JP2681633B2 - Pulse high voltage power supply - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention applies a periodic pulse high voltage having a very short time width to a high voltage load such as an electrostatic precipitator by superimposing it on a direct current high voltage. The present invention relates to a pulsed high voltage power supply for doing so. However, the pulsed high voltage power supply of the present invention is not limited to the electrostatic precipitator, but any high voltage application device to be driven by superimposing the pulsed high voltage on the DC high voltage, for example, an ozone generator using pulsed corona discharge, a pulsed device.・ It can also be used as a device for removing harmful gases such as SO2, NO, NO2, Hg, dioxins, and furans from combustion waste gas that uses corona discharge, or a surface activation device for plastic that uses pulsed corona discharge. I can. [Prior Art] Conventionally, as an electrode of this type, a DC high voltage is applied in advance to a high voltage load such as an electrostatic precipitator by an independent DC high voltage power source, and the DC voltage is superimposed on the DC high voltage to generate a separate DC voltage. A method has been used in which a periodic pulsed high voltage is applied to the high voltage load via a coupling capacitor from an independent pulsed high voltage power supply equipped with a separate high voltage power supply. [Problems to be Solved by the Present Invention] In the above-mentioned conventional technique, other than the DC high-voltage power supply for directly applying the DC high voltage to the high-voltage load, the pulse high-voltage power supply also has the following constituent elements: It is necessary to provide a separate DC high-voltage power supply having an output voltage comparable to that of the DC high-voltage power supply, which causes a problem that the cost of the pulse high-voltage power supply becomes very high. The present invention solves this problem,
It is an object of the present invention to provide an electric dust collector and a simple and inexpensive pulse high voltage power source for applying a periodic pulse high voltage by superimposing DC on the above various high voltage loads. [Means for Solving the Problem] The present invention uses a DC high-voltage power supply for supplying a DC high voltage to the above high-voltage load (hereinafter referred to as a load), and simultaneously charges two or more capacitors with charging impedance. Via the high-speed switching element in series, and then applied to both ends of the load to which the DC high voltage has been applied in advance, and as a result, to the load. By applying a steep pulse high voltage in superposition to the DC high voltage, the number of DC high voltage power supplies to be used is only one, and the above problem is solved. That is, the novel pulse high voltage power supply according to the present invention is provided with a high voltage load connected to the DC high voltage power supply through a high frequency current blocking element composed of an inductance element such as an air-core coil, and a plurality of capacitors and intermediate capacitors between them. A total of N capacitors (N ≧ 2) in which high-speed switching elements are connected in series and a capacitor array consisting of (N−1) high-speed switches are connected in parallel, and the two capacitors at both ends of the capacitor array are respectively connected. Connection point of each of the high-speed switching elements and the connection point of each of the capacitors at the opposite end to the high-voltage load via a charging impedance. By connecting to both the connection points of the both-end capacitor and the high-voltage load via After supplying the DC voltage to the load and charging each capacitor of the capacitor array through the respective charging impedance, all the high speed switching elements of the capacitor array are turned on at the same time, whereby each capacitor of the capacitor array is turned on. A charging voltage is serially applied to both ends of the high-voltage load, and this operation is cyclically repeated thereafter to superimpose the DC high-voltage on the high-voltage load to apply a periodic pulse high-voltage. . In this case, all of the high-speed switching elements may be self-destruction type high-speed switching elements that automatically turn on at an overvoltage of a certain voltage or higher, such as a spark switching element composed of a pair of spark electrodes. When the charging voltage of the capacitor exceeds the overvoltage, the all-self-destruction type high speed switching element is instantly turned on. Alternatively, at least one of the high-speed switching elements is an externally controlled high-speed switching element whose ON operation can be controlled and set from the outside, and the other is a self-destruction high-speed switching element. Alternatively, the self-destruction type high-speed switching elements may be turned on at the same time each time they are turned on periodically. In this case, when the external control type high speed switching device is turned on, an overvoltage is generated in all other self-destruction type high speed switching devices, and all are automatically turned on. As the external control type high speed switching element, any suitable one can be used as long as it initiates a preset time-on operation in accordance with a predetermined pulse high voltage period, for example, a thyristor turned on by an external trigger signal. Element, GT
