JPH08156274A - Production of ink jet recording head, ink jet recording head, and recording device - Google Patents

Abstract

PURPOSE: To prevent inclusion of air by a method wherein a dissoluble solid layer of a pattern corresponding to liquid flow paths is provided on a substrate, a cover plate is bonded thereon, an active energy beam-curing material is casted in a pressure reduction atmosphere, and the solid pattern layer is removed after the site forming the liquid flow paths is cured. CONSTITUTION: Liquid delivery energy generation elements 7 are arranged correspondingly to orifices in number. A solid layer 8 is laminated on a liquid flow path-forming site and the like of a substrate 1. A cover plate 4 having an ink supply port 6 and other holes is bonded to the substrate 1 (a, b). An active energy beam-curing material 2 is casted from the ink supply port 6 into a space between the substrate 1 and the cover plate 4 in a pressure reduction atmosphere so as to cover the solid layer 8 (c). A mask 12 is laminated on the cover plate 4 correspondingly to a site where the active energy beam-curing material is unwanted, and an active energy beam 11 is emitted thereto from above to form a cured resin layer and bond the cover plate 4 (d). An orifice end face is exposed by cutting it at a required position (e, f).

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an ink jet recording head for ejecting recording liquid droplets for recording, an ink jet recording head and a recording apparatus.

[0002]

2. Description of the Related Art An ink jet recording head applied to an ink jet recording system generally generates a fine recording liquid discharge port (hereinafter referred to as an orifice), a liquid flow path, and liquid discharge energy generation provided in a part of the liquid flow path. And a section. Conventionally, as a method of manufacturing such an ink jet recording head, a manufacturing method as shown in FIG. 8 has been used.

As shown in FIG. 8 (a), an energy generating element 7 such as an electrothermal converting element is provided on a substrate 1, and as shown in FIG. 8 (b), a photolithography method which is usually performed is used. , Orifice 1 on base 1
3, a liquid channel groove 14 communicating with the opening 13 and a common liquid chamber groove 15 common to the respective liquid channel grooves are respectively formed, and thereafter, as shown in FIG. The lid plate 4 having the liquid supply port 6 formed thereon is joined to the base body 1.

This manufacturing method is a relatively effective method when the recording head is small, but when the recording head is large, for example, the orifices have a predetermined pitch over a length corresponding to the recording width of the recording medium. In the case of a so-called full-multi-type recording head that is arranged in a line, the surface accuracy of the joint surface such as the warp or surface roughness of the base or cover plate becomes low, and it is difficult to bond the base and the cover plate. there were.

Further, since the film forming and patterning process is introduced into the manufacturing process of the substrate, a considerable surface accuracy can be obtained, but the internal stress of the film formed causes the substrate to warp. Cheap. Further, in order to improve the surface accuracy of the lid plate, polishing is required, which is expensive.

The manufacturing method shown in FIG. 9 is disclosed in JP-A-02-12.
692, and consists of the following steps.

(1) A liquid flow path formation planned site and a common liquid chamber planned site on a substrate 1 provided with an element 7 for generating energy used for discharging a liquid along these shapes. Step of providing solid layer 8 that can be dissolved and removed (FIG. 9)
(A)).

(2) On the substrate 1 provided with the solid layer 8,
A step of coating the active energy ray-curable material 2 in a reduced pressure atmosphere (FIG. 9B).

(3) A step of joining the substrate 1 coated with the active energy ray-curable material 2 and the cover plate 4 in a reduced pressure atmosphere (FIG. 9 (c)).

(4) A mask 12 covers the portion of the active energy ray-curable material 2 where the common liquid chamber is to be formed and other portions where the active energy ray-curable material 2 is unnecessary.
Irradiating the active energy ray 11 to a portion other than this portion,
Step of curing (FIG. 9 (d)).

(5) A step of dissolving and removing the uncured portion of the active energy ray-curable material 2 on which the mask 12 is applied (FIG. 9E).

(6) A step of dissolving and removing the solid layer 8 having a pattern corresponding to the liquid flow path (FIG. 9E).

With this manufacturing method, it is possible to manufacture the full-multi type recording head with high yield. However, when considering productivity, there were the following problems.

(1) A vacuum device having a large chamber is required, which increases the cost of the device.

(2) The work in which the base body 1 and the cover plate 4 are joined in a vacuum is not fixed, and thus is difficult to handle.

