JPH08164320A - High voltage pulse power source and pulse corona application device using same - Google Patents

Abstract

PURPOSE: To periodically generate sufficiently strong corona discharge by releasing an output obstruction function again in a switch non-continuity period of a discharge high voltage synchronous switch element, to charge pulse voltage forming capacitors again with high voltage oscillatingly in parallel, and after that repeatedly applying to a load. CONSTITUTION: From high voltage side output terminals 7, 8 and earth side output terminals 10, 11 through a full wave rectifier 51 from the secondary winding of a high voltage transformer 48, charging voltage is applied to a series connected body of a capacitor 3 and a high impedance element 1 and a series connected body of a capacitor 4 and a high impedance element 2 to oscillatingly charge the capacitors 3, 4 with voltage higher than output voltage of a rectifier 51 by resonance charging. Next, sparks are generated in a rotary spark switches 56, 57 at the point of time of spark in a continuity period to provide continuity for them, and high voltage pulse voltage in which rising is steep and peak voltage is high is applied to between a high voltage side input terminal 24 and an earth side input terminal 26 from high voltage pulse output terminals 22, 25.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a discharge gap, in particular, to a large gap corona electrode system composed of a corona discharge electrode arranged insulatively and a ground counter electrode arranged opposite to this with a large gap distance, and has a sharp rise and The present invention relates to a high-voltage pulse power supply for periodically applying a pulse high voltage having an extremely high peak voltage value to generate a strong periodic pulse corona discharge from the corona discharge electrode toward the counter electrode. In addition, such a large gap corona electrode system is built-in, and the high voltage pulse power source is used to charge between both electrodes to generate a strong periodic corona discharge from the corona discharge electrode to the counter electrode through a large gap. The present invention relates to a pulse corona application device such as a new electrostatic precipitator, a pollutant gas treatment device, an object surface treatment device, a gas phase synthesis device, etc.

[0002]

2. Description of the Prior Art Conventionally, a large gap corona discharge electrode system is periodically applied with a pulse high voltage having a sharp rise and an extremely high peak voltage value to form a large gap from the corona discharge electrode to the counter electrode. In order to periodically generate a sufficiently strong corona discharge via the above, after charging multiple pulse forming capacitors in parallel, connect them in series via multiple spark switches and change the charging voltage. A Marx circuit method is used in which they are combined in series and applied to the load, but a slight difference occurs at the time of each spark switch and jitter occurs in the generated pulse voltage, so a sufficiently fast rise time and pulse peak voltage are used. It was difficult to get.

On the other hand, there is an attempt to reduce jitter by constructing a part or all of the above-mentioned plurality of spark switches by a rotary spark switch composed of a fixed electrode and a rotary electrode, but the generated pulse voltage is limited. However, in order to increase this, not only a large number of capacitors and a large number of spark switches are required, but when sparks occur, a short-circuit current flows from the capacitor charging power supply to the load, causing sparks and arcs. However, it has not been put to practical use except for a small size and a voltage that is not so high.

[0004]

DISCLOSURE OF THE INVENTION The object of the present invention is to solve the above problems in a high voltage pulse power supply to which a pulse high voltage having a sharp rise and an extremely high peak voltage value should be periodically applied to the large gap corona electrode system load. Therefore, a sufficiently strong corona discharge can be periodically generated from the corona discharge electrode toward the counter electrode through a large gap.

Further, a pulse corona application device such as an electrostatic precipitator, a pollutant gas treatment device, an object surface treatment device, a vapor phase synthesizing device, etc. utilizing a strong periodic pulse corona discharge through such a large gap. To make it feasible.

[0006]

In the high voltage pulse power supply of the present invention, one end of each of a plurality of pulse shaping capacitors to be used in a Marx circuit is connected via a high impedance element composed of an inductance or a series connection body of the inductance and the resistance. The other end is connected to a high-voltage charging power supply while being grounded, and at the time of charging, the capacitors are oscillatingly charged by series resonance of the capacitor and the high-voltage impedance so that the charging voltage of each capacitor is higher than the output voltage of the high-voltage charging power supply. It is much higher and charges up to twice the voltage.

Then, the capacitors are connected in series by a plurality of high-voltage synchronous switches for discharging, which are turned on and off at high speed in synchronization with each other, and the steep and extremely high series combined voltage is used as the output pulse high voltage for the large gap. Apply to corona electrode load.

In this case, in synchronization with the discharging high-voltage synchronous switch, the charging output of the high-voltage charging power supply is turned off during the conduction period of the switch to prevent a short-circuit current from directly flowing to the load, and the high-voltage charging power supply. At the output end, the same number of protective inductances as the number of capacitors are provided, and during the switch non-conduction period of the discharging high-voltage synchronous switch, the capacitors are separately charged through the protective inductances.

Even when the steep and high peak voltage of the output pulse is generated due to the action of the protective inductance, it is blocked and prevented from being reversely applied to the high voltage charging power source and destroyed. . Moreover, short-circuiting of the capacitors at the time of discharging is prevented by charging each of the capacitors via the protection inductance and the high-voltage side output terminal.

Now, the configuration and principle of the present invention will be described in detail with reference to FIG. A high impedance element 1 consisting of an inductance or a series connection body of an inductance and a resistance,
There is at least two pulse voltage shaping capacitors 3, 4, --- whose one end is grounded via 2, ---, and a separate protection is provided for each of the capacitors 3, 4, --- on the high voltage output side. For the capacitors 3, 4, through the inductances 5, 6, --- and the high-voltage side output terminals 7, 8, ---
There is a high voltage charging power supply 9 which provides a high voltage output voltage for separately charging ---.

The high voltage side output terminal 7 of the high voltage charging power source 9,
8, --- are connected to the capacitors 3, 4, ---
Ground-side output terminals 10 and 11 of the high-voltage charging power supply 9 connected to the respective non-ground-side terminals (omitted in this example, see FIG. 3)
Through the common ground conductor 12 to the capacitors 3, 4,
--- Each of the high impedance elements 1, 2, ---
Connected to the ground side terminals 13, 14, ---.

Of the pulse voltage shaping capacitors, the non-grounding side terminal 15 of the first capacitor 3 and the common grounding conductor 12 are interposed so as to conduct them for a short period of time and then immediately return to the non-conducting state. A first high-voltage synchronous switch 16 for discharging, which has a high-speed on / off function for operating the high-impedance element 1, and a connection point 17 between the ground side terminal of the first capacitor 3 and the high impedance element 1 and the second capacitor 4 are provided. It has the same function as the first high-voltage synchronous switch 16 for discharging by interposing with the non-ground side terminal 18, and in synchronization with this, the connection point 17 and the non-ground side terminal 18 of the second capacitor are connected. A second high-voltage synchronous switch 19 for discharge for turning on / off the interval is provided.

In the following, the number of the capacitors will be first
Connection point 1 between the ground side terminal of the third and following capacitors 3, 4, --- and their high impedance elements 1, 2, ---
7, 20, --- and the non-grounded side terminals 18, --- of the second and lower capacitors to intervene between the first and second discharge terminals.
The second and subsequent high-voltage synchronous switch elements 19 for discharge, which have the same function as the high-voltage synchronous switch element 16 and which are turned on and off in synchronization with the same, are provided.

