction head is raised to transfer the solder balls onto the electrodes.

【0004】[0004]

【発明が解決しようとする課題】半田ボールはPbやS
nなどの硬度の小さい柔かい合金により作られている。
また半田ボールの直径は一般に1.0mm以下、その多
くは0.5mm程度であってきわめて小さい。このため
上述のように半田ボールを吸着ヘッドの吸着孔に真空吸
着し、次いで半田ボールを電子部品の電極上に着地させ
て真空吸着状態を解除し、吸着ヘッドを上昇させた場
合、半田ボールは吸着孔に付着したままで吸着ヘッドと
一緒に上昇し、電極に移載されない移載ミスが発生しや
すいという問題点があった。
The solder balls are made of Pb or S.
It is made of a soft alloy with a small hardness such as n.
The diameter of the solder balls is generally 1.0 mm or less, and most of them are about 0.5 mm, which is extremely small. Therefore, as described above, when the solder ball is vacuum-sucked in the suction hole of the suction head, and then the solder ball is landed on the electrode of the electronic component to release the vacuum suction state and the suction head is raised, the solder ball is There is a problem that a transfer error in which the transfer head is lifted together with the suction head while being attached to the suction hole is not transferred to the electrode is likely to occur.

【0005】また電子部品は多くの品種があり、電子部
品の品種によって電極の個数や配列ピッチなどが異る。
そのため多品種の電子部品に適合した吸着孔が開孔され
た吸着ヘッドを用意せねばならないという問題点があっ
た。
There are many kinds of electronic parts, and the number of electrodes and the arrangement pitch are different depending on the kind of electronic parts.
Therefore, there is a problem in that a suction head having suction holes suitable for various kinds of electronic components must be prepared.

【0006】そこで本発明は、半田ボールが吸着孔に付
着することによる移載ミスを解消できる半田ボールの吸
着ヘッドを提供することを第1の目的とする。また電極
の個数やピッチなどが異る多品種の電子部品に対応しや
すい半田ボールの吸着ヘッドを提供することを第2の目
的とする。
Therefore, it is a first object of the present invention to provide a solder ball suction head capable of eliminating a transfer error caused by a solder ball sticking to a suction hole. It is a second object of the present invention to provide a solder ball suction head that can easily be applied to various kinds of electronic components having different numbers and pitches of electrodes.

【0007】[0007]

【課題を解決するための手段】このために本発明は、多
品種の電子部品の電極の位置に対応する孔部が開孔され
た底部を有するケースと、対象電子部品の電極の位置に
対応する吸着孔が開孔されたプレートとから半田ボール
の吸着ヘッドを構成し、このプレートを底部のフラット
な底面に交換自在に装着するようにしたものである。
To this end, the present invention corresponds to a case having a bottom portion having holes corresponding to the positions of the electrodes of various kinds of electronic components, and the positions of the electrodes of the target electronic component. And a plate having suction holes formed therein to form a solder ball suction head, and the plate is replaceably mounted on a flat bottom surface.

【0008】[0008]

【作用】上記構成によれば、電子部品の電極の位置に対
応した吸着孔が開孔されたプレートをケースの底面に装
着することにより、プレートを交換するだけで多品種の
電子部品に対応することができる。
According to the above structure, a plate having suction holes corresponding to the positions of the electrodes of the electronic component is mounted on the bottom surface of the case, so that a wide variety of electronic components can be handled by simply replacing the plate. be able to.

【0009】また半田ボールが付着しにくい滑性の大き
い素材から成るプレートを用いることにより、移載ミス
を解消できる。
Further, by using a plate made of a material having a large slipperiness to which the solder balls are unlikely to adhere, the transfer error can be eliminated.

