JPH07265655A - Plasma-process waste gas purifying device - Google Patents

Plasma-process waste gas purifying device

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Publication number
JPH07265655A
JPH07265655A JP6063463A JP6346394A JPH07265655A JP H07265655 A JPH07265655 A JP H07265655A JP 6063463 A JP6063463 A JP 6063463A JP 6346394 A JP6346394 A JP 6346394A JP H07265655 A JPH07265655 A JP H07265655A
Authority
JP
Japan
Prior art keywords
plasma
electrodes
exhaust gas
electrode
discharge electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP6063463A
Other languages
Japanese (ja)
Inventor
Hiroshige Arai
浩成 荒井
Hidehiko Maehata
英彦 前畑
Tetsuya Inoue
鉄也 井上
Kenji Yasuda
賢士 保田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Zosen Corp
Original Assignee
Hitachi Zosen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Zosen Corp filed Critical Hitachi Zosen Corp
Priority to JP6063463A priority Critical patent/JPH07265655A/en
Publication of JPH07265655A publication Critical patent/JPH07265655A/en
Withdrawn legal-status Critical Current

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Abstract

PURPOSE:To improve the contact efficiency between plasma and waste gas by arranging the discharge electrode and counter electrode consisting of a mesh having a different density from each other in a flue to pass the whole amt. of waste gas. CONSTITUTION:A reactor formed by alternately providing plural discharge electrodes 13 and plural counter electrodes 14 and a high-voltage pulse power source 12 connected to the electrodes 13 and 14 are set in a flue 11. The discharge electrode 13 is formed with a coarse mesh and the counter electrode 14 with a dense mesh. The whole amt. of waste gas is passed through the electrodes 13 and 14. Consequently, a large-area plasma is produced close to the discharge electrode 13, the whole amt. of waste gas 15 is brought into contact with the plasma, and contact efficiency is improved.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、発電用ボイラ、各種燃
焼機関、燃焼炉等から排出される排ガス中に含まれる有
害物質を浄化する手段の1つであるプラズマ法排ガス浄
化装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plasma method exhaust gas purifying apparatus which is one of means for purifying harmful substances contained in exhaust gas discharged from power generation boilers, various combustion engines, combustion furnaces and the like.

【0002】[0002]

【従来の技術】プラズマ法排ガス浄化装置は、公知のも
のであり(公表特許公報昭63−500020号公報参
照)、この原理を図6を参照して説明する。
2. Description of the Related Art A plasma method exhaust gas purifying apparatus is known (see Japanese Patent Laid-Open No. 63-500020), and its principle will be described with reference to FIG.

【0003】図6において、(1) はプラズマを発生させ
るための高電圧パルス発生電源を示し、(2) はワイヤ型
放電電極、(3) はプレート型対向電極を示す。この両電
極(2)(3)間にパルスピーク電圧1kV〜500Kv、パ
ルス周波数10HZ〜250HZ、パルス幅1ナノ秒〜
10マイクロ秒、立ち上がり時間100kV/ナノ秒〜
100V/ナノ秒の高電圧パルスを連続的に印加する
と、電極間に非平衡プラズマ(4) が発生する。この発生
プラズマ(4) は、非対称な電極間におけるパルスストリ
ーマコロナ放電であり、電流の大部分は電子によるもの
である。このような場に有害ガス成分を含む排ガス(5)
を通じるとプラズマ(4) によって各種ラジカルが発生す
る。ラジカルの生成は電極間全域で行われる。
In FIG. 6, (1) shows a high voltage pulse generating power source for generating plasma, (2) shows a wire type discharge electrode, and (3) shows a plate type counter electrode. A pulse peak voltage of 1 kV to 500 Kv, a pulse frequency of 10 HZ to 250 HZ, and a pulse width of 1 nanosecond to between both electrodes (2) and (3).
10 microseconds, rise time 100 kV / nanoseconds ~
When a high voltage pulse of 100 V / nanosecond is continuously applied, a non-equilibrium plasma (4) is generated between the electrodes. This generated plasma (4) is a pulse streamer corona discharge between asymmetric electrodes, and most of the current is due to electrons. Exhaust gas containing harmful gas components in such a place (5)
Then, various radicals are generated by plasma (4). Radicals are generated between the electrodes.

