JPH08179099A - X-ray mirror device - Google Patents

Abstract

PURPOSE: To set the convergent characteristic of a condensing mirror to the optimum state with a reflecting member bending device and a moving device. CONSTITUTION: One end of a condensing mirror chamber main body 29b with a hollow structure is communicated with the first beam duct 24a connected to a radiation light generator, and the other end is communicated with the second beam duct 24b connected to a device utilizing a radiation light beam S. A condensing mirror 21 is provided in the condensing mirror chamber 29b, and it has a reflecting face 21r feeding the radiation light beam S entering from the first beam duct 24a to the second beam duct 24b. The condensing mirror 21 is elastically deformed by a reflecting member bending device 40 and a moving device 36 reciprocating the condensing mirror 21 against both beam ducts 24a, 24b, and the curvature of the reflecting face 21r is changed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray mirror device.

[0002]

2. Description of the Related Art When an electron moving at a speed close to the speed of light is bent in its traveling direction by a magnetic field or an electric field, it emits an electromagnetic wave (light) called radiation light in the tangential direction of the orbit of the electron.

FIG. 7 shows an example of the synchrotron radiation generating means. Reference numeral 1 denotes a linear accelerating device. The linear accelerating device 1 has an electron generating device 2 for emitting electrons (charged particles) e and an electron for one end. A straight tubular acceleration duct 3 connected to the generator 2;
A high frequency accelerating device 4 for accelerating the electrons e by applying a high frequency to the electrons e moving inside the acceleration duct 3.

One end of a curved tubular deflection duct 5 is connected to the other end of the acceleration duct 3, and the deflection duct 5
A deflection electromagnet 6 for bending the trajectory of the electron e moving inside is provided in the.

Reference numeral 7 is a synchrotron, and the synchrotron 7 has an endless duct 8 for causing the above-mentioned electrons e to form a circular orbit. The other end of the deflection duct 5 is connected.

The curved portion of the endless duct 8 is provided with a deflection electromagnet 9 for bending the trajectory of the electrons e moving inside the endless duct 8. Further, a required portion of the endless duct 8 is provided with a bending electromagnet 9.
A high frequency accelerating device 10 is provided to apply a high frequency to the electrons e moving inside the endless duct 8 to accelerate the electrons e.

Furthermore, the radiant light beam S emitted by bending the traveling direction of the electrons e moving at a speed close to the speed of light in the curved portion of the endless duct 8 at the required location is an endless duct. 8 is connected to one end of a straight ring-shaped beam channel 11, and the other end of the beam channel 11 is provided with an experimental device 12 for conducting an experiment using the synchrotron radiation beam S. Has been.

When the synchrotron radiation beam S is emitted by the above-mentioned synchrotron radiation generating means, the insides of the acceleration duct 3, the deflection duct 5, the endless duct 8, the beam channel 11 and the experimental apparatus 12 are decompressed to an ultrahigh vacuum state. Then, the electron e is made to move at a speed close to the speed of light, and then the electron generator 2
The electron e is emitted from.

The electrons e emitted from the electron generator 2 are
The deflection electromagnet 6 is accelerated by the high-frequency accelerating device 4.
It is incident on the endless duct 8 by being bent by the.

The electron e incident on the endless duct 8 has its trajectory bent at each curved portion by the deflection electromagnet 9 and is accelerated by the high frequency accelerating device 10, whereby a radiant light beam S is emitted from the electron e.

The radiant light beam S emitted at the curved portion of the endless duct 8 at a predetermined position is provided with a beam channel 11.
And then enters the experimental device 12.

In the experimental apparatus 12 attached to the synchrotron radiation generating means, when conducting an experiment using electromagnetic waves in various wavelength ranges included in the synchrotron radiation beam S, particularly electromagnetic waves in the X-ray range, first, An X-ray mirror device is provided at the required position of the beam channel 11 described above.

FIG. 4 shows an example of a conventional X-ray mirror device. This X-ray mirror device has a hollow mirror chamber 13 and a first reflecting device 17 arranged inside the mirror chamber 13. And a second reflecting device 20.