【0010】[0010]

【実施例】次に、図面を参照しながら本発明の一実施例
を説明する。図1は本発明の一実施例の半田ボールの吸
着ヘッドの分解斜視図、図2は同半田ボールの吸着ヘッ
ドの断面図である。この吸着ヘッド1は、上ケース2
と、下ケース3と、下ケース3の底面に装着されるプレ
ート4Aから成っている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will now be described with reference to the drawings. FIG. 1 is an exploded perspective view of a solder ball suction head according to an embodiment of the present invention, and FIG. 2 is a sectional view of the solder ball suction head. This suction head 1 has an upper case 2
The lower case 3 and the plate 4A mounted on the bottom surface of the lower case 3.

【0011】上ケース2は、箱形の半ケース5とそのつ
ば部6から成っている。半ケース5の側面にはパイプ7
が突設されている。このパイプ7は、ポンプなどの真空
吸引手段(図外)に接続される。つば部6にはボルト孔
8が開孔されている。
The upper case 2 comprises a box-shaped half case 5 and a flange portion 6 thereof. Pipe 7 on the side of half case 5
Is protruding. The pipe 7 is connected to a vacuum suction means (not shown) such as a pump. A bolt hole 8 is formed in the collar portion 6.

【0012】下ケース3は、箱形の半ケース11とその
つば部12から成っている。つば部12にはボルト孔1
3が開孔されている。またつば部12にはシール用のパ
ッキン14が配設されている。図2に示すように、つば
部6とつば部12を接合し、ボルト孔8,13にボルト
15を挿入してナット16を螺着することにより、上ケ
ース2と下ケース3は一体化される。
The lower case 3 comprises a box-shaped half case 11 and a flange portion 12 thereof. Bolt hole 1 in collar 12
3 is opened. A packing 14 for sealing is arranged on the collar portion 12. As shown in FIG. 2, the upper case 2 and the lower case 3 are integrated by joining the flange portion 6 and the flange portion 12, inserting the bolt 15 into the bolt holes 8 and 13 and screwing the nut 16. It

【0013】図3は本発明の一実施例の半田ボールの吸
着ヘッドの下ケースの平面図である。下ケース3の半ケ
ース11の底部21には孔部22がマトリクス状(本実
施例ではタテ、ヨコ4個づつ計16個)開孔されてい
る。また各孔部22の間には、これよりもやや小径の孔
部23が多数開孔されている。
FIG. 3 is a plan view of a lower case of a solder ball suction head according to an embodiment of the present invention. The bottom 21 of the half case 11 of the lower case 3 is provided with holes 22 in a matrix form (in the present embodiment, a total of 16 vertically and 4 horizontally). In addition, a large number of holes 23 having a diameter slightly smaller than that of the holes 22 are formed between the holes 22.

【0014】図1において、プレート4Aには吸着孔2
4がマトリクス状に開孔されており、またその4隅には
ビス孔25が開孔されている。26はビスである。この
プレート4Aは、半田ボール10が付着しにくい滑性の
大きい素材により形成されている。滑性の大きい素材と
しては、例えばフッ素樹脂やセラミックなどがある。図
2に示すように、このプレート4Aは、半ケース11の
底面にビス26により着脱自在に装着される。その状態
で、プレート4Aの上面は底部21のフラットな底面に
密接する。図1に示すように、プレート4Aにはタテ、
ヨコ4個づつ計16個の吸着孔24が開孔されており、
すべての吸着孔24は底部21の孔部22に合致する。
したがって半ケース5と半ケース11を一体化したケー
スの内部を真空吸引することにより、半田ボール10は
吸着孔24に真空吸着される(図1参照)。また孔部2
3から真空吸引することにより、プレート4Aは底部2
1のフラットな下面に強く密接し、フラットな平面状態
を保持する。すなわちプレート4Aは肉薄であってたわ
みやすいものであり、プレート4Aがたわんで平面性が
悪くなると、すべての吸着孔24に半田ボール10を真
空吸着できないが、このようにプレート4Aを比較的肉
厚で剛性の大きい底部21の下面に真空吸引して密接さ
せることにより、プレート4Aの平面性を維持すること
ができる。なお上ケース2や下ケース3は、例えばステ
ンレス鋼板などの剛度の大きい素材により形成されてい
る。
In FIG. 1, the suction holes 2 are formed in the plate 4A.
4 are formed in a matrix, and screw holes 25 are formed at the four corners. 26 is a screw. The plate 4A is formed of a material having a large slipperiness to which the solder balls 10 are unlikely to adhere. Examples of the material having high lubricity include fluororesin and ceramics. As shown in FIG. 2, the plate 4A is detachably attached to the bottom surface of the half case 11 with screws 26. In that state, the upper surface of the plate 4A is in close contact with the flat bottom surface of the bottom portion 21. As shown in FIG. 1, the plate 4A is vertically
A total of 16 suction holes 24, each of which is 4 horizontal, have been opened.
All the suction holes 24 match the holes 22 of the bottom 21.
Therefore, the solder balls 10 are vacuum-sucked in the suction holes 24 by vacuum suction of the inside of the case in which the half case 5 and the half case 11 are integrated (see FIG. 1). Also the hole 2
The plate 4A is moved to the bottom 2 by vacuum suction from
It strongly adheres to the flat lower surface of 1 and maintains a flat planar state. That is, the plate 4A is thin and easily bent, and when the plate 4A is bent and the flatness is deteriorated, the solder balls 10 cannot be vacuum-sucked to all the suction holes 24. However, the plate 4A is relatively thick in this way. By vacuum suction and intimate contact with the lower surface of the bottom portion 21 having high rigidity, the flatness of the plate 4A can be maintained. The upper case 2 and the lower case 3 are made of a material having high rigidity such as a stainless steel plate.