【0004】ここで、パルスストリーマコロナ放電は、
前記電子性電流によるラジカル生成域を広域化するとい
う特徴のほかに、短時間に放電を行うことにより、導通
ブリッジの形成による大きなイオン電流スパークの発生
(すなわちギャップの絶縁破壊)を抑制するという特徴
も有している。また、パルス電源のピーク値Vpはスト
リーマコロナ放電に必要な電圧(数kV)以上であり、
パルス立上り時間Trはストリーマの形成速度(100
0km/s)以上必要である。また、排ガス処理効果を
高めるため(ストリーマ中の電子を加速してこの電子に
より排ガス分子を活性化させる)には、ΔVp/ΔTr
値が大きいことが望ましい。
Here, the pulse streamer corona discharge is
In addition to the feature of widening the radical generation region by the electronic current, the feature of suppressing generation of a large ionic current spark (that is, dielectric breakdown of the gap) due to formation of a conduction bridge by performing discharge in a short time. I also have. Further, the peak value Vp of the pulse power supply is equal to or higher than the voltage (several kV) required for the streamer corona discharge,
The pulse rise time Tr is the streamer formation speed (100
0 km / s) or more is required. Further, in order to enhance the exhaust gas treatment effect (accelerate the electrons in the streamer and activate the exhaust gas molecules by these electrons), ΔVp / ΔTr
A large value is desirable.

【0005】排ガス中の有害成分はこのラジカルとの反
応によりCOはCO2 に、SOxはSO3 に、NOxは
NO2 に酸化され、無害な形態あるいは捕集されやすい
形態に変化する。また、被処理ガスがごみ焼却炉からの
排ガスの場合、ガス中に含まれるダイオキシンなどは分
解されて無害化される。これらの反応が生じている反応
器内、あるいは反応器後流にアンモニア、石灰等を吹き
込むとSOx成分およびNOx成分はそれぞれ硫酸アン
モニウムおよび硝酸アンモニウムまたは硫酸カルシウム
および硝酸カルシウム等の固体に変化するので、後流に
電気集塵器あるいはバグフィルターを設けてこれらを捕
集することにより排ガス浄化が達成される。
By reacting with the radicals, the harmful components in the exhaust gas are oxidized into CO 2 , SO x into SO 3 , and NO x into NO 2, and are transformed into a harmless form or a form easily collected. Further, when the gas to be treated is the exhaust gas from the refuse incinerator, dioxins and the like contained in the gas are decomposed and rendered harmless. When ammonia, lime, etc. are blown into the reactor where these reactions occur or in the downstream of the reactor, the SOx component and NOx component change to solids such as ammonium sulfate and ammonium nitrate or calcium sulfate and calcium nitrate. An exhaust gas purification is achieved by providing an electrostatic precipitator or a bag filter and collecting them.

【0006】[0006]

【発明が解決しようとする課題】上記の図6に示した電
極では、プラズマはワイヤ型放電電極の長さ方向に間欠
的に発生し、したがって、プラズマに疎の部分ができて
プラズマと排ガスとの接触効率が良くないという問題が
あった。
In the electrode shown in FIG. 6, the plasma is generated intermittently in the lengthwise direction of the wire type discharge electrode. Therefore, a sparse portion is formed in the plasma and the plasma and the exhaust gas are separated from each other. There was a problem that the contact efficiency was poor.

【0007】本発明の目的は、プラズマと排ガスとの接
触効率を向上させることができるプラズマ法排ガス浄化
装置を提供することにある。
An object of the present invention is to provide a plasma method exhaust gas purifying apparatus capable of improving the contact efficiency between plasma and exhaust gas.

【0008】[0008]

【課題を解決するための手段】本発明によるプラズマ法
排ガス浄化装置は、煙道の内部に少なくとも1つの放電
電極および少なくとも1つの対向電極が交互に設けられ
てなる反応器と、両電極に接続された高電圧パルス発生
電源とを備え、両電極間に高電圧パルスを連続的に印加
することにより非平衡プラズマを発生させ、排ガスが反
応器中を通過する間に排ガス中の有害ガス成分を捕集し
やすい形態もしくは無害な形態に転換するプラズマ法排
ガス浄化装置において、放電電極および対向電極は、互
いに密度が異なるメッシュ状の電極であり、かつ排ガス
の全量を通すように煙道内に配置されていることを特徴
とするものである。
A plasma method exhaust gas purifying apparatus according to the present invention is connected to both a reactor and a reactor in which at least one discharge electrode and at least one counter electrode are alternately provided inside a flue. Equipped with a high-voltage pulse generation power supply, the non-equilibrium plasma is generated by continuously applying a high-voltage pulse between both electrodes, and harmful gas components in the exhaust gas are removed while the exhaust gas passes through the reactor. In the plasma-type exhaust gas purifying apparatus that converts into a form that is easy to collect or a harmless form, the discharge electrode and the counter electrode are mesh-shaped electrodes having different densities, and are arranged in the flue so as to pass the entire amount of exhaust gas. It is characterized by that.

【0009】[0009]

【作用】本発明によるプラズマ法排ガス浄化装置は、放
電電極および対向電極は、互いに密度が異なるメッシュ
状の電極であり、かつ排ガスの全量を通すように煙道内
に配置されているものであるから、放電電極近傍には大
面積のプラズマが発生し、排ガスの全量がプラズマと接
触する。
In the plasma-type exhaust gas purifying apparatus according to the present invention, the discharge electrode and the counter electrode are mesh-shaped electrodes having different densities, and are arranged in the flue so as to pass the entire amount of exhaust gas. A large-area plasma is generated in the vicinity of the discharge electrode, and the entire amount of exhaust gas comes into contact with the plasma.

【0010】[0010]

【実施例】本発明の実施例を、以下図面を参照して説明
する。なお、以下の説明において、図1の左右を左右と
いうものとする。
Embodiments of the present invention will be described below with reference to the drawings. In the following description, the left and right of FIG. 1 will be referred to as the left and right.

【0011】図1は、本発明によるプラズマ法排ガス浄
化装置を示し、図2はこの装置におけるプラズマ発生用
電極の概念を示す。
FIG. 1 shows a plasma-type exhaust gas purifying apparatus according to the present invention, and FIG. 2 shows the concept of a plasma generating electrode in this apparatus.

【0012】図1に示すように、プラズマ法排ガス浄化
装置は、煙道(11)の内部に複数の放電電極(13)および複
数の対向電極(14)が交互に設けられてなる反応器(10)
と、両電極(13)(14)に接続された高電圧パルス電源(12)
とを備えている。
As shown in FIG. 1, the plasma method exhaust gas purifying apparatus has a reactor (in which a plurality of discharge electrodes (13) and a plurality of counter electrodes (14) are alternately provided inside a flue (11). Ten)
And a high voltage pulse power supply (12) connected to both electrodes (13) (14)
It has and.

【0013】図2に示すように、放電電極(13)および対
向電極(14)は、いずれもメッシュ状の電極であり、放電
電極(13)は粗(開口面積大)のメッシュ、対向電極(14)
は密(開口面積大)のメッシュとされている。両電極(1
3)(14)は絶縁材製枠(16)内に支持されている。放電電極
(13)は、例えば縦横各5本の導電材料製ワイヤにより構
成され、対向電極(14)は、例えば縦横各17本の導電材
料製ワイヤにより構成され、放電電極(13)の電極面積は
対向電極(14)の電極面積に比べて大幅に小さくなされて
いる。そして、放電電極(13)と対向電極(14)とが、排ガ
ス(15)の流れ方向に対して垂直に配置されている。放電
電極(13)と対向電極(14)とは、排ガス(15)の流れ方向に
対して垂直でなくてもよく、これらは排ガス(15)の全量
を通すように煙道(11)内に配置されていればよい。
As shown in FIG. 2, the discharge electrode (13) and the counter electrode (14) are both mesh electrodes, and the discharge electrode (13) is a coarse (large opening area) mesh, counter electrode ( 14)
Is a dense (large opening area) mesh. Both electrodes (1
3) and (14) are supported in an insulating material frame (16). Discharge electrode
(13) is composed of, for example, five vertical and horizontal wires made of conductive material, and the counter electrode (14) is made of, for example, 17 vertical and horizontal wires made of conductive material, and the discharge electrode (13) has an electrode area facing each other. The size is significantly smaller than the electrode area of the electrode (14). The discharge electrode (13) and the counter electrode (14) are arranged perpendicular to the flow direction of the exhaust gas (15). The discharge electrode (13) and the counter electrode (14) do not have to be perpendicular to the flow direction of the exhaust gas (15), and they are in the flue (11) so as to pass the entire amount of the exhaust gas (15). It should be arranged.

【0014】図1に示す実施例では、電極(13)(14)は全
部で9枚とされ、これらの電極(13)(14)が、それぞれス
ペーサ(17)を介して粗密交互に排ガス(15)の流れ方向に
沿って並べられている。これらの電極(13)(14)を左から
順にNO.1からNO.9までとして区別すると、奇数
番号が、対向電極(14)となる密なメッシュ、偶数番号
が、放電電極(13)となる粗なメッシュとされている。そ
して、偶数番号の電極(13)は、回転スイッチ(18)を介し
て高圧パルス電源(12)の一端に接続され、奇数番号の電
極(14)同士は、導線により互いに接続され、その導線が
高圧パルス電源(12)の他端に接続されている。
In the embodiment shown in FIG. 1, the number of electrodes (13) and (14) is nine in total, and these electrodes (13) and (14) respectively alternate with the exhaust gas ( They are arranged along the flow direction of 15). These electrodes (13) and (14) were sequentially numbered from the left to NO. 1 to NO. When it is distinguished as up to 9, the odd number is a dense mesh which becomes the counter electrode (14), and the even number is a coarse mesh which becomes the discharge electrode (13). The even-numbered electrodes (13) are connected to one end of the high-voltage pulse power supply (12) via the rotary switch (18), and the odd-numbered electrodes (14) are connected to each other by a conductive wire, and the conductive wire is It is connected to the other end of the high voltage pulse power supply (12).

【0015】回転スイッチ(18)は、火花ギャップスイッ
チであって、モータ(19)によって駆動される回転バー(2
0)と、回転バー(20)の両端に設けられた2つの可動接点
(21)と、回転バー(20)の回転中心を中心とする円周上に
等間隔をおいて配置された8つの固定接点(22)とを備え
ており、回転バー(20)の回転に伴って、8つの固定接点
(22)の対向するもの同士の間の電路が順次回転バー(20)
を介して開閉されていく。したがって、回転バー(20)が
モータ(19)によって駆動されると、偶数番号の放電電極
(13)とこれの左右両側の対向電極(14)との間に順次プラ
ズマが発生する。なお、回転スイッチ(18)としては、パ
ルスの立ち上がり時間を短くし、かつパルス幅を狭くす
るという点から、モータ(19)により駆動される火花ギャ
ップスイッチが望ましいが、その他のスイッチを使用し
てもよい。
The rotary switch (18) is a spark gap switch, and is a rotary bar (2) driven by a motor (19).
0) and two movable contacts on both ends of the rotating bar (20)
(21) and eight fixed contacts (22) arranged at equal intervals on the circumference around the center of rotation of the rotating bar (20) are provided to rotate the rotating bar (20). Accompanied by eight fixed contacts
The electric circuit between the opposing ones of (22) is a rotating bar (20)
It will be opened and closed via. Therefore, when the rotating bar (20) is driven by the motor (19), even numbered discharge electrodes
Plasma is sequentially generated between (13) and the counter electrodes (14) on the left and right sides of the (13). As the rotary switch (18), a spark gap switch driven by the motor (19) is desirable from the viewpoint of shortening the pulse rise time and narrowing the pulse width, but other switches are used. Good.

【0016】この装置におけるプラズマ発生タイムチャ
ートを図3に示す。回転バー(20)が図2に示した位置に
あるときは、NO.2の放電電極(13)とNO.1および
NO.3の対向電極(14)との間にプラズマが発生する。
回転バー(20)がこの位置から時計回りに回転させられる
と、NO.4の放電電極(13)とNO.3およびNO.5
の対向電極(14)との間にプラズマが発生する。同様にし
て、回転バー(20)が時計回りに回転させられるのに伴っ
て、NO.6の放電電極(13)とNO.5およびNO.7
の対向電極(14)との間、NO.8の放電電極(13)とN
O.7およびNO.9の対向電極(14)との間、再びN
O.2の放電電極(13)とNO.1およびNO.3の対向
電極(14)との間に順次プラズマが発生する。NO.2の
放電電極(13)とNO.1およびNO.3の対向電極(14)
との間では、回転バー(20)によるスイッチング回数に限
界があるため、プラズマ発生の間隔は4ミリ秒で、プラ
ズマ発生回数は1秒間に250回であるが、この4ミリ
秒の間に他の電極同士の間にも1回ずつプラズマが発生
し、反応器内におけるプラズマ発生回数は1秒間に10
00回、すなわちデューティファクター(DF)=1/
1000となる。
A plasma generation time chart in this apparatus is shown in FIG. When the rotary bar (20) is in the position shown in FIG. No. 2 discharge electrode (13) and NO. 1 and NO. Plasma is generated between the counter electrode 14 of FIG.
When the rotary bar (20) is rotated clockwise from this position, NO. No. 4 discharge electrode (13) and NO. 3 and NO. 5
Plasma is generated between the counter electrode (14) and the counter electrode (14). Similarly, as the rotary bar (20) is rotated in the clockwise direction, NO. No. 6 discharge electrode (13) and NO. 5 and NO. 7
Between the counter electrode (14) of NO. 8 discharge electrodes (13) and N
O. 7 and NO. N between the counter electrode (14) of N
O. No. 2 discharge electrode (13) and NO. 1 and NO. Plasma is sequentially generated between the counter electrode 14 and the counter electrode 14. NO. No. 2 discharge electrode (13) and NO. 1 and NO. 3 counter electrodes (14)
Since there is a limit to the number of times of switching by the rotating bar (20) between and, the interval of plasma generation is 4 milliseconds and the number of plasma generations is 250 times per second. Plasma is also generated once between the electrodes, and the number of plasma generations in the reactor is 10 per second.
00 times, that is, duty factor (DF) = 1 /
It will be 1000.