A semiconductor switching device such as an O element, a FET element, a transistor, or an electron tube, or a discharge tube including a trigger-like lattice electrode such as hydrogen thyraroton may be used. Alternatively, an externally controlled spark switch element that generates a spark by an external operation and turns on may be used. Such an externally controlled spark switch element is provided with, for example, an auxiliary electrode for a trigger, and a three ignition spark switch that applies a trigger voltage to this to trigger a spark, or a laser trigger type that triggers a spark by ionization by laser irradiation. A spark switch or other trigger-type spark switch element that is turned on by an external trigger operation, or a pair of fixed electrodes and a rotor that is rotatably insulated and rotatably supported between them, and is carried on it. And a rotating electrode body composed of a plurality of rotating electrodes, and a rotating spark switch or the like for performing an ON operation by generating a spark only when the rotating electrode body rotates and the fixed electrode and the rotating electrode approach each other. is there. As the charging impedance, either an inductance element or a resistance element may be used. When the inductance element is used, the inductance of the inductance element and the electrostatic capacitance of the capacitor are charged when the capacitors are charged from the DC high voltage power source. Due to the LC transient vibration caused by, that is, so-called resonance charging is performed, the charging loss is significantly reduced, which is convenient. In this case, when the diode element is connected in series with the inductance element with the charging direction from the DC high-voltage power supply as the conduction direction, the peak value of the capacitor voltage charged by the resonance charging is held as it is. The voltage of the capacitor is generally higher than the DC high voltage of the DC high voltage power supply, so that the maximum pulse output voltage is obtained. [Operation] The operation of the present invention will be described below with reference to FIG. 1 showing the waveform of the output pulse high voltage. However, in the figure, the voltage waveform when a negative DC high voltage is used is shown, and Vo = -V
Has become. First, each of the capacitors forming the above-mentioned capacitor array is charged in parallel by the DC high-voltage power supply through the respective charging impedances, and the voltage Vc of all the capacitors becomes the output DC high voltage Vo = -V of the DC high-voltage power supply. Equal to or
Alternatively, a higher value Vc = -Ve (during resonance charging) is reached. Next, at time t1, all of the high-speed switching elements are turned on at the same time, the charging voltages of the respective capacitors are all connected in series through them, and the value NVc obtained by multiplying Vc by the number N of the capacitor elements is obtained. A pulsed high voltage of full peak value is generated across the capacitor train, which is applied across the high voltage load. At this time, since the high-frequency current blocking element exists, the intrusion of this pulse high voltage into the DC high-voltage power supply is blocked, and the pulse high voltage with the peak value of Vp = NVc-Vo is turned on at the ON time t1. In the form superimposed on Vo,
Applied across the high voltage load. As shown in the figure, the voltage waveform at this time is basically a waveform in which a sawtooth wave having a leading peak value Vp having one cycle of the pulse high voltage cycle T = t4−t1 is superimposed on the DC voltage Vo−V, The leading edge of the sawtooth wave has a high-frequency damped vibration of an extremely high frequency, the details of which will be described later with reference to FIG. The first half-wave of this high-frequency oscillation has a time width of about 1 microsecond, and this portion exhibits the same action and effect as pulse charging by an extremely steep pulse high voltage, and substantially acts as a pulse high voltage. is there. In this case, when three or more capacitors are used in the capacitor array, capacitors other than the capacitors at both ends are provided with two charging impedances, one at each end and a total of two charging impedances, respectively. Must be connected across a high voltage load. [Embodiment] FIG. 2 is a circuit diagram showing an embodiment of the present invention.
