JPH09230099A - Focusing type spectroscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To contract the beam profile of a X-ray beam. SOLUTION: This focusing type spectroscope is provided with a first crystal 13 separating electromagnetic wave of wavelength in the X-ray territory from an emitted light beam S into its spectral components so as to project X-ray beam X, and a second crystal 17 projecting the X-ray beam X incident on one concavely curved face so as to focus on a focusing point F, a plurality of projecting stripe parts 18a, 18b extending in parallel from the front side G to the rear side H are provided on one face of the second crystal 1-7, and slopes is formed thereon so as to project the x-ray beam X focusing to the focusing point F.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a condensing spectroscope.

[0002]

2. Description of the Related Art When an electron moving at a speed close to the speed of light is bent in its traveling direction by a magnetic field or an electric field, it emits an electromagnetic wave (light) called radiation light in the tangential direction of the orbit of the electron.

FIG. 4 shows an example of the synchrotron radiation generating means. Reference numeral 1 denotes a linear accelerating device. The linear accelerating device 1 has an electron generating device 2 for emitting electrons (charged particles) e and an electron for one end. A straight tubular acceleration duct 3 connected to the generator 2;
A high-frequency accelerator 4 is provided to apply high frequency to the electrons e moving inside the acceleration duct 3 to accelerate the electrons e.

[0004] The other end of the acceleration duct 3 is connected to one end of a curved tubular deflecting duct 5.
A bending electromagnet 6 is provided to bend the trajectory of the electron e moving inside.

Reference numeral 7 is a synchrotron (electron storage ring), and the synchrotron 7 has an endless duct 8 for forming a circular orbit of the electrons e. Is connected to the other end of the deflection duct 5.

The bending portion of the endless duct 8 is provided with a deflecting electromagnet 9 for bending the trajectory of the electron e moving inside the endless duct 8. A high-frequency accelerator 10 is provided for applying a high frequency to the electrons e moving inside and accelerating the electrons e.

[0007] Further, in a curved portion at a required portion of the endless duct 8, a radiation light beam S emitted by bending the traveling direction of the electron e moving at a speed close to the speed of light in the curved portion is provided with an endless beam. One end of a beam line 11 for leading to the outside of the duct 8 is connected, and the other end of the beam line 11 is provided with an experimental device 12 for performing an experiment using the radiation light beam S as an irradiation light source.

Further, at the other end of the beam line 11, a beryllium window (not shown) for keeping the inside of the beam line 11 in a vacuum state is provided.

When the synchrotron radiation beam S is emitted by the synchrotron radiation generating means shown in FIG. 4, the insides of the acceleration duct 3, the deflection duct 5, the endless duct 8 and the beam line 11 are depressurized to an ultrahigh vacuum state. , The electron e is made to move at a speed close to the speed of light, and then the electron e is emitted from the electron generator 2.

The electrons e emitted from the electron generator 2 are:
Accelerated by the high-frequency accelerator 4,
The beam enters the endless duct 8 by bending the orbit.

The electrons e incident on the endless duct 8 are accelerated by the high-frequency accelerating device 10, and the trajectory is bent at each bending portion by the bending electromagnet 9, whereby the tangent of the electron e to the trajectory of the electron e is obtained. A radiation light beam S is emitted in the direction.

A radiation light beam S emitted from a predetermined curved portion of the endless duct 8 is incident on an experimental device 12 via a beam line 11.

The radiated light beam S is divergent light that spreads in the traveling direction from the orbit of the electron e that circulates in the endless duct 8 as a light emitting point, and also includes electromagnetic waves having a wavelength ranging from the visible region to the X-ray region. There is.

Therefore, X contained in the radiation beam S
When an electromagnetic wave having a wavelength in the line region is used as the irradiation light source of the experimental apparatus 12, a condensing spectroscope is incorporated in the beam line 11.

FIG. 3 shows an example of a conventional condensing type spectroscope. This condensing type spectroscope disperses an electromagnetic wave having a wavelength in the X-ray region from a radiant light beam S and emits an X-ray beam X. The first crystal 13 and the second crystal 14 that collects the X-ray beam X emitted from the first crystal 13 are provided.

The first crystal 13 is a crystal of silicon or germanium having a characteristic of dispersing electromagnetic waves having a wavelength in the X-ray region, which is machined into a flat plate having one surface and the other surface.

