JPH08130155A - Coater - Google Patents

Abstract

PURPOSE: To eliminate pin-holes in a green sheet formed by coating. CONSTITUTION: Ceramic paint 17a is applied to the one side (a) of a flexible carrier 19 which travels in one direction F by a coating head 10. Respective rollers 121-127, 151, 152, 161 and 162 are so provide as to be brought into contact with only the side (b) of the flexible carrier which is opposite to the side (a) to which the ceramic paint 17a is applied.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coating apparatus for coating a flexible support with a ceramic coating or the like.

[0002]

2. Description of the Related Art A multilayer ceramic electronic component is manufactured by applying a ceramic paint containing a ceramic powder, an organic binder, a plasticizer, a solvent, etc., on a flexible support running in one direction by a doctor blade method to form a green sheet. After molding, an electrode made of palladium, silver, nickel or the like is formed on it by screen printing. Next, the green sheets are peeled from the flexible support so as to have a desired laminated structure, laminated one by one, and a ceramic green chip is obtained through a press cutting process. The binder in the ceramic green chip thus obtained is burned out and heated to 1000 ° C.
Firing at ˜1400 ° C. and forming terminal electrodes of silver, silver-palladium, nickel, copper or the like on the obtained fired body to obtain a ceramic electronic component.

By the way, in the case of a monolithic ceramic capacitor, for example, it is conceivable to reduce the thickness of each dielectric layer and increase the number of laminated layers as a method of reducing the size and increasing the capacity. However, in the method of separating the green sheet from the flexible support and laminating the green sheet, especially in the case of a thin green sheet, the green sheet cannot be well separated from the flexible support, resulting in a very poor lamination yield. Also, since thin green sheets are handled, defective products such as short circuits often occur in finished products.

As a means for solving such a problem,
A method of thermally transferring the green sheet so that the flexible support faces upward has also been proposed (JP-A-63-188926).
No.). However, in the case of the thermal transfer method, the upper electrode located on the one surface side of the dielectric layer and the lower electrode located on the other surface side are not properly aligned, and the thermal transfer is performed every time, so that the facility capacity becomes small.

Furthermore, as the green sheet becomes thinner and the number of layers is increased, the amount of the flexible support necessary for obtaining a kind of ceramic electronic component is increased and the cost is increased.

In order to solve such problems, a step of applying a ceramic coating to form a dielectric layer on a flexible support and a step of printing electrodes on the dielectric layer are required. A method is conceivable in which a laminate is obtained by repeating the number of laminations. However, one of the problems in this manufacturing method is that the roller of the coating device is usually provided so as to be in contact with the side of the flexible support on which the ceramic coating is applied, so that the roller is not dielectric. A pinhole is generated in contact with the body layer, and as a result, a short circuit defect is likely to occur.

[0007]

SUMMARY OF THE INVENTION An object of the present invention is to provide a coating apparatus capable of preventing pinholes from being formed in a coated green sheet.

Another object of the present invention is to provide a coating apparatus capable of obtaining a uniform green sheet having good surface accuracy and less variation in thickness.

[0009]

In order to solve the above problems, the coating apparatus according to the present invention includes a coating head and a plurality of rollers. The coating head coats the ceramic coating on one side of the flexible support that travels in one direction. Each of the rollers is arranged so as to contact only the surface of the flexible support opposite to the surface on which the ceramic coating is applied.

Preferably, the coating head is of the extrusion type.

More preferably, the coating head is provided with a plurality of nozzles. The coating apparatus according to the present invention further includes a metering pump and a mass flow meter, and the metering pump and the mass flow meter control the amount of coating material supplied to the coating head.

[0012] Preferably, at least one of the rollers applies a tension to the flexible support, and the tension has a width of 0.1 to 1.5 kgf / 100 mm.

[0013]

Since the coating head coats the ceramic coating on one side of the flexible support which runs in one direction, the green sheet can be formed on the flexible support. Since each of the rollers is arranged so as to contact only the surface of the flexible support opposite to the surface on which the ceramic coating is applied,
The roller does not come into contact with the applied and formed green sheet, and it is possible to prevent pinholes from being formed in the green sheet.

In a preferred example in which the coating head is of the extrusion type, the coating amount can be controlled, the surface accuracy is good, and a uniform green sheet with little thickness variation can be obtained.

The extrusion type coating head is suitable for forming a green sheet of ceramic paint having a low viscosity. Ceramic paints with low viscosity have a high drying shrinkage ratio, so the amount of supply can be increased to obtain the same thickness after drying, and the gap between the tip of the coating head and the flexible support (or green sheet) can be reduced. It can be made large and the occurrence of streaks due to the coating head can be avoided.

In a preferred example in which the coating head has a plurality of nozzles provided side by side, another coating layer can be formed immediately after the coating layer coated by one nozzle. Accordingly, the coating apparatus according to the present invention capable of preventing the occurrence of pinholes further includes a metering pump and a mass flow meter, and the metering pump and the mass flow meter control the supply amount of the coating material to the coating head. Therefore, it is possible to obtain a uniform green sheet in which the amount of coating material discharged from the coating head is stable, the surface accuracy is good, and the thickness variation is small.

In a preferred example in which at least one of the rollers is a roller which gives a tension to the flexible support, and the tension is 0.1 to 1.5 kgf / 100 mm width, the take-up reel can be formed into a green sheet. When the flexible support is wound, the green sheet does not transfer to the surface of the flexible support opposite to the coated surface.

Other features of the present invention and the effects thereof will be described in more detail with reference to the accompanying drawings.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a diagram showing a structure of a coating apparatus according to the present invention and a green sheet forming process using the coating apparatus. The coating apparatus according to the present invention includes a coating head 10 and a plurality of rollers 121 to 127, 151, 152, 161, and 1.
62 is included. Rollers 121 to 127 are guide rollers, rollers 151 and 152 are suction rollers, and roller 16
Reference numerals 1, 162 are meandering correction rollers. Reference numeral 11 is a delivery reel, 14 is a drying furnace, and 17 is a take-up reel.

The coating head 10 coats the ceramic coating 17a on one surface side a of the flexible support 19 traveling in one direction F. Rollers 121 to 127, 151, 152, 16
Each of Nos. 1 and 162 is arranged so as to contact only the surface b of the flexible support 19 opposite to the surface on which the ceramic paint 17a is applied. In order to make the surface of the green sheet uniform, the tension between the suction rollers 151-152 is controlled to control the drive-in dimension of the coating head 10 and the nozzle angle. The conventional coating device has a roller 121.
It was usual that some of 127 to 151, 152, 161 and 162 were in contact with the surface side to which the ceramic paint 17a was applied.