(3) Ink supply port 6 provided on the cover plate 4
The active energy ray-curable material 2 overflows from the inside, causing a problem in the step of irradiating the active energy ray 11. Alternatively, a device or personnel for removing the overflowing active energy ray-curable material 2 is required, which causes a cost increase.

[0017]

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above problems, and is excellent in productivity and has no bubbles in the active energy ray-curable material which causes a decrease in yield. An object of the present invention is to provide a recording head manufacturing method, an inkjet recording head, and a recording apparatus.

[0018]

DISCLOSURE OF THE INVENTION The present invention is intended to solve the above-mentioned problems, and its gist is to have an ejection energy generating element in a part of a liquid flow path and to utilize the ejection energy generated by the element. In a method of manufacturing an inkjet recording head for ejecting recording liquid droplets to perform recording, a step of providing a solid layer capable of being dissolved and removed on a substrate on which the element is disposed in a pattern corresponding to at least the liquid flow path , A step of joining a lid plate on the base body provided with the solid layer, an active energy ray curable material forming a part of the liquid flow path is injected between the base body and the lid plate by a capillary phenomenon in a reduced pressure atmosphere. The step of irradiating with an active energy ray, the step of curing at least the portion constituting the liquid flow path of the portion into which the active energy ray-curable material is injected, and
In the method for manufacturing an inkjet recording head and the method for manufacturing an inkjet recording head, the step of removing the solid layer having a pattern corresponding to the liquid flow path, and injecting a substrate when injecting the active energy. An inkjet recording head manufacturing method, an inkjet recording head, and a recording apparatus are characterized in that a temperature of a portion is high and a temperature of an outer peripheral portion is low.

[0019]

With the above construction, since the active energy ray-curable material is injected between the substrate and the lid plate by a capillary phenomenon in a reduced pressure atmosphere after joining the substrate and the lid plate, air bubbles are mixed in the manufacturing process. Can be prevented.

Further, since the base and the lid plate are joined together without the active energy ray-curable material, the warp and low surface accuracy of the base and the lid plate are alleviated, and the base plate and the lid plate can be joined easily. .

Further, in terms of productivity, the vacuum apparatus used does not require a joining mechanism as compared with the conventional method, and can be considerably miniaturized. Handling at the time of taking out from the vacuum device was also improved. Since the active energy ray-curable material is injected by a capillary phenomenon without applying pressure, it is possible to prevent the active energy ray-curable material from overflowing from the ink supply port.

The injection of the active energy ray-curable material can be made smooth and the tact can be shortened because the viscosity becomes low by raising the temperature of the substrate. Moreover, since the outer peripheral portion has a high viscosity at a low temperature, it is possible to further prevent the outer peripheral portion from overflowing.

The present invention brings excellent effects particularly in an ink jet type recording head and a recording apparatus for recording by forming flying droplets by utilizing thermal energy among the ink jet recording systems.

Regarding the typical structure and principle thereof, see, for example, US Pat. Nos. 4,723,129 and 4740.
What is done using the basic principles disclosed in 796 is preferred. This method can be applied to both the so-called on-demand type and continuous type, but especially in the case of the on-demand type, liquid (ink)
By applying at least one drive signal to the electrothermal converter arranged corresponding to the sheet or liquid path in which is stored, which corresponds to the recorded information and causes a rapid temperature rise exceeding nucleate boiling. , It is effective because it generates heat energy in the electrothermal converter and causes film boiling on the heat-acting surface of the recording head, resulting in the formation of bubbles in the liquid (ink) corresponding to this drive signal on a one-to-one basis. Is. The liquid (ink) is ejected through the ejection openings by the growth and contraction of the bubbles to form at least one droplet. It is more preferable to make this drive signal into a pulse shape because bubbles can be immediately and appropriately grown and contracted, so that liquid (ink) ejection with excellent responsiveness can be achieved.

As the pulse-shaped drive signal, those described in US Pat. Nos. 4,463,359 and 4,345,262 are suitable. If the conditions described in US Pat. No. 4,313,124 of the invention relating to the rate of temperature rise on the heat acting surface are adopted, more excellent recording can be performed.

As the constitution of the recording head, in addition to the combination constitution of the discharge port, the liquid passage, and the electrothermal converter (the linear liquid passage or the right-angled liquid passage) as disclosed in the above-mentioned respective specifications. The present invention also includes configurations using US Pat. No. 4,558,333 and US Pat. No. 4,459,600, which disclose a configuration in which a heat acting portion is arranged in a bending region.

In addition, JP-A-59-123670 discloses a structure in which a common slit is used as a discharge portion of the electrothermal converter for a plurality of electrothermal converters, and a pressure wave of thermal energy is absorbed. The present invention is also effective as a configuration based on Japanese Patent Application Laid-Open No. 59-138461, which discloses a configuration in which an opening corresponds to a discharge portion.

Further, as a full line type recording head having a length corresponding to the width of the maximum recording medium which can be recorded by the recording apparatus, the length can be increased by combining a plurality of recording heads as disclosed in the above-mentioned specification. The present invention can exert the above-mentioned effects more effectively, although it may have a configuration that satisfies the above requirement or a configuration as one recording head integrally formed.

In addition, by being attached to the apparatus main body, it can be electrically connected to the apparatus main body and can be supplied with ink from the apparatus main body by a replaceable chip type recording head or the recording head itself. The present invention is also effective when a cartridge-type recording head provided with an ink tank is used.

Further, it is preferable to add recovery means for the recording head, preliminary auxiliary means, etc., which are provided as a configuration of the recording apparatus of the present invention, because the effects of the present invention can be further stabilized. If you list these specifically,
Capping means, cleaning means, pressurizing or sucking means for the recording head, preheating means using an electrothermal converter or another heating element or a combination thereof, and a preliminary ejection mode for performing ejection other than recording It is also effective to perform stable recording.

Further, as the recording mode of the recording apparatus, not only the mainstream color such as black is recorded but also the recording head may be integrally formed or a plurality of them may be combined. The present invention is also extremely effective for a device provided with at least one of full colors by color mixing.

In the embodiments of the present invention described above, the ink is described as a liquid, but it is an ink that solidifies at room temperature or lower and that softens at room temperature, or is a liquid, or the above-mentioned liquid. In the inkjet method, the temperature of the ink itself is generally adjusted within a range of 30 ° C. or higher and 70 ° C. or lower to control the temperature of the ink so that the viscosity of the ink is within a stable ejection range. It may be in a liquid form.

In addition, the temperature rise due to thermal energy is positively prevented by being used as energy for changing the state of the ink from the solid state to the liquid state, or the ink is solidified in a standing state for the purpose of preventing evaporation of the ink. In some cases, such as ink that is liquefied by applying heat energy according to a recording signal and ejected as a liquid ink, or one that has already started to solidify when it reaches a recording medium. The use of an ink having a property of being liquefied only by heat energy is also applicable to the present invention. In such a case, the ink is disclosed in JP-A-54-5684.
No. 7 or JP-A-60-71260, a mode in which the porous sheet is opposed to the electrothermal converter in the state of being held as a liquid or solid in the recess or through hole of the porous sheet. May be In the present invention, the most effective one for each of the above-mentioned inks is to execute the above-mentioned film boiling method.

In addition, as a form of the recording apparatus according to the present invention, in addition to a recording apparatus provided integrally or separately as an image output terminal of information processing equipment such as a word processor or a computer, a copying apparatus combined with a reader or the like, May take the form of a facsimile machine having a transmission / reception function.

[0035]

Embodiments of the present invention will be described below in detail with reference to the drawings. Embodiment 1 FIGS. 1A to 1F show a method of manufacturing an inkjet recording head according to an embodiment of the present invention in the order of steps. Step (a) (FIG. 1A) The substrate 1 is provided with liquid discharge energy generating elements 7 such as electrothermal converting elements or piezoelectric elements corresponding to the number of orifices. Control signal input electrodes (not shown) for operating these elements are connected to these elements 7. Further, in general, various functional layers such as a protective layer are provided for the purpose of improving the durability of these ejection energy generating elements, but of course in the present invention, such functional layers may be provided.

Next, along the shape of the liquid flow path forming portion on the base 1 including the liquid discharge energy generating element 7 and the common liquid chamber forming portion communicating with the liquid flow passage forming portion, as shown in FIG.
The solid layer 8 shown in (a) is laminated.

In the present invention, it is not always necessary to provide a solid layer on both the liquid flow passage and the common liquid chamber forming portion, and the solid layer may be provided at least on the liquid flow passage forming portion.

The solid layer 8 is dissolved and removed after the steps described below, and a liquid flow path and a common liquid chamber are formed in the removed portion. Examples of materials and means used for forming such a solid layer 8 include the following. (1) Using a photosensitive dry film, a solid layer is formed according to a dry film patterning process. (2) Using a photosensitive liquid photoresist, a solid layer is formed according to a photoresist patterning process. (3) Print the resin.

As the photosensitive dry film mentioned in (1), either a positive type or a negative type can be used, but it must be one that can be dissolved or peeled off in a later step.

Specific examples of the positive dry film include "OZATEC R225" [trade name, Hoechst Japan KK] "OZATEC T series" [trade name, Hoechst Japan KK] "PHOTEC PHT series" Trade name, Hitachi Chemical Co., Ltd. "RISTON" [trade name, Ju Pon de Nemours Co., etc. are used.

The photosensitive photoresist mentioned in (2) is typically a positive photoresist made of novolac type phenol resin and naphthoquinone diazide, a negative type liquid photoresist made of polyvinyl cinnamate,
A negative type liquid photoresist composed of cyclized rubber and bisazide may be used.

As the positive photoresist, specifically, "AZ-4903" [trade name, Hoechst Japan KK] "PL-268" [trade name, Hoechst Japan KK] and the like are used.

As the material for forming the solid layer by the printing method mentioned in (3), for example, a flat plate ink, a screen ink and a transfer type which are used in respective drying methods such as evaporation drying type, thermosetting type and ultraviolet curing type are used. Resin, etc. are also used.

Among the materials listed above, the means using (1) a photosensitive dry film or (2) a photosensitive liquid photoresist is preferable in terms of processing accuracy, ease of removal, workability and the like. Considering the degree of freedom of thickness (height of liquid flow path), (2) photosensitive liquid photoresist is advantageous, and of these, positive liquid photoresist is particularly preferable. That is, the positive type liquid photoresist, the thickness can be freely set by the coating conditions,
It is suitable for forming a liquid flow path, such as a pattern having a vertical and smooth side wall surface. Further, it has a feature that it can be easily dissolved and removed in a subsequent step, and is preferable as a solid layer forming material in the present invention. Step (b) (FIG. 1B) The lid plate 4 having the ink supply port 6 and other holes is joined to the base body 1 on which the solid layer 8 is formed.

The distance between the substrate and the cover plate is the layer thickness of the active energy ray-curable material to be injected in the subsequent step, so it is necessary to secure the required distance. As means therefor, there are a method of providing a spherical spacer such as glass beads or a plate spacer such as a resin film between the base and the cover plate, or a method of securing a distance between the base and the cover plate by an apparatus used for bonding. However, the present invention is not limited by any method.

Further, it is necessary to fix the joined base and lid plate. Various adhesives can be used as the bonding agent 10. It is particularly preferable to use an active energy ray-curable material as the bonding agent 10. As a result, the active energy ray-curable material 2 and the bonding agent 10 that are injected in the subsequent step are the same material, so that the mutual relationships such as adhesion can be optimized.

As described above, the cover plate 4 is provided with the ink supply port and other holes. In the post process,
Since the active energy ray irradiation is performed from the lid plate 4 side, the lid plate 4
Must be transparent to active energy rays.

Thus, a laminated body is obtained in which the base body 1 on which the solid layer 8 is formed and the lid plate 4 are joined with a required space. Step (c) (FIG. 1 (c)) In the space between the base 1 and the cover plate 4 of the laminate, the active energy ray-curable material 2 is applied from the ink supply port 6 in a reduced pressure atmosphere so as to cover the solid layer 8. Inject.

Since the active energy ray-curable material forms a liquid flow path and a common liquid chamber and serves as a structural material of an ink jet recording head, it has adhesiveness to a substrate, mechanical strength, dimensional stability and corrosion resistance. It is preferable to select and use those having excellent properties. Furthermore, it is necessary to have the property of not attacking the solid layer. Further, since the active energy ray curable material is used in a reduced pressure atmosphere, if a solvent is contained in the material, it foams and becomes a defect of the liquid flow path. Need to be

Specific examples of such a material are liquid and suitable for ultraviolet curing and electron beam curing. Among them, epoxy resin, acrylic resin, diglycol dialkyl carbonate resin, unsaturated polyester resin, polyurethane resin, Polyimide resin, melamine resin, phenol resin, urea resin and the like are used. In particular,
Epoxy resins capable of initiating cationic polymerization by light, acrylic oligomers having an acrylic ester group capable of radical polymerization by light, photo-addition polymerization type resins using polythiols and polyenes, unsaturated cycloacetal resins, etc. It is suitable for a structural material because it has a large particle size and the polymer has excellent physical properties.