1 is a high voltage load, in this example an electrostatic precipitator, whose dust collecting electrode 2 is grounded, and the discharge electrode 3 which is insulated and supported from this is a DC high voltage through a conducting wire 4 and an air core coil 5 (inductance value L1). It is connected to the negative output terminal 7 of the power source 6 to apply a negative DC high voltage −V, and the positive output terminal 8 of 6 is grounded by a conductor 9. Reference numeral 10 is a pulse high voltage generator according to the present invention, the high voltage side output terminal 11 of which is connected to the discharge electrode 3 via a conductor 12.
The ground-side output terminal 13 is grounded together with the dust collecting electrode 2 via a conductor 14. 15 is the already mentioned condenser array, and the two condensers 16 and 17 are rotary spark switches.
They are connected in series via 18. Fixed electrodes 19 and 20 of the rotary spark switch 19 are connected to the capacitors 16 and 17 via connection points 21 and 22, respectively. Reference numeral 23 is an insulating disk rotatably supported by a rotary shaft 24 parallel to an imaginary axis connecting the fixed electrodes 19 and 20, and a peripheral edge portion of 23 is fitted in a gap between 19 and 20, and a symmetrical position of the peripheral edge portion. Rotational electrodes 25 and 26 are respectively arranged so as to vertically penetrate the disk. 27 is an electric motor connected to the rotating dust 24, which rotates the insulating disk 23 to alternately pass the rotating electrodes 25 and 26 through the gap between the fixed electrodes 19 and 20, and sparks each time. The rotary spark switch 18 is turned on when it is generated. The other ends 28 and 29 of the capacitors 16 and 17 are connected to high voltage output terminals 11 and 11 via conductors 30 and 31, respectively.
It is connected to the ground side output terminal 13. 32 and 33 are charging inductance elements of the capacitors 16 and 17, respectively, which are connected in series to the diode elements 34 and 35, respectively, and are connected at upper connection points 21 and 29 and 22, respectively.
Connected between 30. The conduction direction of 34 and 35 is the charging direction of the capacitors 16 and 17 by the DC high voltage power supply 6. The operation of the power supply of this example will be described below. First, when the rotary spark switch 18 is off (the fixed electrodes 19 and 20 and the rotary electrodes 25 to 25).
26), the capacitors 16 and 17 have respective charging inductance elements 32 and 33, and the diode elements 33 and 34,
And the DC high-voltage power supply 6 via the air-core inductance 5
Are charged in parallel. In this case the capacitors 16, 17
Is charged (resonant charging) by transient vibration due to the presence of the respective charging inductance elements 32 and 33, the charging loss is extremely small, and the charging voltage Vc of each capacitor due to the presence of the diode elements 34 and 35 is higher than -V. The peak voltage of transient vibration is held at Vc = -Ve. Next, when the rotary spark switch 18 is turned on, both capacitors 16 and 17 are connected in series via 18, and the sum of the respective voltages 2Vc = -2Ve is output terminal.
It appears between 11 and 13, which is already charged to the negative DC high voltage -V through the conductors 12 and 14 and the discharge electrode 3 and the dust collecting electrode 2.
Applied between. Therefore, in the end, between 3 and 2, the negative pulse high voltage Vp =-(2Ve- is superimposed on the negative DC high voltage -V.
