JPH08106827A - Manufacture of superconductive wire - Google Patents

Abstract

PURPOSE: To manufacture a superior conductive wire by using almost all oxide superconductive materials known at present by adhering at least one kind of oxide materials and oxide superconductive metal elements to a conductive material in such a state as coexisting with an oxidizing agent. CONSTITUTION: A silver wire which can be supplied by a supply reel 1 and a winding reel 2 is heated by a heater 19 so that magnesium oxide is made to evaporate. Oxygen gas is introduced from an introduction pipe 14, electric current of 100mA, for example, is flown, 500V is applied on a draw grid, and acceleration voltage is set to 1KV so that magnesium oxide is evaporated on the silver wire. This silver wire is moved to spaces 8-9, while the temperature of the silver is heated to, for example, 500 deg.C. The ratio of Y, Ba, and Cu is adjusted to 1:2:3 and 02 gas which is heated in the adjacent to a supply window 12 is supplied to the space 9. And the silver wire moved from the space 9 to the space 10 is cooled down to 50 deg.C, on which polyethylene film is formed, and wound by the reel 2.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a superconducting wire using an oxide superconductor.

[0002]

2. Description of the Related Art A conventionally known method for manufacturing a superconducting wire is described in "Superconducting Material Engineering" by Kitada Kaibundou Publishing (1
988). 82-P. Although detailed in 95, it is roughly classified into a diffusion method, a quenching method, and an evaporation method. Among these, for the oxide superconductor, the powder method, which is one of the diffusion methods, and the vapor deposition method are mainly used.
In the powder method, a superconductor or a raw material for the superconductor is packed in a metal pipe, and the superconducting wire is produced by drawing or rolling and heat treatment. The vapor deposition method is a method for producing a superconducting wire by forming an oxide superconductor thin film on a metal substrate by a vacuum vapor deposition method or the like.
Japanese Patent Publication No. 46 also discloses a manufacturing method by a laser ablation method.

[0003]

Among the above methods, the powder method is a method capable of inexpensively producing a long superconducting wire having a length of 1 km or more. If applied, there are the following problems. That is, the oxide superconductor has a great change in superconducting characteristics depending on the amount of oxygen in the material, and thus the usable metal pipe material is limited. At present, as a metal material capable of controlling the oxygen content of a superconductor even when drawn, no other than silver or its alloy is found. However, since silver melts at about 950 ° C, the heat treatment temperature of the oxide superconductor material must be 950 ° C or lower. On the other hand, there are only limited materials such as BiCaSrCuO based materials that can obtain excellent superconducting properties in this temperature range. Furthermore, oxide superconductors are generally harder than silver,
The mechanical deformation is small and the tensile strength of silver is 7.5km /
Since it is mm ² , silver is often broken when trying to manufacture a superconducting wire having a diameter of about 1 mm or less. Therefore, when the superconducting wire is manufactured by the powder method, if the oxide superconductor is applied, there is a problem that the usable materials are limited.

On the other hand, in the vapor deposition method, a superconducting wire corresponding to the superconducting wire having a diameter of 1 mm or less in the powder method can be easily manufactured, but this method has the following problems. . Oxide superconductor thin films are formed in the electronics field by many thin film forming methods such as MBE, sputtering, and laser ablation. However, since the oxide superconductor has a large number of elements, It is difficult to control the composition, and there is a problem that even a slight composition change causes a great change in superconducting properties. Further, the thin film formation rate is slow, and it often takes 2 hours or more to form a thin film of 1 μm, and the heat treatment time for adjusting the amount of oxygen in the thin film is long, so 1 m or more per minute. It has not been possible to manufacture superconducting wires of length. Because of this,
Although a superconducting wire having a superconducting property superior to that of the above-mentioned powder method is obtained with a length of about 2.5 cm, the superconducting wire manufactured by this method has an extremely high manufacturing cost. There is a problem that it ends up.

Further, Japanese Patent Laid-Open No. 5-62546 discloses a manufacturing method by a laser ablation method. This method melts an oxide superconductor with a laser beam and then cools it, but there is a problem that a uniform superconducting wire cannot be obtained unless the laser beam is stably irradiated. Further, in the currently known oxide superconductor, it is extremely difficult to control the film thickness of the superconductor because the viscosity of the melt is about the same as that of water.

Further, when a supply reel and a take-up reel are used in the production of a superconducting wire using an oxide superconductor, the oxide superconductor may be removed due to temperature changes during the winding stage or during production. It may peel off from the substrate. This is because the oxide superconductor is a kind of ceramics and is mechanically brittle, and there is a large difference in thermal conductivity between the base metal (which plays a role as a stabilizer) and the oxide superconductor. Is.

Therefore, the object of the present invention is, for almost all oxide superconductor materials, without being restricted to any material,
It is an object of the present invention to provide a method for manufacturing a superconducting wire that can obtain a superconducting wire having excellent properties such as superconducting properties and mechanical strength. Another object of the present invention is to provide a method for manufacturing a superconducting wire which can significantly reduce the manufacturing speed and is advantageous in terms of cost.

[0008]

The above object can be achieved by the present invention described below, that is, the present invention has a structure in which an oxide material and an oxide superconductor material are sequentially formed on the outer periphery of a conductive material. In the method for manufacturing a superconducting wire, the conductive material is fed from the supply reel and wound on the take-up reel while the oxide material is formed on the conductive material at the forming temperature T ₁ .
And sequentially forming the oxide superconductor material at the formation temperature T ₂ ,
The forming temperature at that time is set so that T ₂ > T ₁ , and
Further, at least in the formation of the oxide material and the oxide superconductor material, at least one of the constituent metal elements of the oxide material and the oxide superconductor material is used as a conductive material in the state of coexisting with an oxidizing agent. It is a method for producing a superconducting wire, characterized in that it adheres.

[0009]

In the present invention, the superconducting wire has a structure composed of a conductive material, an oxide material and an oxide superconductor material, and further has a four-layer structure in which an insulating material is laminated on the superconducting wire. In the case of forming the oxide material and the oxide superconductor material by forming the oxide material and the oxide superconductor material at the center of the superconducting wire and sequentially forming the other material on the conductive material, At least one metal element constituting the body is attached in the state of coexisting with an oxidant, and more preferably, at least one metal element constituting the oxide superconductor is ionized and accelerated to have an ion retention. By positively utilizing energy, it is possible to significantly improve the usage restrictions on the materials that make up the superconducting wire,
Further, it becomes possible to provide a practical superconducting wire having excellent mechanical strength and superconducting properties.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows the principle of the method for producing a superconducting wire of the present invention. In this figure, 1 is a supply reel for supplying a conductive material 6 and 2 is a manufactured superconducting wire 7.
A take-up reel for winding the wire, 3 is a forming device for attaching an oxide material to a conductive material, 4 is a forming device for attaching an oxide superconductor material, and 5 is a forming device for attaching an insulating material. It is a device, and is housed in spaces 8, 9 and 10 which are respectively partitioned. FIG. 2 shows a principle configuration diagram of the forming devices 3 and 4. It goes without saying that the forming apparatus 5 may have the same configuration as that shown in FIG. 2, but depending on the purpose of use of the obtained superconducting wire, the forming apparatus 5 may have an oxide material or an oxide superconducting material. Unlike the case of the body material, it is not always necessary to form the insulating material on the outer periphery of the conductive material, and thus the configuration may be different from that of FIG.

In the manufacturing method of the present invention having the above-described construction principle, first, the oxide material is formed by the forming device 3 on the conductive material processed into a desired shape. After that, the oxide superconductor material is formed by the forming apparatus 4. At this time, these materials are supplied from a plurality of forming material supply windows 12 provided in the periphery of the conductive material so that the outer circumference of the conductive material becomes uniform. Figure 2
Although the number of the supply windows 12 is four in (a), the number is not particularly limited. And heating means 11 such as an electron gun
And a container 15 in which an inlet pipe 14 for introducing an oxidant such as oxygen gas is housed and a supply window 12 is attached. The container 15 may have any shape as long as it can form a conductor material. It goes without saying that the outer periphery of the container may be a partition plate for the spaces 8, 9 and 10 in some cases.

With the above-described structure, the material evaporated from the heating means 11 is supplied from the supply window 12 while being mixed with the oxidant introduced from the introduction pipe 14, and if necessary, from the electronic filament 17. The electrons are extracted by the extraction grid 16 and the evaporation material supplied from the supply window is ionized. The ionized evaporation material is accelerated by the acceleration electrode 18 and adheres to the conductive material 6. Either the conductive material or the accelerating electrode may have a ground potential, but if there are a plurality of constituent metal elements of the oxide material or the oxide superconductor material and they are vaporized from different heating means, the conductivity is reduced. It is desirable to have the material at earth potential. Further, a plurality of heating means may be provided in the spaces 8, 9 and 10 along the moving direction of the conductive material and they may be operated under the same or different conditions.

When forming an oxide material or an oxide superconductor material, it is generally necessary to raise the temperature of the conductive material. For example, as an oxide superconductor material, YB
In the case of forming a ₂ Cu ₃ O _y , 500 ° C. to 1.00
A temperature of 0 ° C is required. Therefore, if the oxide superconductor material is directly attached to the conductive material, the conductive material and the oxide superconductor material often react with each other, and even if they do not react, their thermal conductivity, Due to the different coefficient of thermal expansion, the oxide superconductor material may crack or peel during cooling. Furthermore, in order to improve the performance as a superconducting wire, the orientation of the superconducting material is important, but in general, the oxide superconductor material directly attached to the conductive material is a polycrystalline body, The sex is often disturbed.

In the present invention, in order to solve these problems, the oxide material is first attached to the conductive material at a temperature lower than the temperature at which the oxide superconductor material is formed. The presence of this material can prevent the reaction between the conductive material and the oxide superconductor material. Furthermore, since the oxide material has a thermal expansion coefficient closer to that of the superconductive material than the conductive material, The orientation of the conductive material is also likely to be improved, and the adhesion is greatly improved by the ionization and acceleration.

The shape of the supply window 12 is not limited. For example, a circular or square hole may be formed in the inner circumference of the container 15, or the evaporative substance flow may be made parallel by a nozzle so that the evaporative substance emitted from the supply window does not adhere to a portion other than the conductive material. You may The size of the hole varies depending on the size of the conductive material. For example, the distance between the surface of the conductive material and the acceleration electrode 18 is about 10 cm, and the diameter of the conductive material is 1 mm.
When the number of the supply windows 12 is four, the size of the circular hole may be about 0.3 mm to 10 mm in diameter, and in the case of a shape other than the circular shape, it is conductive. The hole may be as large as the material. Further, the container 15 and the spaces 8, 9 and 10 may have the same pressure, but it is desirable that the pressure in the space is low in order to increase the forming speed.

It is also a preferred embodiment of the present invention to form the insulating material around the oxide superconductor material at a temperature equal to or lower than the formation temperature of the oxide material. The formation temperatures of these materials differ depending on the types of the materials, but in the present invention, when the formation temperatures of the oxide material, the oxide superconductor material and the insulating material are T ₁ , T ₂ and T ₃ , respectively, T ₁ and T
₂ the relationship of T _2> T _1, when the further mounting the insulating material, to as keep the relation of _{T 2> T 1 ≧ T 3} . That is, in the case of forming an oxide superconductor material, it is generally 500.degree.
Although a high temperature of about 1,000 ° C. is required, thermal stress tends to remain at such a temperature as the oxide material and the like are formed. Therefore, it is necessary to moderate the thermal stress by gradually increasing and gradually decreasing the temperature change in the manufacturing process. In the case of forming an oxide material, the oxide superconductor is formed at a temperature lower than the temperature at which the oxide superconductor material is formed, and in order to produce an oxide superconductor having good characteristics, a crystal is formed rather than an amorphous state. Since it is desirable to form the film, it is preferable to form it at a somewhat high temperature, generally about 200 ° C to 400 ° C. As a result, the heat treatment for removing the mechanical strain of the conductive material can be simultaneously performed. After that, an oxide superconductor material is formed, and the temperature at this time may be set depending on the kind of the superconducting material to be formed.