As described above, since the coating head 10 coats the ceramic coating 17a on the one surface a side of the flexible support 19 traveling in the one direction F, the green sheet 43 is formed on the flexible support 19. Can be continuously formed.

The rollers 121 to 127, 151 and 152,
Each of the rollers 161 and 162 is arranged so as to contact only the other surface b of the flexible support 19 opposite to the surface on which the ceramic coating is applied.
7, 151, 152, 161, and 162 do not contact the coated green sheet 43, and it is possible to prevent the pinholes from being generated in the green sheet 43.

After forming the green sheet 43, the flexible support 19 is dried through the drying oven 14 and the take-up reel 1
It is rolled up to 7.

FIG. 2 is a sectional view of the coating head, and FIG. 3 is a diagram for explaining a state of forming a green sheet using the coating head shown in FIG. The coating head is of the extrusion type. Reference numeral 46 is a slit for discharging ceramic paint, 4
7 is an upstream nozzle, 48 is a downstream nozzle, 49 is a ceramic paint pool, and 53 is a supply port to the ceramic paint pool. Such extrusion type coating head is known. In FIG. 3, reference numeral F1 indicates the traveling direction of the flexible support 19.

In a preferred example in which the coating head 10 is of the extrusion type, the coating amount can be controlled, the surface accuracy is good, and a uniform green sheet with little thickness variation can be obtained. In forming the green sheet to be the first protective film, a conventional doctor blade method or reverse roll method may be used instead of the extrusion coating head. Further, it may be repeated several times to obtain a desired thickness.

FIG. 4 is a cross-sectional view showing another example of the extrusion type coating head, and FIG. 5 is a diagram for explaining a state of forming a green sheet using the extrusion type coating head shown in FIG. The extrusion type coating head shown in FIG.
It has a multi-series nozzle having 61, 462. Reference numerals 491 and 492 are ceramic paint pools 531, 5
Reference numeral 32 is a supply port to the ceramic paint reservoirs 491 and 492. When using this extrusion type coating head 10,
As shown in FIG. 5, after the ceramic paint 17a stored in the ceramic paint reservoir 491 is applied to the flexible support 19 through the slit 461, another layer is passed through the slit 462 on the applied ceramic paint layer 431. The ceramic paint layer 432 is continuously overlaid.
This suppresses the generation of pinholes.

The extrusion type coating head 10 described above is suitable for forming a green sheet with a ceramic coating 17a having a low viscosity. Since the ceramic coating material 17a having a low viscosity has a large drying shrinkage ratio, the ceramic coating material can be supplied in a large amount in order to obtain the same thickness after drying, and the tip of the extrusion coating head 10 and the flexible support 19 (or the green support). It is possible to prevent the generation of streaks by the extrusion type coating head 10 by making a large gap with the sheet 43).

As described above, the extrusion type coating head 10 has a remarkable advantage in addition to forming a uniform green sheet without streaks. That is, it is very effective in forming a green sheet again on the green sheet 43 that has been formed once. In the doctor blade method, since the edge side of the head of the doctor blade is always in contact with the flexible support 19, there is no problem at the time of forming the first green sheet, but at the time of forming the second and subsequent green sheets, the The dry surface on the edge side of the first green sheet 43 contacts. Therefore, there is a problem that the edge side of the first green sheet 43 is scraped off. Further, as the number of laminated layers increases, the total thickness becomes thicker, so that the blade comes into contact with the upstream side of the blade and is eventually peeled off.

On the other hand, in the extrusion type coating head 10, on the surface of the green sheet 43 previously formed,
When molding the next green sheet 43, the extrusion type coating head 10 is applied to the surface of the green sheet 43 which has been formed in advance.
It is possible to obtain a good green sheet 43 that does not come into contact with each other and is not scraped.

The flexible support 19 is made up of the green sheet 43.
In consideration of peeling, it is preferable to subject the green sheet molding surface to a peeling treatment. The peeling treatment is performed on the flexible support 19-1.
This can be performed by thinly coating the surface with a peeling film made of, for example, Si. By performing such a peeling process, after the lamination process of the required number of layers is completed, the green sheet 43 of the lowermost layer formed on the flexible support 19 is removed from the flexible support 19. It can be easily peeled off.

The coating apparatus shown in FIG. 1 further includes a metering pump 6 and a mass flow meter 9. The metering pump 6 and the mass flowmeter 9 are provided with a paint 17 for the extrusion type coating head 10.
Control the supply amount of a. Reference numeral 7 is a precision metering gear pump, and 8 is a filter. The precision metering gear pump 7 is provided for the metering pump 6 to further improve the quantitative accuracy. The filter 8 is installed to finally remove foreign matter. Therefore, the discharge amount of the coating material 17a from the extrusion type coating head 10 is stable, the surface accuracy is good, and the uniform green sheet 43 with less thickness variation can be obtained.

FIG. 6 is a sectional view of a monolithic ceramic capacitor manufactured by using the coating apparatus according to the present invention. In the figure, 1 is a monolithic ceramic capacitor, 2 is a dielectric layer, 3 is an electrode, and 4 is a terminal electrode. FIG. 7 is a manufacturing flowchart for manufacturing the multilayer ceramic capacitor, and FIG. 8 is a manufacturing flowchart showing another manufacturing example.

In the manufacturing flowchart of FIG. 7, the dielectric material (ceramic) is made into a paint, and the paint-made ceramic paint is applied to the flexible support to form a green sheet. The green sheet is formed by the above-mentioned coating device.

Next, after drying the green sheet, electrodes are printed on the green sheet. After the printing of the electrodes is completed, a drying process is performed. Among the above steps, the steps from the green sheet forming step, the electrode printing step by image processing, and the drying step are repeated on the flexible support until the required set number of stacked layers is reached. When the set number of stacked layers is reached, a green sheet serving as a protective layer is formed on the surface of the uppermost electrode and the ceramic green sheet supporting the electrode. After that, the laminated body of the electrode and the green sheet is cut, the laminated ceramic capacitor is taken out, and further,
A finished product of the monolithic ceramic capacitor is obtained through necessary steps such as firing and application of end electrodes.

According to the manufacturing flow chart shown in FIG. 7,
The use of the flexible support is small because it includes a green sheet forming step of applying a ceramic coating to form a green sheet on the flexible support and a printing step of printing electrodes on the green sheet. Mass production is improved.

Further, it is not necessary to separate and handle each of the green sheets from the flexible support. There is also no thermal transfer step. Therefore, high precision,
A highly reliable laminated ceramic electronic component can be easily manufactured. Further, the step difference between the portion with the electrode and the portion without the electrode is absorbed by the repetition of the formation of the green sheet and the printing of the electrode, so that the defect such as the crack due to the step is improved. Further, since it is possible to obtain a laminated green chip in which a plurality of layers of green sheets are integrated with electrodes, delamination after pressing, which has been a problem in the past, is not seen.

In the electrode printing step, the electrodes are printed by image processing. Before the printing step or at the same time as the first printing step, the first target mark for image processing is formed on the flexible support, and the information obtained by the image processing of the first target mark is added. Based on this, the electrodes are printed and positioned. Thereby, the electrode can be formed with high accuracy at a predetermined position based on the first target mark. Therefore, even a complicated electrode laminated structure can be formed accurately and in a short time.

In the manufacturing flow chart shown in FIG.
7 is different from the manufacturing flow chart shown in FIG. 7 in that the green sheet forming step and the printing step are performed a plurality of times, the set number of stacked layers is reached, the obtained stacked green sheet is peeled from the flexible support, and then the That is, a plurality of laminated green sheets obtained by peeling are laminated. After lamination, pressing is performed, and further, necessary steps such as a cutting step, a firing step, and an end electrode application step are performed to obtain a finished monolithic ceramic capacitor.

According to the manufacturing flow chart shown in FIG.
The printing step includes a step of printing the second target mark on the green sheet, and the laminated green sheets are laminated on the basis of the information obtained by the image processing of the second target mark. Accordingly, the plurality of green sheet laminated bands can be positioned and laminated with high accuracy so that the mutual electrodes have a predetermined positional relationship based on the second target mark. The protective layer is separately formed into a sheet and laminated by a laminating machine.

A more detailed description will be given below with reference to specific examples.

<Conversion of dielectric material into coating material> Particle size of 0.1 μm
After firing powder of barium titanate, chromium oxide, yttrium oxide, manganese carbonate, barium carbonate, calcium carbonate, silicon oxide, etc. having a thickness of about 1.0 μm, BaTiO ₃
As 100 mol%, 0.3 mol% converted to Cr ₂ O ₃ , 0.4 mol% converted to MnO, 2.4 mol% converted to BaO, and 1.6 mol converted to CaO. %, SiO
4 mol% when converted to ₂ , 0.1 mol% when converted to Y ₂ O ₃
The mixture was mixed so as to have the composition described above, and mixed for 24 hours by a ball mill, and dried to obtain a dielectric material. This dielectric material 10
0 parts by weight, 5 parts by weight of acrylic resin, 40 parts by weight of methylene chloride, 25 parts by weight of acetone, 6 parts by weight of mineral spirit were mixed and mixed with a commercially available φ10 mm zirconia beads for 24 hours by a pot stand, and a dielectric ceramic coating Got

<Green Sheet Molding> Green sheet molding is carried out using the coating apparatus according to the present invention. The dielectric ceramic coating material obtained as described above is applied to a continuously supplied flexible support to form a green sheet. The first green sheet forming step is a step of forming a protective film on the flexible support. In the case of the monolithic ceramic capacitor of FIG. 6, the protective film serves as an outer package that constitutes either the uppermost layer or the lowermost layer.

<Formation of Target Marks> Next, before electrode printing, as shown in FIG. 9, first target marks a1, b1, for image processing are formed on the flexible support 19 having the green sheet 43. c1, d1 and pitch mark e1 are formed. The first target marks a1 to d1 and the pitch mark e1 are preferably formed on the side of the surface on which the green sheet 43 is applied and at the widthwise end of the flexible support 19. First target marks a1 to d
1 and the pitch mark e1 may be marks that can be subjected to image processing, such as marks formed by screen printing or ink jet printing or through holes, and the printing surface may be either the front or back surface of the flexible support 19. Also,
First target marks a1 to d1 and pitch mark e
The formation timing of 1 may be any time before the electrode printing by image processing is performed, and may be the same as the first electrode formation. First target marks a1 to d1
The preferable timing of forming the is before cutting the raw material for flexible support with a slitter. Before cutting the raw material for a flexible support with a slitter, the first target marks a1 to
If d1 is formed, when the original sheet is cut into a predetermined width by a slitter, it can be cut based on the first target marks a1 to d1. First target mark a1
It is desirable that the colors d1 to d1 have a clear contrast with the flexible support 19 and are circular.

<Electrode Printing by Image Processing> Next, using the take-up reel 17 on which the flexible support 19 is wound,
The electrodes are printed on the green sheet 43 on the flexible support 19. When printing the electrode, the first target mark a
The electrodes are printed and positioned based on the information obtained by the image processing of 1 to d1. FIG. 10 is a diagram schematically showing a configuration of a printing machine with an image processing device (hereinafter referred to as an image processing printing machine) used for electrode printing. The flexible support 19 on which the green sheet 43 is formed is the supply roll 2
1 through the guide roller 22, xy-θ
-Directed to the z-table 25. Reference numeral 23 is a support body that supports the guide roller 22, and reference numeral 24 is a support base.

The table 25 has cameras 26a, 26b,
26c and 26d are provided, and the cameras 26a to
The first target marks a1 to d1 are read by 26d, and the electrodes are printed and positioned based on the read information. The electrodes are printed and positioned by the xy-θ-z table 25. The electrodes are printed by the plate making 27 provided on the plate making table 28. The xy- [theta] -z table 25 is a vacuum suction surface, and the cameras 26a to 26d are provided with glass 56a, 56b and 56 at four corners as shown in FIG.
It is embedded via c and 56d. Camera 26a-
26d is arranged facing upward, and the cameras 26a to 26a
The arrangement is such that the flexible support 19 passes above d. With such a structure, it is possible to obtain an extremely excellent effect that the image processing by the cameras 26a to 26d can be executed without being influenced by the plate making 27 that moves up and down on the xy-θ-z table 25. You can x-
Since the y-θ-z table 25 has a vacuum suction surface, and the flexible support body 19 on which the green sheet 43 is molded is vacuum-sucked on the vacuum suction surface, the x-y-θ-z table 25.
Is driven by the correction operation, the flexible support 19 is driven integrally with the xy-θ-z table 25,
There is no displacement.

The coordinates (x, y) of the first target marks a1 to d1 are read by the cameras 26a to 26d. Based on the read data, data processing is performed by a computer system (not shown), and the xy-θ-z table 25 is controlled so that the xy-θ-z table 25 is moved in the θ direction, the x direction, and the y direction as required.

FIG. 12 shows an electrode pattern 44 obtained by the above-mentioned electrode printing process, and FIG. 13 shows a side view of FIG. Each electrode forming the electrode pattern 44 is
It is composed of an appropriate electrode material, for example, an electrode material containing nickel, copper or the like as a main component. In the electrode pattern 44, individual electrodes are arranged at intervals in the horizontal and vertical directions. In the embodiment, each electrode has m rows in the horizontal direction, and has 6 rows in each odd column and 5 rows in each even column in the vertical direction. The first digit of the reference number attached to the electrode indicates the column to which the electrode belongs, and the second digit indicates the row to which the electrode belongs. The number of rows and the number of columns are arbitrary. Of the above-mentioned electrodes, the electrode rows that are laterally adjacent to each other, for example, the electrodes 211 to 261 belonging to the first row and the electrode 2 belonging to the second row
12-252, the corresponding individual electrodes (211 and 21)
2) to (261 and 262) are arranged so as to be different in the vertical direction by a predetermined dimension L. A suitable dimension L is 1/2 of the electrode pitch 2L. However, the electrode pattern is xy
Since the pattern can be moved to the desired pattern by the -θ-z table 25, the pattern does not have to be the illustrated pattern. For example, the pattern may be such that the electrodes in each column repeat the same arrangement.

In the printing process, the second target marks a2, b2, c2 and d2 are formed together with the electrode pattern 44.
And the pitch mark e2 is printed. Along with the electrode pattern 44, the second target marks a2, b2, c2, d
By printing 2 and the pitch mark e2, as shown in the manufacturing flowchart of FIG. 8, after performing the green sheet forming step and the printing step a plurality of times, the obtained laminated green sheet is removed from the flexible support. When the step of peeling and then laminating a plurality of laminated green sheets obtained by peeling is performed, the electrode patterns 44 of each other are predetermined based on the second target marks a2, b2, c2, d2. It is possible to position and stack with high accuracy so as to have the positional relationship of. Further, according to the manufacturing flow chart of FIG. 7, when the plate making is exchanged, the second target marks a2 and b which are formed by printing simultaneously with the electrode pattern 44 are formed.
2, c2, d2 for the first target mark a1,
By looking at the positional relationship between b1, c1 and d1, the relative position between the first target marks a1, b1, c1 and d1 and the electrode pattern 44 can be known, and image processing can be performed.

<Alignment by Image Processing> Next, x-
The details of positioning and alignment by the y-θ-z table 25 will be described. FIG. 14 is a diagram showing the positional relationship of the four cameras 26a to 26d with respect to the xy-θ-z table 25. The cameras 26a to 26d have the first target marks a1 to d on the flexible support 19 described above.
It is arranged at four points corresponding to the position of 1. Camera 26
Although the arrangement positions of a to 26d are fixed by design, in reality, there are arrangement errors and the like, so that a coordinate reading error occurs as it is. As a means for correcting this, before starting the manufacturing process, one of the cameras 26a to 26d located under the xy-θ-z table 25, for example, the center point of the camera 26a to 26d is used as the origin. (0,0)
Is determined. Next, the xy- [theta] -z table 25 is moved in the x-axis direction, and the coordinates (Xb, Yb) when the position corresponding to the origin (0, 0) reaches the center point of the camera 26b.
Read. As a result, the position of the camera 26b when the center point of the camera 26a is the origin (0, 0) is the coordinate (X
b, Yb). Other cameras 2
Similarly for 6c and 26d, the coordinates (Xc, Y
c) and (Xd, Yd) are calculated. The above-mentioned initial correction is performed by using image processing on the display together. In this way, the coordinate determination of each of the cameras 26a to 26d is performed by driving the highly accurate xy-θ-z table 25.
Coordinate reading error is extremely small. Reference symbol O ₀
Are coordinates (0, 0) representing the positions of the cameras 26a to 26d.
It is the midpoint calculated from (Xd, Yd).

The printing positions of the first target marks a1 to d1 are substantially the same even if there is no misalignment.
Since 9 is transported, it is often rotated in the plane of the table 25 by an angle θ or displaced in the X-axis or Y-axis direction. By correcting this positional deviation, the electrode pattern 44 is printed with high accuracy. As the means, the cameras 26a to 26d which have been subjected to the initial correction are used, and x-
The coordinates of the first target marks a1 to d1 of the flexible support 19 vacuum-sucked on the y-θ-z table 25 are read as shown in FIG. Cameras 26a-26
The read value by d is converted into coordinates in which the coordinates (Xb to Yb) to (Xd to Yd) set by the initial correction are taken into consideration. The coordinates of the first target mark a obtained by the camera 26a in this manner are (X1, Y1)
The coordinates of the first target mark b obtained by 6b are (X2, Y2), the coordinates obtained by the camera 26c are (X3, Y3), and the coordinates obtained by the camera 26d are (X4, Y4).

Obtained coordinates (X1, Y1) to (X4, Y
As shown in FIG. 15, the midpoint O1 of the quadrangle surrounded by the first target marks a1 to d1 is obtained from the data of 4). The middle point O1 is the middle point (a) of the two opposite sides,
It is obtained as the midpoint of the line segment L1 connecting (b) and (b). This middle point O1 serves as an origin for alignment during printing. Then, a perpendicular line L2 passing through the middle point O1 is obtained for the line segment L1. The vertical line L2 is normally the xy-θ-z table 25.
Has an angle θ with respect to the Y-axis. Midpoint O1 and angle θ
Is calculated by the computer system based on the data input from the cameras 26a to 26d to the computer system (not shown). Then, based on the control signal given from the computer system, x-y-θ-z
The table 25 is rotationally driven in the direction of the arrow so that θ = 0, whereby the angle θ is corrected. x-y-
The θ-z table 25 is further driven in the X-axis direction and the Y-axis direction based on the control signal from the computer system to perform the alignment in the X-axis direction and the Y-axis direction, and the alignment is completed. 16 shows a state after the correction of the angle θ, FIG. 17 shows a state after the alignment in the X-axis direction, and FIG. 18 shows a state after the alignment in the Y-axis direction. Shows the state of. However, in the actual alignment operation, the midpoint O1 is corrected while correcting the angle θ.
To match the middle point O ₀ of the cameras 26a to 26d.

