KR100227128B1 - Plasma ionizing gas generation apparatus using streamer corona discharge - Google Patents

Abstract

The present invention relates to an apparatus for generating a plasma ionizing gas. In particular, a high voltage pulse having a narrow pulse width and an extremely short pulse rise time is formed by a discharge interrupting means for arbitrarily interrupting high-speed flame discharges generated between spark gap switches. The present invention relates to a plasma ionizer generating device which is a chemically active species by a non-equilibrium low-temperature plasma at room temperature and pressure through a powerful streamer corona discharge.

The present invention provides a voltage control device 11 for controlling voltage, a high voltage transformer 12 for boosting an AC voltage, a high voltage rectifier 13 for converting a boosted AC high voltage into a DC high voltage, and charging for pulse discharge. In the plasma ionizing gas generator having a capacitor C2, a spark gap switch 15 for generating spark discharge, and a plasma reactor 16 for generating plasma, the spark gap switch 15 is generated between the spark gap switch 15. Discharge interruption means for arbitrarily interrupting the spark discharge, and high voltage pulse corona discharge received by LC resonance according to the load impedance and capacitance of the plasma reactor 16 is received. It characterized in that it comprises a high frequency reactor (L2) to reduce the pulse rise time and pulse width of the high voltage output to the plasma reactor through the high frequency reactor The present invention relates to an efficient generation of plasma ionizing gas, which is an active species having strong chemical oxidative and reducible properties, which is useful for the environment and other industries by powerful streamer corona discharge.

Description

Plasma ionizing gas generator by streamer corona discharge

The present invention relates to an apparatus for generating a plasma ionizing gas, wherein a high voltage pulse having a narrow pulse width and an extremely short pulse rising time is a plasma reactor through a discharge interrupting means for arbitrarily interrupting a high-speed flame discharge generated from a spark gap switch. The present invention relates to a plasma ionizing gas generating device which is a chemically active species by generating a physically neutral non-equilibrium low-temperature plasma at room temperature and pressure caused by a powerful streamer corona discharge (STREAMER CORONA DISCHARGE).

Recently, industrial applications using plasma have been increasing, but there are many practical problems due to the lack of practical techniques for generating low temperature plasma at room temperature and atmospheric pressure. Therefore, there is a lot of practical problems for plasma generation technology through more powerful streamer corona discharge. The research is being conducted.

1 and 2 are explanatory views for explaining a conventional plasma generator, the plasma generator according to Figure 1 controls the commercial AC power supply 10 by a voltage control device, the controlled AC voltage is a high voltage transformer The AC high voltage stepped up by a predetermined AC voltage and boosted by 12 is full-wave rectified by the high voltage rectifier 13 and smoothed by the high voltage capacitor C2, and then the high voltage charged in the high voltage capacitor C2 is spark-gap. Is applied to the switch 15. When the high voltage charged in the high voltage capacitor C2 discharges, spark discharge according to the high voltage occurs between the discharge terminals 15a and 15b of the spark gap switch 15. Spark discharge does not occur in the spark gap switch 15 while the high voltage charged in the capacitor C2 discharges and charges, and the spark voltage switch 15 discharges while the high voltage charged in the capacitor C2 discharges again. Spark discharges occur at When this process is repeatedly performed in the spark gap switch 15, a high-speed spark discharge occurs in the spark gap switch 15, and a high voltage pulse is generated, and the high voltage pulse is discharge electrode 17 of the plasma reactor 16. Is delivered to generate a plasma.

Alternatively, rotational discharge terminals 14a and 14b are provided between the discharge terminals 15a and 15b of the spark gap switch 15 to obtain a more vigorous plasma, thereby showing the rotational discharge terminals 14a and 14b. When the rotary discharge terminals 14a and 14b come close to the discharge terminals 15a and 15b by rotating in the direction of the arrow, a spark discharge is generated so that a high voltage flame discharge of 150 KV to 250 KV is generated in the plasma reactor 16. It was made.

However, according to the related art of FIG. 1, the discharge terminals 15a and 15b of the spark gap switch 15 are fixed at a predetermined distance, and the distance between the discharge terminals 15a and 15b is usually about 10 mm apart. Therefore, the breakage of the spark discharge generated between the discharge terminals 15a and 15b is poor, and the high voltage pulse is rapidly lowered. On the contrary, if the distance between the discharge terminals 15a and 15b is too wide, the spark discharge does not occur and the plasma is not generated. There is a problem that can not be obtained.