The mirror chamber 13 has a beam passage hole 1 at the upper end of one end face and the lower end of the other end face so as not to face each other.
Box-shaped chamber body 14 having holes 4a and 14b
And short tubes 15a and 15b having base ends fixed to the outer surface of one end and the outer surface of the other end of the chamber body 14 so as to correspond to the beam passage holes 14a and 14b, and fixed to the tip ends of the short tubes 15a and 15b. The connecting flanges 16a and 16b are connected to each other.

The first reflecting device 17 includes a flat mirror 18 having a flat surface as a reflecting surface 18r, and a holding member 19 which is provided on the back side of the reflecting surface 18r of the flat mirror 18 and holds the flat mirror 18. It is composed by.

The first reflecting device 17 is a flat mirror 1
8 so that the reflecting surface 18r of the chamber 8 faces downward.
Is disposed at a portion near the one end side inside the chamber, and the holding member 19 is fixed to the inner surface of the upper portion of the chamber body 14 via the supporting member 23a, and is substantially horizontal inside the chamber body 14 from the beam passage hole 14a. Incident radiation beam S
Enters the reflecting surface 18r and is reflected by the reflecting surface 18r toward the other end of the chamber body 14 at a predetermined angle.

The second reflecting device 20 has a converging mirror 21 having a reflecting surface 21r, which is formed in a gently concave shape.
And a holding member 22 that is provided on the back surface (surface opposite to the reflecting surface 21r) of the condenser mirror 21 and holds the condenser mirror 21.

As shown in FIGS. 5 and 6, the condenser mirror 21
The reflecting surface 21r is curved with a small radius R ₁ (R ₁ : several tens of cm) in the width direction of the member of the condenser mirror 21, and
A large radius R in the front-back direction (longitudinal direction) of the condenser mirror 21.
_2: is curved with (R ₂ having about 1000m~10000m).

The second reflecting device 20 includes a condenser mirror 2
The reflection surface 21r of No. 1 faces upward, the front end of the condenser mirror 21 faces the inner surface of one end of the chamber body 14, and the rear end of the condenser mirror 21 faces the inner surface of the other end of the chamber body 14. Is disposed in a portion near the other end side of the inside of the chamber, and the holding member 22 is fixed to the inner surface of the lower portion of the chamber body 14 via the supporting member 23b, and emitted from the reflecting surface 18r of the first reflecting device. The emitted light beam S is incident on the reflecting surface 21r, is condensed by the reflecting surface 21r, and is incident on the reflecting surface 18r of the first reflecting device toward the outside from the beam passage hole 14b. The emitted light beam S is reflected substantially in parallel.

For the plane mirror 18 constituting the first reflecting device 17 and the condensing mirror 21 constituting the second reflecting device 20 described above, a metallic material such as Al (aluminum) alloy or SiC (silicon carbide) is used. ) And the like, a composite material in which a metal coating film such as Pt (platinum) is formed on the surface of a base material made of a ceramic material is used.
The reflecting surfaces 18r and 21r of Nos. 8 and 21 have a high reflectance with respect to electromagnetic waves in the X-ray region.

Further, a metal material such as Cu (copper) is used for the holding members 19 and 22 constituting the both reflecting devices 17 and 20, and these holding members 19 and 22 are used for the respective mirrors 1.
When the radiation light beam S is incident on the reflecting surfaces 18r and 21r of the mirrors 8 and 21, the heat received by the mirrors 18 and 21 is absorbed.

Reference numeral 24a is a first beam duct, and 24b is a second beam duct.
The beam channels 11 (see FIG. 7) described above are constituted by a and 24b and the mirror chamber 13.

That is, the base end portion of the first beam duct 24a is connected to the endless duct 8 (see FIG. 7), and the connecting flange 25a provided at the tip end portion of the first beam duct 24a is connected to the end portion. The mirror chamber 13 is hermetically connected to one coupling flange 16a of the mirror chamber 13 by fastening means such as bolts.