Here, in order to improve the accuracy, the camera 26
a to 26d and four correction cameras 30a to 30d are used, respectively, two first target marks and one camera 2 are used.
Even with an individual piece, the midpoint between two points is set, the deviation angle θ between the two points is set, and the image is processed by a computer, so that sufficient image processing printing is possible. Since the xy- [theta] -z table 25 is a vacuum suction surface, it can be accurately moved in the x-direction, the y-direction, and the [theta] -direction. After the image processing is performed in this manner, the xy-θ-z table 25 is moved in the z direction by an arbitrary distance so as to come into contact with the back surface of the flexible support, and screen printing is performed.

After printing, the flexible support 19 is moved by a fixed size by the constant length feeding device 29 (see FIG. 10), and is subsequently fed to the position where the correction cameras 30a to 30d are located. In the fixed length feeding device 29, the surface in contact with the flexible support 19 is a vacuum suction surface, and therefore the flexible support 1
The back surface of 9 is sucked and fixed to the vacuum suction surface of the constant length feeding device 29. Then, the pitch mark e1 is read by the sensor (camera) and, at the same time, the fixed-length feed is applied to the flexible support 19 until the next pitch mark e1 is read by the sensor. In this way, since the constant-scale feed corresponding to the interval between the adjacent pitch marks e1 and e1 is added, the first target marks a1 to d2 are out of the field of view of the cameras 30a to 30d due to the conveyance deviation. There is no problem. Moreover, the fixed length feeding device 29
In the above, since the surface of the flexible support member 19 in contact is a vacuum suction surface, the flexible support member 19 will not be displaced on the fixed length feeding device 29 during the operation of the fixed length feeding.

The correction cameras 30a to 30d have different stations, but their positional relationship is that of the cameras 26a to 26d.
Is the same as Here, the positional deviation at the time of mounting the pattern printing plate can be measured by reading the coordinates between the first target mark and the second target mark by the same method as the above-mentioned image processing, and is not shown. The computer system performs data processing to calculate the necessary correction amount, feeds back the data to the control system of the xy-θ-z table 25, drives the xy-θ-z table 25, and corrects the position. Perform. In the above description, the case where four correction cameras 30a to 30d are used has been described, but eight cameras are used, and the first target marks a1 to d1 and the second target mark are used by the eight cameras. The configuration may be such that a2 to d2 are read simultaneously. First target marks a1 to d
The positional relationship between 1 and the second target marks a2 to d2 can be clarified by using a standard plate (eg, glass standard plate) on which the first target marks a1 to d1 are printed in advance.

The green sheet 19 having the electrodes thus obtained is placed on the belt conveyor 36 rotating between the rollers 33 and 34, passing through the transmitted light visual inspection table 31 and the guide roller 32, and the drying furnace. At 35, for example, after drying at 60 ° C., it passes through the guide roller 37 and is wound up by the winding and winding roller 38.

<Step of Obtaining Set Lamination Number> a. In the case of following the manufacturing flow chart of FIG. 7, as described above,
After the green sheet forming process using the coating apparatus shown in FIG. 1, the green sheet is attached to the feeding roller 11 again and passed through the meandering correction roller 13 so that the desired green sheet thickness is obtained in the same manner as the first green sheet forming. Control to
Green sheet molding is performed, and then the step of printing electrodes based on the image processing by the image processing printer shown in FIG. 10 is repeated by the required number of layers.

FIGS. 19 and 20 are views showing the electrode printing positions in the second and subsequent electrode printing steps. Printing is performed by shifting the positions by one row with respect to the first electrode printing. When the electrode pattern is changed, x corresponding to the electrode pattern
The -y- [theta] -z table 25 is controlled in the x-direction, the y-direction, or the [theta] -direction so as to obtain the necessary overlap of the electrode patterns. For example, as shown in FIG. 21, when the electrode pattern 44 has a pattern in which the same electrode rows are arranged at intervals, the second electrode pattern 44 is flexible with respect to the first electrode pattern. The support 19 is moved in the width direction. The x-y-θ-z table 25 is in the x direction,
Since the camera can move freely in the y and θ directions, the camera 26a
First target marks a1 to d1 obtained with
Position information is input to the computer system, and the computer system can control the xy- [theta] -z table 25 so that the required electrode patterns overlap. This second and subsequent green sheet molding,
Image processing printing is repeated up to the desired number of layers. Then, finally, the second protective layer 56B is formed to have a thickness of, for example, 160 μm.

FIG. 22 is a sectional view of the laminate obtained as described above, in which the laminated green sheet 55 is formed on the flexible support 19. 56A is the first protective layer, 4
3 is a green sheet, 54 is an electrode after drying, and 56B is a second protective layer.

B. According to the manufacturing flow chart shown in FIG. 8, when following the manufacturing flow chart shown in FIG. 8, after performing the green sheet forming step and the printing step a plurality of times, the obtained laminated green sheet is peeled from the flexible support,
Next, a plurality of laminated green sheets obtained by peeling are laminated on the separately formed first protective layer. Next, the second protective layer separately formed into a sheet is laminated on the uppermost layer of the obtained laminate. FIG. 23 shows a specific example thereof.
After performing the green sheet forming step and the printing step Q times, the obtained laminated green sheets 561 to 56Q are peeled off from the flexible support, and then the first sheet separately formed.
A plurality of Q laminated green sheets 561 to 56Q obtained by peeling are laminated on the protective layer 56A. The laminated green sheets 561 to 56Q have the second target mark a2.
Stacking is performed while performing alignment based on the information obtained by the image processing of d2. Figure 14 ~
This is as described with reference to FIG. Next, the second protective layer 56B separately formed into a sheet is laminated on the uppermost layer of the obtained laminated body.

<Process After Obtaining Set Lamination Number> The laminated green sheet obtained as described above is punched, pressed and cut to obtain a laminated green chip shown in FIG. The obtained laminated green chip is subjected to binder removal processing under a predetermined temperature condition, followed by firing, and then a terminal electrode is formed by firing.

The binder removal and firing conditions are well known in the art. For example, the binder is removed at 280 ° C. for 12 hours, and firing is performed at 1300 ° C. for 2 hours in a reducing atmosphere. The terminal electrode 4 (see FIG. 6) is formed on the laminated body obtained after firing. The material and forming method of the terminal electrode 4 are well known in the past. For example, copper as the main component, 800 ℃ in N2 + H2
Bake for 30 minutes and plate.