【0015】図1において、30Aは電子部品である。
この電子部品30Aは基板31の下面にチップ32をボ
ンディングして製造されている。基板31の上面には電
極33がマトリクス状に形成されている。したがって、
図2に示すように吸着ヘッド1は半田ボール供給部(図
外)に備えられた半田ボール10をプレート4Aの吸着
孔24に真空吸着してピックアップし、電子部品30A
の上方へ移動して半田ボール10と電極33を位置合わ
せしたうえで、吸着ヘッド1は下降して半田ボール10
を電極33上に着地させ(図2において鎖線で示す半田
ボール10を参照)、真空吸引状態を解除したうえで、
吸着ヘッド1を上昇させれば、半田ボール10は電極3
3上に移載される。この場合、プレート4Aは滑性の大
きい素材により形成されているので、半田ボール10は
吸着孔24に付着することはなく、吸着ヘッド1を上昇
させれば電極33上に確実に移載される。なお図示しな
いが、電極33上には予めフラックスが塗布されてい
る。半田ボール10が搭載された電子部品30Aは、リ
フロー装置の加熱炉へ送られて加熱され、半田ボール1
0は溶融・固化することによりバンプとなる。
In FIG. 1, 30A is an electronic component.
The electronic component 30A is manufactured by bonding the chip 32 to the lower surface of the substrate 31. Electrodes 33 are formed in a matrix on the upper surface of the substrate 31. Therefore,
As shown in FIG. 2, the suction head 1 vacuum-sucks and picks up the solder balls 10 provided in the solder ball supply portion (not shown) in the suction holes 24 of the plate 4A to pick up the electronic component 30A.
, The solder ball 10 and the electrode 33 are aligned with each other, and then the suction head 1 is lowered to move the solder ball 10 to the electrode 33.
After landing on the electrode 33 (see the solder ball 10 shown by the chain line in FIG. 2) and releasing the vacuum suction state,
When the suction head 1 is lifted, the solder balls 10 will move to the electrodes 3
3 is transferred. In this case, since the plate 4A is formed of a material having a high degree of lubricity, the solder balls 10 do not adhere to the suction holes 24 and are reliably transferred onto the electrodes 33 when the suction head 1 is raised. . Although not shown, the electrode 33 is pre-coated with flux. The electronic component 30A on which the solder balls 10 are mounted is sent to the heating furnace of the reflow device and heated, so that the solder balls 1
0 becomes a bump by melting and solidifying.