The first crystal 13 has a holder (not shown) so that the radiant light beam S is incident on the one surface from the front side G.
And is rotatable with the holder about a rotary shaft 15 that extends horizontally in a direction orthogonal to the radiant light beam S that should separate the electromagnetic waves in the X-ray region.
When the incident angle of the radiant light beam S on one surface of the first crystal 13 is appropriately adjusted, electromagnetic waves having a wavelength in the X-ray region dispersed from the radiant light beam S are emitted as the X-ray beam X. .

A cooling medium is continuously supplied to a holder (not shown) on which the first crystal 13 is mounted.

The second crystal 14 is a plate made of a silicon or germanium crystal having a flat surface on one side and a convex section (rib) 16 having a rectangular cross section on the other side and extending parallel to each other from the front side G to the rear side H. It is cut into a shape.

The second crystal 14 has a ridge 1 so that the X-ray beam X from the first crystal 13 is incident on one surface thereof.
A holder (not shown) is mounted so that 6 extends in a direction orthogonal to the rotation axis 15 of the first crystal 13.

One end of the second crystal 14 is fixed to a fixed structure (not shown) such as a cradle together with the holder,
In the vicinity of the other end of the second crystal 14, the other end should be pressed from the other surface (the surface having the ridges 16) toward the one surface (the surface without the ridges 16). Is provided with an actuator (not shown) that bends the second crystal 14 so that one surface becomes concave, and when the second crystal 14 is appropriately curved by the actuator so that one surface becomes concave. , The X-ray beam X from the first crystal 13
The light is emitted from the crystal 14 so as to connect the focal points F.

A cooling medium is continuously supplied to a holder (not shown) on which the second crystal 14 is mounted.

In the converging type spectroscope shown in FIG. 3, when the electromagnetic wave in the X-ray region is dispersed and condensed from the radiant light beam S, the first crystal 13 is preliminarily arranged around the rotary shaft 15 in advance. The synchrotron radiation beam S for rotating one surface of the first crystal 13 is rotated.
Of the second crystal 14 is curved by an actuator (not shown) so that one surface of the second crystal 14 becomes a concave surface. The X-ray beam X is emitted so as to connect F.

The cooling medium is continuously supplied to each of the holders (not shown) on which the first crystal 13 and the second crystal 14 are mounted.

As a result, the radiant light beam S emitted from the light emitting point is obliquely incident on one surface of the first crystal 13, and the electromagnetic wave having a wavelength in the X-ray region dispersed by the first crystal 13 is X-ray. A line beam X is emitted from the first crystal 13 to the second crystal 14.

Since the radiant light beam S is obliquely incident on the first crystal 13, the heat flux per unit area of the first crystal 13 is reduced, and as a result, the heat load on the first crystal 13 is reduced. It will be reduced.

Further, the first crystal 13 to the second crystal 14
The X-ray beam X that is incident on one surface is emitted from the second crystal 14 so as to connect the condensing points F.

[0028]

However, in the condensing type spectroscope shown in FIG. 3, the synchrotron radiation beam S which is divergent light is made incident on the flat surface of the first crystal 13 to change the wavelength of the X-ray region. Since the electromagnetic wave is dispersed, the X-ray beam X emitted from the first crystal 13 also becomes divergent light, and therefore the second crystal 14
The beam profile (spread of the beam cross section) of the X-ray beam X focused by will also tend to increase.

The present invention has been made in view of the above situation, and an object thereof is to provide a condensing type spectroscope capable of reducing the beam profile of an X-ray beam.

[0030]

In order to achieve the above object, in the condensing type spectroscope of the present invention, the radiant light beam S is arranged so as to be incident from the front side G to a flat surface. The first crystal 13 that emits the X-ray beam X by dispersing the electromagnetic wave having a wavelength in the X-ray region included in S and the first crystal 13 that is concavely curved when viewed from the front side G.
In the condensing spectroscope provided with the second crystal 17 which is incident with the X-ray beam X from and which emits the X-ray beam X so as to connect the condensing point F, one surface of the second crystal 17 is provided. Front side G
Ridges 18 extending in parallel from each other toward the rear side H
a and 18b are provided, and from the front side G to the rear side H in the portion of each ridge portion 18a located on one end side A from the center of the second crystal 17 near the center of the second crystal 17. Extending from the front side G to the other side D from the one side C of the second crystal 17 and extending obliquely from one side A to the other side B of the second crystal 17 is formed. , The portion extending from the front side G to the rear side H at the portion of each ridge portion 18b located on the other end side B of the second crystal 17 closer to the center of the second crystal 17 and extending forward. When viewed from the side G, an inclined surface 18d is formed that extends obliquely from one surface side C of the second crystal 17 to the other surface side D and from the other end side B of the second crystal 17 to the one end side A.