2, the streamer corona is generated from the discharge electrode 17 toward the cylindrical counter electrode 18, and the streamer portion is a plasma region in which positive and negative ions are mixed. When the gas molecules pass through, it generates active species (RADICAL) by plasma ionization gas which is easy to chemically react. Therefore, in order to generate a large amount of active species for industrial application, it is necessary to increase the concentration of a wide range of plasma region and plasma ionizing gas by a more powerful streamer, and therefore, it is necessary to increase the crest value and generation frequency of the high voltage pulse. To this end, there is a problem that the rotation speed of the rotary discharge terminals 14a and 14b of the spark gap switch 15 must be at least 1500 rpm for practical use. In addition, the number of poles of the rotary discharge terminals 14a and 14b may be increased to increase the frequency of high voltage pulses, but until the level of ions generated between the gaps by each spark discharge eventually recovers the electrical insulation between the gaps. There is a problem in that spark discharge cannot be generated at a time interval shorter than the recovery time, and a part of the ions between the gaps is blown by the wind generated by the rotation of the rotary discharge terminals 14a and 14b, so that the frequency of occurrence of high voltage pulse is practical There is a problem that is only about 300 times / second.

In addition, the rotary discharge terminals 14a and 14b should be enlarged in order to prevent the spark discharge from occurring again when the electrical discharge recovery of the gas is not sufficient during the high speed rotation of the rotary discharge terminals 14a and 14b. If discharge is caused again in this unsecured state, there is a problem that a uniform pulse voltage cannot be obtained.

Therefore, in order to solve the above problems, the present invention provides a discharge interruption means between the discharge terminals of the spark gap switch, and connects the high frequency reactor L2 between the spark gap switch and the plasma reactor 16 to spark the spark. The spark discharge generated in the gap switch is arbitrarily interrupted, so that the pulse width is extremely narrow and the pulse high voltage with a very short pulse rise time is transmitted to the discharge electrode 17 so that the plasma having strong chemical activity by the strong streamer corona discharge is generated. It is an object of the present invention to provide an apparatus for generating a plasma ionizing gas by a streamer corona discharge that is generated.

In order to achieve the above object, the present invention provides a voltage control device 11 for controlling voltage, a high voltage transformer 12 for boosting an AC voltage, and a high voltage rectifier 13 for converting a boosted AC high voltage into a DC high voltage. And a plasma generating device including a charging capacitor (C2) for pulse discharge, a spark gap switch for generating spark discharge, and a plasma reactor (16) for generating plasma, wherein the spark generated in the spark gap switch A discharge interrupting means for arbitrarily interrupting the discharge, and a high voltage outputted by the means, receiving a high voltage pulse corona discharge by LC resonance according to the load impedance and capacitance of the plasma reactor 16. It characterized in that it comprises a high frequency reactor (L2).

1 and 2 are explanatory diagrams for explaining a conventional plasma generating apparatus.

Figure 3 is an explanatory diagram for explaining an embodiment of the plasma ionizing gas generating apparatus according to the present invention.

4 is a perspective view for enlarged explanation of the discharge control means of FIG.

5 is an explanatory diagram for explaining another embodiment of the plasma ionizing gas generating apparatus according to the present invention;

6 is a perspective view for enlarged explanation of the discharge interrupting means of FIG.

Figure 7 is a perspective view for explaining another embodiment of the plasma ionizing gas generating apparatus according to the present invention.

Fig. 8A is a diagram showing voltage waveforms between the positive electrodes of a conventional plasma generator.

FIG. 8B is an enlarged view of only one waveform of the voltage waveform of FIG. 8A; FIG.

9A is a diagram showing voltage waveforms between the positive electrodes of the plasma ionizing gas generator according to the present invention;

FIG. 9B is an enlarged view of only one waveform of the voltage waveform of FIG. 9A; FIG.

* Explanation of symbols for main parts of the drawings

10: commercial AC power supply 11: voltage control device

12: high voltage transformer 13: high voltage rectifier

14a, 14b: rotary discharge terminal 15: spark gap switch

15a, 15b: discharge terminal 16: plasma reactor

17: discharge electrode 18: counter electrode

20, 40, 50: discharge interrupting means 21: motor

24: controller 25: rotating disc

26 shaft 27 rotation axis

35: compressor 42: injection nozzle

43: gas pipe C1, C2: high voltage capacitor

L1, L2: Reactor

Hereinafter, with reference to the accompanying drawings the present invention will be described in detail.