【0016】図4は本発明の一実施例の他のプレートと
電子部品の斜視図、図5は同半田ボールの吸着ヘッドの
断面図である。図4に示すように、この電子部品30B
の基板31には4個の電極33が形成されている。また
これに対応して、プレート4Bには4個の電極33に対
応する4個の吸着孔24が開孔されている。図5に示す
ように、上記プレート4Aに代えて、このプレート4B
を半ケース11の底面に装着する。図3に示すように、
底部21には16個の孔部22が開孔されているが、プ
レート4Bはその中央部に4個の吸着孔24が開孔され
ているだけであり、したがって図5に示すように底部2
1の16個の孔部22のうち、中央部の4個の孔部22
のみがプレート4Bの吸着孔24と連通し、これ以外の
12個の孔部22はプレート4Bで塞がれる。勿論この
プレート4Bも、プレート4Aと同様に滑性の大きい素
材により形成されている。したがってこのプレート4B
を用いれば、図5に示すように半田ボール10を4個真
空吸着して、電子部品30Bの電極33に移載できる。
FIG. 4 is a perspective view of another plate and an electronic component according to one embodiment of the present invention, and FIG. 5 is a sectional view of the solder ball suction head. As shown in FIG. 4, this electronic component 30B
The substrate 31 has four electrodes 33 formed thereon. Correspondingly, four adsorption holes 24 corresponding to the four electrodes 33 are opened in the plate 4B. As shown in FIG. 5, instead of the plate 4A, this plate 4B is used.
Is attached to the bottom surface of the half case 11. As shown in FIG.
Although 16 holes 22 are opened in the bottom portion 21, the plate 4B has only four suction holes 24 formed in the central portion thereof, and therefore the bottom portion 2 is formed as shown in FIG.
Of the 16 holes 22 of 1, the four holes 22 in the center
Only the holes 12 communicate with the suction holes 24 of the plate 4B, and the other 12 holes 22 are closed by the plate 4B. Of course, the plate 4B is also made of a material having a large slipperiness, like the plate 4A. Therefore, this plate 4B
Using, the four solder balls 10 can be vacuum-sucked and transferred to the electrodes 33 of the electronic component 30B as shown in FIG.

【0017】図6は本発明の一実施例の他の電子部品の
平面図、図7は同プレートの平面図である。この電子部
品30Cの基板31には、電極33は枠形に12個形成
されている。したがってこのような電子部品30Cの場
合には、プレート4Cにはこれらの電極33の位置に対
応するように、12個の吸着孔24を12個形成すれば
よい。以上のように上ケース2と下ケース3から成る吸
着ヘッド1の本体部分は共用し、電子部品の品種に応じ
てプレートを交換することにより、多品種の電子部品の
電極に半田ボールを搭載できる。
FIG. 6 is a plan view of another electronic component of one embodiment of the present invention, and FIG. 7 is a plan view of the same plate. On the substrate 31 of this electronic component 30C, 12 electrodes 33 are formed in a frame shape. Therefore, in the case of such an electronic component 30C, twelve suction holes 24 may be formed in the plate 4C so as to correspond to the positions of these electrodes 33. As described above, the main body of the suction head 1 including the upper case 2 and the lower case 3 is shared, and the solder balls can be mounted on the electrodes of various types of electronic components by exchanging the plates according to the types of electronic components. .

【0018】また本発明の半田ボールの吸着ヘッドは、
電子部品の電極の配列ピッチの違いにも容易に対応でき
る。すなわち電極の配列ピッチが1.0mmピッチのも
のと1.5mmピッチのものがある場合、半ケース11
(図2参照)の孔部22の配列ピッチを0.5mmピッ
チにしておけば、半ケース11の底部21に1.0mm
ピッチ用のプレート4Aと1.5mmピッチ用のプレー
ト4Aの両方が装着できる。
The solder ball suction head of the present invention is
It can easily cope with the difference in the arrangement pitch of the electrodes of the electronic component. That is, when there are electrode arrangement pitches of 1.0 mm pitch and 1.5 mm pitch, the half case 11
If the arrangement pitch of the holes 22 (see FIG. 2) is set to 0.5 mm, the bottom 21 of the half case 11 has 1.0 mm.
Both the pitch plate 4A and the 1.5 mm pitch plate 4A can be mounted.