As a result of application of V), a voltage waveform (N = 2) as shown in FIG. 1 appears. That is, first, at the time point t1, the rotary spark switch 18 is turned on, and at this moment, a pulse high voltage having a peak value close to 2Vc = 2Ve is instantaneously generated between the discharge electrode 3 and the dust collecting electrode 2 by the total circuit capacitance Ct. (Capacitance C of capacitors 16 and 17
1, C2, series capacitance of inter-electrode capacitance Ce between discharge electrode 3 and dust collection electrode 2), and total circuit inductance Lt (spark switch)
18, the series inductance of the inductances of the conductors 30, 12, 14, and 31) and the high frequency transient damping vibration due to series resonance. This vibration attenuates extremely quickly at a frequency of about 1000 kHz and disappears at time t2 (about 0.1 millisecond after t1), but a strong pulse-like corona discharge occurs only at the peak of the first half wave of the discharge electrode 3. Then, a large amount of negative ions are generated on the surface of the discharge electrode. Since the space charge of the released negative ions is too large, the electrostatic shield action on the discharge electrode does not cause corona discharge after the next vibration peak. As a result, this first transient oscillation peak exerts a pulse charging action on the high voltage load, which is quite equivalent to a very short pulse high voltage with a peak value of −2 Ve and an equivalent time width of about 1 microsecond. In this case capacitors 16 and 17
The discharge current through the rotary spark switch 18 is at least
Charging inductance 32, 33 for a short time before 18 turns off
Almost no current flows because of the large impedance against high frequencies. The pulsed corona current due to the movement of negative ions from the discharge electrode 3 to the dust collection electrode 2 is too small for maintaining the arc of the spark switch 18. Therefore, the high-frequency transient vibration is attenuated, and the arc is immediately cut off at time t2 when the arc heating action by the high-frequency current is stopped, and the rotary spark switch 18
Is turned off, and the supply of current from the pulse high voltage generator 10 to the electrodes 3 and 2 is cut off. A large amount of negative ions generated by the pulsed corona discharge still move toward the dust collection electrode 2 from the discharge electrode 3 after this, and the large pulsed ion current accompanying this causes electrostatic discharge between the electrodes 3 and 2. The electric charge stored in the capacitance Ce is rapidly discharged, the voltage v of the discharge electrode 3 is drastically decreased, and the voltage v is drastically decreased at the completion time t3 (a few milliseconds from t2) of the movement of the negative ions. . Then, after that, slow v due to normal DC negative corona discharge
Then, v approaches the original DC voltage to -V, reaches the next ON time t4 of the rotary spark switch 18, and the above operation is repeated. In this case, the air-core coil 5 has a large impedance with respect to the high-frequency oscillating voltage, and the high-frequency oscillating voltage is prevented from entering the high-voltage DC power supply 6 by being blocked by this impedance. Also, due to the action of this impedance, the full peak value is −2V.
The pulse voltage close to e appears between the electrodes 3 and 2 without dropping. Further, after the high frequency oscillating voltage disappears, the overvoltage in the period of t2-t3 cannot be prevented by the air-core coil 5, but since the change is slower, the DC high voltage power supply 6
The internal rectifier can prevent it, and it will not be destroyed. Immediately after the rotary spark switch 18 is turned off at time t2, charging of the capacitors 16 and 17 is started via the charging inductances 32 and 33 and the diodes 34 and 35. In this case, the inductance values L1 and L2 of the charging inductances 32 and 33 and the Capacitor capacity C1, C2 Transient vibration cycle T1, T2 determined
Is large, resonance charging takes time, and eventually charging is completed almost immediately before time t4. On the contrary, if T1 and T2 are sufficiently smaller than the time (t3−t2), the relatively high voltage charged in the capacitance Ce between the electrodes 2 and 3 at time t2 is Ce−L1−C1.