The last capacitor, in the example of this figure, the ground side terminal of the capacitor 4 and the high impedance element 2
The connection point 20 between them is connected to the high voltage side output terminal 22 of the high voltage pulse power supply 21 of the present invention, this is connected to the high voltage side input terminal 24 of the load 23, and the ground side high voltage of the last capacitor 4 is connected. The ground terminal 14 of the impedance element 2 is connected to the ground side output terminal 25 of the high-voltage pulse power supply 21, and this is connected to the ground side terminal input 26 of the load 23.

The high voltage synchronous switches 16 and 1 for each discharge described above.
After the ON operation of 9, ---, at least during the switch conduction period until the OFF function is restored, the high voltage charging power source 9
Of the pulse voltage shaping capacitors 3, 4, --- by blocking the output from the respective output terminals 7, 8, ---
In addition to blocking charging to each of them, the output blocking function is released during the switch non-conduction period of each of the discharging high-voltage synchronous switches 16, 19, ---, and the pulse voltage shaping capacitors 3, 4,-. --The high-voltage charging power source 9 is equipped with a charging control mechanism 27 for charging each of them.

As a result, the output blocking function of the charging control mechanism 27 is released and each of the pulse voltage shaping capacitors 3, 4, --- is vibrated and the high voltage charging power source 9 is vibrated.
High-voltage charging in parallel to a high voltage value up to about twice the output voltage of the above, and then activating the output blocking function of the charge control mechanism 27, while the high-voltage synchronous switches 16 and 19 for discharge are provided. By turning on and off the capacitors in synchronization with each other, the charging voltages of the capacitors 3, 4 and --- are connected in series via the discharging high voltage synchronous switches 16, 19 and-, and the series combined pulse height is increased. The voltage is supplied to the high voltage side output terminal 22 and the ground side output terminal 25 of the high voltage pulse power supply 21.
To the load 23, and then the output blocking function is canceled again during the non-conducting period of the discharge high-voltage synchronous switch elements 16, 19, ---, and the pulse voltage shaping capacitors 3, 4,-. Each of them is again oscillated in parallel for high voltage charging, and thereafter, the above operation is periodically repeated to periodically apply the pulse high voltage to the load 23.

In this case, according to the present invention, as shown in FIG. 2, the high voltage side output terminals 7, 8, --- of the high voltage charging power source 9 are connected to the high voltage sides of the respective pulse shaping capacitors 3, 4, ---. The terminals 15 and 18 are connected to the high-voltage synchronous switch 28 for discharging and the high-voltage synchronous switch 28 is connected between the high-voltage side terminal 15 of the first capacitor 3 and the low-voltage side terminal of the second capacitor 4 and its high-voltage impedance element 2. Between the connection points 20, and depending on the number of capacitors, the second and subsequent capacitors 4, −
−− high-voltage side terminal 18, −−− and a low-voltage side terminal of the next capacitor and a connection point between the high-voltage impedance element and the last capacitor.
In the example of this figure, the high-voltage side terminal 18 of the second capacitor 4 may be connected to the high-voltage side output terminal 22 of the high-voltage pulse power supply of the present invention via the last high-voltage synchronous switch 29 for discharging.

The names and functions of the elements with the numbers other than the above in FIG. 2 are the same as those of the elements with the same numbers in FIG.

As the discharge high-voltage synchronous switch used in the present invention, a combination of a rotary spark switch having a fixed electrode and a rotary electrode and an electric motor for rotating the rotary electrode is most suitable, but any other suitable switch element. , Thyristors, GTOs, IGBTs, solid state switching devices such as power transistors, etc. can also be used,
In the method of synchronizing the discharge high-voltage synchronous switches with each other, in the rotary spark switch, an electric motor or a drive mechanism for rotating the rotary shaft of the rotary spark switch is electrically or mechanically synchronized with each other to appropriately adjust each rotational phase. Or by attaching each rotary electrode to a common rotary shaft, and by synchronizing the control signals for turning on / off each solid-state switch with the appropriate phase relationship. Easy to implement.

A charging control mechanism for turning on / off the high-voltage output of the high-voltage power source for charging of the present invention in synchronization with the high-voltage synchronous switch for discharging includes a high-voltage power source for charging and an AC power source and a primary side. To a rectifier on the secondary side and a high-voltage transformer connected to the separate high-voltage side output terminal through the separate protective inductance, and the AC power supply is synchronized with the discharge high-voltage synchronous switch. A control signal for supplying an AC voltage of half a cycle or more to the primary side of the high-voltage transformer only during the non-conduction period Tb, and for stopping the supply of the AC voltage during the conduction period Ta of the discharging high-voltage synchronous switch. Can also be realized by an external control type AC power supply which controls the operation by applying to the control terminal of the AC power supply from the external control section in synchronization with the discharge high voltage synchronous switch and with an appropriate phase.

Alternatively, the charging control mechanism may connect the charging high-voltage power source to an AC power source, a primary side thereof to the secondary side thereof, a secondary side thereof to a rectifier, and a high-voltage side output terminal thereof via the protective inductance. A transformer, the output terminal of the AC power source and the primary side of the high-voltage transformer are connected by an external control switch element pair such as a thyristor connected in antiparallel, and the operating period of the high-voltage switch for discharging is The external control unit does not apply a control signal for turning on the control terminal of the external control type switch element in the conduction period Ta in synchronization with the frequency of the AC power supply in an appropriate phase in synchronization with the frequency. Also, it can be realized by applying the control signal from the external control unit to the control terminal of the external control type switch element during the non-conduction period Tb to turn on the control terminal.

Alternatively, in the charging control mechanism, the charging high-voltage power source is connected to an AC power source, the primary side is connected to this, the secondary side is a half-wave rectifier, and the high-voltage side separate power is output via the protective inductance. It is composed of a high-voltage transformer that can be connected to a terminal, the operating cycle of the discharging high-voltage switch is synchronized with the frequency of the AC power source, and the operating phase thereof is adjusted by an appropriate phase adjusting unit. A half cycle period in which the polarity is in the forward direction of the half-wave rectifier is matched with the switch non-conduction period Tb, and a half cycle period in which the polarity of the secondary voltage is reversed is matched with the switch conduction period Ta. Can be realized by

Alternatively, the charging control mechanism is configured such that the charging high-voltage power supply includes a direct-current high-voltage power supply, and an output end thereof is composed of a fixed electrode and a rotating electrode, and rotates the rotating electrode in synchronization with the discharging high-voltage synchronous switch. Through a charging rotary spark switch equipped with an electric motor, and connected to each of the high voltage side output terminals through a protective inductance corresponding to the number of the pulse shaping capacitors, the discharge high voltage synchronous switch and The rotating electrode of the charging rotary spark switch is phase-adjusted by an appropriate phase control unit and synchronously rotated, so that the non-conducting period of the charging rotary spark switch coincides with the switch conducting period Ta of the discharging high-voltage synchronous switch. In addition, the switch conduction period of the charging rotary spark switch is set to the switch non-conduction period Tb of the discharging high-voltage synchronous switch.
It can also be achieved by matching with.

Alternatively, the charging control mechanism may be configured such that the charging high-voltage power supply is a DC high-voltage power supply and an output terminal thereof via a current limiting impedance formed of a large value of an inductance, a resistance, or a series connection body of both, and the pulse. To the load from the high voltage side output terminal in the conduction period Ta of the discharge high voltage synchronous switch to the load by being connected to each of the high voltage side output terminals via the protective inductances corresponding to the number of molding capacitors. Can also be realized by limiting the current to a value that is small enough to eliminate the follow-up current due to a short circuit or spark.

In order to operate the rotary spark switches constituting the first high-voltage synchronous switch for discharging and the high-voltage spark switch for charging synchronously, the rotary electrodes may be common. Alternatively, at least one of the rotary shafts of the rotary electrodes or the electric motors that rotate the rotary shafts may be common.

There are various construction methods for the rotary electrode of the rotary spark switch, but any suitable one can be used. For example, the electrode pieces may be fixed to the tips of a plurality of conductor supporting arms that are supported by the rotating shaft and that have mutually equal angles of intersection with each other and that have the same length.

Alternatively, a plurality of rod-shaped electrode pieces may be provided on the same circle near the peripheral edge of the insulating disk supported by the rotating shaft.
The disks may be fixedly arranged so as to penetrate through the disks at equal intervals and project from both front and back surfaces of the disks.

The rotating shaft of the rotating electrode is made of a conductor,
The both-end bearings may be supported by the insulator, but the rotary shaft may be made of an insulator, and the both-end bearings may be supported by the insulator.

The rotating electrode may have a cage structure, in which two rotating conductor discs which are spaced apart from each other and can be fixed to a common rotating shaft are provided, and a plurality of discs are provided on the circles near the peripheral portions of both discs. The conductor rods are fixedly supported on the circular plate in parallel with the rotary shaft of the rotary conductor plate so that both ends thereof are equally spaced from each other, and are formed into a cage. It may be configured to be supported by.

The high-voltage pulse power supply of the present invention incorporates any device that applies a pulse high voltage of steep rise and high peak voltage, in particular, a corona electrode system composed of a corona discharge electrode and a grounded counter electrode facing the corona discharge electrode. The present invention can be applied to a device to realize a pulse / corona application device exhibiting a new effect, and such a new pulse / corona application device also constitutes the content of the present invention.

As such a pulse corona application device,
For example, in a casing equipped with a dust-containing gas inlet, a clean gas outlet, and a dust hopper, a corona discharge electrode to be insulated and a dust collection field that is opposed to this and has a ground dust collection electrode sandwiching a gas passage is used as a gas flow field. There is an electrostatic precipitator in which one field or a plurality of fields are arranged in the direction.

By applying a pulse high voltage from the high voltage pulse power source of the present invention between the corona discharge electrode and the dust collecting electrode in at least one field, the conventionally known action of generating reverse ionization peculiar to pulse charging can be achieved. , It can be greatly promoted and its dust collection effect can be greatly improved. This is due to the plasma chemistry by the unique pulse corona generated by the application of the pulse high voltage which is extremely steep and has a remarkably high peak voltage, which is characteristic of the high voltage pulse power supply of the present invention. That is, SO ₂ in the dust-containing gas is converted to SO ₃ to be adsorbed on the dust surface, and the surface layer of H ₂ SO ₄ thus formed significantly lowers the electric resistance to completely prevent reverse ionization. , By increasing the cohesiveness of dust and preventing re-scattering when hammering the dust collecting electrode.

Further, by the plasma chemistry described above, gaseous pollutants such as NO and SO ₂ contained in the dust-containing gas can be decomposed at the same time.

In this case, if necessary, a gas such as ammonia, lime or the like or a powdery additive substance for promoting the plasma collecting action such as the dust collecting action or the decomposition of the gaseous pollutant is appropriately added to the dust-containing gas inlet or the dust-containing gas inlet. It may be injected into the gas upstream thereof.

Further, in this case, a water washing mechanism such as a spray nozzle or an irrigation nozzle is provided to constantly or intermittently provide both the corona discharge electrode or the dust collecting electrode or at least the dust collecting electrode in at least one field of the dust collecting field. It may be washed with water to give a wet field, whereby the reaction products of the plasma chemistry may be washed away with water.

Further, as the above-mentioned pulse corona application device, a corona discharge electrode to be insulated is provided in a casing having an inlet for a gas containing a pollutant gas component and an outlet for a clean gas, and a gas passage is sandwiched opposite to the corona discharge electrode. A corona reactor consisting of a grounded counter electrode is housed and disposed, and a pulsed high voltage having a very steep rise and a remarkably high peak voltage is applied between the corona discharge electrode and the grounded counter electrode by the power supply of the present invention. Then, a strong pulsed corona discharge is generated by sandwiching a gas flow from the corona discharge electrode toward the grounded counter electrode, and the plasma chemistry thereof causes heavy metal vapor such as NO, SO ₂ , dioxin, and mercury, Freon, Halon, trichloroethane, trichlorethylene, toluene, etc.,
There is also a pollutant gas treatment device for decomposing the above-mentioned gaseous pollutants.

Also in this case, if necessary, a gas or a powdery additive substance for promoting / assisting the plasma chemical decomposition treatment action can be appropriately injected into the gas at the gas inlet or upstream thereof. Further, the above-mentioned water washing mechanism for washing at least the grounding counter electrode among the corona discharge electrode and the grounding counter electrode with water constantly or intermittently may be provided.

As the corona discharge electrode used in the above-mentioned pulse corona applying device, a round wire, a square wire, a spiral wire, a strip strip, and a sharp protrusion along a side edge of a support conductor having an elongated rod shape or an angle shape. A corona discharge electrode or the like in which a barbed or strip-shaped conductor having the conductor is arranged, or at least one circular or polygonal conductor plate having a sharp peripheral edge is equidistantly arranged at a right angle to the support conductor. Various composite corona discharge electrodes can be used.

As the above-mentioned pulse corona application device,
Further, a corona discharge electrode for insulation and a treatment corona electrode system composed of a grounded counter electrode arranged opposite to this through a space and an object to be treated are provided. While applying a pulsed high voltage with a very steep rise and a remarkably high peak voltage, while generating a strong pulsed corona discharge from the corona discharge electrode toward the grounded counter electrode through the space and the object to be treated. There is also an object surface treatment apparatus for chemically treating the surface of the object to be processed by the plasma chemical action of the pulse corona discharge by allowing the object to be processed to stand still or passing between the electrodes. Also in this case, an appropriate additive gas or additive that promotes the above-mentioned surface treatment action can be appropriately supplied to the space between both electrodes, if necessary.

Further, as the above-mentioned pulse corona application device, a corona discharge electrode which is disposed in an insulating manner in a casing having a raw material gas inlet, a gas outlet and a produced substance outlet, and a corona discharge electrode which is opposed to the corona discharge electrode via a raw material gas. Incorporating a corona electrode system for pulsed plasma vapor phase synthesis composed of a grounded counter electrode, the above-mentioned rising characteristic of the high-voltage pulse power supply of the present invention between the corona discharge electrode and the grounded counter electrode is extremely steep and remarkable. Apply pulse high voltage with high peak voltage,
A strong pulsed corona discharge is generated from the corona discharge electrode to the grounded counter electrode through the raw material gas, and a plasma chemical action is used to vapor-phase synthesize a special substance such as ceramic ultrafine particles from the raw material gas. There is also a phase synthesizer.

Although the gap distance between the corona discharge electrode and the grounded dust collecting electrode or the grounded counter electrode in the above various pulse corona applied devices is sufficiently large and at least 250 mm or more, it is economically advantageous. By increasing the length of the corona discharge, the number of electrons at the tip of the discharge streamer can be greatly increased, the space charge electric field can be made extremely large, the electron energy can be greatly increased, and the above plasma chemistry is dramatically improved. There is a big advantage over being able to do it. .