Further, when the insulating material is formed, it is important that the forming temperature has a relation of T ₁ ≧ T ₃ , and the winding temperature of the winding reel 2 is kept as close to room temperature as possible. Is desirable. Therefore, the insulating material is formed at 400 ° C. or lower, preferably 200 ° C. or lower. If the temperature is lower than this level, the superconducting wire wound by the take-up reel will almost always have a problematic thermal stress in use unless the heat capacity of the superconducting wire 7 becomes particularly large. Absent. A cooling means may be provided around the take-up reel depending on the forming temperature of the insulating material.

The insulating material is generally attached to the entire outer circumference of the oxide superconductor material. However, in the manufacturing method of the present invention, the take-up reel 2 may be a coil bobbin of a superconducting magnet. . In such a case, an insulating material may be formed, for example, at regular intervals and wound on a coil bobbin, and then the whole may be heat-treated, or an epoxy resin or the like may be poured into the gap formed by the insulating material and cured. . In FIG. 2, the material attached to the conductive material is the container 1
Although it is generated from the heating means 11 in the apparatus 5, it is also possible to vaporize the organometallic compound or the like outside the container and supply this through the supply window 12 together with the oxidizing agent.

[0019]

EXAMPLES Hereinafter, the present invention will be described in more detail with reference to examples. The case where silver wire is used as the conductive material, magnesium oxide is used as the oxide material, YBa ₂ Cu ₃ O _y is used as the oxide superconductor material, and polyethylene is used as the insulating material will be described. The invention is in no way limited to these materials. As a heating method of each substance, a resistance heating method and a heating method using an electron gun will be described, but it goes without saying that heating may be performed by other means such as laser or plasma.

Example 1 FIG. 1 shows a sectional view of an apparatus used in the manufacturing method of the present invention. 1 is a supply reel of silver wire, 2 is a superconducting wire 7
Take-up reels 3, 4, and 5 are devices for forming magnesium oxide, YBa ₂ Cu ₃ O _y , and polyethylene, respectively.
Reference numerals 8, 9 and 10 denote spaces for accommodating the forming devices 3, 4 and 5, and the pressure is reduced to about 4 × 10 ⁻⁶ Torr by a device (not shown). The cross-sectional structure of the forming devices 3, 4, and 5 is shown in FIG. The silver line moves vertically from top to bottom with respect to the plane of the paper. 11 is a heating device, 12 is 11
A supply window to which the substance evaporated from the supply window is supplied, and 13 is a unit for ionizing and accelerating the substance supplied from the supply window. The details are as shown in FIG. The grid 16 and the acceleration electrode 18. The accelerating electrode 18 can be applied up to +10 kV with the silver wire 6 at the ground potential. Supply window 12
The forming devices 3 and 4 had a circular hole with a diameter of 1 mm, and the forming device 5 had a circular hole with a diameter of 5 mm. 19 is a heater. The heating device 11, the extraction grid 16, the electronic filament 17, the acceleration electrode 18, and the heater 19 are omitted in FIG. Further, reference numeral 14 is an introduction pipe for introducing oxygen gas, which does not have to be installed in the forming apparatus 5.

A silver wire can be supplied and wound by the supply reel 1 and the winding reel 2. First, the silver wire is heated to 200 ° C. by the heater 19, and magnesium oxide is evaporated in this state. At this time, the pressure inside the container 15 is made higher than that at the outside, but here, it is about 1.5 times. Further, oxygen gas was introduced from 14 at a rate of 50 ml / sec. A current of 100 mA is applied to the electron filament, 500 V is applied to the extraction grid, and the acceleration voltage is 1
Magnesium oxide was vapor-deposited on a silver wire as kV.

The silver wire on which magnesium oxide is deposited moves to the spaces 8 to 9 and the temperature of the silver wire is 500 during this time.
It is heated to ℃. And by the heating device,
The ratio of Y, Ba and Cu is adjusted to be 1: 2: 3, and a heater (not shown) is provided near the supply window 12 to set the ratio to 1.0.
Oxygen gas heated to 00 ° C. was introduced at a rate of 100 ml / sec and was supplied into the space 9 through the supply window 12 together with the metal components. The pressure inside the container 15 was set to be five times that outside the container when oxygen gas was not introduced. And 30 mA for the electronic filament 17 and 2 for the extraction grid 16.
00V and 500V were applied to the acceleration electrode 18.