【0017】図4には、密度の粗なメッシュ状放電電極
(13)付近に発生する電離能力を有する放電領域(P1)を示
し、図5には、図6に示した従来の装置におけるワイヤ
型放電電極(2) 付近に発生する電離能力を有する放電領
域(P2)を示す。図4および図5から分かるように、従来
の装置における電離能力を有する放電領域(P2)は、ワイ
ヤ型放電電極(2) 付近に限られ、したがって、排ガス
(5) との接触面積が非常に小さく、これに対して、本発
明の装置における電離能力を有する放電領域(P1)は、メ
ッシュ状放電電極(13)付近のほぼ全域にわたり、排ガス
(15)との接触面積が大きくなっている。なお、放電およ
び対向電極(13)(14)が共にメッシュ状であるので、排ガ
ス(15)流の圧損については従来のものに比べてあまり悪
くならない。
FIG. 4 shows a mesh-shaped discharge electrode having a coarse density.
(13) shows a discharge area (P1) having an ionizing ability in the vicinity, and FIG. 5 shows a discharge area having an ionizing ability in the vicinity of the wire type discharge electrode (2) in the conventional apparatus shown in FIG. (P2) is shown. As can be seen from FIG. 4 and FIG. 5, the discharge area (P2) having the ionizing ability in the conventional device is limited to the vicinity of the wire type discharge electrode (2), and therefore the exhaust gas
The contact area with (5) is very small, whereas the discharge area (P1) having the ionization capacity in the device of the present invention is almost the entire area near the mesh-shaped discharge electrode (13),
The contact area with (15) is large. Since the discharge and the counter electrodes (13) and (14) are both mesh-shaped, the pressure loss of the exhaust gas (15) flow is not much worse than that of the conventional one.

【0018】なお、上記実施例では、電極(13)(14)の数
は全部で9枚とされているが、この数は適宜変更され
る。上記装置をスケールアップするさいは、電極(13)(1
4)の数および面積を増やせばよく、容易にスケールアッ
プができる。
In the above embodiment, the total number of electrodes (13) and (14) is nine, but this number may be changed appropriately. When scaling up the above device, the electrodes (13) (1
It is sufficient to increase the number and area of 4) and it is possible to easily scale up.

【0019】[0019]

【発明の効果】本発明のプラズマ法排ガス浄化装置によ
ると、放電電極近傍には大面積のプラズマが発生し、排
ガスの全量がプラズマと接触するので、排ガスとプラズ
マとの接触効率が向上する。
According to the plasma type exhaust gas purifying apparatus of the present invention, a large-area plasma is generated in the vicinity of the discharge electrode, and the entire amount of the exhaust gas comes into contact with the plasma, so that the contact efficiency between the exhaust gas and the plasma is improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明によるプラズマ法排ガス浄化装置を概略
的に示す断面図である。
FIG. 1 is a cross-sectional view schematically showing a plasma method exhaust gas purification apparatus according to the present invention.

【図2】同装置におけるプラズマ発生用の電極の概念を
示す斜視図である。
FIG. 2 is a perspective view showing the concept of an electrode for plasma generation in the same apparatus.