Further, the mirror chamber 1 is attached to the connecting flange 25b provided at the base end of the second beam duct 24b.
The other connecting flange 16b of 3 is airtightly connected by a fastening means such as a bolt, and the second beam duct 2
The tip of 4b is connected to the above-mentioned experimental apparatus (see FIG. 7).

A vacuum boundary window member (not shown) having a beam transmitting portion made of beryllium or polyimide is provided between the experimental apparatus 12 and the second beam duct 24b or inside the second beam duct 24b. ) Is provided.

In the X-ray mirror device shown in FIG. 4, the beam passage hole 1 is formed in a state where the inside of the mirror chamber 13 and both beam ducts 24a and 24b is depressurized to an ultrahigh vacuum.
When the radiant light beam S enters the chamber body 14 from 4a substantially horizontally, the radiant light beam S is reflected by the reflecting surface 18r of the plane mirror 18 constituting the first reflecting device 17 and the second reflecting light. Condensing mirror 2 constituting the device 20
It is incident on the first reflecting surface 21r.

Further, the emitted light beam S is focused by the condenser mirror 21.
The light is condensed by the reflecting surface 21a of the above, and emitted toward the outside from the beam passage hole 14b substantially in parallel to the radiant light beam S incident on the reflecting surface 18r.

In this way, the radiant light beam S incident on the experimental apparatus 12 has its wavelength region belonging to the X-ray region due to the reflection characteristics of the plane mirror 18 and the condenser mirror 21 as described above. Will be things.

[0029]

However, in the X-ray mirror device shown in FIG. 4, if the radius R ₂ of the reflecting surface 21r of the condenser mirror 21 of the second reflecting device 20 is not an appropriate value, The radiation light beam S emitted from the reflecting surface 18r of the first reflecting device may not be efficiently condensed and may be emitted to the second beam duct 24b.

On the other hand, since the radius R ₂ of the reflecting surface 21r of the condenser mirror 21 is too large, the reflecting surface 21r of the condenser mirror 21 is different from the designed value when various measuring instruments are used. It is difficult to surely grasp how much the radius R ₂ of the error has.

An object of the present invention is to provide an X-ray mirror device which can efficiently collect a radiation beam S.

[0032]

In order to achieve the above object, in the X-ray mirror device of the present invention, one end communicates with the first beam duct 24a connected to the radiant light generator and the other end radiates. A concentrating mirror chamber body 29b having a hollow structure, which communicates with a second beam duct 24b connected to a device using the light beam S, and a first beam provided inside the concentrating mirror chamber body 29b. Duct 2
Condensing mirror 2 having a reflecting surface 21r for emitting the radiation light beam S incident from 4a to the second beam duct 24b.
1 and the condensing mirror 21 with both beam ducts 24a, 24
It is provided with a moving device 36 that moves forward and backward with respect to b, and a reflecting member bending device 40 that elastically deforms the condenser mirror 21 to change the curvature of its reflecting surface 21r.

Further, the moving device 36 is provided outside the condensing mirror chamber body 29b, and the condensing mirror chamber body 29b can be expanded and contracted by connecting members 30 and 33 having a hollow structure.
Through the beam ducts 24a and 24b, and the moving device 36 moves the focusing mirror chamber main body 29b.
The condensing mirror 21 is moved so that both beam ducts 24a and 24b can be moved.