<Characteristic Evaluation 1; Effect of Non-Contact of Roller to Coating Surface> Multilayer ceramic capacitor manufactured by using the coating apparatus according to the present invention and multilayer ceramic capacitor manufactured by using the conventional coating apparatus. 26 shows the characteristic evaluation of FIG. In Table 1,
Sample No. 1 and 2 are multilayer ceramic capacitors manufactured using a conventional coating apparatus, sample No. Reference numerals 3 and 4 are monolithic ceramic capacitors manufactured using the coating apparatus according to the present invention. Sample No. In 1 and 2, the roller contacts the green sheet when forming the green sheet. Sample No. In Nos. 3 and 4, the roller does not contact the green sheet when forming the green sheet.

Sample No. 1 is green sheet thickness 11.
0 μm, the thickness of one layer of the dielectric layer 2 after firing is 6.6 μm,
The number of layers is 110. Sample No. Reference numeral 2 is a green sheet thickness of 16.0 μm, the thickness of the dielectric layer 2 after firing is 9.6 μm, and the number of laminated layers is 75. Sample No. Reference numeral 3 denotes a green sheet having a thickness of 11.0 μm, one thickness of the dielectric layer 2 after firing is 6.6 μm, and the number of laminated layers is 110. Sample N
o. Reference numeral 4 is a green sheet thickness of 16.0 μm, the thickness of the dielectric layer 2 after firing is 9.6 μm, and the number of laminated layers is 75.

The laminated ceramic capacitor was evaluated for the number of pinholes (pieces / 10 m), electrostatic capacity, dielectric loss, insulation resistance, breakdown voltage, and short circuit failure rate. Table 1 shows the evaluation results. Sample No. 1 to
In each of the four, the number of samples used in the test was three
It is 10,000.

A. Number of pinholes (number / 10 m) Sample No. manufactured using the coating apparatus according to the present invention. Three
The number of pinholes is 0 (pieces / 10
m). On the other hand, the sample No. manufactured using the conventional coating device was used. 33 pinholes / 10 m pinholes were observed in Sample No. 1, and sample No. In 2, the number of pinholes was 49 holes / 10 m. In the conventional manufacturing method using the coating device, the surface of the flexible support on which the ceramic coating is applied is in contact with the roller both before and after the coating, so that pin holes due to peeling frequently occur on the green sheet. On the other hand, in the manufacturing method using the coating apparatus according to the present invention, the ceramic coating surface of the flexible support does not come into contact with the roller either before or after coating. Therefore, it is assumed that pinholes due to peeling do not occur in the green sheet.

B. Capacitance and dielectric loss Measured at 20 ° C. with an impedance analyzer HP-4284A manufactured by Hewlett-Packard Company. For the capacitance, the sample No. The sample No. 1 has a value of 0.96 μF, while the sample No. No. 3 is 1.04 μF, which is the sample No. 3 manufactured using the coating apparatus according to the present invention. Sample No. 3 was manufactured using a conventional coating device. Capacitance larger than 1 can be acquired. Sample No. 2 and sample No. In comparison with 4, the same capacitance is obtained. The coating apparatus according to the present invention is effective when the thickness of the green sheet is reduced.

Regarding tan δ (%), sample No. 1
And Nos. 2 and 1.72 (%) and 1.63 (%), respectively. 1.70 (%) and 1.6 in 3 and 4
0 (%), and the sample No. Sample Nos. 3 and 4 The dielectric loss is smaller than 1 and 2.

C. Insulation resistance and short circuit failure rate High resistance meter HP-4329A made by Hewlett-Packard Co.
10 V was applied at 20 ° C. for 30 seconds and measurement was performed. If the insulation resistance is 1000 Ω or less, it is considered as a short circuit failure, and each sample No. In each of Nos. 1 to 4, the ratio of the number of short circuit defects to the number of samples used in the test was expressed as the short circuit defect rate.

The insulation resistance was measured according to Sample No. In 1 and 2, 2.
3 × 10 ⁹ Ω, 4.3 × 10 ⁹ Ω, whereas sample N
o. In 3 and 4, there are 3.0 × 10 ⁹ Ω and 4.9 × 10 ⁹ Ω, and sample N manufactured by using the coating apparatus according to the present invention.
o. Sample Nos. 3 and 4 manufactured using a conventional coating device An insulation resistance larger than 1 and 2 can be obtained.

The short-circuit defect rate is the same as the sample No. 1 and 2
In the case of Sample No. 10, the values are 10.4 (%) and 6.5 (%). In 3 and 4, 0.4 (%) and 0.2 (%) are obtained, and sample N manufactured using the coating apparatus according to the present invention.
o. Sample Nos. 3 and 4 manufactured using a conventional coating device The short-circuit defect rate is significantly smaller than in 1 and 2.

D. Breakdown voltage The breakdown voltage was evaluated by an automatic booster tester. Breakdown voltage is sample No. 1 and 350 (v), 610
(V), the sample No. 580 for 3 and 4
(V) and 800 (v), the sample No. obtained by the manufacturing method according to the present invention. Samples Nos. 3 and 4 are sample Nos. A breakdown voltage greater than 1 and 2 can be secured.

<Characteristic Evaluation 2; Mainly Effect of Tension Control> When a laminated ceramic green sheet is obtained by the coating apparatus according to the present invention, as the laminated ceramic green sheet becomes thicker, if the winding tension is too strong, the flexibility is increased. Since the coated surface of the support is surface-treated with Si or the like so that it can be easily peeled off, the green sheet corresponding to the number of windings before that may be transferred to the surface of the flexible support opposite to the coated surface. is there. Fig. 2 shows the transfer degree for each tension when 75 layers of 8 µm ceramic green sheets are laminated.
7 shows as Table 2. Sample No. In No. 5, the winding tension was too weak and winding deviation was observed. Sample N
o. In No. 10, the winding tension was too strong, and the occurrence of transfer was observed at 18 places (100 mm width) or 31 places (1000 mm width). Sample No. 6-Sample No. 9
No occurrence of transcription was observed in. From this result, the winding tension is 0.1 kgf to 1.5 kgf.
A width of / 100 mm is suitable.

<Characteristic Evaluation 3; Effect Obtained by Roller Non-Contact and Positioning by Image Processing Device> Next, in the manufacturing of the laminated ceramic capacitor, the coating device according to the present invention and the image processing, which is an important element, are used. Data relating to the effect of alignment are shown in Table 3 in FIG.

