JPH0799201A - Method for connecting electrode - Google Patents

Method for connecting electrode

Info

Publication number
JPH0799201A
JPH0799201A JP24155293A JP24155293A JPH0799201A JP H0799201 A JPH0799201 A JP H0799201A JP 24155293 A JP24155293 A JP 24155293A JP 24155293 A JP24155293 A JP 24155293A JP H0799201 A JPH0799201 A JP H0799201A
Authority
JP
Japan
Prior art keywords
electrode
solvent
electrodes
conductive particles
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24155293A
Other languages
Japanese (ja)
Inventor
Atsuhiko Fujii
淳彦 藤井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP24155293A priority Critical patent/JPH0799201A/en
Publication of JPH0799201A publication Critical patent/JPH0799201A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73201Location after the connecting process on the same surface
    • H01L2224/73203Bump and layer connectors
    • H01L2224/73204Bump and layer connectors the bump connector being embedded into the layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319Arrangement of the layer connectors prior to mounting
    • H01L2224/83192Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3457Solder materials or compositions; Methods of application thereof
    • H05K3/3478Applying solder preforms; Transferring prefabricated solder patterns

Landscapes

  • Wire Bonding (AREA)

Abstract

PURPOSE:To simplify the method for directly connecting, electrodes of electronic components and devices to electrodes provided on printed circuit boards, etc., and for decreasing costs. CONSTITUTION:Solvent 5 containing solder-plating magnetic particles 6 is coated in the area where an electrode 2, present on a printed circuit board 1, is placed, and the particles 6 in the solvent are forced to concentrate on the electrode 2 in the magnetic field of magnets 7 and 8. Then under this situation, the solvent is made to volatile, and the concentrated particles are baked to produce a bump 9. With this method, bumps are produced inexpensively through no highly controlled process.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、電子部品や電子デバ
イスの電極をワイヤー等のリードを使用せずに、接続相
手の電極に直接接続するための方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for directly connecting an electrode of an electronic component or an electronic device to an electrode of a connection partner without using a lead such as a wire.

【0002】[0002]

【従来の技術】電子部品や電子デバイスの電極間を電気
的に接続する場合、ボンディングワイヤ等を介して間接
的に接続するのが一般的であるが、最近は電子回路の小
型化に伴い、電極同士を重ねて直接接続する方法が考え
出されて多用される傾向にある。例えば、電極上に半田
等のバンプを形成し、リフロー炉でそのバンプを溶かし
て上に重ねた電極を下側の電極に接合する方法はこの直
接接続の代表的な一例である。
2. Description of the Related Art Generally, when electrically connecting electrodes of electronic parts and electronic devices, it is common to make an indirect connection through a bonding wire or the like, but recently, with the miniaturization of electronic circuits, A method of overlapping electrodes and directly connecting them has been devised and often used. For example, a method of forming bumps of solder or the like on the electrodes, melting the bumps in a reflow furnace, and joining the stacked electrode to the lower electrode is a typical example of this direct connection.

【0003】[0003]

【発明が解決しようとする課題】上述した半田パンブ等
は、複雑でしかも極めて高度な制御を必要とする工程を
得て作られているためコスト高となり、従って、電子回
路の小型化面で好ましいことは分かっていても、コスト
面から使用分野が限定されると云う問題があった。
The above-mentioned solder bump or the like has a high cost because it is manufactured by a process which requires a complicated and extremely high degree of control, and is therefore preferable in terms of downsizing of an electronic circuit. However, there is a problem that the field of use is limited in terms of cost even though it is known.

【0004】そこで、この発明は、電極同士の直接接続
を比較的容易に安価に信頼性良く行えるようにすること
を課題としている。
[0004] Therefore, an object of the present invention is to make direct connection between electrodes relatively easy, inexpensive and reliable.