The step of injecting the active energy ray-curable material 2 is performed by using an apparatus as described later with reference to FIG. Step (d) (FIG. 1 (d)) The active energy ray 1 is applied to the portion where the common liquid chamber is to be formed and other portions where the active energy ray-curable material is unnecessary.
The mask 12 is laminated on the active energy ray transparent cover plate 4 so as to be shielded from the active energy ray 1, and the active energy ray 11 is irradiated from above the mask 12. This active energy ray 11
By the irradiation of 1, the active energy ray curable material in the irradiated portion is cured to form a cured resin layer, and the curing also joins the base 1 and the cover plate 4.

As the active energy rays, ultraviolet rays, electron rays, visible rays and the like can be used. However, since the exposure is performed through the cover plate 4, ultraviolet rays and visible rays are preferable, and ultraviolet rays are most preferable in terms of polymerization rate. Is suitable.

As the mask for the active energy rays, particularly when ultraviolet rays or visible rays are used, a metal mask, a silver salt emulsion mask, a diazo mask and the like can be mentioned.

Then, for example, when the end face of the orifice is not exposed, if necessary, the end face of the orifice is cut with a dicing saw using a diamond blade or the like at a required position where the curing by the irradiation of active energy rays is completed. Expose. Steps (e), (f) (Fig. 1
(E), (f) The uncured active energy ray-curable material 2 and the solid layer 8 are removed from the laminate after the irradiation with active energy rays to form a common liquid chamber and a liquid flow path. .

In this embodiment, the active energy ray-curable material in the common liquid chamber forming portion is not irradiated with the active energy ray and is removed in an uncured state. Therefore, the active energy ray-curable material laminated on the solid layer is removed. It is possible to freely form the liquid chamber irrespective of the liquid flow path by controlling the layer thickness of.

The means for removing the uncured active energy ray-curable material 2 and the solid layer 8 is not particularly limited. For example, the uncured active energy ray-curable material 2 and the solid layer 8 are dissolved. A method of immersing in a liquid and removing it is preferable. At this time, if necessary, ultrasonic waves, spraying, heating, stirring, circulation, or other removal promoting means can be used.

The liquid used for the removing means is, for example, a halogen-containing hydrocarbon, a ketone, an ester,
Aromatic hydrocarbons, ethers, alcohols, water containing acids or alkalis, and the like can be mentioned. If necessary, a surfactant may be added to these liquids.

FIG. 1 (f) shows a state after the removal of the uncured active energy ray-curable material 2 and the solid layer 8 as described above. In the case of this example, they are immersed in a liquid that dissolves them, and dissolved and removed through the orifice of the head and the ink supply port 6 as shown by the arrow in FIG.

After the above steps have been completed, the orifice surface may be subjected to finishing processing such as cutting, grinding and polishing, and if necessary, water repellent treatment may be applied to the orifice surface.

FIG. 2 is a schematic perspective view of an apparatus that enables step (c) of the above manufacturing method. In FIG. 2, 20
Is a vacuum chamber, 21 is a dispenser head for applying the liquid active energy ray-curable material 2 to the laminated body 60 of the substrate 1 and the lid plate 4, and has a valve for controlling ON / OFF of the application. 22 is a storage tank for the same material 2, and dispenser head 2 through a tube or the like.
The same material 2 is pressure-fed to 1.

First, after reaching the set degree of vacuum, the laminated body 60 is sent under the dispenser head 21, and the liquid active energy ray-curable material 2 is filled in the holes of the cover plate 4 such as the ink supply port 6. Applied to. At this time, the dispenser head 21 and the laminated body 60 are relatively positioned by a ball screw 31 and a motor 32 that rotationally drives the X direction, and a ball screw 33 and a motor (not shown) that rotationally drives the Y direction. .

The degree of vacuum in the vacuum chamber may be such that the active energy ray-curable material 2, the solid layer 8 and other various film materials on the substrate 1 or materials in the vacuum chamber do not cause alteration such as gasification. For example, the higher the degree of vacuum, the greater the effect on air bubble inclusion. As a result of an experiment conducted by the present inventor, 1
It has been confirmed that bubbles are not mixed in the active energy ray-curable material 2 when the degree of vacuum is higher than 0 ^-3 Torr. Moreover, it has been confirmed that no bubbles are mixed in if an injection method that does not entrap bubbles is taken even at a vacuum degree of about 5 × 10 ⁻³ Torr, but delicate active energy considering the injection speed and direction. It is necessary to control the application of the line curable material 2. Example 2 Similar to Example 1, active energy ray curing was performed so as to cover the solid layer 8 in the space between the substrate 1 and the lid plate 4 of the laminate obtained through the steps of FIGS. 1 (a) and 1 (b). 1 (c) where the temperature of the central portion of the substrate that requires energy ray-curable curing is high and the active energy ray-curable resin at the edge of the substrate is not required Was set to be low.

As shown in FIG. 7, the setting of this temperature is divided into a block in which a portion requiring curing of the active energy ray-curable resin and a portion in which it is not necessary are divided into heaters 101a and 101b. And the temperature sensor 103 are embedded, and the block 10 of the unnecessary part
4 was perforated so that cooling water could flow, so that the temperature became low. In the present example, although the temperature of the central portion of the substrate depends on the resin, the tact reduction due to the decrease in the viscosity of the resin between 30 ° C. and 60 ° C. is drastically shortened and effective. Although it is possible to make it more than that, there was a tendency of equilibrium in terms of tact. The outer peripheral temperature is preferably 25 ° C. or lower, more preferably 20 ° C. or lower. In the subsequent steps, active energy ray irradiation was performed in the same manner as in Example 1, and the uncured material 2 and the solid layer were removed from the laminated body after the irradiation to form the common liquid chamber portion and the liquid flow path. According to this embodiment, the active energy ray curable material can be injected very smoothly because the temperature is high in the central portion of the substrate and the viscosity is low, so that the takt time can be shortened. Further, since the outer peripheral portion of the substrate has a high viscosity at a low temperature, it is possible to prevent the resin from overflowing to the outside of the substrate. Example 3 FIG. 6 shows a step (d) or a step (e) in a wafer state.
An example relating to the manufacture of a small recording head used in a serial printer by cutting after completion of the above will be described.

The wafer 1 (which has the same role as that of the base body up to now) and the cover plate 4 are bonded together with a gap maintained at a required distance by a spacer 18. The cover plate 4 is provided with ink supply ports 6 according to the number of recording heads to be taken.

The active energy ray curable material is injected by applying it to the ink supply port 6 by a capillary phenomenon. Fourth Embodiment Similar to FIG. 3, FIG. 4 shows an embodiment relating to the manufacture of a small recording head used in a serial printer by cutting after completion of step (d) or step (e) in a wafer state. Show.

The cover plate 4 is separated into strips for each of the facing recording heads, and the ink supply ports 6 are provided according to the number of recording heads to be taken. The lid plate 4 and the wafer 1 are
The spacers 18 are joined together with the gap being secured at a required distance.

The injection of the active energy ray-curable material is carried out by capillarity by line-coating the portion 19 without the cover plate (for example, the terminal forming portion for electrical external extraction). In the case of this embodiment, since line coating can be performed, the injection time can be greatly shortened. Fifth Embodiment FIG. 5 is an embodiment related to the manufacture of a small print head used in a serial printer by cutting the wafer after completion of step (d) or step (e) in the same manner as FIG. Show.

The cover plate 4 is separated into strips for each of the opposite recording heads as shown in FIG. 4, and ink supply ports 6 are provided according to the number of recording heads to be taken. The lid plate 4 and the wafer 1 are joined by a spacer 18 with a gap maintained at a required distance to form a laminated body 60. In the case of the present embodiment, the laminated body 60 is tilted at an angle θ so that the orientation flat 70 of the wafer faces downward. This angle θ
Must be within a range in which the meniscus of the active energy ray-curable material formed at the ends of the substrate 1 and the cover plate 4 at the injection inlet can be held.