Resonant charging due to transient vibration of Ce-L1-C1 causes the capacitors 16 and 17 to be reversely charged, and the pulse waveform becomes extremely steep as shown in FIG. Along with this, a considerable portion of the capacitive positive energy supplied to the interelectrode capacitance Ce from the capacitors 16 and 17 at the time of applying a pulse is recovered to 16 and 17,
Extremely high energy efficiency. In this case as well, the diodes 34 and 35 serve to hold the peak value of the reverse charging voltage. In this example, both or one of the charging impedances 32, 33 is made variable, and if both are made larger by making it larger than the time constant T1, T2, or the pulse period T1 / 3, the next trigger time t4 is reached. Also the condenser 16,
Both or one of 17 is not charged to -V, and the output voltage of the pulse high voltage power supply becomes less than -2V. Therefore, L1, L2
By adjusting both or one of the values above to a value higher than the value corresponding to the above, it becomes possible to make the total peak value Vp of the pulse voltage variable within the range of −2 V or less. In this case, it goes without saying that fixed or variable charging resistors may be used instead of the charging inductances 32 and 33. In some cases, the diodes 34 and 35 may be omitted, but at this time, the charging voltage of the capacitors 16 and 17 during charging is -V or less. Instead of the rotary spark switch 18, any externally controlled high-speed switching element or a self-destruction high-speed switching element such as a fixed spark switch may be used. In FIG. 4, another capacitor 36 is inserted in the middle of the capacitors 16 and 17 at both ends via a self-destruction type spark switch 39 composed of two fixed electrodes 37 and 38 and the rotary spark switch 18 to make a total of three capacitors. An example in which the capacitor array 15 is composed of capacitors is shown. However the middle condenser 36
Have charging inductance elements 42 and 43 respectively inserted between both ends 40 and 41 and connection points 28 and 29, and diode elements 44 and 45 respectively make the charging direction of the capacitor 36 by the power source 6 conductive. It is connected in series. In this way, the intermediate capacitors, regardless of whether the number of capacitors is one or more as in the present example, both capacitors are inserted between the both ends of the capacitors and both terminals 7 and 8 of the high-voltage DC power supply 6, respectively. It goes without saying that charging cannot be performed unless the individual charging impedance is provided. The names and functions of the elements numbered 1 to 35 in the figure are the same as those of the elements of the same number in FIG. When the rotary spark switch 18 is turned on, the sum of the charging voltages of the capacitors 17 and 16, that is, a voltage of about 2Vo is applied between the fixed electrodes 37 and 38 of the self-destruction type spark switch 39, and 39 is instantly turned on automatically. Since the details of the pulse high voltage generating operation following this are self-explanatory, the description thereof will be omitted. FIG. 5 is another embodiment of the present invention. In place of the rotary spark switch 18 in the embodiment of FIG. 2, two fixed electrodes 46, 47, a trigger auxiliary electrode 48, and a trigger pulse power source 49 are used. And the charging resistors 52a and 51b are used instead of the charging inductances 32 and 33, and the charging current control element 54 including the FET element example 52 and its gate circuit 53 is inserted in series with 51a. And is used as a pulse output voltage control element. The names and functions of the elements 1 to 31 in the figure are the same as those of the elements with the same numbers in FIG. In this example, when the capacitors 16 and 17 are charged from the DC high-voltage power supply 6, 16 is charged via the charging resistor 51 and the charging current control element 54, and 17 is charged via the charging resistor 52. Therefore, the charging speed of 17 is determined by the value of the charging resistor 52, but the charging speed of 16 can be freely controlled by the charging current control element 54, whereby the charging voltage of the capacitor 16 immediately before the trigger spark switch 50 is turned on. To
It can be freely adjusted within the range of Vo or less, and the pulse output voltage can be freely adjusted within the range of Vo to 2Vo. The pulse high voltage generating operation of this embodiment is basically the same as that shown in FIG. 2, and therefore its explanation is omitted. As an external control type high speed switch element used in the present invention,
For example, when an element 55 having a rectifying property such as a thyristor is used, a diode element 56 is connected in parallel to the element 55 as shown in FIGS.