Further, when it is necessary to make the incident optical axis and the outgoing optical axis of the emitted light beam S parallel to each other, one end of the hollow structure is connected to the first beam duct 24a connected to the emitted light generator. A flat mirror chamber main body 29a, an expandable and contractible hollow connecting member 30 having one end connected to the other end of the flat mirror chamber main body 29a, and the connecting member 30.
A concentrating mirror chamber body 29b having a hollow structure, one end of which is connected to the other end, and a concentrating mirror chamber body 29b.
An extendable hollow structure connecting member 33 communicating with a second beam duct 24b, one end of which is connected to the other end and the other end of which is connected to a device that uses the emitted light beam S, and the flat mirror chamber. A reflecting surface 1 provided inside the main body 29a and for emitting the radiant light beam S incident from the first beam duct 24a to the focusing mirror chamber main body 29b.
The plane mirror 18 having 8r and the plane mirror 1 provided inside the chamber body 29b for the condenser mirror.
The radiation beam S incident from the second beam duct 2
Condensing mirror 21 having a reflecting surface 21r for emitting to 4b
A moving device 36 arranged outside the light collecting mirror chamber body 29b and moving the light collecting mirror chamber body 29b toward and away from the flat mirror chamber body 29a, and elastically deforming the light collecting mirror 21. And a reflecting member bending device 40 that changes the curvature of the reflecting surface 21r.

[0035]

In the X-ray mirror device according to the first aspect of the present invention, the reflecting surface 2 of the condenser mirror 21 is elastically deformed by the reflecting member bending device 40.
By changing the curvature of 1r and moving the condenser mirror 21 by the moving device 36, the condenser mirror 2
The position of the first beam duct 24a, 24b with respect to both beam ducts is changed to adjust the condensing characteristics of the condensing mirror 21.

In the X-ray mirror device according to the second aspect of the present invention, the curvature of the reflecting surface 21r of the condenser mirror 21 is changed by elastically deforming the condenser mirror 21 by the reflecting member bending device 40, In addition, the moving device 36 moves the focusing mirror chamber body 29b together with the focusing mirror 2
1 is moved to change the position of the condenser mirror 21 with respect to both beam ducts 24a and 24b,
The light collection characteristic of the light collection mirror 21 is adjusted.

In the X-ray mirror device according to the third aspect of the present invention, the curvature of the reflecting surface 21r of the condenser mirror 21 is changed by elastically deforming the condenser mirror 21 by the reflecting member bending device 40, Further, by moving the condenser mirror 21 together with the condenser mirror chamber body 29b by the moving device 36, the plane mirror 18 inside the condenser mirror 21 and the plane mirror chamber body 29a is moved.
The interval between and is changed to adjust the light collecting characteristics of the light collecting mirror 21.

[0038]

Embodiments of the present invention will be described below with reference to the drawings.

FIGS. 1 to 3 show an embodiment of the X-ray mirror device of the present invention, in which the first reflecting device 17, the condenser mirror 21, the beam ducts 24a and 24b, etc. are shown. The parts with the same reference numerals as 4 represent the same things.

The X-ray mirror device according to this embodiment has a hollow mirror chamber 26, a first reflecting device 17 and a second reflecting device 38 arranged inside the mirror chamber 26, and a second reflecting device 38. The reflecting device 38 is replaced by the first reflecting device 17
With respect to the moving device 36 for moving closer to and away from the device, and the reflecting member bending device 4 for changing the curvature of the reflecting surface 21r thereof by deforming the condensing mirror 21 constituting the second reflecting device 38.
0.

The mirror chamber 26 has a box-shaped flat mirror chamber body 29a having a beam passage hole 27a in the upper part of one end face and a connecting opening 28a in the substantially central part of the other end face, and a substantially central part of the one end face. A box-shaped collector mirror chamber body 29b having a connecting opening 28b in the other end and a beam passage hole 27b in the lower part of the other end surface thereof, and a hollow connecting member 30 made up of a bellows or the like that can expand and contract in the axial direction.
It is composed of

A base end of a short tube 31a is fixed to the outer surface of one end of the flat mirror chamber main body 29a so as to correspond to the beam passage hole 27a, and a tip end of the short tube 30a is connected. The flange 32a is fixed.

A connecting flange 25a at the tip of the beam duct 24a, the base end of which is connected to the endless duct 8 (see FIG. 7), is hermetically connected to the connecting flange 32a by fastening means such as bolts. Has been done.

The proximal end of the short tube 31b is fixed to the outer surface of the other end of the focusing mirror chamber main body 29b so as to correspond to the beam passage hole 27b. The connecting flange 32b is fixed.