In general, in order to obtain the plasma ionizing gas of the active species generated in the plasma reactor 16, the pulse width of the high voltage output to the discharge electrode by the spark discharge generated from the spark gap switch should be narrow, and the pulse rise time should be short. Good active species plasma ionizing gas can be obtained. Therefore, in the present invention, the spark discharge generated in the spark gap switch is arbitrarily interrupted by the discharge interrupting means so that a pulse high voltage is output to the discharge electrode with a narrow pulse width and a short pulse rise time. It is explanatory drawing for demonstrating the plasma ionizing gas generating apparatus using an Example of discharge control means.

The AC or DC voltage is supplied from the AC or DC input voltage to control the AC or DC voltage to the required voltage, but the input DC voltage is converted into an AC voltage through an inverter (not shown) and controlled. The AC voltage output from the voltage controller 11 is boosted by the high voltage transformer 12 and the AC high voltage boosted by the high voltage rectifier 13 is converted into a DC high voltage, and the voltage output from the rectifier 13 is The high voltage is supplied to the stable DC voltage through the high voltage capacitor C1 and the reactor L1, and the high voltage is charged to the charging capacitor C2 for pulse discharge.

When the high voltage (+) of the charging capacitor (C2) is connected to the discharge terminal (15a ') of the spark gap switch (15') to charge the charging capacitor (C2) a DC high voltage of a predetermined voltage or more is charged The pulsed high voltage is output to the plasma reactor 16 by the direct current high voltage spark discharge between the discharge terminal 15a 'and the discharge terminal 15b' of the output side of the spark gap switch 15 '. In order to generate more sharp and stable pulses in the method of generating such a series of pulse high voltages, more specific pulse high voltage generation is described by the following operation.

In the discharge interruption means 20, a rotating disk 25 having a required hole 28 (see Fig. 4) is operated by a motor 21, and the hole 28 of the rotating disk 25 is sparked. It is provided so as to be placed between the discharge terminals 15a 'and 15b' of the gap switch 15 'to control the spark discharge generated at the spark gap switch 15'.

The high frequency reactor L2 is connected in series to the discharge terminal 15b 'of the spark gap switch 15', and the plasma reactor 16 is connected again. The controller 24 receives the high voltage input to the plasma reactor 16 and the high voltage applied to the DC terminal (P point) and the operation signal of the rotational disc 25 of the discharge control means 20. The motor 21 of the voltage control device 11 and the discharge control means 20 is controlled.

Referring to the operation process according to the above configuration in more detail,

The electrical process for generating the spark discharge in the spark gap switch 15 'will be omitted because it has been described above.

When the high voltage charged in the charging capacitor C2 is discharged and applied to the spark gap switch 15 ′ having the discharge interruption means 20 installed therein, a hole 28 is formed in the rotating disc 25 of the discharge interruption means 20. Is discharged when coincides with the discharge terminals 15a 'and 15b' of the spark gap switch 15 ', and the rotary disk 25 is rotated according to the operation of the controller 24 so that the hole 28 When the discharge terminals 15a 'and 15b' do not coincide, the spark discharge is blocked. The pulse high voltage caused by the spark discharge when the discharge terminals 15a 'and 15b' coincide with the hole 28 is extremely short in the pulse rising time and extremely narrow in the pulse width through the high frequency reactor L2. SECOND PULSE) High voltage is delivered to the plasma reactor 16.

In the plasma reactor 16, two electrodes are installed to form an ionizing gas of a plasma phase having strong chemical activity by the streamer corona discharge, and the discharge electrode 17 is disposed between the anode (+; positive electrode) and the opposite electrode ( Two electrodes are provided, each having 18 as a negative electrode (-; negative electrode). The spark discharge generated in the spark gap switch 15 'provided with the discharge interruption means 20 is interrupted by the hole 28 of the rotating disc 25, and the interrupted high voltage is pulsed through the high frequency reactor L2. Very high rise time (100ns or less), narrow pulse width (200ns or less), pulse high voltage is applied to the discharge electrode 17 to generate a discharge electric field like an electrodynamic phenomenon formed between the two electrodes, and discharge in the discharge electric field. A large amount of electrons emitted from the electrode 17 is collided with gas molecules to generate an ionizing gas in plasma having chemically strong activity such as excitation, dissociation and ionization. Therefore, when the pulse rise time of the high voltage is extremely short and the nanosecond pulse (NANO SECOND PULSE) high voltage is applied to the plasma reactor 16, a strong streamer discharge (STREAMER DISCHARGE) is generated. Since the high voltage applied to the discharge electrode 17 of the plasma reactor 16 is extremely short in pulse width, only light electrons are accelerated, and large ions are not accelerated. Type plasma (NON-THERMAL PLASMA) is formed. As a result, the temperature of the gas can be extremely high the temperature of the electron that is the main role of the plasma chemical reaction at room temperature, and generates a plasma ionizing gas of active species (RADICAL) of high activity.