Sample No. 11 to 13 are multilayer ceramic capacitors obtained through the manufacturing flow chart of FIG. 16 is a monolithic ceramic capacitor obtained through the manufacturing flow chart of FIG. 14 and 15
Is a monolithic ceramic capacitor manufactured using a conventional coating device and alignment device.

Sample No. 11 is the green sheet thickness 8.
0 μm, the thickness of the dielectric layer 2 after firing is 5 μm, and the number of laminated layers is 75. Sample No. 12 is a green sheet thickness of 2.5 μm, the thickness of one layer of the dielectric layer 2 after firing is 1.5 μm
m, and the number of laminated layers is 75. Sample No. A green sheet 13 has a thickness of 2.5 μm, the thickness of the dielectric layer 2 after firing is 1.5 μm, and the number of laminated layers is 150.

Sample No. 14 is the green sheet thickness 8.
0 μm, the thickness of the dielectric layer 2 after firing is 5 μm, and the number of laminated layers is 75.

Sample No. 15 is the green sheet thickness 2.
5 μm, the thickness of one layer of the dielectric layer 2 after firing is 1.5 μm,
The number of layers is 150. However, the sample No. 15 is 2.5
Due to the thin green sheet thickness of μm, it was not possible to perform lamination to the extent that the characteristics required for a laminated ceramic capacitor could be obtained (non-laminating).

Sample No. 16 is the green sheet thickness 8.
0 μm, the thickness of the dielectric layer 2 after firing is 5 μm, and the number of laminated layers is 75. Sample No. Through 11 to 16, the outer dimensions were fixed to 3.2 mm × 1.6 mm. The thickness dimension depends on the number of laminated layers and the thickness of the dielectric layer per layer.

This multilayer ceramic capacitor was evaluated for the number of pinholes (pieces / 10 m), the capacitance, the dielectric loss, the insulation resistance, the breakdown voltage, the short circuit failure rate, the printing deviation and the yield. Table 1 shows the evaluation results. Sample No. In each of 11 to 16, the number of samples subjected to the test is 30,000.

Regarding the evaluation test results shown in Table 3,
In comparing a monolithic ceramic capacitor manufactured by the manufacturing method using the coating apparatus according to the present invention with a monolithic ceramic capacitor manufactured by the manufacturing method using the coating apparatus of the prior art, the samples having the same number of green sheets and the same number of stacked layers were compared. Will be done in. Specifically, the sample No. 1
1, 16 and sample No. 14 and sample No. 12,
13 and sample No. Contrast with 15.

A. Capacitance, Dielectric Loss Capacitance 14 is 0.91 μF, whereas sample No. No. 11, 1.01 μF, sample No.
No. 16 is 1.03 μF, and the sample No. 16 manufactured by using the coating apparatus according to the present invention. Sample Nos. 11 and 16 are sample Nos. Manufactured using a conventional coating device. A capacitance larger than 14 can be obtained.

Sample No. 12, 13 and sample No. 15
In comparison with Sample No. No. 15 cannot be laminated when the thickness of the green sheet is 2.5 μm, whereas sample No. 15 manufactured by using the coating apparatus according to the present invention. 12, 13 are
3.3 using a thin green sheet of 2.5 μm
Capacitances of μF and 6.63 μF can be acquired.

Regarding tan δ (%), sample No. 1
In the case of Sample No. 4, it was 1.88 (%). 11
Then, 1.86 (%), sample No. 16 is 1.85
(%), And the sample No. Sample Nos. 11 and 16 are sample Nos. 14
The dielectric loss is smaller than that. Sample No. 1
Nos. 2 and 13 have a dielectric loss of 1.87 (%) and 1.96 (%) even if an extremely thin green sheet of 2.5 μm is used.

B. Insulation resistance and short circuit failure rate If the insulation resistance is 1000Ω or less, short circuit failure will occur.
Each sample No. In each of Nos. 11 to 16, the ratio of the number of occurrence of short circuit defects to the number of samples used in the test was expressed as the short circuit defect rate.

The insulation resistance of the sample No. 14 with 1.7 ×
It is 10 ⁹ Ω, while the sample No. 2.0 for 11
10 ⁹ Ω, sample No. 16 is 3.1 × 10 ⁹ Ω,
Sample No. manufactured using the coating apparatus according to the present invention. 1
Samples 1 and 16 are samples N manufactured using a conventional coating device.
o. An insulation resistance larger than 14 can be obtained. In addition, the sample No. 12 and 13 also 7.1 × 10 ⁸ Ω, 4.6 × 1
The insulation resistance of 0 ⁸ Ω can be secured.

The short-circuit defect rate is shown in Sample No. 3 in 14
3.2 (%), the sample No. In 11 it is 0.
7 (%), sample No. No. 16 is 0.4 (%), and the sample No. 16 manufactured using the coating apparatus according to the present invention. 1
Samples 1 and 16 are samples N manufactured using a conventional coating device.
o. The short circuit defect rate is significantly smaller than that of No. 14. In addition, the sample No. 0.8 for 12 and 13 (%),
The short-circuit defect rate is 1.0 (%).

C. Breakdown voltage The breakdown voltage is the sample No. 14 is 150 (v), while the sample No. Nos. 11 and 16 have a value of 230 (v), and the sample Nos.
Samples Nos. 11 and 16 are sample Nos. A breakdown voltage larger than 14 can be secured. In addition, the sample No. 1 having a very thin green sheet thickness of 2.5 μm (thickness after drying was 1.5 μm). Even 12 and 13 are 90 (v) and 80 (v)
The breakdown voltage of can be secured.

D. Print deviation The multilayer ceramic capacitor was cut along the dotted line in FIG. 25, and the average value ΔGmax-av of the maximum value ΔGmax (see FIG. 25) of the positional deviation amount of the 10 electrodes on the cut surface was measured. The average value ΔGmax-av is the sample No. 14
Is 250 μm, while sample No. 8 for 11
μm, sample No. No. 16 is 11 μm, and sample No. 16 manufactured using the coating apparatus according to the present invention. 11, 16
Is a sample No. manufactured using a conventional coating device. 14
The print misalignment is significantly smaller than that. Sample No.
In 12 and 13, the average value ΔGmax-av is 12 μm,
It is 13 μm, and the print deviation is extremely small.

