JPH08179010A - Electric inspection device for electronic part - Google Patents

Abstract

PURPOSE: To employ a simple and low-cost tester electrode terminal in place of an expensive probe requiring high-accuracy machining and make the whole device compact. CONSTITUTION: The drive test signal is applied to an electrode terminal pad (constituted of an input terminal 21 and an output terminal 22) provided on a liquid crystal display panel 20 as an electronic part before driving LSI chips are mounted. This electric inspection device for an electronic part is provided with an arm mechanism section 12 movable into contact with or apart from the input terminal 21 and the output terminal 22 of the positioned liquid crystal display panel 20; a tester LSI chip 13 fitted to the arm mechanism section 12 and having multiple bumps (constituted of an input signal bump 14 and an output signal bump 15), pressed to the input terminal 21 and the output terminal 22, and serving as electrode terminals applying the drive test signal; and a feed power source section constituted of a power circuit 18 feeding a current to the tester LSI chip 13.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a TF to be inspected.
The present invention relates to an electric inspection device that performs a lighting display test or the like on an electronic component such as a T (thin film transistor) liquid crystal display panel by energization.

[0002]

2. Description of the Related Art Generally, in a mass production process of a COG (chip on glass) mounted liquid crystal display device using a TFT as a switching element, a liquid crystal display panel is usually driven before a process of mounting a driving LSI chip. An electrical inspection is performed by applying a test signal and determining whether or not the product is non-defective according to the lighting display. For the liquid crystal display panel to be inspected,
If the lighting display inspection is performed after the driving LSI chip is mounted by soldering or the like, if the result is determined to be defective, there is a problem that a labor such as a removal work is wasted. For this reason, a drive test signal is applied to the liquid crystal display panel in the step before mounting the drive LSI chip, and the acceptability of the non-defective product is determined. FIG. 4 shows an example of an apparatus that has been conventionally used for this type of electrical inspection. According to this, the liquid crystal display panel 1 in a semi-finished product stage is set on the sample stage before the mounting of the driving LSI chip.
This liquid crystal display panel 1 has electrode terminal pads 2 formed at the tips of outer leads of an IC or LSI chip. The pads 2 are composed of an input terminal portion 2A and an output terminal portion 2B. It is applied and the presence or absence of a lighting display is inspected. On the inspection device side, a number of probes (probes) 3 corresponding to the number of terminal signals of the pad output terminal portion 2B are formed in a card shape, and at the time of inspection, the probe 3 is pressed against the pad output terminal portion 2B. Drive test signal is applied. The probe 3 is pressure-contacted by an automatic or manual moving mechanism. The probe 3 is connected to an output terminal of a tester LSI chip 5 having the same specifications as the mounted product via a relay board 4, and the tester LSI chip 5 is connected to a signal supply unit including a relay connector 6 and a drive control circuit 7. ing.

[0003]

By the way, in the conventional electrical inspection apparatus as described above, since the probe 3 which requires high precision processing is used, this probe 3 outputs the output signal on the pad 2 side. The number of fine pitches corresponding to the number of fabrications increases the cost, and further, the relay board 4
The structure of the circuit including the relay connector 6 is complicated, and the inspection apparatus itself is expensive. An object of the present invention is to provide a simple and low-cost tester electrode terminal in place of a probe that requires high-precision processing and is high in cost, and to provide an electrical inspection apparatus for electronic components that can make the entire apparatus compact. .

[0004]

In order to achieve the above object, an electronic component electrical inspection apparatus according to the present invention is an electrode provided on an electronic component before mounting a driving LSI chip on the electronic component. It is a device that applies a drive test signal to a pad as a terminal, and is an arm mechanism part that is freely movable back and forth with respect to a pad of an electronic component that has been positioned, and is attached to the arm mechanism part and is pressed against the pad. The tester LSI chip is provided with a plurality of bumps as electrode terminals for applying a drive test signal, and a signal supply circuit for supplying a test signal to the tester LSI chip. In the present invention, when the electronic component is a liquid crystal display panel, a lighting test can be performed by applying a drive test signal to the liquid crystal display panel before mounting the drive LSI chip. Further, according to the present invention, the input signal side bumps of the tester LSI chip can be directly connected to the signal supply circuit via the lead wire. Further, in the present invention, the tester LSI chip having the same specifications as the mounted drive LSI chip is used.

[0005]

In the electrical inspection of the electronic component, the arm mechanism portion moves and the bumps provided on the tester LSI chip are pressed against the pads on the electronic component side. When the test signal is supplied by the signal supply circuit, the drive test signal is applied to the pad through the bump. At this time, since the bump is not a very finely processed electrode terminal, it can be roughly positioned and pressed against the pad. Further, the electrical inspection device according to the present invention is suitable for a lighting display test of a liquid crystal display panel as a specific example of an electronic component. Further, according to the present invention, in the tester LSI chip, which has the same specifications as the mounted drive LSI chip, the connection with the signal supply circuit involves the use of the relay substrate and the connector as in the conventional device, However, by directly connecting the bumps on the input signal side to the signal supply circuit with lead wires, a considerable simplification can be realized.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of an electrical inspection apparatus for electronic parts according to the present invention will be described below with reference to the drawings. FIG. 1 and FIG. 2 respectively show a plan view and a side view of a main part of an embodiment device 10 which performs a lighting display test of a liquid crystal display panel as an example of an electronic component to be inspected. The main part of the device 10 is a liquid crystal display panel before mounting a drive LSI chip, and a liquid crystal display panel positioned before applying a drive test signal to pads as electrode terminals provided on the liquid crystal display panel. , For a tester provided with an arm mechanism part that is freely movable back and forth on this pad, and a plurality of bumps that are attached to this arm mechanism part and that are in pressure contact with the pad and apply a drive test signal as electrode terminals An LSI chip and a power supply circuit that supplies a current to the tester LSI chip are provided.

On the sample stage 11 of the apparatus 10, the semi-finished liquid crystal display panel 20 that has flowed between the steps of the mass production assembly line is sequentially positioned. As shown in FIG. 2, the outer lead extending from the electrode substrate of the liquid crystal display panel 20 has the same function as the pad 2 including the input terminal portion 2A and the output terminal portion 2B shown in FIG. 4 of the conventional example. As a matter of fact, the input terminal 21 and the output terminal 22 are respectively formed as electrode terminals of a number corresponding to the number of input / output signals. Further, the liquid crystal display panel 20 is provided with a signal input terminal 23, which is connected to a signal supply section on the side of the device 10 described below.

Further, the apparatus 10 is equipped with an arm mechanism section 12 such as a robot, and the arm mechanism section 12 is provided.
Although it is possible to use a manual mechanism, in the embodiment, it is possible to freely move back and forth toward the input terminal 21 and the output terminal 22 on the liquid crystal display panel 20 side by automatic control. A tester LSI chip 13 having the same specifications as the mounted drive LSI chip is detachably attached to the tip of the arm mechanism 12.

The tester LSI chip 13 has a number of input signal bumps 14 and a number of input signal bumps 14 corresponding to the number of signals so that a drive test signal can be applied to the input terminal 21 and the output terminal 22 on the liquid crystal display panel 20 side by pressure contact. The output signal bump 15 is formed in a protruding shape. The bumps 14 and 15 for the input / output signals can be formed by a well-known technique in which a photolithography process for bump formation is performed after a metal film is deposited on the chip substrate and a pattern is formed by etching. You can With such a simple forming method, the electrode terminals that require high-precision processing, such as a conventional probe, are not required on the inspection device side, and instead, the bumps 14 and 15 for input / output signals, which are remarkably low cost, are formed. be able to.

Therefore, as the arm mechanism section 12, the input / output signal bumps 1 are accurately moved forward and backward with respect to the liquid crystal display panel 11 positioned on the sample stage 11.
In order that the Nos. 4 and 15 can be pressed against the input terminal 21 and the output terminal 22 with a suitable pressing force, the operation is patterned by a swinging operation in the horizontal direction and an elevating operation in the vertical direction.

Further, the apparatus 10 includes a probe-shaped signal supply terminal 16, a relay connector 17, and a drive control circuit 18.
The liquid crystal display panel 20 can be easily connected to the signal supply unit via the signal input terminal 23. By connecting the signal input terminal 23 to the signal supply section, a test signal can be supplied from the input signal bump 14 to the tester LSI chip 13 attached to the arm mechanism section 12.

With the above-described structure, the electrical inspection apparatus 10 has the following functions when performing the lighting display inspection of the liquid crystal display panel 20. The liquid crystal display panel 20 is set on the sample stage 11 of the apparatus 10. Almost in synchronization with this, a control signal for operation is sent to the arm mechanism unit 12, and the arm mechanism unit 12 waits for the liquid crystal display panel 20.
Move to the specified position. The input signal bumps 14 and the output signal bumps 15 of the tester LSI chip 13 are brought into pressure contact with the input terminals 21 and the output terminals 22 of the liquid crystal display panel 20 by an appropriate pressing force due to the lowering operation of the arm. This pressure contact operation is easily performed because the bump shape is relatively rough and large, and does not require a high degree of positioning accuracy as in the conventional fine probe. Such pressure contact operation can be monitored and executed by a CRT monitor installed on the back surface of the sample stage 11 or the liquid crystal display panel 20.

During this period, the signal supply section including the drive control circuit 18 and the like on the apparatus 10 side is also synchronized substantially with the liquid crystal display panel 2.
0 is connected to the signal input terminal 23, and a required signal is supplied from the signal input terminal 23 to the liquid crystal display panel 20 when the circuit is turned on. Since the input signal bumps 14 and the output signal bumps 15 of the tester LSI chip 15 are in pressure contact with the input terminals 21 and the output terminals 22 of the liquid crystal display panel 20, the tester LSI chip 13 drives the liquid crystal display panel 20. A test signal is applied and the liquid crystal display panel 2
If the 0 electrode substrate is driven and lit and displayed, a non-defective product determination is made, and the liquid crystal display panel 20 is sent to the next step and mounted by mounting a driving LSI chip for mounting by soldering.

In the present invention, the signal supply unit of the embodiment is a signal supply including the relay board 4, the tester LSI chip 5, the relay connector 6 and the drive control circuit 7 shown in the conventional example of FIG. It is simpler than the department. Further, in the embodiment, the configuration of the signal supply unit can be simplified as shown in FIG. That is, the lead wire 19 extending directly from the drive control circuit 18 is attached to the arm mechanism section 12 without providing the signal input terminal 23 of the liquid crystal display panel 20, the signal supply terminal 16 on the device 10 side or the relay connector 17. Input signal bump 14 of tester LSI chip 13
It is a structure directly connected to. As a result, the electrical inspection device 1
The configuration of 0 can be greatly simplified.

In the present invention, the lighting display inspection of the liquid crystal display panel 20 has been described as an electronic component to be inspected, but a card-like probe having a large number of probes is used as a tester electrode terminal to perform an electrical inspection. It can be applied to other mass-produced electronic components and semi-finished products that are being conducted, and can solve problems such as high inspection cost and inspection difficulty.

[0016]

As described above, the electronic component electrical inspection apparatus according to the present invention is suitable for the lighting display inspection of the liquid crystal display panel before the mounting of the driving LSI chip, and the drive test signal is supplied. Instead of a probe that requires higher accuracy than the conventional electrode terminal to be applied, an LSI chip with the same specifications as the mounted driving LSI chip is used for the tester, and inexpensive bumps for input / output signals are provided as electrode terminals. As a result, cost reduction is realized and the inspection work is simplified.

[Brief description of drawings]

FIG. 1 is a plan view of an electrical inspection apparatus according to an embodiment of the present invention that performs a lighting display inspection of a liquid crystal display panel as an electronic component to be inspected.

FIG. 2 is a side view of essential parts showing a lighting display inspection mode of a liquid crystal display panel by the electrical inspection device of the embodiment.

FIG. 3 is a side view showing another form of current supply for applying a drive test signal in the electrical inspection apparatus of the embodiment.

FIG. 4 is a plan view showing a mode of a lighting display inspection of a liquid crystal display panel by an electrical inspection device of a conventional example.

[Explanation of symbols]

 10 liquid crystal display panel 12 arm mechanism section 13 LSI chip for tester 14 input signal bump 15 output signal bump 17 relay connector 18 drive control circuit 20 liquid crystal display panel 21 input terminal 22 output terminal 23 signal input terminal

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Internal reference number FI technical display location G09F 9/00 352 7426-5H

Claims (4)

[Claims] 1. An electrical inspection apparatus for applying a drive test signal to a pad as an electrode terminal provided on an electronic component before mounting the driving LSI chip on the electronic component. A tester LSI provided with an arm mechanism part that is freely movable back and forth with respect to the pad, and a plurality of bumps that are attached to the arm mechanism part and that are pressed into contact with the pad and apply drive test signals as electrode terminals. An electrical inspection apparatus for electronic parts, comprising: a chip; and a signal supply circuit that supplies a cost signal to a tester LSI chip. 2. The electrical inspection apparatus for an electronic component according to claim 1, wherein a driving test signal is applied to the liquid crystal display panel before mounting a driving LSI chip as the electronic component to perform a lighting display test. 3. The electrical inspection apparatus for an electronic component according to claim 1, wherein the bump on the input signal side of the tester LSI chip is directly connected to a signal supply circuit via a lead wire. 4. The driving LSI chip and the tester LSI chip to be mounted have the same specifications.
Electrical inspection device for the electronic parts described.