In the above principle, when the pulse of extremely high rise time and width of the high voltage is applied to the plasma reactor 16, it is cooled in the pulse rest period, and returns to the initial state when the next high voltage pulse is applied, thereby increasing the gas temperature rise. It is easy to suppress and the temperature rise of ion molecules is suppressed during the pulse application time, so the peak value of the pulse voltage, that is, the pulse high voltage can be extremely high, and the electrons can be accelerated more remarkably. It is possible to produce an ionizing gas in the plasma which can be advanced to enrich the active species (RADICAL) having a chemically strong activity by a more powerful streamer.

In addition, by installing a plurality of spark gap switch (15 ') in which the discharge interruption means 20 is installed in series or in parallel to output a high voltage pulse to the plasma reactor 16 through the high-frequency reactor (L2) by sequential interruption It is possible to increase the number of pulses to thousands of times.

4 is a perspective view for explaining the discharge control means 20 according to the present invention, which is composed of a rotating disc 25, a motor 21, a shaft 26, a rotating shaft 27, a support 32. Operated by a control signal of the controller 24, the rotary disk 25 is formed with a predetermined number of holes 28 in a predetermined portion of the insulated disk, the shaft 26 is connected to the rotating shaft 27 It is fixed, but is installed between the discharge terminal (15a ', 15b') of the spark gap switch (15 ') so that the discharge terminal (15a', 15b ') and the hole 28 of the rotating disk 25 is matched It is installed. In addition, a conductor may be inserted into the hole 28 to be used. Both ends of the rotary shaft 27 is fixed by the fixing part 31 installed on the support 32, one end of the rotary shaft 27 is connected by the motor 21 and the belt 29 to the motor ( The rotating shaft 27 rotates in accordance with the operation of 21 so that the rotating disk 25 rotates between the discharge terminals 15a 'and 15b' of the spark gap switch 15 '.

Spark discharge occurs when the hole 28 of the rotating disc 25 provided between the discharge terminals 15a 'and 15b' of the spark gap switch 15 'coincides with the discharge terminals 15a' and 15b '. When the rotating disk 25 is rotated so that the insulating surface without the hole 28 is placed between the discharge terminals 15a 'and 15b', the spark discharge is interrupted and a high voltage having a short pulse width is transferred to the high frequency reactor L2. Is output.

In addition, by adjusting the gap interval (6mm to 35mm) of the discharge terminals (15a ', 15b') according to the shape and characteristics of the plasma reactor 16 to adjust the crest value of the high voltage pulse output to the plasma reactor 16, the load characteristics It is possible to maintain a constant plasma corresponding to. If the gap interval is far away, the peak value of the pulse high voltage can be relatively increased to provide the best pulse high voltage that the plasma reactor can accommodate when the gap distance is within 35 mm.

5 is an explanatory view for explaining an embodiment of the plasma generating apparatus using the discharge control means 40 according to the present invention, the process of controlling the voltage for generating a spark discharge by receiving the AC and DC input voltage Since it is the same as the description of Figure 3 will be omitted.

The spark gap switch 15 coupled with the discharge control means 40 to the charging capacitor C2 is provided in parallel.

The discharge interruption means 40 is the injection nozzle 42 for injecting a predetermined amount of gas is operated by the compressor 35, the injection nozzle 42 is discharge terminal 15a of the spark gap switch 15 '', 15b '') is installed at the lower center of the center, and the spark gap switch 15 is installed at the position where the spark discharge generated in the spark gap switch 15 '' is interrupted by the injection gas of the injection nozzle 42. '') To interrupt the spark discharge generated.