The silver wire to which the oxide material and the oxide superconductor material are attached as described above is then moved from the space 9 to the space 10, during which the temperature of the silver wire is cooled to 50 ° C. Then, 100 mA is applied to the electronic filament 17, 300 V is applied to the extraction grid 16, and 1 kV is applied to the acceleration electrode 18 to form a polyethylene film, which is then wound by the winding reel 2.

The characteristics of the superconducting wire produced in this way were examined as follows. A superconducting wire was manufactured under the same conditions as above using a silver tape with a width of 5 mm instead of a silver wire, and a sample piece with a length of 10 mm was taken out from an arbitrary place, and its X-ray diffraction pattern, DC 4-terminal method was used. The temperature dependence of electric resistance was investigated by. The results of the sample without polyethylene attached are shown in FIGS. 3 and 4. From these results, it can be seen that the critical temperature is 91 K and a C-axis oriented superconducting thin film is formed. Further, when the current value when a voltage of 0.1 μV is observed in a four-terminal measurement in which the distance between the current terminals is 5 mm is defined as the critical current, the superconductor manufactured by the method of the present invention is 10 ^{4 at} 77K. A / cm ²
It was confirmed that the above current could be passed, and it was confirmed that it could be used as a practical superconducting wire.

Further, copper, stainless steel, hastelloy, manganese steel or the like is used instead of silver, cerium oxide, alumina or yttrium oxide or the like is used instead of magnesium oxide, and a superconductor material such as Bi or Tl-based superconductor is used. Even when using, a superconducting wire with sufficient practicability can be obtained,
It was confirmed that the manufacturing method of the present invention is not limited to materials. Also, as the insulating material, almost all insulating materials such as ethylene propylene copolymer, epoxy resin, aramid resin, magnesium oxide, alumina, etc., which are the same as the oxide materials used inside, can be used.

Embodiment 2 FIG. 5 shows a sectional configuration diagram of an apparatus used in the manufacturing method of the present invention. Spaces 8, 9 and 10 for forming an oxide material, an oxide superconductor material and an insulating material are provided along the moving direction of the silver wire 6, and a plurality of forming devices 3, 4 are provided in each space.
And 5 are provided. The forming devices 3 and 4 use an electron gun as a heating device to evaporate cerium oxide which is an oxide material and YBa ₂ Cu ₃ O _y which is an oxide superconductor material.
The forming device 5 evaporates polyethylene by resistance heating. In the forming apparatus 4, the electron beam emitted from the electron gun is irradiated on the crucible containing Y, BaO, and Cu in time series, and the irradiation time is controlled so that Y in the vaporized vapor:
The Ba: Cu ratio was set to be 1: 2: 3. The heater 19 heats the silver wire so that the temperature of the silver wire in the space 8 becomes 250 ° C. and that in the space 9 becomes 550 ° C. 5 in space 10
Oxygen is introduced from the introduction pipe 14 into the intermediate portion where the silver wire moves from 9 to 10 so as to reach 0 ° C., and then cooled. Each space 8, 9 and 10 is 2 × 10 by a vacuum exhaust device (not shown).
^{Although the} pressure was reduced to ^-6 Torr or less, in the space 9, an exhaust device having a high water exhaust capacity, for example, a cryopump was used, and the others used an oil diffusion pump. Also, the forming device 3
Oxygen was used as the oxidizing agent, and ozone was used as the oxidant in the forming apparatus 4, and the oxygen was introduced through an introducing pipe (not shown). No oxidizer is used in the forming device 5.

In the forming apparatus 4, the evaporation material supplied from the supply window is ionized and accelerated between the evaporation material supply window (not shown) and the silver wire. At this time, the electronic filament 17 is 50
mA, the extraction grid 16 was 100 V, and the acceleration voltage was 1 kV. Further, the supply window 12 was circular with a diameter of 3 mm, and the silver wire was set to the ground potential. Also in the forming devices 3 and 5, the supply window 12 is a circular hole having a diameter of 3 mm. Supply window 12
Is 6 places, and in the forming apparatus 4, ionization was performed in 3 supply windows to accelerate. The pressure difference between the inside and outside of the forming device was 1.2 times in the forming devices 3 and 5 and double in the forming device 4 when ozone was introduced.

