JPH0810184Y2 - 基板の表面処理装置 - Google Patents
基板の表面処理装置Info
- Publication number
- JPH0810184Y2 JPH0810184Y2 JP1989121987U JP12198789U JPH0810184Y2 JP H0810184 Y2 JPH0810184 Y2 JP H0810184Y2 JP 1989121987 U JP1989121987 U JP 1989121987U JP 12198789 U JP12198789 U JP 12198789U JP H0810184 Y2 JPH0810184 Y2 JP H0810184Y2
- Authority
- JP
- Japan
- Prior art keywords
- transmission means
- surface treatment
- liquid
- lubricating liquid
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004381 surface treatment Methods 0.000 title claims description 35
- 239000000758 substrate Substances 0.000 title claims description 25
- 239000007788 liquid Substances 0.000 claims description 65
- 230000005540 biological transmission Effects 0.000 claims description 49
- 230000001050 lubricating effect Effects 0.000 claims description 39
- 239000003795 chemical substances by application Substances 0.000 claims description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 230000000694 effects Effects 0.000 description 5
- 239000012756 surface treatment agent Substances 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000008400 supply water Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989121987U JPH0810184Y2 (ja) | 1989-10-17 | 1989-10-17 | 基板の表面処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989121987U JPH0810184Y2 (ja) | 1989-10-17 | 1989-10-17 | 基板の表面処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0361330U JPH0361330U (enrdf_load_stackoverflow) | 1991-06-17 |
| JPH0810184Y2 true JPH0810184Y2 (ja) | 1996-03-27 |
Family
ID=31670008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989121987U Expired - Lifetime JPH0810184Y2 (ja) | 1989-10-17 | 1989-10-17 | 基板の表面処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0810184Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101457871B1 (ko) * | 2013-05-13 | 2014-11-06 | 한국성전(주) | 테이프 재단용 금형 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5844850U (ja) * | 1981-09-21 | 1983-03-25 | 日本電気ホームエレクトロニクス株式会社 | 無塵搬送装置 |
| JPH0719767B2 (ja) * | 1986-05-08 | 1995-03-06 | 大日本スクリ−ン製造株式会社 | 表面処理装置 |
-
1989
- 1989-10-17 JP JP1989121987U patent/JPH0810184Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0361330U (enrdf_load_stackoverflow) | 1991-06-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |