JPH0796408B2 - Transfer robot - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer robot.

[0002]

It is an object of the present invention to lift an article to be unloaded, which is placed on a traveling carriage and conveyed to an unloading station, from the traveling carriage to an unloading position, and at the same time, to carry an article at the unloading position. It is an object of the present invention to provide a transfer robot capable of changing the orientation of the.

[0003]

In order to achieve the above object, the present invention employs the following means. The present invention, by a lifting body which has been made with the vertically movable so as not to rotate, the shaft center in the lifting body to direct vertically 1
A central axis provided so as to rotate in the reverse direction of 80 degrees, a horizontal pivot arm attached to the central axis at the center in the longitudinal direction, and an axial center oriented vertically in both ends of the horizontal pivot arm. a rotary shaft rotatably provided in the, with these rotating shaft mounted article holder and allowed to participate in said lifting member and the rotation axis, in conjunction with the turning <br/> horizontal swivel arm has a power transmission mechanism for communicating dynamic rotating the article retainer Te, wherein each power transmission mechanism, the lifting member has stopped fitted to a central shaft concentric with the fixed wheel was stopped fitted to the rotary shaft It has a rotating wheel and an endless band that is wound around these fixed wheel and rotating wheel .
The diameter of the fixed wheel of one power transmission mechanism: same rotation
Wheel diameter = 3: 2 and the other power transmission mechanism
Fixed wheel diameter: same rotating wheel diameter = 1: 2
There is something.

[0004]

The present invention has the following functions. Horizontal swivel arm swivels 180 degrees counterclockwise
In tandem with the operation of the
The article holder moves 270 clockwise with respect to the horizontal swing arm.
When the other article holder is moved relative to the horizontal swing arm 23,
It is rotated 90 degrees in the total direction.

[0005]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on the embodiments shown in the drawings. In this specification, the front means the right side of FIG. 1, the rear means the left side of FIG. 1, the left means the upper side of FIG. 1, and the right means the lower side of FIG.

A guide rail 1 is provided so that its longitudinal direction faces the front-rear direction, and a traveling carriage 2 is allowed to travel along the guide rail 1 by a traveling drive device such as a linear motor (not shown). The traveling carriage 2
A carrier tray 5 is placed on the carrier 3.

The carrying tray 5 has a body 6 having an inverted U-shaped cross section, a pair of projecting pieces 7 projecting outward at the upper end of the rising wall of the body 6, and the body 6 And two loading platforms 8 provided at the bottom of the. A carrier 10 in which a large number of semiconductor wafers are stored is placed on the loading table 8.

An unloading station 12 is provided at a predetermined position of the guide rail 1, and this unloading station 1
2, a hollow fixed base 13 is provided, and a fixed guide tube 14 having an axial center in the vertical direction is provided on the fixed base 13.
An elevating body 16 is provided on the fixed guide cylinder 14 so as to be movable up and down via a ball spline mechanism so as not to rotate. A ball nut 17 having an axial center in the vertical direction is provided at the lower part of the lifting body 16.
A ball screw 18 that is rotated by a motor 19 that can rotate in the normal and reverse directions is screwed into the screw 7. The ball screw 18 is rotatably provided on the fixed base 13 so as not to move in the vertical direction. With such a configuration, the elevator 16 can be moved up and down by rotating the hole screw 18.

A central shaft 22 is rotatably fitted to the upper end of the elevating body 16 and is rotated by a motor 21 that can rotate in the normal and reverse directions.
Is attached in the middle of its length. With such a configuration, the horizontal swing arm 23 moves up and down as the lifting body 16 moves up and down, and the center axis 22 moves forward and backward.
It turns 180 degrees horizontally by rotating 180 degrees.
It's been roaring. Rotation shafts 25 are rotatably provided at both ends of the horizontal rotation arm 23 so that their axes are oriented in the vertical direction, and the article holders 2 are provided at the lower ends of the rotation shafts 25.
6 is attached. The article holder 26 includes a main body 27 having an inverted U-shaped cross section, and a pair of support pieces 28 provided at the lower end of the hanging portion of the main body 27 for supporting the projecting pieces 7 of the carrying tray 5. . The horizontal swivel arm 2
3 has a rotating shaft 25 when its longitudinal direction is oriented in the left-right direction.
The center of is aligned with the center of the guide rail 1.

In one of the article holders 26, the horizontal swing arm 23 is 180 in FIG. 1 by the power transmission mechanism 31.
When it is turned counterclockwise, it is rotated 270 degrees clockwise with respect to the horizontal turning arm 23, and
Pivoting Then horizontal pivot arm 23 to 180 degrees clockwise,
The horizontal rotation arm 23 is rotated counterclockwise by 270 degrees, and the other article holder 26 is moved by the power transmission mechanism 31 to move the horizontal rotation arm 23 to 18 in FIG.
When it is rotated in the counterclockwise direction by 0 degrees, the horizontal rotation arm 23 is rotated by 90 degrees in the clockwise direction, and
Pivoting Then horizontal pivot arm 23 to 180 degrees clockwise,
It is configured to rotate 90 degrees counterclockwise with respect to the horizontal swing arm 23.

The power transmission mechanism 31 is provided on the lifting body 16.
A fixed wheel 32 fixed so as to be concentric with the central shaft 22, a rotary wheel 33 fixed to the rotary shaft 25, and an endless band 34 hung parallel to the fixed wheel 32 and the rotary wheel 33. have. The ratio between the diameter of the fixed wheel 32 and the diameter of the rotating wheel 33 has the following relationship. For the article holder 26 that rotates 270 degrees, the diameter of the fixed wheel 32: the diameter of the rotating wheel 33 = 3: 2 For the article holder 26 that rotates 90 degrees, the diameter of the fixed wheel 32: the diameter of the rotating wheel 33 = 1: 2.