The high frequency reactor L2 is connected in series to the discharge terminal 15b ″ of the spark gap switch 15 ″, and the plasma reactor 16 is connected again. The controller 24 receives the high voltage input to the plasma reactor 16 and the high voltage applied to the DC terminal (P point) and the operation signal of the injection nozzle 42 of the discharge control means 40. The compressor 35 of the voltage control device 11 and the discharge control means 40 is controlled.

When the high voltage charged in the charging capacitor C2 is discharged and applied to the spark gap switch 15 '' to generate a spark discharge, the gas injected by the injection nozzle 42 of the discharge control means 40 is discharged. Part of the spark discharge is cut off and transmitted to the high frequency reactor L2. At this time, the high voltage interrupted by the gas injected by the injection nozzle 42 in the spark gap switch 15 '' has a very short pulse rise time and extremely narrow pulse width through the high frequency reactor L2. (NANO SECOND PULSE) A high voltage is applied to the plasma reactor 16.

Since the high voltage output to the discharge electrode 17 of the plasma reactor 16 is the same as that described in FIG. 3, a detailed description thereof will be omitted.

In addition, a plurality of spark gap switches 15 " in which discharge interruption means 40 is provided between the discharge terminals 15a " and 15b " are continuously installed in series to generate a pulsed high voltage through the high frequency reactor L2. Output to reactor 16.

FIG. 6 is an enlarged perspective view illustrating the discharge interruption means 40 of FIG. 5, wherein the discharge terminals 15a and 15b of the spark gap switch 15 are disposed on an upper side of the insulator 33 installed on the base fixing plate 41. It is provided, the injection nozzle 42 is connected to the gas pipe 43 at the lower center between the discharge terminals (15a, 15b), the gas pipe 43 is connected to the compressor 35 to the spark The spark discharge generated between the discharge terminals 15a and 15b of the gap switch 15 is interrupted.

7 is a perspective view showing another embodiment of the discharge control means 50 according to the present invention, the discharge consisting of the injection nozzle 42 for the gas injection to the discharge control means 20 composed of the rotary disk 25 That is, the intermittent means 40 is coupled, that is, the gas pipe 43 connected to the compressor 35 on the top of the basic fixing plate 34 of the discharge intervening means 20 installed by the rotating disc 25, The injection nozzle 42 is installed on the upper portion of the rotary disc 25, which is installed below the rotary disc 25 provided between the discharge terminals 15a 'and 15b' '' of the spark gap switch 15 '. At the same time, the spark discharge is interrupted by the gas injected through the injection nozzle 42.

In addition, a spark gap between the discharge terminals 15a '' 'and 15b' '' is provided with a discharge interruption means 20 composed of the rotary disk 25 and a discharge interruption means 40 composed of the injection nozzles 42 at the same time. One or more switches 15 '' 'may be provided in series to continuously output a pulse high voltage to the plasma reactor 16 through the high frequency reactor L2.

FIG. 8A is a diagram showing voltage waveforms between the positive electrodes of a conventional plasma generator, and FIG. 8B is an enlarged view of one waveform of the voltage waveform of FIG. 8A, and shows the high voltage output between the spark gap switches 15. FIG. It can be seen that the pulse rise time Tr is 7 Hz, the wave length Th is 10.5 Hz, the pulse width TD is 14 Hz and the frequency f is 71 KHz.

9A is a diagram showing voltage waveforms between the positive electrodes of the plasma generating apparatus of the present invention, and FIG. 9B is an enlarged view of one waveform of the voltage waveform of FIG. 9A, and is generated in a spark gap switch provided with discharge interrupting means. The high voltage waveform outputted to the plasma reactor 16 through the high frequency reactor L2 is arbitrarily interrupted by the discharge interrupting means, and the pulse rise time Tr of the high voltage is 30 ns, and the wave length Th is 42 ns. It can be seen that the pulse width T _D is 60 ns and the frequency f is 16 MHz.

The plasma ionizing gas generating device of the present invention is not limited to the present embodiment, and it is apparent that various modifications, changes, deletions, and applications can be made within the spirit and scope of the present invention.

For example, the present invention has been described with the polarity of the high voltage rectifier 13 as a positive polarity, but the polarity of the high voltage rectifier 13 can be changed to a negative polarity. That is, when the polarity of the high voltage rectifier 13 is negative, the polarities of the discharge electrodes 17 and the counter electrodes 18 in the plasma reactor 16 are operated to be reversed, whereby the high voltage rectifier 13 is positive. By the same principle of operation as in the case of (+) polarity, plasma ionizing gas of active species is generated. In the case of the negative electrode in comparison with the positive electrode, a large amount of electrons can be released to make the dust particles well charged (charged). However, any positive and negative electrodes may be used as necessary.

