JPH0797017B2 - 光学的集積歪み干渉計 - Google Patents

光学的集積歪み干渉計

Info

Publication number
JPH0797017B2
JPH0797017B2 JP5061489A JP6148993A JPH0797017B2 JP H0797017 B2 JPH0797017 B2 JP H0797017B2 JP 5061489 A JP5061489 A JP 5061489A JP 6148993 A JP6148993 A JP 6148993A JP H0797017 B2 JPH0797017 B2 JP H0797017B2
Authority
JP
Japan
Prior art keywords
optical
optical waveguide
substrate
interferometer
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5061489A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0694425A (ja
Inventor
フーベルト・グラムリング
Original Assignee
ダイムラー−ベンツ・アクチエンゲゼルシヤフト
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ダイムラー−ベンツ・アクチエンゲゼルシヤフト filed Critical ダイムラー−ベンツ・アクチエンゲゼルシヤフト
Publication of JPH0694425A publication Critical patent/JPH0694425A/ja
Publication of JPH0797017B2 publication Critical patent/JPH0797017B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02023—Indirect probing of object, e.g. via influence on cavity or fibre
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02051—Integrated design, e.g. on-chip or monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/2935—Mach-Zehnder configuration, i.e. comprising separate splitting and combining means
    • G02B6/29352—Mach-Zehnder configuration, i.e. comprising separate splitting and combining means in a light guide
    • G02B6/29355—Cascade arrangement of interferometers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Integrated Circuits (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP5061489A 1992-02-15 1993-02-10 光学的集積歪み干渉計 Expired - Lifetime JPH0797017B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4204521A DE4204521C1 (enExample) 1992-02-15 1992-02-15
DE4204521.5 1992-02-15

Publications (2)

Publication Number Publication Date
JPH0694425A JPH0694425A (ja) 1994-04-05
JPH0797017B2 true JPH0797017B2 (ja) 1995-10-18

Family

ID=6451767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5061489A Expired - Lifetime JPH0797017B2 (ja) 1992-02-15 1993-02-10 光学的集積歪み干渉計

Country Status (6)

Country Link
US (1) US5289256A (enExample)
JP (1) JPH0797017B2 (enExample)
DE (1) DE4204521C1 (enExample)
FR (1) FR2687472B1 (enExample)
GB (1) GB2264183B (enExample)
IT (1) IT1262345B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109631789A (zh) * 2018-12-29 2019-04-16 电子科技大学 一种具有温度自补偿效应的高灵敏珐珀传感器

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FR2694630B1 (fr) * 1992-08-10 1994-09-09 Commissariat Energie Atomique Capteur en optique intégrée, notamment pour substances chimiques.
GB2319335B (en) * 1996-11-15 1998-11-11 Bookham Technology Ltd Integrated interferometer
US5481922A (en) * 1994-05-31 1996-01-09 Washabaugh; Peter D. Elastic transducer designs incorporating finite length measurement paths
RU2100787C1 (ru) * 1995-03-01 1997-12-27 Геликонов Валентин Михайлович Оптоволоконный интерферометр и оптоволоконный пьезоэлектрический преобразователь
EP0876595B1 (de) * 1996-01-26 2002-11-27 Roche Diagnostics GmbH Niederkohärenz-interferometrisches gerät
US5883717A (en) * 1996-06-04 1999-03-16 Northeastern University Optical quadrature interferometry utilizing polarization to obtain in-phase and quadrature information
US6020963A (en) * 1996-06-04 2000-02-01 Northeastern University Optical quadrature Interferometer
US5852687A (en) * 1997-07-09 1998-12-22 Trw Inc. Integrated optical time delay unit
US6687424B1 (en) 1998-08-24 2004-02-03 Empirical Technologies Corporation Sensing pad assembly employing variable coupler fiberoptic sensor
US6463187B1 (en) 1998-08-24 2002-10-08 Empirical Technologies Corporation Variable coupler fiberoptic sensor and sensing apparatus using the sensor
US6907148B2 (en) 1998-08-24 2005-06-14 Empirical Technologies Corporation Sensing apparatus employing variable coupler fiberoptic sensor
US6723054B1 (en) * 1998-08-24 2004-04-20 Empirical Technologies Corporation Apparatus and method for measuring pulse transit time
AU759318B2 (en) * 1998-10-09 2003-04-10 University Of Sydney, The Interferometer coupler using multiple input ports for improved stabiblity
AUPP644998A0 (en) * 1998-10-09 1998-10-29 University Of Sydney, The A method to stabilize the performance of a 3x3 coupler in a sagnac interferometer
CA2311966A1 (en) * 1999-06-23 2000-12-23 Stavros Dariotis Optical fiber mach-zehnder interferometer employing miniature bends
AU2903101A (en) * 1999-09-21 2001-04-30 Nanovation Technologies, Inc. A nanophotonic mach-zehnder interferometer switch and filter
US6426496B1 (en) 2000-08-22 2002-07-30 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration High precision wavelength monitor for tunable laser systems
DE10127497B4 (de) * 2001-06-09 2006-12-28 Ralf Dipl.-Ing. Siebert Miniaturisierter optischer Evaneszent-Feld-Sensor zur Gasanalyse
JP2003131051A (ja) * 2001-08-16 2003-05-08 Nec Corp 光デバイス
EP1291642A1 (en) * 2001-09-05 2003-03-12 Linde Medical Sensors AG Sensor system comprising an integrated optical waveguide for the detection of chemical substances
JP2003195087A (ja) * 2001-12-28 2003-07-09 Fujitsu Ltd 光機能デバイスの接続方法および光装置
US8182433B2 (en) * 2005-03-04 2012-05-22 Endosense Sa Medical apparatus system having optical fiber load sensing capability
US8075498B2 (en) 2005-03-04 2011-12-13 Endosense Sa Medical apparatus system having optical fiber load sensing capability
US8894589B2 (en) 2005-08-01 2014-11-25 Endosense Sa Medical apparatus system having optical fiber load sensing capability
US8048063B2 (en) 2006-06-09 2011-11-01 Endosense Sa Catheter having tri-axial force sensor
US8567265B2 (en) 2006-06-09 2013-10-29 Endosense, SA Triaxial fiber optic force sensing catheter
US8157789B2 (en) * 2007-05-24 2012-04-17 Endosense Sa Touch sensing catheter
US8622935B1 (en) 2007-05-25 2014-01-07 Endosense Sa Elongated surgical manipulator with body position and distal force sensing
JP4936286B2 (ja) * 2007-06-14 2012-05-23 独立行政法人産業技術総合研究所 内径測定装置
US8298227B2 (en) * 2008-05-14 2012-10-30 Endosense Sa Temperature compensated strain sensing catheter
JP5065230B2 (ja) * 2008-11-05 2012-10-31 古河電気工業株式会社 光モジュール及び光モジュールの作製方法
FR2949152A1 (fr) * 2009-08-17 2011-02-18 Eads Europ Aeronautic Defence Jauge de deformation et systeme de localisation spatiale de telles jauges
US8457453B2 (en) * 2009-11-02 2013-06-04 Cornell University Passively-thermally-stabilized photonic apparatus, method, and applications
EP2696777B1 (en) 2011-04-14 2020-08-05 St. Jude Medical International Holding S.à r.l. Catheter assembly with optical force sensor
JP2014520258A (ja) * 2011-05-31 2014-08-21 トルネード メディカル システムズ，インコーポレイテッド 平面基板における干渉法
CN103487405B (zh) * 2013-09-23 2015-04-22 电子科技大学 一种基于螺旋跑道型干涉结构的光学生化传感器
US10989879B2 (en) 2014-06-03 2021-04-27 Nikon Metrology Nv Thermally compensated fiber interferometer assembly
GB2545912A (en) * 2015-12-29 2017-07-05 Nokia Technologies Oy Interferometry
EP3677206B1 (en) 2016-01-07 2022-02-23 St. Jude Medical International Holding S.à r.l. Medical device with multi-core fiber for optical sensing
DE102018101768B3 (de) * 2018-01-26 2019-02-28 Medizinisches Laserzentrum Lübeck GmbH Verfahren und Vorrichtung zur Erzeugung eines zweidimensionalen Interferogramms mit einem Freistrahl-Aufbau des Michelson-Typs
US10942312B1 (en) * 2018-03-29 2021-03-09 Lockheed Martin Corporation Optical temperature sensing methods and devices associated with photonic integrated circuits
JP7528834B2 (ja) * 2021-03-24 2024-08-06 住友大阪セメント株式会社 光導波路素子、光変調器、光変調モジュール、及び光送信装置
CN113514420B (zh) * 2021-04-20 2022-10-04 桂林电子科技大学 一种双u型波导结构的高灵敏度传感器
US11644305B2 (en) * 2021-06-09 2023-05-09 Marvell Asia Pte Ltd Temperature insensitive distributed strain monitoring apparatus and method
WO2024029083A1 (ja) * 2022-08-05 2024-02-08 日本電信電話株式会社 モニタリングデバイス
JP2024107840A (ja) * 2023-01-30 2024-08-09 住友大阪セメント株式会社 光導波路素子及びそれを用いた光変調デバイス並びに光送信装置

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FR2613826B1 (fr) * 1987-04-07 1990-10-26 Commissariat Energie Atomique Capteur de deplacement en optique integree
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109631789A (zh) * 2018-12-29 2019-04-16 电子科技大学 一种具有温度自补偿效应的高灵敏珐珀传感器

Also Published As

Publication number Publication date
ITRM930035A1 (it) 1994-07-25
FR2687472B1 (fr) 1996-05-31
GB2264183A (en) 1993-08-18
ITRM930035A0 (it) 1993-01-25
FR2687472A1 (fr) 1993-08-20
DE4204521C1 (enExample) 1993-06-24
US5289256A (en) 1994-02-22
GB2264183B (en) 1995-06-07
GB9302773D0 (en) 1993-03-24
IT1262345B (it) 1996-06-19
JPH0694425A (ja) 1994-04-05

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