FR2687472B1 - Interferometre optique integre pour mesure d'allongement. - Google Patents

Interferometre optique integre pour mesure d'allongement.

Info

Publication number
FR2687472B1
FR2687472B1 FR9301591A FR9301591A FR2687472B1 FR 2687472 B1 FR2687472 B1 FR 2687472B1 FR 9301591 A FR9301591 A FR 9301591A FR 9301591 A FR9301591 A FR 9301591A FR 2687472 B1 FR2687472 B1 FR 2687472B1
Authority
FR
France
Prior art keywords
integrated optical
optical interferometer
elongation measurement
elongation
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9301591A
Other languages
English (en)
Other versions
FR2687472A1 (fr
Inventor
Hubert Gramling
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daimler Benz AG
Original Assignee
Daimler Benz AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daimler Benz AG filed Critical Daimler Benz AG
Publication of FR2687472A1 publication Critical patent/FR2687472A1/fr
Application granted granted Critical
Publication of FR2687472B1 publication Critical patent/FR2687472B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02023—Indirect probing of object, e.g. via influence on cavity or fibre
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02051—Integrated design, e.g. on-chip or monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12004—Combinations of two or more optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/2935—Mach-Zehnder configuration, i.e. comprising separate splitting and combining means
    • G02B6/29352—Mach-Zehnder configuration, i.e. comprising separate splitting and combining means in a light guide
    • G02B6/29355—Cascade arrangement of interferometers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Integrated Circuits (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
FR9301591A 1992-02-15 1993-02-12 Interferometre optique integre pour mesure d'allongement. Expired - Fee Related FR2687472B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4204521A DE4204521C1 (fr) 1992-02-15 1992-02-15

Publications (2)

Publication Number Publication Date
FR2687472A1 FR2687472A1 (fr) 1993-08-20
FR2687472B1 true FR2687472B1 (fr) 1996-05-31

Family

ID=6451767

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9301591A Expired - Fee Related FR2687472B1 (fr) 1992-02-15 1993-02-12 Interferometre optique integre pour mesure d'allongement.

Country Status (6)

Country Link
US (1) US5289256A (fr)
JP (1) JPH0797017B2 (fr)
DE (1) DE4204521C1 (fr)
FR (1) FR2687472B1 (fr)
GB (1) GB2264183B (fr)
IT (1) IT1262345B (fr)