57 is connected in series with the above-mentioned connection element as shown in FIG. 7A or in series with the branch of the diode element 56 as shown in FIG. The stored capacitive energy can be recovered in the capacitor by LC transient vibration. It goes without saying that a trigger type spark switch or a rotary spark switch or the like may be used instead of the thyristor element 55 in FIG. Further, by interposing between the connection point 28 and the discharge electrode 3 or between the connection point 29 and the dust collection electrode 2, a fixed element having a variable charging inductance, a variable charging resistance and a current control function as shown in FIG. 7 (a). Insert a pulse output voltage control element 60, which is formed by connecting in parallel a suitable charging current control element 58 composed of the like and a high-speed switching element 59 that allows conduction only in the discharging direction when the capacitor array is discharged, It is possible to freely control the pulse output voltage by controlling the parallel charging speed of the capacitors and thereby changing the charging voltage at the series discharge point of each capacitor. In this case, when the capacitor is discharged in series, its discharge current instantaneously flows through the high-speed switching element 59, so that the discharging operation does not cause any trouble. FIG. 7 (b) shows a variable inductance element 61 as the charging current control element 58, and a high-speed switching element 59 as a high-speed switching element 59 for permitting conduction only in the discharging direction of the capacitor row in synchronization with the series discharge of the capacitor row. The above-mentioned pulse output voltage control element 60 is configured by using a trigger type spark switch 62 that triggers the. In this case, the diode element 63 is connected in series with 61 so that the charging direction by the power source 6 of each capacitor is the conduction direction,
This series connection element is connected in parallel to 62. In this case, the trigger signal is applied to 62 when the capacitor is discharged in series, and 62 instantly sparks and turns on. Moreover, when the capacitors are charged, resonance charging of each capacitor occurs due to LC transient vibration due to the existence of the variable inductance element, and not only a significant reduction in charging loss is obtained, but also when the pulse voltage is applied, it is stored between the electrodes 2 and 3. It also recovers capacitive energy. Further, due to the presence of the diode element, the charging voltage of each capacitor is held at the peak value of the transient vibration, and the value is increased. EFFECTS OF THE INVENTION The present invention has a DC high voltage power supply 6 for supplying a DC high voltage Vo to a high voltage load 1 such as an electrostatic precipitator as described above.
A pulse superposed on the DC high voltage Vo by charging two or more capacitors forming a capacitor array in parallel to each other and discharging the capacitor voltage in series toward the load 1 through a high-speed switching element, thereby being superimposed on the DC high voltage Vo. Since a high voltage is applied to the load 1, there is an effect that a separate direct current high voltage power source for charging a capacitor having a high pulse voltage is not required, which makes the pulse high voltage power source extremely inexpensive and simple. In addition to this, by using an inductance element as a charging impedance element of the capacitor, resonance charging can be used for the parallel charging of each capacitor, charging loss can be significantly reduced, and charging energy efficiency can be significantly improved. Furthermore, by inserting a diode element in series with this charging inductance and performing resonant charging of the capacitor via this, the charging voltage of the capacitor can be held at the peak value of transient vibration during resonant charging.
It is convenient because it can be made higher than Vo. In addition to this, the pulse output voltage can be easily adjusted by controlling the charging current during parallel charging of the capacitors by using the pulse output voltage control element including the charging current control element of the capacitor. Further, by using the peak voltage of a half wave of the first time width of about 1 microsecond of the LC transient high frequency oscillation when the high-speed switching element is turned on for pulse charging, a pulse high voltage with an extremely steep and short width is used. A very good pulse charging effect similar to the above can be obtained.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 shows a typical voltage waveform appearing between the electrodes of an electrostatic precipitator which is a high voltage load when the pulse high voltage power supply of the present invention is used. FIG. 2 shows a circuit diagram of an embodiment of the present invention.