The connecting flange 32b has a beam duct 24b whose tip is connected to an experimental device (see FIG. 7).
The flange 25b at the base end is airtightly connected by fastening means such as bolts through a hollow-structured connecting member 33 made of bellows or the like that can expand and contract in the axial direction.

These flat mirror chamber bodies 29a
And the condensing mirror chamber body 29b includes a connecting member 30.
The surfaces on which the connection openings 28a and 28b are provided face each other, and one end of the connection member 30 is connected to the connection opening 28a.
Is airtightly connected to the outer surface of the other end of the flat mirror chamber main body 29a, and the other end of the connecting member 30 is connected to the outer surface of one end of the converging mirror chamber main body 29b so as to correspond to the connecting opening 28b. Airtightly connected.

Reference numeral 34 denotes a support member, and the support member 34
Fixes the lower surface of the first chamber body 29a to a fixed structure 35 such as the floor of the building.

Reference numeral 36 is a moving device such as a moving table.
The moving device 36 includes a fixing member 36a and a fixing member 36a.
a moving member 36b attached so as to move substantially horizontally with respect to a, and an actuator 36c for moving the moving member 36b substantially horizontally with respect to the fixed member 36a.
It is composed of

The moving device 36 is arranged below the focusing mirror chamber main body 29b so that the moving member 36b is displaced in the direction in which the moving member 36b moves toward and away from the support member 34, and the fixed structure described above. A fixing member 36a is fixed to 35, and a moving member 36b is fixed to the focusing mirror chamber main body 29b.

The actuator 3 of the moving device 36 described above
When 6c is operated to displace the moving member 36b, the focusing mirror chamber main body 29b approaches or separates from the flat mirror chamber main body 29a, and the above-mentioned hollow structure connecting members 30, 33 expand and contract. To do.

Reference numeral 17 denotes a first reflecting device, which is arranged inside the chamber body 29a for a flat mirror such that the reflecting surface 18r of the flat mirror 18 faces downward and is also held. The member 19 is fixed to the upper inner surface of the flat mirror chamber main body 29a through the support member 37a, and the radiant light beam S that enters the flat mirror chamber main body 29a from the beam passage hole 27a substantially horizontally.
Enters the reflecting surface 18r of the plane mirror 18 and is emitted by the reflecting surface 18r toward the other end of the plane mirror chamber body 29a at a predetermined angle.

Reference numeral 38 denotes a second reflecting device. The second reflecting device 38 is provided on the condensing mirror 21 and the rear surface (the surface opposite to the reflecting surface 21r) of the reflecting surface 21r of the condensing mirror 21. The holding member 39 provided and curved fulcrum members 39a, 39a extending substantially horizontally in the width direction of the light collecting mirror 21 provided so as to come into contact with the holding member 39 near the front and rear ends of the back surface of the light collecting mirror 21. And a fall prevention member 39b provided on the holding member 39 so as to contact the rear end side edge and the left and right edges of the condenser mirror 21.

The second reflecting device 38 is used for the collecting mirror 2
The reflecting surface 21r of No. 1 faces upward, the front end of the condensing mirror 21 faces the inner surface of one end of the condensing mirror chamber body 29b, and the rear end of the condensing mirror 21 is the other inner surface of the condensing mirror chamber body 29b. Is placed inside the condensing mirror chamber body 29b so that the holding member 39 faces the condensing mirror chamber body 29b via the support member 37b.
The flat mirror 18 is fixed to the inner surface of the lower part of b.
The radiant light beam S emitted from the reflecting surface 18r of the laser enters the reflecting surface 21r of the condenser mirror 21 and is reflected by the reflecting surface 21r.
The light is focused by, and is emitted from the beam passage hole 27b to the outside in substantially parallel to the radiant light beam S incident on the reflecting surface 18r described above.

Reference numeral 40 is a reflecting member bending device, and the reflecting member bending device 40 is arranged inside the chamber body 29b for the light collecting mirror.