In the concentrating spectrometer of the present invention, the first crystal 13 separates the electromagnetic wave in the X-ray region from the radiant light beam S to emit the X-ray beam X, and the first crystal 13 emits the second beam. Of the X-ray beam X incident on the crystal 17 of the second crystal 17 on the ridges 18a and 18b of the second crystal 17,
The beam profile of the X-ray beam X at the condensing point F is reduced by allowing the light to be emitted toward the converging point F by the beam d.

[0032]

Embodiments of the present invention will be described below with reference to the drawings.

FIGS. 1 and 2 show an example of an embodiment of a condensing type spectroscope of the present invention. In the drawings, a first crystal 1 is shown.
3 is the same as that shown in FIG. 3, and the parts given the same reference numerals as those in FIGS. 3 and 4 represent the same things.

This condensing spectroscope emits an X-ray beam X by separating an electromagnetic wave having a wavelength in the X-ray region from a radiant light beam S, and emits the X-ray beam X from the first crystal 13. Second crystal 17 for condensing the X-ray beam X.

The second crystal 17 is a plate made of a silicon or germanium crystal and having ridges (ribs) 18a and 18b extending parallel to each other from the front side G to the rear side H on one surface and having a flat other surface. It is cut into a shape.

A portion of each ridge portion 18a located on the one end side A from the center of the second crystal 17 near the center of the second crystal 17 extends from the front side G to the rear side H. Further, as viewed from the front side G, an inclined surface 18c extending obliquely from one side A to the other side B of the second crystal 17 is formed from one side C to the other side D of the second crystal 17. .

From the front side G to the rear side H in the portion of each ridge portion 18b located on the other end side B from the center of the second crystal 17, near the center of the second crystal 17. An inclined surface 18d extending from one surface side C of the second crystal 17 to the other surface side D as viewed from the front side G and obliquely extending from the other end side B of the second crystal 17 to the one end side A is formed. There is.

The groove bottom 18e between the adjacent ridges 18a, 18a and the groove bottom 18f between the adjacent ridges 18b, 18b are formed flat.

The second crystal 17 has a ridge 1 so that the X-ray beam X from the first crystal 13 is incident on one surface thereof.
Holder 1 having a cooling function so that 8a and 18b extend in a direction orthogonal to the rotation axis 15 of the first crystal 13.
9 is attached.

The holder 19 has a heat transfer plate 20 arranged so that one surface thereof is in surface contact with the other surface of the second crystal 17, and a portion of one surface of the heat transfer plate 20 near one end side A and the other end side. Support members 21 and 21 provided in a portion near B and fixing the second crystal 17 to the heat transfer plate 20, and fixed to a portion of the other surface of the heat transfer plate 20 near one end side A and A cooling member 23 having a cooling medium flow path 22 therein, an operating member 24 that is continuous with the cooling member 23 and is parallel to the heat transfer plate 20 at a predetermined distance, and the other end side B of the operating member 24. A pressing member 25 provided so as to come into contact with the other surface of the heat transfer plate 20 is provided in a portion near the pressing member 25.

These heat transfer plate 20 and support members 21 and 2
1, the cooling member 23, the operating member 24, and the pressing member 25 are all formed in a plate shape from copper (Cu) having excellent heat transfer properties.

An end portion on one end side A of the holder 19 is fixed to a fixed structure 26 such as a gantry, and in the vicinity of the end portion on the other end side B of the holder 19, the operating member 24 and the pressing member 2 are provided.
5, the second crystal 17 in the vicinity of the other end from the other surface (the surface without the ridges 18a and 18b) to the one surface (the ridge 18a,
An actuator 27 is provided which bends the second crystal 17 so that one surface becomes a concave shape by pressing it toward the surface 18b).
By appropriately bending the second crystal 17 so that one surface is concave, the X-ray beam X from the first crystal 13 is emitted from the second crystal 17 so as to connect the focal point F. It has become.

In the condensing type spectroscope shown in FIGS. 1 and 2, when the electromagnetic wave in the X-ray region is dispersed and condensed from the radiated light beam S, the first movement is performed around the rotating shaft 15 in advance. Crystal 1
3 is rotated so that the incident angle of the radiated light beam S with respect to one surface of the first crystal 13 becomes an appropriate value, and the second surface of the second crystal 17 is made concave by the actuator 27. So that the second crystal 17
The X-ray beam X is set to be emitted so as to connect the condensing points F from.