The superconducting wire produced by such a method has a critical temperature of 90 K and a critical current of about 3 × 10 ⁴ A / cm ² (7
7K), and the take-up reel is 1 m / min. The above speed (when the thickness of each layer is 200 nm for oxide material, 1 μm for oxide superconductor material and 2 μm for insulating material)
Was able to wind the superconducting wire.

Example 3 In the apparatus having the structure shown in FIG. 5, the apparatus including one forming apparatus 3, five forming apparatuses 4 and three forming apparatuses 6 was used. A superconducting wire was manufactured around the supply window 12 of the forming devices 3, 4 and 5 using a device as shown in FIG. 6 is a silver wire,
Reference numeral 14 is an introduction pipe for introducing an oxidant, and 16, 17, and 18 are extraction grids, electron filaments, and acceleration electrodes for ionizing and accelerating. Further, reference numeral 12 is a supply window 12 having a nozzle whose inside is machined so that the vaporized substance is adiabatically expanded and the flight loci of the vaporized substance thereafter are substantially parallel. The inner diameter of this nozzle is the smallest and the diameter is 1.5
mm, but 2.5 mm in the forming device 5. or,
There are six supply windows 12 in the forming devices 3 and 4, and the forming device 5
Then there are 3 places.

Cerium oxide is evaporated by an electron gun and attached to the outer circumference of the silver wire heated by the heater 19. In FIG. 6, cerium oxide is evaporated so that the pressure inside the nozzle of the supply window 12 is 5 times that of the outside, and in this state, oxygen is introduced from the introduction pipe 14 (the tip diameter is 1 mm) at 30 ml /
min. Was introduced in the direction of the nozzle. A current of 100 mA was passed through the electron filament 17, a voltage of 150 V was applied to the extraction grid 16, and a voltage of 2 kV was applied to the acceleration electrode 18, to deposit cerium oxide. In the forming device 4, Y,
When BaO and CuO are heated, Y: Ba: Cu becomes 1: 2: 3.
The pressure inside the forming apparatus is higher than that in the space 9 by about 2 orders of magnitude. In this state, NO ₂ gas is supplied from the introduction pipe 14 (the diameter of the tip is 1 mm) to efficiently oxidize the NO ₂ gas.
ml / min. Introduced at the rate of. The heater, the silver wire when silver wire is moved to the space 9 from the space 8 is heated to 500 ° C., in an electronic filament 17 passing a 40mA current, the voltage of the extraction grid 16, 50 V, the voltage of the accelerating electrode 18 500V Oxide superconductor YBa ₂ C as
u ₃ O _y was formed. When the silver wire moves from the space 9 to the space 10, a mixed gas of oxygen and nitrogen of 1: 1 is sprayed to cool it. When the temperature of the silver wire is about 60 ° C. or less, the electric filament 17 has a current of 50 mA and the extraction grid 16 has a voltage of 50.
A superconducting wire 7 was manufactured by attaching polyethylene at V and an accelerating voltage of 1 kV.

In the present invention, the superconducting wire (oxide material 20n
m, oxide superconductor material 1 μm, insulating material 3 μm) 3
m / min. The critical temperature of the superconductor at this time is 88 K, and the critical current is 5 × 10 ⁶ A / cm 2.
² (4.2K). When copper, stainless steel, hastelloy, manganese steel or the like is used instead of silver, cerium oxide, alumina or yttrium oxide or the like is used instead of magnesium oxide, and a Bi-based or Tl-based superconductor is used. It was confirmed that a sufficiently practical superconducting wire was obtained, and that the manufacturing method of the present invention is not limited to materials. Also, as the insulating material, an insulating material such as an ethylene propylene copolymer, an epoxy resin, an aramid resin, cerium oxide, or alumina, which is the same as the oxide material used inside, can be used.