【0019】[0019]

【発明の効果】以上説明したように本発明によれば、プ
レートを交換することにより、多品種の電子部品の電極
に半田ボールを搭載できる。またプレートを滑性の大き
い素材により形成することにより、半田ボールが孔部に
付着するのを防止し、すべての半田ボールを電子部品の
電極に確実に移載できる。
As described above, according to the present invention, the solder balls can be mounted on the electrodes of various kinds of electronic parts by exchanging the plates. Further, by forming the plate with a material having a high slipperiness, it is possible to prevent the solder balls from adhering to the holes, and to reliably transfer all the solder balls to the electrodes of the electronic component.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例の半田ボールの吸着ヘッドの
分解斜視図
FIG. 1 is an exploded perspective view of a solder ball suction head according to an embodiment of the present invention.

【図2】本発明の一実施例の半田ボールの吸着ヘッドの
断面図
FIG. 2 is a sectional view of a solder ball suction head according to an embodiment of the present invention.

【図3】本発明の一実施例の半田ボールの吸着ヘッドの
下ケースの平面図
FIG. 3 is a plan view of a lower case of a solder ball suction head according to an embodiment of the present invention.

【図4】本発明の一実施例の他のプレートと電子部品の
斜視図
FIG. 4 is a perspective view of another plate and an electronic component according to an embodiment of the present invention.

【図5】本発明の一実施例の半田ボールの吸着ヘッドの
断面図
FIG. 5 is a cross-sectional view of a solder ball suction head according to an embodiment of the present invention.

【図6】本発明の一実施例の他の電子部品の平面図FIG. 6 is a plan view of another electronic component according to an embodiment of the present invention.

【図7】本発明の一実施例の他のプレートの平面図FIG. 7 is a plan view of another plate according to the embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 吸着ヘッド 2 上ケース 3 下ケース 4A,4B,4C プレート 5 半ケース 21 底部 22 孔部 24 吸着孔 30A,30B,30C 電子部品 33 電極 1 Adsorption Head 2 Upper Case 3 Lower Case 4A, 4B, 4C Plate 5 Half Case 21 Bottom 22 Hole 24 Adsorption Hole 30A, 30B, 30C Electronic Component 33 Electrode

───────────────────────────────────────────────────── フロントページの続き (72)発明者 石川 隆稔 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 八尋 寛司 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Takatoshi Ishikawa 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (72) Kanji Yahiro, 1006 Kadoma, Kadoma City, Osaka Matsushita Electric Industrial Co., Ltd.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】多品種の電子部品の電極の位置に対応する
孔部が開孔された底部を有するケースと、対象電子部品
の電極の位置に対応する吸着孔が開孔されたプレートと
を備え、このプレートを前記底部のフラットな底面に交
換自在に装着することを特徴とする半田ボールの吸着ヘ
ッド。
1. A case having a bottom having holes corresponding to the positions of electrodes of various types of electronic components, and a plate having suction holes corresponding to the positions of electrodes of target electronic components. A solder ball suction head, characterized in that the plate is attached to the flat bottom surface of the bottom portion in a replaceable manner.
【請求項2】前記プレートは、前記底部よりも半田ボー
ルに対する滑性が大きい素材から成ることを特徴とする
請求項1記載の半田ボールの吸着ヘッド。
2. The solder ball suction head according to claim 1, wherein the plate is made of a material having a greater slipperiness with respect to the solder ball than the bottom portion.
JP14468294A 1994-06-27 1994-06-27 Solder ball suction head Expired - Fee Related JP3196508B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14468294A JP3196508B2 (en) 1994-06-27 1994-06-27 Solder ball suction head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14468294A JP3196508B2 (en) 1994-06-27 1994-06-27 Solder ball suction head

