JPH08100252A - Film forming device - Google Patents

Abstract

PURPOSE: To stabilize the evaporation of a metallic material and to obtain a magnetic recording medium having high performance with good production efficiency by transporting this metallic material from the lower position to the upper position of a vessel, supplying the metallic material into the vessel and evaporating the material. CONSTITUTION: The magnetic recording medium is obtd. by heating and evaporating a magnetic alloy 5 housed in a crucible 8 in the vacuum vessel 7 and is deposited on the base 2 traveling on a cooling can 1, by which the metallic film is formed. Pellets 9 of the magnetic alloy material are supplied from the housing container 10 of the film forming device via rails 11. The pellets 9 are received in the lower position of the crucible 9 and are transported to the upper position via a rod 12 vertically moving by a pinion 13. The pellets 9 are smoothly charged from this position into the crucible 8 by guiding of a guide 14, by which the replenishing of the magnetic alloy 5 is executed. As a result, the evaporation of the magnetic material is stabilized and the defectless film is formed on the base 2.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium manufacturing apparatus, for example.

[0002]

BACKGROUND OF THE INVENTION For magnetic recording media such as magnetic tape, a binder resin is not used as a magnetic layer provided on a non-magnetic support instead of a coating type using a binder resin because of the demand for high density recording. A metal thin film type that is not used has been proposed. That is, there has been proposed a magnetic recording medium having a magnetic layer formed by a wet plating means such as electroless plating, or a dry plating means such as vacuum deposition, sputtering or ion plating. Since the magnetic recording medium of this type has a high packing density of magnetic material, it is suitable for high-density recording.

In particular, the means for forming the magnetic film by the vapor deposition means is preferable because the film formation rate is higher than that by sputtering. A magnetic recording medium manufacturing apparatus using this vapor deposition means is generally configured as shown in FIG. In FIG. 4, 21 is a cooling can roll, 22 is a polyethylene terephthalate (PET) film supply side roll, 23 is a PET film winding side roll, 24
Is a shielding plate, 25 is a crucible, 26 is a magnetic alloy, 27 is an electron gun, 28 is a vacuum container, and 29 is a supply device. That is, after the vacuum container 28 is evacuated to a predetermined vacuum degree, the electron gun 27 is operated to operate the magnetic alloy 2 in the crucible 25.
A magnetic recording medium is manufactured by evaporating 6 and depositing (evaporating) the magnetic alloy 26 on the PET film.

In this manufacturing apparatus, in order to continuously deposit a magnetic material on a long PET film, it is necessary to replenish the magnetic metal lost by evaporation so that the height of the molten metal surface becomes constant. , Crucible 25 by feeding device 29
A lump 30 of magnetic alloy is supplied to. However,
In the conventional apparatus, the mass 30 of magnetic alloy is the crucible 25.
On the other hand, since it has been dropped from above, stable supply may not be possible due to the pollution due to the deposition of evaporated metal and the effect of heat.

Therefore, there has been a problem that defects are caused in the magnetic film deposited on the PET film and the production efficiency of the high performance magnetic recording medium is significantly reduced.

[0006]

DISCLOSURE OF THE INVENTION An object of the present invention is to provide a technique capable of efficiently obtaining a high performance magnetic recording medium. An object of the present invention is a film forming apparatus for forming a metal film by evaporating a metal material in a container and depositing the metal material on a support, and receiving the metal material at a position below the container, Is provided to the upper position of the container and is supplied to the inside of the container.

It is preferable that a guide plate is provided upright on the edge of the container on the side where the metal material is charged. This makes it possible to prevent vaporized metal from adhering particularly effectively. Further, from the viewpoint of manufacturing cost, it is preferable that the supply means is constituted by a rack and pinion mechanism. For example, the supply means includes a storage container for the metal material, a rail for guiding the metal material in the storage container, and a rack and pinion mechanism provided at the end of the rail, and the metal material in the storage container is railed. It is possible to exemplify a structure in which the rack and pinion mechanism is guided by the rack pinion mechanism and the guided metal material is conveyed to the upper position of the container by the rack and pinion mechanism.

According to the present invention, when the magnetic material is supplied, the magnetic material is conveyed from a position lower than the crucible and is introduced into the crucible. Don't get up For this reason, it is possible to always supply a smooth metal material, the evaporation of the magnetic material is stable, defects are not easily caused in the magnetic film deposited on the support, and a high-performance magnetic recording medium can be obtained with high production efficiency. The
A magnetic recording medium can be obtained at low cost.

The present invention will be described below with reference to examples.

[0010]

1 to 3 show an embodiment of a film forming apparatus according to the present invention. FIG. 1 is a schematic view of an entire apparatus for manufacturing a magnetic recording medium, and FIGS. 2 and 3 are metal material supplying mechanisms. It is a side view which shows the operating condition of. In each figure, 1 is a cooling can roll, 2
Is a non-magnetic support such as a PET film, 3a is a supply side roll of the support 2, 3b is a winding side roll of the support 2, 4
Is a shielding plate, 5 is a Co—Ni magnetic alloy, 6 is an electron gun, 7 is a vacuum container, and 8 is a crucible. Since the configurations of these portions are well known, detailed description thereof will be omitted.

Numeral 9 is a pellet of the Co-Ni magnetic alloy supplied to the crucible 8 and is formed into a cylindrical shape having a diameter of 10 mm and a height of 12 to 20 mm so that the supply can be performed smoothly. 10 is a pellet container, 11 is an inclined rail set below the melting and evaporating surface in the crucible 8, 12 is a rod displaceable in the vertical direction, and the tip of this rod 12 is pellet. It is inclined (for example, in an arc shape) from the storage container 10 side toward the crucible 8 side.

A pinion 13 is rotated by a driving means (not shown), and is arranged in a state of meshing with a rack formed on the rod 12, whereby the rod 12 is moved up and down. . Reference numeral 14 denotes a guide plate provided on the pellet supply side at the edge portion of the crucible 8, and thereby more effectively prevents vaporized metal from adhering to the metal material supply mechanism.

Next, a process of manufacturing a magnetic recording medium using the apparatus configured as described above will be described. First, after evacuating the inside of the vacuum container 7 to a predetermined vacuum degree,
The electron gun 6 is operated to evaporate the magnetic alloy 5 in the crucible 8, and the particles of the magnetic alloy are obliquely deposited on the support 2. Then, when the magnetic alloy 5 decreases due to evaporation, the rod 12 in the lowered state is pushed up by the rotation of the pinion 13 as shown in FIG. 2, whereby the pellet 9 placed on the rod tip portion is conveyed to the loading position. To be done.

Then, as shown in FIG. 3, when the pellet 9 falls into the crucible 8 over the guide plate 14, the pinion 13 is reversed and the rod 12 is pulled back to its original position. Immediately before the end of this backward movement, that is, the rod 12
2 again, the rod 12 receives one pellet 9 and the next pellet can be supplied.

Since the magnetic alloy is constantly supplied into the molten metal during the vapor deposition work as described above, the vapor deposition work is not interrupted and the magnetic film can be formed efficiently, and heat and vaporized metal Since there is no possibility that the adhesion will cause a problem in the supply of the magnetic alloy material, a high-quality magnetic recording medium can be manufactured with a high yield. Although the above description is for forming the magnetic film, the same can be applied to the case where the back coat film is formed of a metal thin film.

[0016]

[Effects] According to the present invention, it is possible to prevent metal material supply failure due to heat or adhesion of evaporated metal from occurring, and to supply metal material reliably and smoothly into the crucible.
Therefore, stable evaporation can be continuously performed for a long time, and a high-quality film can be efficiently obtained.
For example, a high performance magnetic recording medium can be obtained at low cost.

[Brief description of drawings]

FIG. 1 is a schematic view of an entire magnetic recording medium manufacturing apparatus according to the present invention.

FIG. 2 is a side view showing an operating state of a metal material supply mechanism.

FIG. 3 is a side view showing an operating state of the metal material supply mechanism.

FIG. 4 is a schematic diagram of a conventional magnetic recording medium manufacturing apparatus.

[Explanation of symbols]

 1 Cooling Can 2 Support 3a Supply Side Roll 3b Winding Side Roll 5 Magnetic Alloy 6 Electron Gun 7 Vacuum Container 8 Crucible 9 Pellet 10 Pellet Storage Container 11 Rail 12 Rod 13 Pinion 14 Guide Plate

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Hirohide Mizunoya 2606 Akabane, Kai-cho, Haga-gun, Tochigi Prefecture Kao Co., Ltd.Institute of Information Science Research Institute (72) Inventor Shigemi Wakabayashi 2606 Akabane, Kai-cho, Haga-gun, Tochigi Kao Co., Ltd. Company Information Science Laboratory

Claims (4)

[Claims] 1. A film forming apparatus for forming a metal film by evaporating a metal material in a container and depositing the metal material on a support, which receives the metal material at a position below the container, A film forming apparatus comprising: a supply unit configured to convey to an upper position of the container and supply into the container. 2. The film forming apparatus according to claim 1, wherein a guide plate is provided at an edge of the container on the side to which the metal material is supplied. 3. The film forming apparatus according to claim 1, wherein the supply means has a rack and pinion mechanism. 4. The supply means comprises a container for storing a metal material, a rail for guiding the metal material in the container, and a rack and pinion mechanism provided at an end of the rail. The material is guided to a rack and pinion mechanism by a rail, and the guided metal material is configured to be conveyed to a position above the container by the rack and pinion mechanism. Deposition apparatus.