This reflecting member bending device 40 extends in the width direction of the condensing mirror 21 of the second reflecting device, and
A pair of front and rear pressing members 40a, 40a contacting the intermediate portion of the reflecting surface 21r in the front-rear direction, and a pair of left and right upper portions extending along the side portions of the condenser mirror 21 and fixing the both pressing members 40a, 40a to each other. The connecting members 40b, 40b, a lower connecting member 40c which is formed in a substantially concave shape and surrounds the holding member 39 from below and which fixes the left and right connecting members 40b, 40b to each other, and one end of which is pivoted to the lower connecting member 40c. A linear movement type actuator 40d such as a screw jack is supported and the other end is pivotally supported on the inner surface of the lower portion of the condensing mirror chamber body 29b.

The interval between the pair of pressing members 40a, 40a must be smaller than the interval between the curved fulcrum members 39a, 39a described above.

When the actuator 40d of the reflecting member bending device 40 described above is operated, the actuator 40d is actuated.
Movement of the lower connecting member 40c and the upper connecting member 40b,
The light is transmitted to the pressing members 40a, 40a via 40b, and the condenser mirror 21 supported by the curved fulcrum members 39a, 39a is deformed as the pressing members 40a, 40a are displaced.

The operation of this embodiment will be described below.

In the X-ray mirror device shown in FIGS. 1 to 3,
The interiors of the flat mirror chamber main body 29a, the condenser mirror chamber main body 29b, the mirror chamber 26 including the connecting member 30, the first beam duct 24a, the second beam duct 24b, and the like are depressurized to an ultrahigh vacuum. In this state, when the radiated light beam S enters the plane mirror chamber main body 29a from the beam passage hole 27a substantially horizontally, the radiated light beam S is reflected by the reflecting surface of the plane mirror 18 constituting the first reflecting device 17. The light is reflected by 18r and is incident on the reflecting surface 21r of the light collecting mirror 21 that constitutes the second reflecting device 38 inside the light collecting mirror chamber body 29b through the connecting member 30.

Further, the radiant light beam S incident on the reflecting surface 21r of the condenser mirror 21 is condensed by the reflecting surface 21r, and is emitted from the beam passage hole 27b to the outside.
The emitted light beam S incident on the reflecting surface 18r is emitted substantially in parallel.

The radiation beam S emitted from the beam passing hole 27b of the focusing mirror chamber body 29b to the outside of the mirror chamber 26 in this manner is caused by the reflection characteristics of the plane mirror 18 and the focusing mirror 21. That wavelength region belongs to the X-ray region.

On the other hand, when changing the condensing characteristics of the X-ray mirror device described above, the curvature of the reflecting surface 21r of the condensing mirror 21 constituting the second reflecting device 38 is adjusted, or the first reflecting device. Reflective surface 1 of plane mirror 18 constituting 17
At least one of the adjustment of the distance between 8r and the reflecting surface 21r of the condenser mirror 21 that constitutes the second reflecting device 38 is performed.

When the curvature of the reflecting surface 21a of the condenser mirror 21 constituting the second reflecting device 38 is adjusted, the actuator 40d of the reflecting member bending device 40 is actuated and the actuator 40d is contracted or expanded. .

When the actuator 40d contracts or extends, the movement of the actuator 40d is transmitted to the pressing members 40a, 40a via the lower connecting member 40c and the upper connecting members 40b, 40b, and the pressing members 40a, 4a.
0a presses the reflecting surface 21r of the condenser mirror 21,
Alternatively, it is displaced in a direction away from the reflection surface 21r of the condenser mirror 21.

Therefore, when the reflecting surface 21r of the condenser mirror 21 supported by the curved fulcrum members 39a, 39a is pressed by the pressing members 40a, 40a, the radius of the reflecting surface 21r increases as the pressing force increases. When R ₂ becomes smaller and the pressing members 40a, 40a are displaced in the direction away from the reflecting surface 21r, the pressing members 40a, 40a
Is completely separated from the reflecting surface 21r,
The radius R ₂ of the reflecting surface 21r increases as the pressing force decreases.