FIG. 3 shows a typical voltage waveform appearing between the electrodes of an electrostatic precipitator when the capacitive energy stored when a pulsed high voltage is applied between the electrodes is recovered in the capacitor by LC transient vibration. FIGS. 4 and 5 are circuit diagrams of other embodiments of the present invention. FIGS. 6 (a) and 6 (b) are circuit diagrams of a thyristor used as an external control type high speed switching element for simultaneously performing the energy recovery. FIG. 7 (a),
(B) shows the principle diagram of an example of a pulse output voltage control element, and the circuit diagram of a specific example, respectively. In the figure, v ... Load voltage, 12,14 ... Conductor 1 ... Electrostatic precipitator, 15 ... Capacitor row 2 ... Dust collecting electrode, 16,17, 36 ... Capacitor 3 ... Discharge electrode, 18 …… Rotary spark switch 4,9,12,14,30,31 …… Conductor wire, 19,20,37,38,46,47 …… Fixed electrode 5 …… Air core inductance, 21,22,28,29, 40, 41 ...... Connection point 6 ...... High voltage DC power supply, 23 ...... Insulation disk 7, ...... Same as above Output terminal, 24 ...... Same as above Rotating shaft 10 ...... Pulse high voltage generator, 25, 26 ...... Rotating electrode 11, 13 …… Same as above Output terminal, 27 …… Motor 32, 33, 42, 43 …… Charging inductance, 53 …… Same as above Gate circuit 34, 35, 44, 45, 56, 63 …… Diode element, 54 …… Charging Current control element 39 …… Self-destruction spark switch, 55 …… Thyristor 48 …… Trigger auxiliary electrode, 57 …… Inductance element 49 …… Trigger pulse power supply, 58 …… Charging current control element 50 …… 3 Ignition flower switch , 59 …… High-speed switch Child 51 ...... charging resistor, 60 ...... pulse output voltage control element 62 ...... triggered spark switch 52 ...... FET element array 61 ...... variable inductance element

Claims (1)

(57) [Claims] For a high voltage load connected to a DC high voltage power supply via a high frequency current blocking element consisting of an inductance element,
A plurality of capacitors and a capacitor array consisting of a total of N (N ≧ 2) capacitors in which a high-speed switch element is connected in series between the capacitors and (N−1) high-speed switches are connected in parallel, and the capacitor array is connected. 2 at both ends of
The capacitors are connected to their respective connection points with the high-speed switching element via charging impedances, respectively, to the connection points of the capacitors on the opposite side with the high-voltage load, and the capacitors in the middle of the capacitor array are connected to both ends of the capacitors. Is connected to the connection point between the both-end capacitors and both ends of the high-voltage load via their respective charging impedances, thereby supplying a high-voltage load to the high-voltage load with the direct-current power source and connecting each capacitor in the capacitor array to the respective high-voltage loads. After charging in parallel via the charging impedance of, all the high speed switching elements of the capacitor row are turned on at the same time, whereby the charging voltage of each capacitor of the capacitor row is applied in series across the high voltage load, Hereinafter, this operation is repeated cyclically to superimpose the DC high voltage on the high voltage load to apply a periodic pulse high voltage. Pulsed high-voltage power supply, wherein a thing. 2. The pulse high voltage power supply according to claim 1, wherein all the high-speed switches are self-destruction type high-speed switch elements that automatically turn on at overvoltage. 3. The pulsed high voltage power supply according to claim 2, wherein the self-destruction type high-speed switching element is a self-destruction type spark switch each comprising a pair of spark electrodes. 4. The device according to claim 1, wherein at least one of the high-speed switches is an externally controlled high-speed switching device capable of externally controlling the ON operation thereof. 5. The device according to claim (4) is characterized in that the high-speed switching element other than the externally controlled high-speed switch is a self-destruction high-speed switching element that automatically turns on at an overvoltage. Pulse high voltage power supply. 6. The pulsed high voltage power supply according to claim 5, wherein the self-destruction type high speed switching element is a spark switching element each comprising a pair of spark electrodes. 7. The device according to any one of claims (4) to (6), wherein the externally controlled high-speed switching element is an externally controlled spark switch capable of externally setting an ON operation caused by spark generation. A pulsed high voltage power supply characterized by being an element. 8. The pulsed high-voltage power supply according to claim 7, wherein the external control type spark switch element is a trigger type spark switch element capable of triggering a spark by an external operation. 9. The pulse high-voltage power supply according to claim 8, wherein the trigger-type spark switch element is a three-ignition spark switch element provided with a trigger auxiliary electrode. 10. The pulse high-voltage power supply according to claim 8, wherein the trigger-type spark switch element is a laser-trigger-type spark switch element that triggers a spark by laser irradiation. 11. The device according to claim (7), wherein the externally controlled spark switch element is a plurality of fixed electrodes, and a plurality of fixed electrodes are rotatably insulated and supported between the fixed electrodes and arranged on a rotor driven by an electric motor. A pulsed high-voltage power supply comprising a rotating spark switch, which is composed of a plurality of rotating electrodes, and is turned on by generating a spark in the vicinity of the fixed electrode and the rotating electrode as the rotor rotates. 12. The pulse high voltage power supply according to any one of claims (4) to (6), characterized in that the externally controlled high-speed switching element is a solid-state switching element. 13. The pulse high voltage power supply according to claim 12, wherein the solid state switch element is any one of a thyristor, a GTO, a FET and a transistor. 14． A pulsed high voltage power supply according to any one of claims (4) to (6), characterized in that the externally controlled high-speed switching element is an electron tube. 15. The device according to any one of claims (4) to (6), characterized in that the externally controlled high-speed switching element is a discharge tube having a trigger grid electrode. Pulse high voltage power supply. 16. A pulsed high voltage power supply according to claim 15, wherein said discharge tube is a hydrogen thyratron. 17． A pulse high voltage power supply according to any one of claims (1) to (16), characterized in that the charging impedance is a charging inductance element. 18. A pulse high voltage power supply according to any one of claims (1) to (16), characterized in that the charging impedance is a charging resistance element. 19. The pulsed high voltage power supply according to claim 17, wherein the charging inductance element is a variable inductance element. 20. The device according to any one of claims (17) and (19), wherein at least one of the charging inductance elements is connected in series with the charging direction of the capacitor by the DC high-voltage power supply as a conduction direction. A pulsed high voltage power supply featuring a diode element inserted. 21. The pulse high voltage power supply according to claim 18, wherein the charging resistance element is a variable resistance element. 22. The device according to any one of claims (1) to (21), wherein a charging current control element for the capacitor and the charging are provided by intervening between the capacitor string and the high voltage load. A pulsed high voltage power supply characterized by being inserted in a pulse voltage control element consisting of parallel connection of high-speed switching elements that allow only conduction of current in the direction opposite to the current. 23. The pulsed high voltage power supply according to claim 22, wherein the charging current control element is a variable resistance element. 24. The pulsed high voltage power supply according to claim 22, wherein the charging current control element is a variable inductance element. 25. The pulsed high voltage power supply according to claim 22, wherein the charging current control element is a solid-state element having a current control function. 26. A high-voltage pulse power supply according to any one of claims (22) to (25), characterized in that the high-speed switching element is a spark switch. 27. The pulse high voltage power supply according to claim 26, wherein the spark switch is a trigger type spark switch capable of externally triggering the start of the spark. 28. In the device according to any one of claims (1) to (27), a pulse output voltage control element composed of a charging current control element is inserted in series with at least one of the charging impedances. A pulsed high voltage power supply that is characterized. 29. The pulsed high voltage power supply according to claim 28, wherein the charging current control element is a solid-state element having a current control function. 30. The device according to any one of claims (1) to (29), wherein the DC voltage high-voltage power supply is used to intervene between the capacitor bank and the high-voltage load to Energy obtained by connecting a diode element whose conduction direction is the parallel charging direction and an inductance element in series, and connecting a high-speed switching element that allows only the conduction of a current in the direction opposite to the conduction direction of the diode element in parallel to the series connection element. A pulsed high voltage power supply characterized by inserting a recovery element. 31. A high-voltage pulse power supply according to claim 30, wherein said high-speed switch is a spark switch. 32. The device according to any one of claims (1) to (31), wherein a series discharge of the capacitor is provided in parallel with all the high speed switching devices including the externally controlled high speed switching device. A pulse high voltage power supply characterized in that a diode element having a reverse conduction direction is connected, and an inductance element is connected between at least one of the parallel connection elements and a capacitor connected to the parallel connection element. 33. The device according to any one of claims (1) to (31), wherein a series discharge of the capacitor is provided in parallel with all the high speed switching devices including the externally controlled high speed switching device. A pulse high voltage power supply characterized in that a diode element having a reverse conduction direction is connected, and an inductance element is connected in series to the diode element in at least one of the parallel connection elements.