【図3】同装置におけるプラズマ発生タイムチャートで
ある。
FIG. 3 is a plasma generation time chart in the same apparatus.

【図4】同装置における放電領域を概略的に示す図であ
る。
FIG. 4 is a diagram schematically showing a discharge region in the same device.

【図5】従来のプラズマ法排ガス浄化装置における放電
領域を概略的に示す図である。
FIG. 5 is a diagram schematically showing a discharge region in a conventional plasma-type exhaust gas purifying apparatus.

【図6】従来のプラズマ法排ガス浄化装置におけるプラ
ズマ発生用の電極の概念を示す斜視図である。
FIG. 6 is a perspective view showing the concept of electrodes for plasma generation in a conventional plasma-type exhaust gas purifying apparatus.

【符号の説明】[Explanation of symbols]

(10) 反応器 (11) 煙道 (12) 高圧パルス電源 (13) 放電電極 (14) 対向電極 (15) 排ガス (10) Reactor (11) Flue (12) High-voltage pulse power supply (13) Discharge electrode (14) Counter electrode (15) Exhaust gas

フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 B01D 53/56 53/60 53/74 B01D 53/34 132 A (72)発明者 保田 賢士 大阪市此花区西九条5丁目3番28号 日立 造船株式会社内Continuation of the front page (51) Int.Cl. 6 Identification number Office reference number FI Technical indication location B01D 53/56 53/60 53/74 B01D 53/34 132 A (72) Inventor Kenji Yasuda Nishi, Konohana-ku, Osaka 5-3-28 Kujo Inside Hitachi Shipbuilding Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 煙道の内部に少なくとも1つの放電電極
および少なくとも1つの対向電極が交互に設けられてな
る反応器と、両電極に接続された高電圧パルス発生電源
とを備え、両電極間に高電圧パルスを連続的に印加する
ことにより非平衡プラズマを発生させ、排ガスが反応器
中を通過する間に排ガス中の有害ガス成分を捕集しやす
い形態もしくは無害な形態に転換するプラズマ法排ガス
浄化装置において、放電電極および対向電極は、互いに
密度が異なるメッシュ状の電極であり、かつ排ガスの全
量を通すように煙道内に配置されていることを特徴とす
るプラズマ法排ガス浄化装置。
1. A reactor provided with at least one discharge electrode and at least one counter electrode alternately provided inside a flue, and a high-voltage pulse generating power source connected to both electrodes, and between both electrodes. A plasma method in which a non-equilibrium plasma is generated by continuously applying a high-voltage pulse to the gas, and while the exhaust gas passes through the reactor, the harmful gas components in the exhaust gas are converted into a form that is easy to collect or a harmless form. In the exhaust gas purifying apparatus, the discharge electrode and the counter electrode are mesh-shaped electrodes having different densities from each other, and are arranged in the flue so as to pass the entire amount of the exhaust gas.
JP6063463A 1994-03-31 1994-03-31 Plasma-process waste gas purifying device Withdrawn JPH07265655A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6063463A JPH07265655A (en) 1994-03-31 1994-03-31 Plasma-process waste gas purifying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6063463A JPH07265655A (en) 1994-03-31 1994-03-31 Plasma-process waste gas purifying device

Publications (1)

Publication Number Publication Date
JPH07265655A true JPH07265655A (en) 1995-10-17

Family

ID=13229964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6063463A Withdrawn JPH07265655A (en) 1994-03-31 1994-03-31 Plasma-process waste gas purifying device

Country Status (1)

Country Link
JP (1) JPH07265655A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005135894A (en) * 2003-10-07 2005-05-26 Daikin Ind Ltd Discharge device and air cleaning device
JP2014193807A (en) * 2014-04-14 2014-10-09 Daikoh Shoji Corp Hydrogen generation method, apparatus for execution of the method and fuel power generator for vehicle using the apparatus
KR20220073288A (en) * 2020-11-26 2022-06-03 현대제철 주식회사 Treatment apparatus of particle and gas material

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005135894A (en) * 2003-10-07 2005-05-26 Daikin Ind Ltd Discharge device and air cleaning device
JP2014193807A (en) * 2014-04-14 2014-10-09 Daikoh Shoji Corp Hydrogen generation method, apparatus for execution of the method and fuel power generator for vehicle using the apparatus
KR20220073288A (en) * 2020-11-26 2022-06-03 현대제철 주식회사 Treatment apparatus of particle and gas material

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