The active energy ray-curable material is injected by a capillary phenomenon by line-coating the portion 19 without the cover plate (for example, a terminal forming portion for electrical external extraction) and by gravity by tilting the angle θ. Done. Therefore, in the case of this embodiment, the injection time can be further shortened.

[0070]

Other Embodiments An ink jet head and an ink jet device using the present invention will be described below.

FIG. 10 is a schematic configuration diagram of such an ink jet head. The electrothermal converter 1103, the wiring 1104, the liquid formed on the substrate 1102 through the semiconductor manufacturing process steps such as etching, vapor deposition and sputtering. An ink jet head including a road wall 1105 and a top plate 1106 is shown. The recording liquid 1112 is supplied from a liquid storage chamber (not shown) into the common liquid chamber 1108 of the head 1101 through a liquid supply pipe 1107.
In the figure, 1109 is a connector for a liquid supply pipe. The liquid 1112 supplied into the common liquid chamber 1108 is supplied into the liquid passage 1110 by a so-called capillary phenomenon, and is stably held by forming a meniscus at the discharge port surface (orifice surface) at the tip of the liquid passage. By energizing the electrothermal converter 1103 here, the liquid on the surface of the electrothermal converter is rapidly heated, bubbles are generated in the liquid path, and the liquid is ejected from the ejection port 1111 by expansion and contraction of the bubbles. Droplets are formed.

FIG. 11 is a schematic view of an ink jet device to which the present invention is applied, and a lead groove 5005 of a lead groove 5005 which rotates via driving force transmission gears 5011 and 5009 in association with forward and reverse rotation of a drive motor 5013. The carriage HC that engages with has a pin (not shown) and is reciprocated in the directions of arrows a and b. Reference numeral 5002 denotes a paper pressing plate which holds the paper in the platen 50 in the carriage movement direction.
Press against 00. Reference numerals 5007 and 5008 denote home position detecting means for confirming the presence of the lever 5006 of the carriage in this area by a photocoupler and switching the rotation direction of the motor 5013. Reference numeral 5016 is a member that supports a cap member 5022 that caps the front surface of the recording head. Reference numeral 5015 is a suction unit that suctions the inside of the cap to perform suction recovery of the recording head through the in-cap opening 5023. 5017 is a cleaning blade, 50
Reference numeral 19 denotes a member that allows the blade to move in the front-rear direction, and these members are supported by the main body support plate 5018.
Needless to say, a well-known cleaning blade can be applied to this example instead of this form. Also, 50
Reference numeral 12 denotes a lever for starting suction for suction recovery, which moves in accordance with the movement of the cam 5020 that engages with the carriage, and the driving force from the driving motor is movement-controlled by a known transmission means such as clutch switching. .

The capping, cleaning, and suction recovery are performed so that desired processing can be performed at their corresponding positions by the action of the lead screw 5005 when the carriage comes to the home position side area. Any of these can be applied to this example as long as the desired operation is performed. Each of the above-described configurations is an excellent invention, either alone or in combination, and shows a preferred configuration example for the present invention.

The apparatus has drive signal supply means for driving the ink ejection pressure generating element.

[0075]

As described above, since the active energy ray-curable material is injected between the substrate and the lid plate by a capillary phenomenon in a reduced pressure atmosphere after joining the substrate and the lid plate, bubbles in the manufacturing process are eliminated. Mixing can be prevented.

Further, since the base and the cover plate are joined together without the active energy ray-curable material, the warp and low surface accuracy of the base and the cover plate are alleviated, and the base plate and the cover plate can be joined easily. .

Regarding the productivity, the vacuum device used does not require a joining mechanism as compared with the conventional method, and the size can be considerably reduced. Handling at the time of taking out from the vacuum device was also improved. The injection of the active energy ray-curable material is performed by a capillary phenomenon without pressurizing, and the temperature of the central portion of the substrate requiring the active energy ray-curable resin is increased,
Since the temperature of the outer peripheral portion which does not require the active energy ray curable resin is lowered, the injection of the resin can be performed very smoothly, and the overflow of the active energy ray curable material from the ink supply port can be further prevented. In this way, productivity is greatly improved.

As a result of the above, an inexpensive recording head can be obtained.

[Brief description of drawings]

FIG. 1 (a), (b), (c), (d),
(E), (f) is a typical perspective view which shows the manufacturing method of the inkjet recording head of this invention.