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FR2694630B1 (fr) * 1992-08-10 1994-09-09 Commissariat Energie Atomique Capteur en optique intégrée, notamment pour substances chimiques.
GB2319335B (en) * 1996-11-15 1998-11-11 Bookham Technology Ltd Integrated interferometer
US5481922A (en) * 1994-05-31 1996-01-09 Washabaugh; Peter D. Elastic transducer designs incorporating finite length measurement paths
RU2100787C1 (ru) * 1995-03-01 1997-12-27 Геликонов Валентин Михайлович Оптоволоконный интерферометр и оптоволоконный пьезоэлектрический преобразователь
DE59708822D1 (de) 1996-01-26 2003-01-09 Roche Diagnostics Gmbh Niederkohärenz-interferometrisches gerät
US6020963A (en) * 1996-06-04 2000-02-01 Northeastern University Optical quadrature Interferometer
US5883717A (en) * 1996-06-04 1999-03-16 Northeastern University Optical quadrature interferometry utilizing polarization to obtain in-phase and quadrature information
US5852687A (en) * 1997-07-09 1998-12-22 Trw Inc. Integrated optical time delay unit
US6463187B1 (en) 1998-08-24 2002-10-08 Empirical Technologies Corporation Variable coupler fiberoptic sensor and sensing apparatus using the sensor
US6907148B2 (en) 1998-08-24 2005-06-14 Empirical Technologies Corporation Sensing apparatus employing variable coupler fiberoptic sensor
US6687424B1 (en) 1998-08-24 2004-02-03 Empirical Technologies Corporation Sensing pad assembly employing variable coupler fiberoptic sensor
US6723054B1 (en) * 1998-08-24 2004-04-20 Empirical Technologies Corporation Apparatus and method for measuring pulse transit time
AU759318B2 (en) * 1998-10-09 2003-04-10 University Of Sydney, The Interferometer coupler using multiple input ports for improved stabiblity
AUPP644998A0 (en) * 1998-10-09 1998-10-29 University Of Sydney, The A method to stabilize the performance of a 3x3 coupler in a sagnac interferometer
CA2311966A1 (fr) * 1999-06-23 2000-12-23 Stavros Dariotis Interferometre de mach-wehnder a fibres optiques utilisant des courbures miniatures
WO2001023955A2 (fr) * 1999-09-21 2001-04-05 Nanovation Technologies, Inc. Commutateur et filtre d'interferometre mach-zehnder nanophotonique
US6426496B1 (en) 2000-08-22 2002-07-30 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration High precision wavelength monitor for tunable laser systems
DE10127497B4 (de) * 2001-06-09 2006-12-28 Ralf Dipl.-Ing. Siebert Miniaturisierter optischer Evaneszent-Feld-Sensor zur Gasanalyse
JP2003131051A (ja) * 2001-08-16 2003-05-08 Nec Corp 光デバイス
EP1291642A1 (fr) * 2001-09-05 2003-03-12 Linde Medical Sensors AG Système de capteur pour la détection de substances chimiques comprenant un guide intégré d'ondes lumineuses
JP2003195087A (ja) * 2001-12-28 2003-07-09 Fujitsu Ltd 光機能デバイスの接続方法および光装置
US8182433B2 (en) * 2005-03-04 2012-05-22 Endosense Sa Medical apparatus system having optical fiber load sensing capability
US8075498B2 (en) 2005-03-04 2011-12-13 Endosense Sa Medical apparatus system having optical fiber load sensing capability
EP3028645B1 (fr) 2005-08-01 2019-09-18 St. Jude Medical International Holding S.à r.l. Système d'appareil médical ayant une capacité de détection de charge à fibre optique
US8567265B2 (en) 2006-06-09 2013-10-29 Endosense, SA Triaxial fiber optic force sensing catheter
US8048063B2 (en) * 2006-06-09 2011-11-01 Endosense Sa Catheter having tri-axial force sensor
US8157789B2 (en) * 2007-05-24 2012-04-17 Endosense Sa Touch sensing catheter
US8622935B1 (en) 2007-05-25 2014-01-07 Endosense Sa Elongated surgical manipulator with body position and distal force sensing
JP4936286B2 (ja) * 2007-06-14 2012-05-23 独立行政法人産業技術総合研究所 内径測定装置
US8298227B2 (en) * 2008-05-14 2012-10-30 Endosense Sa Temperature compensated strain sensing catheter
JP5065230B2 (ja) * 2008-11-05 2012-10-31 古河電気工業株式会社 光モジュール及び光モジュールの作製方法
FR2949152A1 (fr) * 2009-08-17 2011-02-18 Eads Europ Aeronautic Defence Jauge de deformation et systeme de localisation spatiale de telles jauges
US8457453B2 (en) * 2009-11-02 2013-06-04 Cornell University Passively-thermally-stabilized photonic apparatus, method, and applications
US10561368B2 (en) 2011-04-14 2020-02-18 St. Jude Medical International Holding S.À R.L. Compact force sensor for catheters
US20140125983A1 (en) * 2011-05-31 2014-05-08 Tornado Medical Systems, Inc. Interferometery on a planar substrate
CN103487405B (zh) * 2013-09-23 2015-04-22 电子科技大学 一种基于螺旋跑道型干涉结构的光学生化传感器
WO2016018508A2 (fr) * 2014-06-03 2016-02-04 Nikon Metrology Nv Procédé de constitution d'un réseau de fibres optiques pour radar laser
GB2545912A (en) * 2015-12-29 2017-07-05 Nokia Technologies Oy Interferometry
EP3677206B1 (fr) 2016-01-07 2022-02-23 St. Jude Medical International Holding S.à r.l. Dispositif médical à fibre multic ur pour détection optique
DE102018101768B3 (de) * 2018-01-26 2019-02-28 Medizinisches Laserzentrum Lübeck GmbH Verfahren und Vorrichtung zur Erzeugung eines zweidimensionalen Interferogramms mit einem Freistrahl-Aufbau des Michelson-Typs
US10942312B1 (en) * 2018-03-29 2021-03-09 Lockheed Martin Corporation Optical temperature sensing methods and devices associated with photonic integrated circuits
CN109631789B (zh) * 2018-12-29 2020-03-17 电子科技大学 一种具有温度自补偿效应的高灵敏珐珀传感器
CN113514420B (zh) * 2021-04-20 2022-10-04 桂林电子科技大学 一种双u型波导结构的高灵敏度传感器
US11644305B2 (en) * 2021-06-09 2023-05-09 Marvell Asia Pte Ltd Temperature insensitive distributed strain monitoring apparatus and method

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US4515430A (en) * 1980-09-15 1985-05-07 Massachusetts Institute Of Technology Integrated optical transducers
GB2136952B (en) * 1983-03-16 1987-05-07 Standard Telephones Cables Ltd Fabry perot sensor
FR2613826B1 (fr) * 1987-04-07 1990-10-26 Commissariat Energie Atomique Capteur de deplacement en optique integree
JPS6412204A (en) * 1987-07-07 1989-01-17 Topcon Corp Optical ic interferometer
DE3825606C2 (de) * 1988-07-28 1993-12-23 Heidenhain Gmbh Dr Johannes Interferometer
DE59102110D1 (en) * 1990-02-09 1994-08-11 Heidenhain Gmbh Dr Johannes Interferometer.
US5173747A (en) * 1990-09-20 1992-12-22 Battelle Memorial Institute Integrated optical directional-coupling refractometer apparatus

Also Published As

Publication number Publication date
DE4204521C1 (fr) 1993-06-24
FR2687472A1 (fr) 1993-08-20
ITRM930035A0 (it) 1993-01-25
GB9302773D0 (en) 1993-03-24
GB2264183B (en) 1995-06-07
ITRM930035A1 (it) 1994-07-25
US5289256A (en) 1994-02-22
JPH0694425A (ja) 1994-04-05
JPH0797017B2 (ja) 1995-10-18
IT1262345B (it) 1996-06-19
GB2264183A (en) 1993-08-18

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TP Transmission of property
ST Notification of lapse