Further, the cooling medium is continuously supplied to the holder (not shown) on which the first crystal 13 is mounted, and the cooling member 23 constituting the holder 19 on which the second crystal 14 is mounted. The cooling medium is continuously supplied to the cooling medium passage 22.

As a result, the radiant light beam S emitted from the light emitting point is obliquely incident on one surface of the first crystal 13, and the electromagnetic wave having a wavelength in the X-ray region dispersed by the first crystal 13 is X-ray. The line beam X is emitted from the first crystal 13 to the second crystal 17.

Since the synchrotron radiation beam S is obliquely incident on the first crystal 13, the heat flux per unit area of the first crystal 13 is reduced, and as a result, the heat load on the first crystal 13 is reduced. It will be reduced.

Further, the first crystal 13 to the second crystal 17
The X-ray beam X incident on one surface is emitted from the second crystal 17 so as to connect the focal points F.

At this time, the ridges 18 of the second crystal 17
The X-ray beam X is emitted from the inclined surfaces 18c and 18d of a and 18b so as to converge toward the focal point F.

Therefore, the X emitted from the second crystal 17
The beam profile (spread of the beam cross section) at the condensing point F of the line beam X is the beam profile of the X-ray beam X emitted from the second crystal 14 of the conventional condensing type spectroscope (see FIG. 3) described above. The beam profile becomes smaller than the beam profile at the converging point F. In the converging spectroscope shown in FIGS. 1 and 2, the intensity of the X-ray beam X emitted from the second crystal 17 at the converging point F is improved. Can be made.

The condensing spectroscope of the present invention is not limited to the above-mentioned embodiment, and it goes without saying that various modifications can be made without departing from the gist of the present invention.

[0051]

As described above, in the concentrating spectroscope of the present invention, the first crystal 13 disperses the electromagnetic wave in the X-ray region from the emitted light beam S to emit the X-ray beam X, The X-ray beam X incident on the second crystal 17 is directed to the inclined surfaces 18c, 18 of the ridges 18a, 18b of the second crystal 17.
Since the light is emitted so as to converge toward the converging point F by d, the beam profile of the X-ray beam X at the converging point F can be reduced, and thus the second crystal 17 can be obtained.
It is possible to obtain an excellent effect that the intensity of the X-ray beam X emitted from the light source can be improved at the focal point F.

[Brief description of drawings]

FIG. 1 is a perspective view showing a positional relationship between a first crystal and a second crystal in an example of an embodiment of a condensing spectroscope of the present invention.

FIG. 2 is a diagram showing a second crystal support structure applied to an example of an embodiment of a concentrating spectrometer of the present invention.

FIG. 3 is a perspective view showing a positional relationship between a first crystal and a second crystal in an example of a conventional condensing spectroscope.

FIG. 4 is a conceptual diagram illustrating an example of a radiation light generating unit.

[Explanation of symbols]

 13 1st crystal 17 2nd crystal 18a Convex part 18b Convex part 18c Inclined surface 18d Inclined surface A One end side B Other end side C One surface side D Other surface side F Focus point G Front side H Rear side S Radiation Light beam X X-ray beam

Claims (1)

[Claims] 1. An electromagnetic wave having a wavelength in an X-ray region contained in the radiant light beam (S) is arranged so that the radiant light beam (S) is incident on the flat surface from the front side (G). First crystal (13) for emitting an X-ray beam (X)
And when viewed from the front side (G), the first surface is curved concavely.
And a second crystal (17) for injecting the X-ray beam (X) from the crystal (13) and emitting the X-ray beam (X) so as to connect the condensing point (F). Type spectrometer
A ridge (18a) extending parallel to each other from the front side (G) to the rear side (H) on one surface of the second crystal (17).
(18b) is provided, and the second ridges (18a) located on one end side (A) with respect to the center of the second crystal (17)
Of the second crystal (17) extending from the front side (G) to the rear side (H) and viewed from the front side (G) from the one side (C) of the second crystal (17) The inclined surface (18c) extending obliquely from the one end side (A) of the second crystal (17) to the other end side (B) toward the plane side (D) is formed, and the center of the second crystal (17) is formed. From the front side (G) to the rear side (H) in the portion of each ridge (18b) located closer to the center of the second crystal (17) than the other side (B). Further, when viewed from the front side (G), from the one surface side (C) of the second crystal (17) to the other surface side (D), one end side (from the other end side (B) of the second crystal (17) ( Inclined surface (18) extending obliquely to A)
A condensing type spectroscope characterized by forming d).