[0032]

As described above, according to the present invention, almost all currently known oxide superconductor materials are used, and the superconducting wire excellent in performance is not limited to the materials. Can be obtained. Further, according to the present invention, the production speed was as slow as about 2 m / hr in the past, but 1 m / mi.
n. It is possible to reduce the manufacturing cost because it is significantly shortened. Furthermore, since the superconducting wire obtained by the manufacturing method of the present invention uses a conductive material in the center,
It has high mechanical strength and is highly practical.

[Brief description of drawings]

FIG. 1 is a structural principle diagram of an example of a manufacturing apparatus used in the present invention.

FIG. 2 is a structural principle diagram of an example of a forming apparatus used in the present invention.

FIG. 3 shows an X-ray diffraction pattern of the superconducting wire produced in Example 1.

FIG. 4 shows the temperature dependence of the electrical resistance of the superconducting wire manufactured in Example 1 measured by the DC 4-terminal method.

FIG. 5 is a structural principle diagram of an example of a manufacturing apparatus used in the present invention.

FIG. 6 is a structural principle diagram of an example of a forming apparatus used in the present invention.

[Explanation of symbols]

 1: Supply reel 2: Take-up reel 3, 4, 5: Forming device 6: Conductive material 7: Superconducting wire 8, 9, 10: Space 11: Heating device 12: Supply window 13: Ionization / accelerator 14: Introducing pipe 15: Forming device container 16: Extraction grid 17: Electronic filament 18: Accelerating electrode 19: Heater

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Office reference number FI technical display location H01B 12/06 ZAA

Claims (6)

[Claims] 1. A method of manufacturing a superconducting wire having a structure in which an oxide material and an oxide superconductor material are sequentially formed on an outer periphery of a conductive material, wherein the conductive material is delivered from a supply reel and wound by a take-up reel. On the way to the formation, an oxide material at a forming temperature T ₁ and an oxide superconductor material at a forming temperature T ₂ are sequentially formed on a conductive material, and the forming temperature at that time is T ₂ > T ₁
And at least one of the constituent metal elements of the oxide material and the oxide superconductor material in the formation of at least the oxide material and the oxide superconductor material.
A method for producing a superconducting wire, characterized in that a seed adheres to a conductive material while coexisting with an oxidizing agent. Wherein oxide material on the outer periphery of the conductive material, delivered in the method of manufacturing an oxide superconductor material and the superconducting wire of the four-layer structure insulation material are sequentially formed, conductive material from the supply reel In the middle of being wound on the take-up reel, the oxide material is formed on the conductive material at the forming temperature T ₁ and the forming temperature T _{2 is} formed.
The oxide superconductor material and the insulating material at the formation temperature T ₃ are sequentially formed, and the formation temperature at that time is set so that T ₂ > T ₁ ≧ T ₃ and at least the oxide material is formed. And in forming an oxide superconductor material, at least one of the constituent metal elements of the oxide material and the oxide superconductor material adheres to the conductive material in the state of coexisting with the oxidizing agent. And a method of manufacturing a superconducting wire. 3. At least one metal element of the metal elements constituting the oxide superconductor material is ionized, and the ionized metal element is electrically accelerated and deposited on the conductive material. Alternatively, the method for manufacturing the superconducting wire according to claim 2. 4. A method for manufacturing a superconducting wire having a structure in which an oxide material and an oxide superconductor material are sequentially formed on the outer periphery of a conductive material, in which evaporation is performed to vaporize the oxide material and the oxide superconductor material. At least one source is prepared for each material, and the substance evaporated from one evaporation source is ejected from a plurality of nozzles and adheres to the surface of the conductive material. 5. A method for producing a superconducting wire having a four-layer structure in which an oxide material, an oxide superconductor material, and an insulating material are sequentially formed on the outer periphery of a conductive material. At least one evaporation source for evaporating the material and the insulating material is prepared for each material, and the substance evaporated from one evaporation source is ejected from a plurality of nozzles and adheres to the surface of the conductive material. Wire manufacturing method. 6. The method for producing a superconducting wire according to claim 4, wherein the vaporized substance ejected from the nozzle between the nozzle and the conductive material is ionized and accelerated to be attached to the conductive material.