DE4391183T1 - Optische Vorrichtung für Ebenheitsmessung - Google Patents
Optische Vorrichtung für EbenheitsmessungInfo
- Publication number
- DE4391183T1 DE4391183T1 DE4391183T DE4391183T DE4391183T1 DE 4391183 T1 DE4391183 T1 DE 4391183T1 DE 4391183 T DE4391183 T DE 4391183T DE 4391183 T DE4391183 T DE 4391183T DE 4391183 T1 DE4391183 T1 DE 4391183T1
- Authority
- DE
- Germany
- Prior art keywords
- optical device
- flatness measurement
- flatness
- measurement
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9200846A SE470029B (sv) | 1992-03-19 | 1992-03-19 | Optisk anordning för kontroll av jämnhet och planhet hos en yta |
PCT/SE1993/000216 WO1993019345A1 (en) | 1992-03-19 | 1993-03-11 | Optical device for checking the flatness and smoothness of a surface |
Publications (1)
Publication Number | Publication Date |
---|---|
DE4391183T1 true DE4391183T1 (de) | 1995-02-23 |
Family
ID=20385668
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE4391183T Withdrawn DE4391183T1 (de) | 1992-03-19 | 1993-03-11 | Optische Vorrichtung für Ebenheitsmessung |
Country Status (5)
Country | Link |
---|---|
US (1) | US5583639A (de) |
JP (1) | JPH07504751A (de) |
DE (1) | DE4391183T1 (de) |
SE (1) | SE470029B (de) |
WO (1) | WO1993019345A1 (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5777740A (en) * | 1997-02-27 | 1998-07-07 | Phase Metrics | Combined interferometer/polarimeter |
JP2000234912A (ja) * | 1999-02-15 | 2000-08-29 | Hitachi Electronics Eng Co Ltd | ウエハ厚さ測定装置 |
US6608919B1 (en) | 1999-11-10 | 2003-08-19 | Digimarc Corporation | Method and apparatus for encoding paper with information |
US6687008B1 (en) | 2000-10-19 | 2004-02-03 | Kla-Tencor Corporation | Waveguide based parallel multi-phaseshift interferometry for high speed metrology, optical inspection, and non-contact sensing |
US7237033B2 (en) * | 2001-04-30 | 2007-06-26 | Aol Llc | Duplicating switch for streaming data units to a terminal |
US6856384B1 (en) * | 2001-12-13 | 2005-02-15 | Nanometrics Incorporated | Optical metrology system with combined interferometer and ellipsometer |
US7095507B1 (en) * | 2002-09-27 | 2006-08-22 | Kla-Tencor Technologies Corporation | Method and apparatus using microscopic and interferometric based detection |
US7061625B1 (en) | 2002-09-27 | 2006-06-13 | Kla-Tencor Technologies Corporation | Method and apparatus using interferometric metrology for high aspect ratio inspection |
DE10303659B4 (de) * | 2003-01-23 | 2005-07-28 | Berliner Elektronenspeicherring-Gesellschaft für Synchrotronstrahlung mbH | Optisches Messverfahren zur Ermittlung von Idealformabweichungen technisch polierter Oberflächen und Präzisionsmessmaschine zur Durchführung des Messverfahrens |
SE527168C2 (sv) * | 2003-12-31 | 2006-01-10 | Abb Ab | Förfarande och anordning för mätning, bestämning och styrning av planhet hos ett metallband |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2159271B (en) * | 1984-04-27 | 1988-05-18 | Nissan Motor | Surface flaw detecting method and apparatus |
US4854708A (en) * | 1987-01-13 | 1989-08-08 | Rotlex Optics Ltd. | Optical examination apparatus particularly useful as a Fizeau interferometer and schlieren device |
GB8810714D0 (en) * | 1988-05-06 | 1988-06-08 | Leicester Polytechnic | Method & apparatus for inspecting smooth surface |
-
1992
- 1992-03-19 SE SE9200846A patent/SE470029B/sv not_active IP Right Cessation
-
1993
- 1993-03-11 WO PCT/SE1993/000216 patent/WO1993019345A1/en active Application Filing
- 1993-03-11 JP JP5516455A patent/JPH07504751A/ja active Pending
- 1993-03-11 DE DE4391183T patent/DE4391183T1/de not_active Withdrawn
- 1993-03-11 US US08/295,871 patent/US5583639A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH07504751A (ja) | 1995-05-25 |
SE470029B (sv) | 1993-10-25 |
SE9200846D0 (sv) | 1992-03-19 |
SE9200846L (sv) | 1993-09-20 |
WO1993019345A1 (en) | 1993-09-30 |
US5583639A (en) | 1996-12-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8130 | Withdrawal |