In addition, industrial ozone generator, metal surface treatment apparatus, metal processing apparatus, high efficiency dust collector, wastewater and waste gas treatment apparatus, and odor removal by deodorization using plasma ionizer gas generator by streamer corona discharge according to the present invention It can be used in equipment and automobile exhaust gas treatment equipment.

As described above, in the plasma reactor, since the spark discharge generated between the spark gap switches is momentarily interrupted by the discharge interrupting means, the pulse rise time and pulse width of the high voltage output through the high frequency reactor can be significantly reduced. By generating a strong streamer corona discharge, it can generate a large amount of physically neutral, non-equilibrium low-temperature active species plasma ionizing gas at room temperature and atmospheric pressure, increase the number of high voltage pulses, and control the spark discharge between spark gap switches. Therefore, there is an excellent effect that can significantly reduce the unnecessary power consumption of spark discharge.

Claims (11)

Voltage control device 11 for controlling DC or AC voltage, high voltage transformer 12 for boosting AC voltage, high voltage rectifier 13 for converting boosted AC high voltage to DC high voltage, charging for pulse discharge In the plasma generating device comprising a capacitor C2, a spark gap switch for generating spark discharge, and a plasma reactor 16 for generating plasma, Discharge interruption means for arbitrarily interrupting the spark discharge generated in the spark gap switch; It is characterized in that it comprises a high frequency reactor (L2) to receive a high voltage output by the means, and to be a sharp high voltage pulse corona discharge by LC resonance according to the load impedance and capacitance of the plasma reactor 16 Apparatus for generating plasma ionizing gas by streamer corona discharge. The method of claim 1, The discharge interruption means 20 is characterized in that the spark discharge is interrupted by the rotary disk 25 formed with the required holes 28 between the discharge terminals 15a ', 15b' of the spark gap switch 15 '. Plasma ionizing gas generator by streamer corona discharge. The method of claim 2, The rotating disc 25 is formed with a predetermined number of holes 28 in the insulated disc, and is installed between the discharge terminals 15a ', 15b' of the spark gap switch 15 ', the rotating disc 25 A plasma ionizer gas generating device according to a streamer corona discharge, characterized in that the holes (28) of the c) and the discharge terminals (15a ', 15b') are matched. The method of claim 2 or 3, And a conductor inserted into the hole (28). The method of claim 1, The discharge control means 40 is sparked by the gas output through the injection nozzle 42 connected to the gas pipe 43 between the discharge terminals 15a '' and 15b '' of the spark gap switch 15 ''. An apparatus for generating a plasma ionizing gas by a streamer corona discharge, wherein the discharge is interrupted. The method of claim 5, The injection nozzle 42 is installed at the lower center between the discharge terminals 15a and 15b of the spark gap switch 15 so that the gas supplied through the compressor 35 is transferred through the gas pipe 43. And a spark discharge generated between the discharge terminals (15a '', 15b '') to be interrupted by the injector gas, wherein the plasma ionizer generator is generated by the streamer corona discharge. The method of claim 1, The discharge control means 50 includes a hole 28 and a spray nozzle 42 formed in the rotating disc 25 between the discharge terminals 15a '' 'and 15b' '' of the spark gap switch 15 '' '. An apparatus for generating plasma ionizing gas by streamer corona discharge, characterized in that the spark discharge is interrupted by the spraying gas. The method of claim 1, Streamer corona characterized in that it comprises a reactor (L1) connected in series to control the high voltage output from the high voltage capacitor (C1) connected in series to supply a high voltage output from the high voltage rectifier (13) to a stable DC voltage Apparatus for generating plasma ionizing gas by discharge. The method of claim 1, And at least one discharge control means is connected in series to a spark gap switch. The method of claim 1, Plasma ionization by streamer corona discharge, characterized in that the polarity of the high voltage rectifier 13 is configured to be positive (+) or negative (-) polarity in order to change the polarity of the discharge electrode 17 and the counter electrode 18. Gas generator. The method of claim 1, Streamer ionizing gas generator by streamer corona discharge, characterized in that when the DC voltage is supplied to the voltage control device (11) is converted to an AC voltage using an inverter.

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