【0005】[0005]

【課題を解決するための手段】上記の課題を解決するた
めに開発したこの発明の方法は、磁性体の導電粒子を含
む溶媒を電極上に塗布し、さらに、その電極に垂直方向
に磁界を印加することにより塗布した導電粒子を電極の
接合面上に集中させ、この状態で溶媒を揮発させ、か
つ、導電粒子を焼結してバンプを作り、このバンプを接
合材として上記電極上に接続相手の電極を接合するもの
である。
The method of the present invention, which was developed to solve the above-mentioned problems, applies a solvent containing conductive particles of a magnetic material onto an electrode, and further applies a magnetic field in the direction perpendicular to the electrode. The applied conductive particles are concentrated on the bonding surface of the electrode by applying, the solvent is volatilized in this state, and the conductive particles are sintered to form a bump, and the bump is connected to the electrode as a bonding material. It is to join the electrodes of the other party.

【0006】また、もうひとつの方法は、磁性体の導電
粒子を含む接着液を電極上に塗布し、さらに、その電極
に垂直方向に磁界を印加することにより塗布した導電粒
子を電極の接合面上に集中させ、この状態で上記電極上
に接続相手の電極を重ねて接着液を固化するものであ
る。
Another method is to apply an adhesive solution containing conductive particles of a magnetic material onto an electrode, and then apply a magnetic field to the electrode in the vertical direction to apply the applied conductive particles to the bonding surface of the electrode. It is concentrated on the upper side, and in this state, the electrode of the connection partner is overlapped on the electrode to solidify the adhesive liquid.

【0007】なお、前者の方法で用いる導電粒子は、焼
結と相手電極接合時の溶融を低温で行えるように、磁性
体粒子に鉛、錫、半田等の低融点(好ましくは350℃
以下)金属の被覆を設けたものが望ましい。
The conductive particles used in the former method have a low melting point (preferably 350 ° C.) of lead, tin, solder or the like in the magnetic particles so that sintering and melting at the time of joining the mating electrodes can be performed at a low temperature.
The following is preferable to be provided with a metal coating.

【0008】[0008]

【作用】この発明の方法では、磁界により溶媒又は接着
液中の磁性体導電粒子を電極上に集中させるため、従来
の半田バンプ形成のように複雑な工程を経る必要がな
く、高度な制御も必要としない。
According to the method of the present invention, the magnetic conductive particles in the solvent or the adhesive solution are concentrated on the electrodes by the magnetic field. Therefore, there is no need to go through complicated steps as in the conventional solder bump formation, and high-level control is also possible. do not need.

【0009】また、導電粒子が確実に連なって導電路を
構成するため、導電塗料を介して電気導通を得る方法よ
りも高信頼性の接続が行える。
Further, since the conductive particles are surely connected to each other to form the conductive path, the connection can be made with higher reliability than the method of obtaining the electric conduction through the conductive paint.

【0010】なお、導電粒子の焼結時、或いは導電粒子
から成るバンプの溶融時に電子部品や電子デバイスが高
温に曝されるのは好ましくない。先に述べた低融点金属
の被覆を有する導電粒子は、焼結と被覆の溶融が低温で
行えるため、その好ましくない事態を回避できる。
It is not preferable that the electronic parts and the electronic device are exposed to a high temperature when the conductive particles are sintered or when the bumps made of the conductive particles are melted. Since the conductive particles having the coating of the low melting point metal described above can be sintered and melted at a low temperature, the unfavorable situation can be avoided.

【0011】[0011]

【実施例】図1及び図2にこの発明の接続方法の具体例
を示す。ここでは、プリント回路基板上の電極に半導体
チップを直接接続する場合を例に挙げている。両図とも
1はプリント回路基板、2は同基板上の電極、3は半導
体チップ、4は電極2に接続するチップ側の電極を表し
ている。
1 and 2 show a concrete example of the connection method of the present invention. Here, the case where the semiconductor chip is directly connected to the electrodes on the printed circuit board is taken as an example. In both figures, 1 is a printed circuit board, 2 is an electrode on the board, 3 is a semiconductor chip, and 4 is an electrode on the chip side connected to the electrode 2.

【0012】図1の方法では、図のに示すように、溶
媒5を基板1上の電極形成領域に塗布する。ここで用い
た溶媒5は、揮発性の液体中に半田メッキ磁性体粒子6
を分散させてある。
In the method of FIG. 1, as shown in the figure, the solvent 5 is applied to the electrode forming region on the substrate 1. The solvent 5 used here is solder-plated magnetic particles 6 in a volatile liquid.
Are dispersed.

【0013】次に、図のに示すように、電極2を間に
してその上下に極性の異なる磁石7、8を対向配置し、
電極2の接合面に対し垂直方向の磁界を印加して溶媒5
中の半田メッキ磁性体粒子6を電極2上に集中させる。
次いで、この状態を保って基板の全体を加熱雰囲気中に
置く。これにより、液が揮発して無くなり、さらに残さ
れた半田メッキ磁性体粒子6が焼結して電極2上に図の
に示すようなバンプ9ができる。そこで、この後は従
来と同様にバンプ9上に半導体チップ3の電極4を重
ね、リフロー炉でバンプ9を溶かして(溶けるのは粒子
表面の半田)電極2、4を接合する。
Next, as shown in the figure, magnets 7 and 8 having different polarities are arranged to face each other with the electrode 2 in between.
A magnetic field perpendicular to the bonding surface of the electrode 2 is applied to the solvent 5
The solder-plated magnetic particles 6 are concentrated on the electrode 2.
Then, keeping this state, the whole substrate is placed in a heating atmosphere. As a result, the liquid volatilizes and disappears, and the remaining solder-plated magnetic particles 6 are sintered to form bumps 9 on the electrode 2 as shown in the figure. Therefore, thereafter, the electrodes 4 of the semiconductor chip 3 are stacked on the bumps 9 as in the conventional case, and the bumps 9 are melted in a reflow furnace (melting is solder on the particle surface) to bond the electrodes 2 and 4.

【0014】図2に示す第2の方法も、基本的な部分は
図1の方法と同じである。即ち、この方法では、溶媒1
5として接着液中に磁性体粒子16を分散させたものを
用い、この溶媒を基板上の電極形成領域に塗布する。そ
して、図1の方法と同様に磁石7、8が作る磁界を利用
して磁性体粒子16を電極2上に集中させる。図2の方
法では、この後、磁性体粒子16の集中保持状態を保っ
て電極2上に半導体チップの電極4を重ね、接着剤を固
化させる。この方法では、接着剤の接着力によって電極
2、4の接合状態を維持するので磁性体粒子16は焼結
性の良し悪しを問わないが、接続部の電気特性を考える
と、表面に良導電性金属の被覆を設けたものが好まし
い。また、接着剤による接合はバンプによる接合に比べ
て単位面積当たりの接合力が小さくなるので、図2の
に示すように、チップ3の全体が接着されるようにして
おくのが望ましい。
The basic method of the second method shown in FIG. 2 is the same as that of FIG. That is, in this method, the solvent 1
As the material 5, magnetic particles 16 dispersed in an adhesive solution are used, and this solvent is applied to the electrode formation region on the substrate. Then, similarly to the method of FIG. 1, the magnetic particles 16 are concentrated on the electrode 2 by utilizing the magnetic fields generated by the magnets 7 and 8. In the method of FIG. 2, thereafter, the electrode 4 of the semiconductor chip is superposed on the electrode 2 while maintaining the magnetic particles 16 in a concentrated holding state, and the adhesive is solidified. In this method, since the bonding state of the electrodes 2 and 4 is maintained by the adhesive force of the adhesive, the magnetic particles 16 may or may not have good sinterability, but in view of the electrical characteristics of the connecting portion, the surface has good conductivity. Those provided with a coating of a functional metal are preferable. Further, since the bonding force per unit area is smaller in the bonding by the adhesive than in the bonding by the bump, it is desirable to bond the entire chip 3 as shown in FIG.

【0015】[0015]

【発明の効果】以上説明したように、この発明の接続方
法は、高度に制御された工程を経ずに、信頼性良く電極
同士を接続することができ、経済面、信頼性の面から直
接接続が制限されていた部品やデバイスにも利用できる
ため、小型の電子回路の普及性を高めるのに役立つ。
As described above, the connection method of the present invention allows electrodes to be connected to each other with high reliability without going through a highly controlled process, and is directly connected from the economical and reliability points of view. Since it can be used for parts and devices that have limited connections, it helps increase the popularity of small electronic circuits.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の方法の一例を示す工程図FIG. 1 is a process chart showing an example of a method of the present invention.

【図2】他の接続方法の一例を示す工程図FIG. 2 is a process diagram showing an example of another connection method.

【符号の説明】[Explanation of symbols]

1 プリント回路基板 2 電極 3 半導体チップ 4 電極 5、15 溶媒 6 半田メッキ磁性体粒子 16 磁性体粒子 7、8 磁石 9 バンプ DESCRIPTION OF SYMBOLS 1 Printed circuit board 2 Electrode 3 Semiconductor chip 4 Electrode 5,15 Solvent 6 Solder plating magnetic substance particle 16 Magnetic substance particle 7,8 Magnet 9 Bump

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 磁性体の導電粒子を含む溶媒を電極上に
塗布し、さらに、その電極に垂直方向に磁界を印加する
ことにより塗布した導電粒子を電極の接合面上に集中さ
せ、この状態で溶媒を揮発させ、かつ、導電粒子を焼結
してバンプを作り、このバンプを接合材として上記電極
上に接続相手の電極を接合することを特徴とする電極の
接続方法。
1. A solvent containing magnetic conductive particles is applied onto an electrode, and a magnetic field is applied in a direction perpendicular to the electrode to concentrate the applied conductive particles on the bonding surface of the electrode. The method of connecting electrodes, wherein the solvent is volatilized and the conductive particles are sintered to form bumps, and the electrodes of the connection partner are bonded onto the electrodes using the bumps as a bonding material.
【請求項2】 磁性体の導電粒子を含む接着液を電極上
に塗布し、さらに、その電極に垂直方向に磁界を印加す
ることにより塗布した導電粒子を電極の接合面上に集中
させ、この状態で上記電極上に接続相手の電極を重ねて
接着液を固化することを特徴とする電極の接続方法。
2. An adhesive liquid containing magnetic conductive particles is applied onto an electrode, and a magnetic field is applied in a direction perpendicular to the electrode to concentrate the applied conductive particles onto the bonding surface of the electrode. In the state, an electrode of a connection partner is overlaid on the electrode to solidify the adhesive liquid, and the electrode connecting method.
JP24155293A 1993-09-28 1993-09-28 Method for connecting electrode Pending JPH0799201A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24155293A JPH0799201A (en) 1993-09-28 1993-09-28 Method for connecting electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24155293A JPH0799201A (en) 1993-09-28 1993-09-28 Method for connecting electrode

Publications (1)

Publication Number Publication Date
JPH0799201A true JPH0799201A (en) 1995-04-11

Family

ID=17076055

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24155293A Pending JPH0799201A (en) 1993-09-28 1993-09-28 Method for connecting electrode

Country Status (1)

Country Link
JP (1) JPH0799201A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100645630B1 (en) * 2005-09-16 2006-11-14 삼성전기주식회사 Method for electrolytic plating on printed circuit board using a periodic directional magnetic field

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100645630B1 (en) * 2005-09-16 2006-11-14 삼성전기주식회사 Method for electrolytic plating on printed circuit board using a periodic directional magnetic field

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