Then, in the initial state in which the horizontal swing arm 23 is oriented in the left-right direction, the article holder 26 that rotates 270 degrees is positioned on the right side, and its support pieces 28 are arranged in the left-right direction, while rotating 90 degrees. The article holder 26 is located on the left side, and the support pieces 28 are arranged in the front-rear direction.

A loading platform 37 is provided to the left of the guide rail 1 at the unloading station 12. This loading platform 3
The carrier surface of 7 is substantially flush with the upper surface of the carrier 3 of the traveling carriage 2.

[0014]

Operation of the Embodiment Next, the operation of the embodiment will be described. 270
When the article holder 26 that rotates once is above the guide rail 1 and the supporting piece 28 is below the overhanging piece 7 of the carrying tray 5 on the traveling carriage 2 , waiting is carried out. The traveling carriage 2 on which the tray 5 is placed travels and stops at the unloading station 12. In this state, the projecting piece 7 is located above the support piece 28.

After that, when the horizontal swing arm 23 rises, the support piece 28 lifts the projecting piece 7,
Ultimately, the carrier tray 5 is lifted. On the other hand, the article holder 26 that rotates 90 degrees is used for the empty carrier tray 5 on the loading platform 37.
(It will be understood in the following description that the carrier tray 5 becomes empty.). Thereafter, the horizontal pivoting arm 23 by a horizontal pivot 180 degrees counterclockwise in FIG. 1, the conveyance tray 5 which has been placed on the traveling carriage 2 is moved to the loading platform 37 side, empty transport trays 5 are traveling vehicle 2 Be moved to the side.

At the same time, the carrying tray 5 mounted on the traveling carriage 2 is rotated 270 degrees clockwise, while
The empty carrier tray 5 is rotated 90 degrees clockwise.
That is, the surface of the carrying tray 5 that has been facing forward on the traveling carriage 2 is made to face to the right on the cargo bed 37 side,
The surface of the transport tray 5 facing the right side on the loading platform 37 side is directed to the front side on the traveling vehicle 2 side. in short,
The orientation of the transport tray 5 can be changed between when it is on the traveling carriage 2 and when it is on the cargo bed 37 side.

Thereafter, the horizontal swing arm 23 is lowered, so that the carrying tray 5 is lowered onto the traveling carriage 2 and the loading platform 37. After that, only the carrier 10 of the carrier tray 5 placed on the carrier 37 is carried out by a well-known robot hand or the like, and the carrier tray 5 that has become empty is used until the trailing carriage 2 stops at the unloading station 12. I will wait on 37. On the other hand, the traveling carriage 2 starts traveling during that time, and the empty transport tray 5 is conveyed by the traveling carriage 2.

The supporting piece 28 of the article holder 26 may be a horizontally movable member, and may be a sandwiching hand mechanism for approaching and separating from each other.

[0019]

Effects of the Invention The present invention is intended to achieve the such effects of following <br/> under by the configuration such noted before. For example, the actual transport on the trolley of the unloading station
Tray (transportation tray on which luggage is loaded) and empty transportation on the loading platform
I can not only transfer and transfer the trays at once at the same time
Place the carrier tray on the traveling carriage on the carrier.
And turn it 90 degrees for convenient handling of luggage on the loading platform.
It can be replaced, and it is the reverse of the horizontal swing arm.
Turn the empty transport tray back to its original orientation by turning 80 degrees
Can be returned to the traveling carriage. Each power transmission mechanism is fixed to the lifting body, the central shaft
Fixed wheel that is concentric with the rotation that is fixed to the rotation axis
Hang between the wheel and these fixed and rotating wheels.
Since it has an endless band that has been handed over,
In front of the transport tray (or baggage) with a single mechanism with few failures
You can change the direction as described below.

[Brief description of drawings]

FIG. 1 is a partially crushed plan view showing an embodiment of the present invention.

FIG. 2 is an enlarged sectional view taken along line II-II of FIG.

FIG. 3 is an enlarged sectional view taken along line III-III of FIG.

[Explanation of symbols]

 16 Lifting / lowering body 22 Center axis 23 Horizontal swivel arm 25 Rotating axis 26 Article holder 31 Power transmission mechanism 32 Fixed wheel 33 Rotating wheel 34 Endless belt

Claims (1)

[Claims] 1. An elevating body which can be raised and lowered so as not to rotate, a central shaft which is provided on the elevating body so as to rotate 180 degrees forward and backward with its axis oriented vertically, and A horizontal swivel arm that is attached to the central axis at the center in the length direction, a rotary shaft that is rotatably provided at both ends of this horizontal swivel arm so that the axial center is oriented in the vertical direction, and that is attached to these rotary shafts. and was article holder, the was allowed to participate in the lifting body and the rotary shafts has a power transmission mechanism for communicating dynamic rotating an article holder in conjunction with the turning of the horizontal pivoting arm, each The power transmission mechanism includes a fixed wheel concentric with the central shaft, which is fixed to the lifting body, a rotating wheel which is fixed to the rotating shaft, and an endless band which is stretched between the fixed wheel and the rotating wheel. and has, on one Diameter of fixed wheel of power transmission mechanism: same rotating wheel
Diameter = 3: 2, and the diameter of the fixed wheel of the other power transmission mechanism: the same rotating wheel
A transfer robot whose diameter is 1: 2 .