When the gap between the reflecting surface 18r of the plane mirror 18 constituting the first reflecting device 17 and the reflecting surface 21r of the condenser mirror 21 constituting the second reflecting device 38 is adjusted, the moving device is used. The actuator 36c of 36 is operated to move the moving member 36b.

When the moving member 36b moves, the displacement of the moving member 36b is transmitted to the focusing mirror chamber main body 29b, and the focusing mirror chamber main body 29b approaches or separates from the flat mirror chamber main body 29a. .

At this time, the chamber body 29 for the condenser mirror
One end of b is connected to the other end of the flat mirror chamber main body 29a through an expandable connecting member 30, and the other end of the converging mirror chamber main body 29b has a connecting flange 3a.
Since 2b is connected to the connecting flange 25b of the beam duct 24b via the expandable connecting member 33,
The condensing mirror chamber main body 29b can move in a direction of approaching or separating from the flat mirror chamber main body 29a without any hindrance.

Therefore, the chamber body 29b for the collecting mirror is
Moves toward the flat mirror chamber main body 29a, the flat mirror 1 constituting the first reflecting device 17 is moved.
The distance between the reflecting surface 18r of No. 8 and the reflecting surface 21r of the condenser mirror 21 forming the second reflecting device 38 is relatively narrowed,
When the focusing mirror chamber body 29b moves away from the flat mirror chamber body 29a, the first
Reflecting surface 18 of the plane mirror 18 that constitutes the reflecting device 17 of
The distance between r and the reflecting surface 21r of the condenser mirror 21 forming the second reflecting device 38 is relatively widened.

As described above, in the present embodiment, the curvature adjustment of the reflecting surface 21r of the condenser mirror 21 constituting the second reflecting device 38 and the reflecting surface 18r of the plane mirror 18 constituting the first reflecting device 17 are performed. Since it is possible to both adjust the distance between the second reflection device 38 and the reflection surface 21r of the condenser mirror 21 that constitutes the second reflection device 38, the emitted light beam S can be efficiently condensed.

The X-ray mirror device of the present invention is not limited to the above-mentioned embodiment, and the radiated light beam S
When it is not necessary to make the incident optical axis and the outgoing optical axis parallel to each other, the X-ray mirror is formed by the condensing mirror chamber main body 29b and the condensing mirror 21 without providing the plane mirror chamber main body 29a and the plane mirror 18. Configuring the device,
It goes without saying that the moving device 36, which is a moving means of the condenser mirror 21, is installed in the chamber body 29b for the condenser mirror, and other various changes can be made without departing from the scope of the present invention.

[0072]

As described above, according to the X-ray mirror device of the present invention, various excellent operational effects as described below can be obtained.

(1) In any of the X-ray mirror devices according to the first to third aspects of the present invention, the curvature of the reflecting surface 21r of the condenser mirror 21 can be changed by the reflecting member bending device 40. Moreover, since the focusing mirror 21 can be moved by the moving device 36, the focusing mirror 2
It is possible to set the condensing characteristic of No. 1 to the optimum state.

(2) In any of the X-ray mirror devices according to claims 2 and 3 of the present invention, the moving device 3
Since 6 is provided outside the condensing mirror chamber body 29b, the condensing mirror chamber body 29b can be downsized, and when the inside of the X-ray mirror device is depressurized to an ultrahigh vacuum. Moreover, the lubricant or the like applied to the moving device 36 is not gasified and adversely affects the progress of the radiated light beam S.

(3) Since the X-ray mirror device according to claim 3 of the present invention has both the plane mirror 18 and the condenser mirror 21, the chamber body 29a for the plane mirror is provided.
It is possible to make the optical axis of the radiant light beam S emitted from the focusing mirror chamber body 29b parallel to the optical axis of the radiant light beam S incident on the.

[Brief description of drawings]

FIG. 1 is a partially cut side view showing an embodiment of an X-ray mirror device of the present invention.

FIG. 2 is a view taken along the line II-II of FIG.

FIG. 3 is a plan view of the condenser mirror and the reflecting member bending device shown in FIG.

FIG. 4 is a partially cut side view showing an example of a conventional X-ray mirror device.

FIG. 5 is a side view showing an example of a condenser mirror.

6 is a VI-VI arrow view of FIG.

FIG. 7 is a conceptual diagram showing an example of radiation light generation means.

[Explanation of symbols]

 18 Planar Mirror 18r Reflecting Surface 21 Condensing Mirror 21r Reflecting Surface 24a First Beam Duct 24b Second Beam Duct 29a Flat Mirror Chamber Main Body 29b Condensing Mirror Chamber Main Body 30 Connecting Member 33 Connecting Member 36 Moving Device 40 Reflecting Member Bending device S Synchrotron beam

Claims (3)

[Claims] 1. A first end, one end of which is connected to a synchrotron radiation generator.
Hollow concentrating mirror chamber body (29b) communicating with the second beam duct (24b) connected to the beam duct (24a) and the other end of which is connected to the device utilizing the synchrotron radiation beam (S). And a reflection surface () which is provided inside the chamber body (29b) for the condensing mirror and which emits the radiant light beam (S) incident from the first beam duct (24a) to the second beam duct (24b). 21r) having a condenser mirror (21), a moving device (36) for moving the condenser mirror (21) forward and backward with respect to the beam ducts (24a) (24b), and the condenser mirror (21).
An X-ray mirror device, comprising: a reflecting member bending device (40) for elastically deforming and changing the curvature of its reflecting surface (21r). 2. A first device having one end connected to a synchrotron radiation generator.
To the second beam duct (24b), which communicates with the beam duct (24a) of the second embodiment through a connecting member (30) having an expandable and retractable hollow structure, and the other end of which is connected to a device utilizing the synchrotron radiation beam (S). A concentrating mirror chamber body (29b) having a hollow structure, which communicates via an expandable and contractable coupling member (33), and a concentrating mirror chamber body (29b).
A condensing mirror (21) provided inside and having a reflecting surface (21r) for emitting the radiant light beam (S) incident from the first beam duct (24a) to the second beam duct (24b); Both of the beam ducts (24a) and (24b) are arranged outside the condensing mirror chamber body (29b) and the condensing mirror chamber body (29b) is provided.
A moving device (36) for moving forward and backward with respect to the reflecting mirror (21) for elastically deforming the condensing mirror (21).
An X-ray mirror device comprising a reflection member bending device (40) for changing the curvature of r). 3. A first terminal, one end of which is connected to a radiant light generator.
Hollow chamber main body (29a) for a flat mirror, which communicates with the beam duct (24a) of the flat mirror, and a connecting member (30) having an expandable hollow structure whose one end is connected to the other end of the chamber main body (29a) for a flat mirror. ) And the connecting member (30)
And a hollow-structured condensing mirror chamber body (29b) having one end connected to the other end, and one end connected to the other end of the condensing mirror chamber body (29b) and the other end to the radiant light beam (S ), A connecting member (33) having an expandable and contractable hollow structure that communicates with a second beam duct (24b) connected to a device using the above-mentioned device, and the chamber body (29) for the flat mirror described above.
a) is provided inside the first beam duct (24
a) a plane mirror (18) having a reflecting surface (18r) for emitting the radiant light beam (S) incident from a) to the focusing mirror chamber body (29b); and the focusing mirror chamber body (29b). A condensing mirror (21) provided inside and having a reflecting surface (21r) for emitting the radiant light beam (S) incident from the plane mirror (18) to the second beam duct (24b); Is placed outside the mirror chamber body (29b) for focusing and the focusing mirror chamber body (29b) is a chamber body for flat mirrors (2).
9a) and a moving device (36) for moving the light collecting mirror (21) close to and away from the light collecting mirror (9a), and its reflecting surface (21) by elastically deforming the condenser mirror (21).
An X-ray mirror device comprising a reflection member bending device (40) for changing the curvature of r).