The plasma chemistry described above improves as the rise time of the pulsed high voltage is made faster, and as the peak voltage and the repetition frequency are made larger. Especially, the rise time is set to 10 μs or less and the peak voltage is set to 1
More than 00kV and its pulse repetition frequency is 5
When it is set to 0 pps or more, a strong streamer corona is generated in the above-mentioned pulse corona application device to develop between both electrodes, a uniform plasma is generated in the entire gas space between them, and an excellent plasma chemical effect is obtained. Is effective in obtaining.

The polarity of the corona discharge used in the above-mentioned pulse corona application device can be either positive or negative, but in many cases, the positive polarity is preferable because a better plasma chemical effect can be obtained.

[0043]

According to the present invention, the output current blocking function of the charge control mechanism 27 is released and each of the pulse voltage shaping capacitors 3, 4, --- is vibrated by series resonance through its high impedance element. High voltage charging is performed in parallel to a sufficiently high voltage value up to about twice the output voltage of the high voltage charging power source 9.

Next, while operating the output blocking function of the charge control mechanism 27, the respective high voltage synchronous switch elements 16, 19, --- are synchronously turned on and off during the period, and the capacitors 3, 4,-. The charging voltage of −− is connected in series through the high voltage synchronous switches 16 and 19 for discharging, and the high voltage of the series synthesized pulse is output to the high voltage side output terminal 22 and the ground side output terminal of the high voltage pulse power source 21. It is applied to the load 23 from 25.

Then, the high-voltage synchronous switch elements 16 and 1
9, the output blocking function is canceled again during the non-conduction period, and the pulse voltage shaping capacitors 3, 4,
Each of them is again oscillatingly charged in parallel in high voltage, and thereafter, the above operation is periodically repeated to periodically apply a pulse high voltage to the load 23.

When the series combined pulse high voltage is generated, the pulse voltage is applied to the inside of the high-voltage charging power source as a reverse voltage due to the blocking action of the protective inductance, and is not destroyed. Further, since each of the pulse shaping capacitors is independently charged by the high voltage charging power source via the respective separate high voltage side output terminals and the protective inductance, the pulse shaping capacitors are respectively charged during the conduction period of the discharging high voltage synchronous switch. Of the capacitor is not short circuited through the switch.

[0047]

FIG. 3 shows an embodiment of the high voltage pulse power supply and pulse corona application device of the present invention. Reference numeral 30 is a commercial frequency AC power source, and its DC output voltage is transferred between terminals 34 and 35 of the tank condenser 33 through an appropriate voltage adjusting mechanism 31 such as an induction voltage regulator, a slider, a phase control thyristor switch and a double wave rectifier 32. And then charge it. 36 is a transistor, thyristor, GTO, I
Appropriate external control type solid state switching devices 37, 3 such as GBT
In the bridge consisting of 8, 39, 40, the control terminals 37a, 40a of the elements 37, 40 are connected to the first of the control unit 42 (corresponding to the charging control mechanism 27 in FIG. 1) via the common lead wire 41.
It is connected to the control signal output terminal 43, and the control terminals 38 a and 39 a of the elements 38 and 39 are connected to the second control signal output terminal 45 of the control unit 42 via the common lead wire 44. Thus, the elements 31 to 45 are housed in one casing 46 to form an external control type AC power supply 47.

Reference numeral 48 is a high-voltage transformer, the primary side of which is connected to the output terminals 49 and 50 of the bridge 36, and the secondary side of which is through a double-wave rectifier 51 and its high-voltage side terminal 52.
(In this example, the positive polarity side) From the protective inductance 5, 6
Is connected to two high-voltage side output terminals 7 and 8 via a double-sided rectifier 51. It is connected to the ground side output terminals 10 and 11. Elements 5, 6 and 48 to 53 are housed in one oil tank 54 to form a high voltage transformer section 55. The external control type AC power source 47 and the high voltage transformer section 55 constitute the entire high voltage charging power source 9.

Reference numerals 3 and 4 denote capacitors for pulse shaping, and the ground side of each is connected to a common ground conductor 12 via connection points 17 and 20 and high impedance elements 1 and 2 composed of a series connection body of an inductance or an inductance resistance. The ground side output terminals 10 and 1 which are connected at 13 and 14 and are short-circuited outside the high voltage charging power source 9 in this example.
Connected to 1. The high voltage side terminals 15 and 18 of the capacitors 3 and 4 are connected to the high voltage side output terminals 7 and 8 of the high voltage charging power source 9, respectively.

Reference numerals 56 and 57 denote rotary spark switches corresponding to the discharge high-speed synchronous switches 16 and 17, respectively, in FIG. 1, and a pair of fixed electrodes 58 and 59 of 56 are respectively the high-voltage side terminal 15 of the capacitor 3 and a common ground. It is connected to the conductor 12. Further, 56 rotating electrodes 60 are, in this example, 4 pieces, etc. which radially protrude at an angle of 90 degrees from each other from an annular conductor 62 fitted and fixed to an insulator rotating shaft 61 such as a vertical ceramic shaft. It is composed of four electrode pieces 64 fixed to the tip of a long conductor arm 63.

A pair of fixed electrodes 6 of the rotary spark switch 57
5 and 66 are high-voltage side terminals 1 of the condenser 4, respectively.
8. It is connected to the connection point 17. Further, the rotary electrode 67 of 57 is fixed to the tips of four equal-length conductor arms 69 which radially project from adjacent annular conductors 68 fitted and fixed to the same insulator rotary shaft 61 at an angle of 90 degrees to each other. It is composed of four electrode pieces 70 formed.

The rotational phase angles of the electrode pieces 64, 70 of the rotary electrodes 60, 67 with respect to the fixed electrodes 58, 59 and 65, 66 of the spark switches 56, 57 are adjusted to be equal. Therefore, both spark switches 56 and 57 perform on / off operation in perfect synchronization,
The switch conducting period and the switch non-conducting period are completely coincident with each other.

The insulator rotary shaft 61 has a vertical support insulator 73 at its lower end 71 via a thrust bearing 72.
Is rotatably supported by the horizontal support insulator 76 via a bearing 75 near its upper end 74, and is directly connected to the rotating electric motor 77 at its upper end 74.

Reference numeral 78 denotes the rotary shaft 6 near the upper end 64.
A rotating phase angle detecting disc having four small holes at equal intervals in the periphery fitted in 1 is fitted with an optical sensor 79 having a light transmitting unit and a light receiving unit sandwiching the circumferential circle, The rotary phase angle detector 80 is composed of 78 and 79, and the rotary spark switch 5
The rotation phase angle θ of the electrode piece of the rotating electrode with respect to each of the fixed electrodes 6 and 57 is detected, and when this takes a predetermined value θo, control of the external control type AC power supply 47 from the output terminal 81 via the optical fiber 82. A trigger signal is sent to the input terminal 83 of the section 42.

The trigger signal is further subjected to appropriate phase adjustment inside the control unit 42 so that the value of the rotation phase angle θ is the electrode piece of the rotary electrode with respect to the fixed electrode of each of the rotary spark switches 56 and 57. At a time T1 within a period Tb (see FIG. 4) in which the distance between them is sufficiently large that they are not electrically connected by sparks (see FIG. 4).
Control signal from the external control type solid state switch elements 37 and 40 of the bridge 36 through the conductor 41.
a, 40a supply, 37, 40 on and tank
Terminal 34 of Capacitor 33-Solid State Switching Element 37-
Terminal 50-Primary winding of the high voltage transformer 38-Terminal 49-Solid state switching element 40-Tank condenser 33 Terminal 3
5 through the transformer 4 within the switch non-conduction period Tb.
A positive half-cycle current I ₊ (FIG. 4) is passed through the primary winding of No. 8.