E. Number of pinholes (number / 10 m) Sample No. manufactured using the coating apparatus according to the present invention. 1
In any of 1 to 13 and 16, the number of pinholes is 0
(Piece / 10 m). On the other hand, the sample No. manufactured using the conventional coating device was used. In 14, it is 49/10
m pinholes were observed, and sample No. In 15, the number of pinholes was 84 / 10m.

F. Yield The yield is the sample No. 14 is 33 (%), while sample No. 14 is 33. In Nos. 11 and 16, it was 92 (%), and the sample No. With 12 and 13, high yields of 92 (%) and 90 (%) can be secured. The manufacturing method using the coating apparatus according to the present invention significantly improves the yield.

In summary, according to the coating apparatus of the present invention, it is possible to accurately stack a thin green sheet of 2.5 μm, which could not be stacked in the past, with a low short circuit defect rate and excellent characteristics. It is possible to manufacture the laminated ceramic capacitor having the high yield.
Moreover, it can be laminated somehow by using the conventional coating device 8
Even at a green sheet thickness of μm, a very good effect was obtained.

Furthermore, in the manufacturing method using the conventional coating apparatus, a step having a product of the thickness of the electrode and the number of the electrodes can be formed in the portion with and without the electrode. In the manufacturing method using the coating apparatus according to the present invention, since the green sheet is image-printed on the green sheet and the green sheet is formed again, the step can be eliminated. As a result of the experiment, the level difference of 2 μm per electrode became a level difference of 1.5 μm. In this way, the steps were eliminated, albeit slightly. Although it is small per electrode, if the number of laminated layers increases, for example, in the case of 150 layers, 0.5μ
A step difference of mx150 = 75 μm can be eliminated.

[0093]

As described above, according to the present invention, the following effects can be obtained. (A) It is possible to provide a coating device capable of preventing pinholes from being formed in the coated green sheet. (B) It is possible to provide a coating apparatus having a high surface accuracy and a uniform green sheet with less variation in thickness.

[Brief description of drawings]

FIG. 1 is a diagram showing a configuration of a coating apparatus according to the present invention and a green sheet forming process using the coating apparatus.

FIG. 2 is a cross-sectional view of an extrusion type coating head that constitutes the coating apparatus according to the present invention.

FIG. 3 is a diagram illustrating a state in which a green sheet is formed using the extrusion type coating head shown in FIG.

FIG. 4 is a cross-sectional view showing another example of the extrusion coating head.

FIG. 5 is a diagram illustrating a state in which a green sheet is formed using the extrusion coating head shown in FIG.

FIG. 6 is a sectional view of a monolithic ceramic capacitor manufactured using the coating apparatus according to the present invention.

7 is a manufacturing flowchart for manufacturing the multilayer ceramic capacitor shown in FIG. 6. FIG.

8 is another manufacturing flowchart for manufacturing the multilayer ceramic capacitor shown in FIG.

FIG. 9 is a diagram showing a step of forming target marks and pitch marks for image processing prior to electrode printing.

FIG. 10 is a diagram showing an image processing printer used in a method for manufacturing a laminated ceramic electronic component.

11 is a diagram showing an arrangement of image processing cameras included in the image processing printer shown in FIG.

FIG. 12 is a plan view of the flexible support surface after the first printing of electrodes by the image processing printer shown in FIG.

FIG. 13 is a side view of the flexible support shown in FIG.

FIG. 14 is a diagram for explaining alignment based on image information using an image processing camera.

FIG. 15 is a diagram for explaining alignment based on image information using an image processing camera.

FIG. 16 is a diagram illustrating θ correction in alignment based on image information using an image processing camera.

FIG. 17 is a diagram illustrating the X-axis direction alignment in the alignment based on the image information using the image processing camera.

FIG. 18 is a diagram illustrating Y-axis direction alignment in alignment based on image information using an image processing camera.

FIG. 19 is a plan view of the flexible support surface after printing the second electrode by the image processing printer shown in FIG.

20 is a side view of the flexible support shown in FIG.

FIG. 21 is a plan view showing another example of electrodes obtained by the image processing printer shown in FIG.

22 is a cross-sectional view of a laminate obtained according to the manufacturing flowchart shown in FIG.

23 is a cross-sectional view of another laminate obtained according to the manufacturing flowchart shown in FIG.

24 is a perspective view of a laminated green chip obtained by pressing and cutting the laminated body shown in FIG. 22 or FIG. 23.

FIG. 25 is a diagram illustrating the definition of the maximum value ΔGmax of the amount of electrode displacement.

FIG. 26 is a diagram showing characteristic evaluation data of a monolithic ceramic capacitor manufactured using the coating apparatus according to the present invention and a monolithic ceramic capacitor manufactured using the conventional coating apparatus.

FIG. 27 is a diagram showing the relationship between the winding tension applied to the flexible support and the transfer frequency.

FIG. 28 is a diagram showing characteristic evaluation data of a laminated ceramic capacitor manufactured by a manufacturing apparatus using a coating apparatus according to the present invention and a laminated ceramic capacitor manufactured by a manufacturing apparatus using a conventional coating apparatus.

[Explanation of symbols]

 121-127 Guide roller 151,152 Suction roller 161,162 Meandering correction roller 6 Constant volume pump 9 Mass flowmeter 10 Extrusion type coating head 17a Ceramic coating 19 Flexible support 25 x-y-θ-z table 26a, 26b, 26c, 26d camera a1 to d1 first target mark a2 to d2 second target mark 27 plate making 28 plate making table 43 green sheet

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shigehiko Shirai 1-13-1 Nihonbashi, Chuo-ku, Tokyo Inside TDC Corporation

Claims (5)

[Claims] 1. A coating apparatus including a coating head and a plurality of rollers, wherein the coating head coats a ceramic coating on one surface side of a flexible support that travels in one direction, Each of the rollers is arranged so as to contact only the surface of the flexible support opposite to the surface on which the ceramic coating is applied. 2. The coating apparatus according to claim 1, wherein the coating head is an extrusion type coating apparatus. 3. The coating apparatus according to claim 2, wherein the coating head is provided with a plurality of nozzles. 4. The coating apparatus according to claim 1, 2 or 3, comprising a metering pump and a mass flow meter, wherein the metering pump and the mass flow meter control the amount of coating material supplied to the coating head. apparatus. 5. The coating apparatus according to claim 1, 2, 3, or 4, wherein at least one of the rollers is a roller that applies a tension to the flexible support, and the tension is 0.
A coating device having a width of 1 to 1.5 kgf / 100 mm.