Publications (2)

Publication Number Publication Date
JPH0818209A true JPH0818209A (en) 1996-01-19
JP3196508B2 JP3196508B2 (en) 2001-08-06

Family

ID=15367810

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14468294A Expired - Fee Related JP3196508B2 (en) 1994-06-27 1994-06-27 Solder ball suction head

Country Status (1)

Country Link
JP (1) JP3196508B2 (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980042766A (en) * 1996-11-26 1998-08-17 윌리엄비.켐플러 Method and apparatus for attaching solder member to substrate
US6107181A (en) * 1997-09-08 2000-08-22 Fujitsu Limited Method of forming bumps and template used for forming bumps
US6320158B1 (en) 1998-01-29 2001-11-20 Fujitsu Limited Method and apparatus of fabricating perforated plate
JP2002111202A (en) * 2000-09-27 2002-04-12 Ibiden Co Ltd Interlayer connecting structure and its manufacturing method
US7066377B2 (en) 1999-06-24 2006-06-27 Athlete Fa Corporation Ball mounting method
KR100618307B1 (en) * 2005-01-27 2006-09-13 한미반도체 주식회사 Solder ball supplying apparatus
CN100390560C (en) * 2005-12-09 2008-05-28 上海大学 Breakage-proof transplanting suction cup for monomer solar cell on-line test
JP2008187211A (en) * 1996-08-27 2008-08-14 Nippon Steel Materials Co Ltd Semiconductor device with low melting point metal bump and method for flip-chip bonding
JP2010183122A (en) * 2010-05-27 2010-08-19 Texas Instr Japan Ltd Semiconductor device and production method therefor
JP2011009591A (en) * 2009-06-29 2011-01-13 Hioki Ee Corp Spherical body sucking apparatus and spherical body mounting device
US20120085810A1 (en) * 2010-10-07 2012-04-12 Samsung Electro-Mechanics Co., Ltd. Jig for round solder ball attachment

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008187211A (en) * 1996-08-27 2008-08-14 Nippon Steel Materials Co Ltd Semiconductor device with low melting point metal bump and method for flip-chip bonding
KR19980042766A (en) * 1996-11-26 1998-08-17 윌리엄비.켐플러 Method and apparatus for attaching solder member to substrate
US6107181A (en) * 1997-09-08 2000-08-22 Fujitsu Limited Method of forming bumps and template used for forming bumps
US6432806B1 (en) 1997-09-08 2002-08-13 Fujitsu Limited Method of forming bumps and template used for forming bumps
US6320158B1 (en) 1998-01-29 2001-11-20 Fujitsu Limited Method and apparatus of fabricating perforated plate
US7240822B2 (en) 1999-06-24 2007-07-10 Athlete Fa Corporation Ball mounting method
US7066377B2 (en) 1999-06-24 2006-06-27 Athlete Fa Corporation Ball mounting method
US7077305B1 (en) 1999-06-24 2006-07-18 Athlete Fa Corporation Ball loading apparatus
JP2002111202A (en) * 2000-09-27 2002-04-12 Ibiden Co Ltd Interlayer connecting structure and its manufacturing method
KR100618307B1 (en) * 2005-01-27 2006-09-13 한미반도체 주식회사 Solder ball supplying apparatus
CN100390560C (en) * 2005-12-09 2008-05-28 上海大学 Breakage-proof transplanting suction cup for monomer solar cell on-line test
JP2011009591A (en) * 2009-06-29 2011-01-13 Hioki Ee Corp Spherical body sucking apparatus and spherical body mounting device
JP2010183122A (en) * 2010-05-27 2010-08-19 Texas Instr Japan Ltd Semiconductor device and production method therefor
US20120085810A1 (en) * 2010-10-07 2012-04-12 Samsung Electro-Mechanics Co., Ltd. Jig for round solder ball attachment
US8286851B2 (en) * 2010-10-07 2012-10-16 Samsung Electro-Mechanics Co., Ltd Jig for round solder ball attachment

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