As a result, the charging voltage of the secondary winding of the high-voltage transformer 48 from the high-voltage side output terminals 7 and 8 and the ground-side output terminals 10 and 11 via the double-wave rectifier 51 is the capacitor 3 and the high impedance element 1. A voltage that is applied to the series connection body and the series connection body of the capacitor 4 and the high impedance element 2 and is sufficiently higher than the output voltage of the rectifier 51 (about a maximum of 2 times) oscillatingly by resonance charging of the capacitors 3 and 4, respectively. Charge to V positive.

Next, at the time t2 of sparks in the conduction period Ta following Tb, sparks are generated in the rotary spark switches 56, 57 to make them conductive, and the high voltage pulse output terminals 22, 25 cause the high voltage side of the load 23. A high-voltage pulse voltage having a steep rise and an extremely high peak voltage is applied between the input terminal 24 and the ground-side input terminal 26 with the former having a positive polarity.

Next, when the rotation phase angle θ reaches θo again, the optical sensor 82 is connected to the optical fiber 82 from the output terminal 81 of the optical sensor 79.
A trigger signal is sent to the input terminal 83 of the control unit 42 of the external control type AC power source 47 via this, and this time at the time point T1 ′ within the non-conduction period Tb (FIG. 4) following the Ta, the control unit 42 A control signal is supplied from the second control signal output terminal 45 to the control terminals 38a and 39a of the external control type solid state switch elements 38 and 39 of the bridge 36 via the lead wire 44, and 3
Turn on 8, 39.

This time, terminal 3 of the tank condenser 33
4-solid switch element 38-terminal 49-high voltage transformer 3
8 through the primary winding-terminal 50-solid state switching element 39-tank capacitor 33 terminal 35 and within the non-conduction period Tb, the negative winding half-cycle current in the reverse direction to the primary winding of the transformer 48. I_ (Fig. 4) flows, and the high voltage transformer 4 as before
From the secondary winding of 8 through the double-wave rectifier 51 to the high-voltage side output terminals 7 and 8 and the ground-side output terminals 11 and 11 'from the series connection of the capacitor 3 and the high impedance element 1, and the capacitor 4 and the high impedance element. Even if the charging voltage is applied to the two series-connected bodies, the capacitors 3 and 4 are positively charged again to the voltage V sufficiently higher than the output voltage of the rectifier 51 (nearly twice the maximum) by the resonant charging.

Next, at the spark timing t2 'within the conduction period Ta following this Tb, the rotary spark switches 56 and 57 are caused to generate sparks again, and the high voltage side input terminal 2 of the load 23 is again generated.
4 and the ground-side input terminal 26 are applied again with a high-voltage pulse voltage having a steep rise and an extremely high peak voltage with the former having a positive polarity.

In this case, if the connections of the terminals 7 and 8 and the terminals 10 and 11 are exchanged as needed, the polarity of the high-voltage pulse power supply applied to the load can be reversed, which is convenient. However, when it is not necessary to reverse the polarity, the protective inductances 5'and 6'can be omitted.

84 is a pulse corresponding to the load 23 in FIG.
It is a corona application device, and is a pollutant gas treatment device in this example.
85 is the corona reactor with a diameter of 50-100 cm
The grounded vertical cylindrical electrode 86 and the corona discharge electrode 87 insulated along the central axis. There is an inlet 88 for the gas to be treated containing gaseous pollutants below it, an outlet 89 for the treated gas that has been cleaned above, and a hopper 90 at the bottom, which communicates airtightly through a rotary valve 91 to an exhaust pipe 92. To do.

The corona discharge electrode 87 is constructed by arranging and fixing a large number of disc electrode pieces 94 having sharp edges on a conductor pipe 93 in a skewered manner, and the upper end of 93 is the ceiling 95 of the corona reactor 85. Insulated bushing 96 mounted on
Projecting to the outside of the reactor via the
Is connected to the high-voltage side output terminal 22 of the high-voltage pulse power source. The lower end of 93 is supported and fixed by a support insulator 97. The grounded vertical cylindrical electrode 86 is connected to the grounded output terminal 25 of the high-voltage pulse power supply through the grounded input terminal 26.

Reference numeral 98 is a mechanical vibration device attached to the outer wall of the vertical cylindrical electrode 86, and mechanical vibration is applied to this to form a layer of dust and fine particles of plasma chemical reaction products deposited on the inner wall of 86. It is peeled off, dropped into the lower hopper 90 and collected there.

Reference numeral 99 denotes a tank of a gaseous or powdery additive substance such as ammonia or lime, which has a function of promoting and assisting the plasma chemical reaction, and the additive substance is piped into the pipe 10.
It is injected into the gas at the gas inlet 88 through the nozzle 0 and the nozzle 101.

Between the corona discharge electrode 87 and the grounded vertical cylindrical electrode 86, the rising characteristic of the present invention from the output terminals 22 and 25 of the high-voltage pulse power source is extremely steep and peaks so that the former has a sex polarity. A periodic pulse high voltage having a remarkably high voltage is applied, and the inner wall 10 of the grounded vertical cylindrical electrode 86 is passed from each peripheral edge of the plurality of disc electrode pieces 94 of the corona discharge electrode 87.
A strong positive streamer corona discharge progresses toward 2 and fills the corona reactor space 85 between both electrodes with a uniform discharge plasma, where a strong plasma chemical reaction is generated.

When a gas containing dust and gaseous pollutants is introduced into the corona reactor space 85 through the inlet 88, the gas intersects the above-mentioned strong positive streamer corona discharge between the electrodes and the space between the electrodes. , During which the gaseous pollutants are decomposed under the action of a strong plasma chemical reaction and converted into fine-particle reaction products by the action of the additive injected from the nozzle 101.

The fine particle reaction product is positively charged by the positive ions from the positive corona along with the dust, and the inner wall 1 of the grounded vertical cylindrical electrode 86 is caused by the action of electrostatic force.
02, and the mechanical vibration device 9 is deposited there.
It is peeled off by 8 and falls downward, is collected in the hopper 90, and is airtightly discharged to the outside through the rotary valve 91 and the discharge pipe 92.

The cleaned gas is discharged from the outlet 89 to the outer stack or a post-treatment plant such as a bag filter, a scrubber, a catalyst tower and the like. In this case, the upstream portion of the gas inlet 88 or the grounded vertical cylindrical electrode 86
A spray nozzle is provided at the bottom or the top of the corona reactor space 85, and water, an appropriate additive (soda,
It is also possible to spray water containing lime or the like) to promote the plasma chemistry described above, and to promote removal of dust and reaction products by wet electrostatic precipitator.

[0070]

As described above, according to the present invention, at least two or more pulse shaping capacitors are respectively connected with high impedance elements having an inductance property, and a plurality of high-speed synchronous switches for discharge are charged by resonance during resonance. Each of the capacitors is charged in parallel to increase its charging voltage, and then the capacitors are connected in series with the discharging high-speed synchronous switch and applied to the load while blocking the charging function. A remarkably high pulse high voltage can be easily obtained.

Further, since each of the capacitors is charged through a separate protective inductance, the capacitors are not short-circuited even when the discharging high-speed synchronous switch is turned on, and the generated pulse high voltage is generated. Is not blocked by the protective inductance and is not reversely applied to the high-voltage charging power supply for charging the capacitor and destroys it, and further short-circuit current or follow-up current may be generated from the high-voltage charging power supply to the load. Absent.

Since the periodic pulse high voltage, which is extremely steep and has a remarkably high peak voltage, which is unique to the present invention, is applied between the corona discharge electrode and the counter electrode of the pulse corona application device, an extremely strong pulse is applied from the former to the latter.・ Because corona discharge is generated periodically and the plasma chemistry that is remarkably excellent is used, a pulse corona application device such as dust collection, pollutant gas treatment, surface treatment, vapor phase synthesis etc. with extremely excellent performance Can be realized.

[Brief description of drawings]

FIG. 1 is a diagram showing the principle and structure of a high-voltage pulse power supply of the present invention.

FIG. 2 is a diagram showing the principle and structure of another configuration of the high-voltage pulse power supply of the present invention.

FIG. 3 is a diagram showing one embodiment of a high voltage pulse power supply and a pulse corona application device of the present invention.

FIG. 4 is a diagram showing a time change of a current flowing through a primary winding of the high voltage transformer in FIG. 3 and a voltage across both capacitors.

[Explanation of symbols]

 1, 2 High impedance element 3, 4 Pulse forming capacitor 5, 6 Protective inductance 9 High voltage charging power supply 12 Common ground conductor 16, 19, 28 Discharge high voltage synchronous switch 21 High voltage pulse power supply 23 Load 27 Charge control mechanism 30 Commercial frequency AC power supply 31 Voltage adjusting mechanism 32 Double wave rectifier 33 Tank condenser 36 External control type solid switching element bridge 37, 38, 39, 40 External control type solid switching element 42 Control unit 48 High voltage transformer 51 Double wave rectifier 56, 57 rotation Spark switch 58, 59, 65, 66 Fixed electrode 60, 67 Rotating electrode 61 Insulating rotary shaft 73, 76 Support insulator 77 Electric motor 78 Rotation phase angle detection disc 79 Optical sensor 82 Optical fiber 84 Pollutant gas treatment device 85 Corona reactor 86 Vertical Type Cylindrical Electrode 87 Corona Release Electrode 88 Treated gas inlet 89 Treated gas outlet 90 Hopper 91 Rotary valve 93 Conductor pipe 94 Disc electrode piece 96 Insulating bushing 97 Support insulator 98 Mechanical vibration device 99 Additive substance tank 100 Pipe 101 nozzle

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Internal reference number FI technical display location B03C 3/40 C 3/66

Claims (26)

[Claims] 1. At least two pulse voltage shaping capacitors each having one end grounded via a high-impedance element composed of an inductance or a series connection body of an inductance and a resistance, and each of the capacitors has a different protective inductance. And a high-voltage charging power supply for separately charging the capacitor through separate output terminals, and connecting each of the high-voltage side output terminals to the non-grounded side terminal of the capacitor, and grounding the high-voltage charging power supply. The side output terminal is connected to the ground side terminals of the high impedance elements of the capacitors via a common ground conductor, and between the non-ground side terminal of the first capacitor of the pulse voltage shaping capacitors and the common ground conductor. To intervene to make both of them conductive for a short period of time and then immediately return to the non-conductive state A first high-voltage synchronous switching device for discharging having a high-speed on / off function is provided, and between a connection point between the ground side terminal of the first capacitor and its high impedance element and a non-ground side terminal of the second capacitor. The second high-voltage synchronization for discharge, which intervenes to have the same function as that of the first high-voltage synchronous switching device for discharge and which turns on and off between the connection point and the non-ground side terminal of the second capacitor in synchronization with this. According to the number of capacitors, a switching element is provided between the grounding side terminal of the first or less capacitor and the connection point between the high impedance elements and the non-grounding side terminal of the second or less capacitor. First to intervene for the above discharge
It has the same function as the high-voltage synchronous switch element, and has a second or lower high-voltage synchronous switch element for discharge that turns on and off between the two synchronously with it, and the ground side terminal of the last capacitor and its Connect the connection point between the high impedance elements as the high voltage side output terminal and connect it to the high voltage side input terminal of the load, and use the ground terminal of the high impedance element on the ground side of the last capacitor as the ground side output terminal to ground the load. The output from each output terminal of the high-voltage charging power supply is blocked during the switch conduction period, which is connected to the side input terminal and after the above-mentioned high-voltage synchronous switching elements for discharge are turned on at least until the off function is restored. To prevent charging of each of the pulse voltage shaping capacitors, and to prevent the output blocking device during the non-conduction period of the discharging high voltage synchronous switching device. And the charging control mechanism for charging each of the pulse voltage shaping capacitors is provided in the high-voltage charging power source, whereby the output blocking function of the charging control mechanism is provided during the switch non-conduction period. Then, each of the pulse voltage shaping capacitors is oscillated and charged in parallel to a high voltage value up to about twice the output voltage of the high voltage charging power source in a vibrational manner, and then the charge control mechanism of the charge control mechanism is charged during the switch conduction period. While operating the output blocking function, the discharge high-voltage synchronous switch elements are synchronously turned on and off during that period, and the charging voltage of each capacitor is connected in series via each discharge high-voltage synchronous switch, and then the series. The combined pulse high voltage is applied to the load from the high-voltage side output terminal and the ground-side output terminal of the high-voltage pulse power source, and then the high switch voltage for each discharge is applied. The output blocking function is released again during the switch non-conduction period of the element, and each of the pulse voltage shaping capacitors is charged again in high voltage in an oscillating parallel manner, and thereafter the above operation is periodically repeated to periodically load the load. A high-voltage pulse power supply, characterized in that a pulsed high voltage is applied to. 2. At least two pulse voltage shaping capacitors each having one end grounded via a high-impedance element composed of an inductance or a series connection body of an inductance and a resistance, and each of the capacitors has a different protection inductance. And a high-voltage charging power source for separately charging the capacitor via separate output terminals, and connecting each of the high-voltage side output terminals to the non-grounded side terminal of the capacitor, and the ground side of the high-voltage charging power source. The output terminal is connected to the ground side terminals of the high impedance elements of the capacitors via a common ground conductor, and the non-ground side terminal of the first capacitor and the ground side terminal of the second capacitor of the pulse voltage shaping capacitors And the connection point between the high impedance element and It has a first high-voltage synchronous switching device for discharge, which has a high-speed on / off function for immediately returning to a non-conducting state after conducting for a short time. By interposing between the non-grounded side terminal of the capacitor and the connection point between the grounded side terminals of the second and lower capacitors and their high impedance elements, the same function as the first high voltage synchronous switching element for discharging is provided. In addition, it has a first or lower high-voltage synchronous switching element for discharge that turns on and off between the two in synchronization with this, and connects the non-ground side terminal of the last capacitor and the high-voltage output terminal of the high-voltage pulse power supply. The first high-voltage synchronous switching device for discharging has the same function as that of the first discharging high-voltage synchronous switching device, and the last high-voltage synchronous switching device for discharging is turned on and off in synchronization with the first high-voltage synchronous switching device. Connect the high-voltage output terminal of the pulse power source to the high voltage side input terminal of the load, to connect the ground side terminal of the second capacitor after outermost to the ground-side input terminal of the load as a ground side output terminal of the high voltage pulse power supply,
And after the ON operation of the high-voltage synchronous switching element for each discharge,
At least during the switch conduction period until the off function is restored, the output from each output terminal of the high-voltage charging power supply is blocked to prevent charging to each of the pulse voltage shaping capacitors, and the discharging for each The high-voltage charging power supply is equipped with a charging control mechanism for releasing the output blocking function during the non-conduction period of the high-voltage synchronous switching device and charging each of the pulse voltage shaping capacitors. During the switch non-conduction period, the output blocking function of the charge control mechanism is released to vibrate each of the pulse voltage shaping capacitors in parallel to a high voltage value up to about twice the output voltage of the high voltage charging power source. Then, during the switch conduction period, the output blocking function of the charge control mechanism is activated, while the discharge high-voltage synchronous switches are activated. The switching elements are turned on and off synchronously, the charging voltage of each capacitor is connected in series via each discharging high-voltage synchronous switch, and the series synthesized pulse high voltage is output to the high-voltage output terminal of the high-voltage pulse power supply and ground. Applied to the load from the side output terminal, and then the output blocking function is released again during the switch non-conduction period of each of the discharge high voltage synchronous switch elements, and each of the pulse voltage shaping capacitors is charged with vibration again at high voltage, Thereafter, the above-mentioned operation is repeated cyclically to apply a pulsed high voltage to the load periodically. 3. An external control type AC power supply which alternately supplies an AC output voltage of half a cycle or more from an output terminal every time the high voltage charging power supply supplies a control signal from a control unit to the control terminal, and the AC power supply. A high-voltage transformer having a primary side connected to the output terminal of and a secondary side connected to a double-wave rectifier and connected to different high-voltage side output terminals via different protective inductances for each capacitor, An external device having a function of supplying the control signal from the control signal output terminal to the control terminal of the external control type AC power supply after phase adjustment by the control unit being supplied with a trigger signal to the signal input terminal. This is a trigger type control unit, which constitutes the above-mentioned charge control mechanism, and the discharge high-voltage synchronous switch element is a fixed electrode and a rotary spark switch composed of a rotary electrode and a rotary electrode. A rotating electric motor, a fixed electrode in the vicinity of the rotary electrode, and a rotary phase angle detector for detecting the rotary phase angle of the rotary electrode, and the external trigger type control using the detection signal of the detector as a trigger signal. Of the external control type AC power supply during the switch non-conduction period of the rotation phase angle where the fixed electrode and the rotating electrode are separated by a distance such that no spark is generated between them. The control signal is supplied to the control terminal to generate its output AC voltage, which is then supplied to the primary side of the high-voltage transformer, and from the secondary side thereof, the double-wave rectifier, the separate protective inductance, and the separate high-voltage. A high-voltage DC charging voltage is supplied to both ends of each of the pulse-forming capacitor and the connection body of the high-impedance element via the side output terminal to charge these capacitors in an oscillating manner, and then to the fixed electrode. The control signal is not supplied to the control terminal of the external control type AC power supply during the switch conduction period of the rotation phase angle at which the distance between the rotating electrodes is sufficiently close to generate a spark between them, and the output voltage is not generated. 3. Therefore, the high-voltage pulse power supply according to claim 1, wherein the function of charging the capacitor from the output terminal of the high-voltage charge power supply is blocked. 4. The high-voltage charging power source is an alternating-current power source, the primary side is connected to the alternating-current power source, and the secondary side is connected to the separate high-voltage side output terminal via a half-wave rectifier and the separate protective inductance. And a synchronous rotary spark switch having a fixed electrode and a rotary electrode that rotates in synchronization with the frequency of the output AC voltage of the AC power supply, and a motor for rotating the rotary electrode. And in the AC half-cycle section such that the polarity of the secondary voltage of the high-voltage transformer is in the forward direction of the rectifier, the distance between the fixed electrode and the rotating electrode is sufficiently separated and a spark is generated between them. In the AC half-cycle section in which the half-wave rectifier is in the blocking state with no polarity and the opposite polarity, the distance between both electrodes is sufficiently close to generate a spark between them. The rotating electrode with respect to the fixed electrode 3. The charging control mechanism can be realized by providing a phase adjusting unit that sets a phase between the rotation phase angle of the battery and the AC voltage.
The high-voltage pulse power supply according to any one of 1. 5. The high-voltage charging power source is an AC power source, the output side of the AC power source is connected to the primary side via a series-parallel connected external control type switching element pair, and the secondary side is a dual-wave rectifier and the separate side. Of a high voltage transformer that connects the separate high voltage side output terminals via a protective inductance of the high voltage synchronous switch, and the high voltage synchronous switch for discharging is composed of a fixed electrode and a rotating electrode that rotates in synchronization with the frequency of the AC power supply. A rotary spark switch and an electric motor that rotates the rotary electrode, and has a control unit that supplies a conduction control signal to each control terminal of the series-parallel connected external control type switch element pair. In synchronization with the frequency of the output AC voltage of the AC power supply, at least half cycle of the output voltage is output, and the externally controlled switching elements connected in series and parallel are alternately guided within a period of at least half cycle or more. An external control type switch connected in series and parallel during the non-conduction period, in which a control signal for passing through is alternately supplied to the fixed electrode and the rotary electrode so that the distance between them is not enough to generate a spark between them. A control signal is supplied to one of the elements to supply a half-cycle AC voltage to the input side of the high-voltage transformer, and a DC high voltage for charging generated in a double-wave rectifier on the output side is supplied to the separate protective inductance and The pulse-forming capacitor and its high-impedance element are connected to both ends of each of them in series via separate high-voltage output terminals to charge them, and the fixed electrode and the rotating electrode are sufficiently close to each other so that they are charged. No control signal is supplied to the external control type switching elements connected in series and parallel during the switch conduction period for generating a spark, and the charging DC voltage is applied to the separate high voltage side output terminals of the high voltage transformer. The charging control mechanism can be realized by providing a phase adjusting unit that sets a phase between a rotation phase angle of the rotating electrode with respect to the fixed electrode and an AC voltage so that a voltage is not generated. The high-voltage pulse power supply according to any one of 1 or 2. 6. A rotary spark switch composed of a fixed electrode and a rotary electrode, wherein the high-voltage charging power source has a primary side connected to an AC power source and a secondary side rotating in synchronization with a rectifier and the discharging high-voltage synchronous switch. A high-voltage synchronous switch for charging composed of an electric motor that rotates the rotary electrode, and a high-voltage DC power source connected to the separate high-voltage side output terminals through the separate protective inductances, and the separate high-voltage side outputs. A terminal is connected to the high voltage side terminal of each of the pulse voltage shaping capacitors, and a phase adjusting unit for adjusting the rotation phase of the rotating electrode of the charging high voltage synchronous switch and the rotating phase of the rotating electrode of the discharging high voltage synchronous switch. The high-voltage synchronous switching device for charging is provided at least during the switch conduction period after the on-operation of each high-voltage synchronous switching device for discharging until the off function is restored. The fixed electrode and the rotary electrode of the switch are set to a sufficiently large value so that a spark is not generated between the fixed electrode and the rotary electrode, so that the output from the separate high voltage side output terminals of the high voltage charging power source is blocked and the pulse is generated. In addition to blocking charging to each of the voltage forming capacitors, during the switch non-conduction period of each discharging high voltage synchronous switch element, the fixed electrode and the rotating electrode of the above charging high voltage synchronous switch are separated from each other by sparks. 3. The pulse voltage shaping capacitors are respectively charged from the separate high-voltage side output terminals by setting a small value as generated. The high-voltage pulse power supply described in the item. 7. The high-voltage charging power source is a high-voltage DC power source,
The discharge high-voltage synchronous switch element is composed of a rotary spark switch composed of a fixed electrode and a rotary electrode and a rotary electrode rotating electric motor, and the charge control mechanism has a high-voltage side output terminal of the high-voltage power supply and a high voltage of the voltage forming capacitor. The high-voltage pulse power supply according to claim 1, wherein the high-voltage pulse power supply has a current limiting impedance to be inserted between the side terminal and the side terminal. 8. The first high-voltage synchronous switching device for discharge, the second high-voltage synchronous switching device, --- and each rotary spark switch constituting the high-voltage spark switch for charging are provided with their own independent fixed electrodes. The high-voltage pulse power source according to any one of claims 3 to 7, which is a rotary spark switch having a common rotary electrode. 9. The first high-voltage synchronous switching device for discharging, the second high-voltage synchronous switching device, --- and each rotary spark switch constituting the high-voltage spark switch for charging has its own fixed electrode and rotary electrode. A rotary spark switch provided, wherein the rotary spark switch has at least one of a rotary shaft of each rotary electrode or an electric motor for rotating each rotary electrode in common. The high-voltage pulse power supply according to any one of 1. 10. The rotating electrode is composed of an electrode piece fixed to the tip of a plurality of conductor supporting arms having the same length and having mutually equal angles of intersection supported by a rotating shaft. The high-voltage pulse power supply according to any one of 1 to 9. 11. The front surface and the back surface of the disk, wherein the rotary electrode penetrates the disk on the same circle near the peripheral edge of the insulator disk supported by the rotary shaft at equal intervals to each other. 10. A plurality of rod-shaped electrode pieces fixedly arranged so as to project more, comprising a plurality of rod-shaped electrode pieces.
The high-voltage pulse power supply described in the item. 12. The high-voltage pulse power supply according to claim 3, wherein the rotary shaft of the rotary electrode is made of a conductor, and both end bearings are supported by an insulator. . 13. The high-voltage pulse power source according to claim 3, wherein the rotary shaft of the rotary electrode is made of an insulating material. 14. The high-voltage pulse power supply according to claim 13, wherein the rotary shaft of the rotary electrode is made of an insulator, and both end bearings are supported by insulating glass. 15. The rotating electrode comprises two rotating conductor discs,
It is composed of a plurality of conductor rods which are adjacent to each other on the circle near the peripheral edge portion thereof and are supported and fixed to each other at equal intervals and are arranged in a cage shape in parallel with the rotation axis of the rotating conductor plate so as to be spaced apart from each other. ,
10. Both ends bearings of the rotating conductor disk are supported by an insulator, and the rotating conductor disk is supported by the insulator.
The high-voltage pulse power supply according to any one of 4 to 4. 16. The high-voltage side output terminal of the pulse high-voltage power supply according to claim 1 is housed in a casing equipped with a dust-containing gas inlet, a clean gas outlet and a dust hopper. In addition, at least one of the electrostatic precipitators comprising a corona discharge electrode to be insulated and at least one field in the gas flow direction, the dust collection field including a grounded dust collection electrode provided opposite to the corona discharge electrode with a gas passage interposed therebetween. Connected to the corona discharge electrode of the field, the ground side output terminal of the high-voltage pulse power supply is connected to the dust collection electrode of this field,
And, if necessary, a gas or a powdery additive substance for facilitating the dust collecting action or the plasma chemical action by the pulse corona is appropriately injected into the gas at the dust-containing gas inlet or the upstream thereof. Type electric dust collector. 17. The electrostatic precipitator according to claim 16, wherein a water rinsing mechanism for rinsing at least one of the dust collecting electrodes of at least one of the dust collecting fields is constantly or intermittently provided as a wet field. apparatus. 18. The high-voltage side output terminal of the pulse high-voltage power supply according to any one of claims 1 to 15 is housed in a casing having an inlet for gas containing pollutant gas components and an outlet for clean gas. A ground side output terminal of the high-voltage pulse power source, which is connected to the corona discharge electrode of the corona reactor, which is composed of an insulated corona discharge electrode and a grounded counter electrode provided opposite to the insulated corona discharge electrode. Is connected to the grounded counter electrode to generate a strong pulsed corona discharge from the corona discharge electrode toward the grounded counter electrode by interposing a gas flow, and the plasma chemical action decomposes the polluted gas component. At the same time, if necessary, a gas or a powdery additive substance for promoting / assisting the plasma chemical analysis treatment action is appropriately injected into the gas at the gas inlet or upstream thereof. And pollution gas treatment equipment. 19. The polluted gas treatment device according to claim 18, further comprising a water washing mechanism for washing at least the grounding counter electrode among the corona discharge electrode and the grounding counter electrode at all times or intermittently. 20. The corona discharge electrode comprises a strip-shaped or strip-shaped conductor having a sharp protrusion along a side edge of an elongated support conductor. The apparatus according to item 1. 21. The corona discharge electrode is constituted by at least one circular or polygonal conductor plate having a sharp peripheral edge which is arranged and fixed at a right angle on the elongated support conductor at a right angle thereto. Device according to any one of claims 16 or 19. 22. Any one of claims 1 to 15
The corona of the corona electrode system for surface treatment, which comprises a corona discharge electrode for insulating the high-voltage side output terminal of the pulsed high-voltage power supply according to the paragraph, and a grounded counter electrode arranged opposite to this via a space and an object to be treated. A strong pulse corona connected to a discharge electrode, and a ground side terminal of the high-voltage pulse power supply is connected to the grounded counter electrode to form a space from the corona discharge electrode toward the grounded counter electrode and the object to be processed. While causing a discharge,
The surface of the object to be treated is chemically treated by the plasma chemistry of the pulsed corona discharge by leaving or passing the object to be treated between the electrodes, and a space between the electrodes is appropriately set as necessary. An object surface treatment apparatus, characterized in that a suitable additive gas or additive that promotes the above surface treatment action is supplied to. 23. Any one of claims 1 to 15
The high-voltage side output terminal of the pulse high-voltage power supply according to the paragraph (3) is a corona discharge electrode that is disposed in an insulating manner in a casing having a source gas inlet, a gas outlet, and a product outlet, and a ground that is disposed opposite to this via a source gas. Pulse consisting of the opposite electrodes of
The source gas is connected to the corona discharge electrode of the corona electrode system for plasma vapor phase synthesis, the ground side terminal of the high-voltage pulse power source is connected to the ground counter electrode, and the source gas is directed from the corona discharge electrode toward the ground counter electrode. A vapor phase synthesizer characterized in that a strong pulse corona discharge is generated via a gas and a special substance such as ultrafine ceramic particles is vapor-phase synthesized from the above-mentioned raw material gas by the plasma chemical action. 24. The apparatus according to claim 16, wherein a distance between the corona discharge electrode and the ground dust collecting electrode or the ground counter electrode is 250 mm or more. 25. The rising time of the pulse high voltage supplied from the high voltage side output terminal and the ground side output terminal of the high voltage pulse power supply is set to 10 μs or less, and the pulse peak voltage thereof is set to 10 μs.
0 kV or more, and the pulse repetition frequency is 50
25. By setting the pps or more, a strong streamer corona is generated to propagate between both electrodes, and a uniform plasma is generated in the entire gas space between them, 25. The apparatus according to item 1. 26. The high voltage pulse power supply of the high voltage side output terminal is provided with a high voltage side pulse having a positive polarity with respect to the ground side output terminal.
The apparatus according to any one of 5 to 5.