FIG. 2 is a schematic perspective view of an apparatus used for manufacturing an inkjet recording head according to an embodiment of the present invention.

FIG. 3 is a schematic perspective view showing a method of manufacturing an inkjet recording head according to a third embodiment of the invention.

FIG. 4 is a schematic perspective view showing a method of manufacturing an inkjet recording head according to a fourth embodiment of the invention.

FIG. 5 is a schematic perspective view showing a method for manufacturing an inkjet recording head according to a fifth embodiment of the invention.

FIG. 6 is a schematic perspective view showing a method for manufacturing an inkjet recording head according to a sixth embodiment of the present invention.

FIG. 7 is a schematic perspective view of an apparatus used for manufacturing an inkjet head according to a second embodiment of the present invention.

8A, 8B, and 8C are schematic perspective views showing a conventional method for manufacturing an inkjet recording head.

FIG. 9A, FIG. 9B, FIG. 9C, and FIG. 9D are schematic perspective views showing a conventional method for manufacturing an inkjet recording head.

FIG. 10 is a schematic perspective view of an inkjet head of the present invention.

FIG. 11 is a perspective view of an inkjet recording apparatus to which the present invention is applied.

[Explanation of symbols]

 1, 10 Substrate, Wafer 2 Active Energy Ray Curable Material (Liquid Flow Path Constituent Member) 4,111 Cover Plate 6 Ink Supply Port 7 Ejection Energy Generation Element 8 Solid Layer 9 Common Liquid Chamber 10 Adhesive 11 Active Energy Ray 12 Mask 18,112 Spacer 13 Orifice 20 Vacuum chamber 21 Dispenser head 60 Laminated body

Claims (10)

[Claims] 1. A method of manufacturing an ink jet recording head, comprising an ejection energy generating element in a part of a liquid flow path, and ejecting recording droplets by utilizing ejection energy generated by the element to perform recording. A step of providing a solid layer on a substrate on which the element is arranged in a pattern corresponding to at least the liquid flow channel, a step of bonding a lid plate on the substrate provided with the solid layer, and a part of the liquid flow channel A step of injecting an active energy ray-curable material that forms a film by a capillary phenomenon in a reduced pressure atmosphere between the base body and the lid plate, and at least the liquid in a portion where the active energy ray-curable material is injected by irradiation of the active energy ray. An ink jet recording head comprising: a step of curing a portion forming a flow path; and a step of removing the solid layer having a pattern corresponding to the liquid flow path. Production method. 2. The method of manufacturing an ink jet recording head according to claim 1, wherein when the active energy ray-curable material is injected, the temperature of the central portion of the substrate which requires the active energy ray-curable resin is increased to activate the active energy ray-curable resin. A method for manufacturing an inkjet recording head, characterized in that the temperature of the outer peripheral portion which does not require the energy ray curable resin is lowered. 3. An inkjet recording head manufactured by the manufacturing method according to claim 1 or 2. 4. The ink jet recording head according to claim 3, wherein the ink ejection energy generating element is an electrothermal converter for generating heat by applying electric energy to cause the ink to change state and eject the ink. 5. The inkjet recording head according to claim 3, wherein the inkjet recording head is a full-line type in which a plurality of ejection openings are provided over the entire width of the recording area of the recording medium. 6. In the step of joining the substrate and the cover plate according to claim 1, the joining agent used in the step is the same material as the active energy ray-curable material forming a part of the liquid flow path. A method of manufacturing an inkjet recording head, comprising: 7. An ink jet method characterized in that the step of injecting the active energy ray-curable material according to claim 1 is performed by applying the material in a hole provided in a lid plate in a reduced pressure atmosphere. Recording head manufacturing method. 8. An ink jet method characterized in that, in the step of injecting the active energy ray-curable material according to claim 1, the material is injected by applying the same material on a substrate at an end portion of a cover plate in a reduced pressure atmosphere. Recording head manufacturing method. 9. In the step of injecting the active energy ray-curable material according to claim 1, the stacking body of the substrate and the cover plate is tilted, and the material is applied in a reduced pressure atmosphere so that capillary action and gravity are caused. A method for manufacturing an ink jet recording head, which comprises: 10. The recording head according to claim 3, wherein the recording head of the recording medium is provided with an ink ejection port for ejecting ink so as to face the recording surface of the recording medium, and a member for mounting the recording head. A recording device characterized by: