JPH079581A - Continuous heat treatment of composite tape - Google Patents

Continuous heat treatment of composite tape

Info

Publication number
JPH079581A
JPH079581A JP15856993A JP15856993A JPH079581A JP H079581 A JPH079581 A JP H079581A JP 15856993 A JP15856993 A JP 15856993A JP 15856993 A JP15856993 A JP 15856993A JP H079581 A JPH079581 A JP H079581A
Authority
JP
Japan
Prior art keywords
tape
composite tape
cylindrical body
heat treatment
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15856993A
Other languages
Japanese (ja)
Other versions
JP2675251B2 (en
Inventor
Masabumi Miyagawa
正文 宮川
Yoshiyuki Yamamori
義之 山森
Hideaki Sasajima
秀明 笹嶋
Toshio Nakao
俊夫 中尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Bakelite Co Ltd
Original Assignee
Sumitomo Bakelite Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Bakelite Co Ltd filed Critical Sumitomo Bakelite Co Ltd
Priority to JP15856993A priority Critical patent/JP2675251B2/en
Publication of JPH079581A publication Critical patent/JPH079581A/en
Application granted granted Critical
Publication of JP2675251B2 publication Critical patent/JP2675251B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)

Abstract

PURPOSE:To prevent the curling of a tape due to the evaporation of a solvent and the difference in the coefficient of thermal expansion between respective layers and to apply heat treatment with good productivity and yield by winding a composite tape around a cylindrical body in a heating and drying oven to provide curvature thereto and passing the composite tape through the heating and drying oven accompanied by the rotation of the cylindrical body to apply heat treatment thereto. CONSTITUTION:In the heat treatment of a composite tape consisting of films or foils composed of two or more kinds of different material qualities, for example, consisting of a copper foil and a polyamic acid film, the flexible composite tape is spirally wound around the cylindrical body rotating in the heating and drying oven to apply curvature to the tape and passed through the heating and drying oven accompanied by the rotation of the cylindrical body to be continuously heat-treated. Herein, a guide is pref. provided to the rotating cylindrical body so that the composite tape advances regularly and spirally. The diameter of the cylindrical body is pref. set to about 0.5-10 times the width of the tape to be heat-treated in order to prevent the remaining of strain in the composite tape and the curling of the tape.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、2種類以上の異種の材
質のフィルムや箔を積層させた複合テープの熱処理法に
関するものであり、例えば銅箔とポリアミック酸フィル
ムの複合テープに熱処理を施すことにより得られる銅箔
とポリイミドとの複合テープは半導体素子実装用のTA
B(Tape Automated Bonding)テープとして、またポリ
エステルテープ上に磁性体の分散液を塗布後、熱処理す
ることにより得られる複合テープは磁気記録テープとし
て利用することができる。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat treatment method for a composite tape in which two or more kinds of films and foils made of different materials are laminated. For example, a composite tape of copper foil and polyamic acid film is heat treated. The resulting composite tape of copper foil and polyimide is TA for mounting semiconductor elements.
A composite tape obtained by applying a dispersion liquid of a magnetic material on a polyester tape and then heat-treating it can be used as a B (Tape Automated Bonding) tape, or as a magnetic recording tape.

【0002】[0002]

【従来の技術】従来上述した様な複合テープは広幅でフ
ローティングドライヤーやアーチ状に配置したロールの
曲率を利用することにより上層が加熱収縮しカールが発
生するのを抑えながら熱処理を行った後、必要な幅にス
リットし製品としてきたが、今日では少量多品種、ある
いは試作的にテープを少量作りたいといったニーズに対
応できなかった。
2. Description of the Related Art Conventionally, composite tapes such as those mentioned above are heat-treated while suppressing the occurrence of curling due to the shrinkage of the upper layer due to heat shrinkage by utilizing the curvature of a wide dryer or a roll arranged in an arch shape. Although the product has been slit to the required width, today, it has not been possible to meet the needs of producing small quantities of a large variety of products or making small quantities of tape on a trial basis.

【0003】例えば、ポリアミック酸フィルムにデバイ
スホールやスプロケットホール等に必要な孔加工を施
し、銅箔と熱圧着した後、熱処理することにより2層T
ABテープを得ることができるが、たいていの場合TA
Bのパターンは汎用性がなく1つの最終製品に1種類と
いうように少量多品種の生産が求められる。一方、先に
述べた様に広幅のポリアミック酸フィルムを用い同時に
複数条の孔加工を施した後に広幅の銅箔に熱圧着し、更
に広幅のまま熱処理した後、所定の幅にスリットするこ
とにより大量のTABテープを一度に製造することがで
きるが、このような方法は汎用性のあるごく一部のTA
Bを除いて、ポリアミック酸フィルムを打ち抜く金型や
複数条処理(ラミネートおよび熱処理)できる装置を新
設しなくてはならない等コスト的な制約がある。
For example, a polyamic acid film is subjected to necessary hole processing for device holes, sprocket holes, etc., thermocompression-bonded with a copper foil, and then heat-treated to form a two-layer T film.
You can get an AB tape, but in most cases TA
The pattern B is not versatile, and it is required to produce a large number of small quantities, such as one kind for one final product. On the other hand, as described above, by using a wide polyamic acid film at the same time to form a plurality of holes, thermocompression-bonding it to a wide copper foil, heat-treating it as it is, and then slitting it into a predetermined width. It is possible to manufacture a large number of TAB tapes at one time, but such a method can be used for a small number of versatile TA tapes.
Except for B, there are cost constraints such as the need to newly install a die for punching out the polyamic acid film and a device capable of multiple-line treatment (laminating and heat treatment).

【0004】そこで、個別のテープを1本づつ独立して
熱処理できる装置の開発が求められていたが、細いテー
プ状の複合材料の熱収縮によるカールを防ぎながら熱処
理を施すには、フローティングドライヤーではサインカ
ーブの密度を増して曲率を増加する必要が、またアーチ
状にロールを配置する場合もロールの間隔を狭めしかも
曲率を増すような工夫が必要となり、設備が大がかりに
なってしまうといった問題点を有していた。
Therefore, there has been a demand for development of an apparatus capable of independently heat-treating each individual tape. However, in order to perform heat treatment while preventing curling due to heat shrinkage of a thin tape-shaped composite material, a floating dryer is used. It is necessary to increase the density of the sine curve to increase the curvature, and also when arranging the rolls in an arch shape, it is necessary to narrow the gap between the rolls and to increase the curvature, resulting in a large scale of equipment. Had.

【0005】[0005]

【発明が解決しようとする課題】本発明の目的とすると
ころは、2種類以上の異種の材質のフィルムや箔を積層
させたTABテープや磁気記録テープとして利用可能な
複合テープを製造するために熱処理するに当たって、溶
剤の蒸発および各層の熱膨張係数の違いによりテープが
カールするのを防ぎ、連続的に熱処理する方法を提供す
ることである。
The object of the present invention is to produce a composite tape which can be used as a TAB tape or a magnetic recording tape in which two or more kinds of films or foils of different materials are laminated. It is an object of the present invention to provide a method for preventing the tape from curling due to the evaporation of the solvent and the difference in the coefficient of thermal expansion of each layer during the heat treatment and continuously performing the heat treatment.

【0006】[0006]

【課題を解決するための手段】本発明は、柔軟な複合テ
ープを加熱・乾燥炉の中で回転する円筒体に螺旋状に巻
き付けて曲率を付け、円筒体の回転に伴って加熱・乾燥
炉を通過させ、連続的に熱処理を行う複合テープの連続
熱処理法である。
SUMMARY OF THE INVENTION According to the present invention, a flexible composite tape is spirally wound around a rotating cylinder in a heating / drying furnace to give a curvature, and the heating / drying furnace is rotated as the cylinder rotates. Is a continuous heat treatment method for a composite tape in which the heat treatment is performed continuously by passing through

【0007】本発明における回転する円筒体は、複合テ
ープが規則正しく螺旋状に進行するようにガイドを設け
ることが好ましい。ガイドの形状はフィルムを規則正し
く誘導できるものであれば特に限定されないが、一般に
螺旋状に凸部もしくはコの字状のガイドを設けるのがよ
い。また円筒体に螺旋状の凹部を付けてもよい。本装置
は連続熱処理を行うために通常巻出しおよび巻取り装置
を設置することが望ましい。熱処理に必要な乾燥炉は、
導体箔等が酸化されると好ましくない材質を有する複合
テープを熱処理する場合には、炉内の雰囲気は窒素ガス
等を流して不活性状態にしておくことが好ましい。生産
性向上の面から、同一の乾燥炉内に複数の回転軸を設け
並行して数列同時に熱処理することも可能である。
The rotating cylindrical body in the present invention is preferably provided with a guide so that the composite tape advances in a regular spiral shape. The shape of the guide is not particularly limited as long as it can guide the film regularly, but it is generally preferable to provide a guide having a convex portion or a U-shape in a spiral shape. Further, the cylindrical body may be provided with a spiral recess. In order to carry out the continuous heat treatment, it is desirable that the unwinding and rewinding devices are usually installed in this device. The drying oven required for heat treatment is
When heat-treating a composite tape having a material that is not preferable when the conductor foil or the like is oxidized, it is preferable that the atmosphere in the furnace is kept in an inactive state by flowing nitrogen gas or the like. From the viewpoint of improving productivity, it is also possible to provide a plurality of rotating shafts in the same drying furnace and perform heat treatment in parallel for several rows at the same time.

【0008】通常の平置き型の連続炉にて複合テープを
加熱・乾燥すると、溶剤の蒸発および各層の熱膨張係数
の違いによりテープがカールしてしまい、均一に熱処理
することができない。一方、テープを螺旋状に巻きつけ
て曲率を持たせた状態にして乾燥炉中を搬送することに
より、テープがカールするのを防ぐことができる。円筒
体の直径は特に限定されないが、複合テープに歪が残ら
ないようにしながら、テープのカールを防ぐためには、
熱処理するテープの幅の0.5〜10倍程度が好ましい。こ
の円筒体として用いることのできる材料としては、加熱
・乾燥時にかかる以上の雰囲気において軟化や酸化の影
響を受けにくい材料であれば特に限定されないが、ステ
ンレスやチタン等の金属材料が挙げられる。
When the composite tape is heated and dried in a normal flat-type continuous furnace, the tape is curled due to the evaporation of the solvent and the difference in the thermal expansion coefficient of each layer, so that the heat treatment cannot be performed uniformly. On the other hand, it is possible to prevent the tape from curling by winding the tape in a spiral shape and conveying it in a drying oven with a curvature. The diameter of the cylindrical body is not particularly limited, but in order to prevent curling of the tape while preventing distortion in the composite tape,
It is preferably about 0.5 to 10 times the width of the tape to be heat treated. The material that can be used as the cylindrical body is not particularly limited as long as it is a material that is not easily affected by softening or oxidation in the above-mentioned atmosphere during heating and drying, but a metal material such as stainless steel or titanium can be used.

【0009】[0009]

【作用】本発明の方法によれば、2種類以上の異種の材
質のフィルムや箔を積層させたTABテープや磁性記録
テープとして利用可能な複合テープの熱処理に際し、加
熱・乾燥炉中を曲率を持たせた状態で搬送することによ
り、溶剤の蒸発および各層の熱膨張係数の違いにより発
生するテープのカールを防ぎながら、容易にかつ安価
に、生産性・収率よく連続した熱処理を施すことができ
る。
According to the method of the present invention, when heat-treating a TAB tape obtained by laminating two or more kinds of films or foils made of different materials or a composite tape usable as a magnetic recording tape, the curvature in the heating / drying furnace is reduced. By carrying it while holding it, it is possible to perform continuous heat treatment easily and cheaply with good productivity and yield while preventing curling of the tape caused by evaporation of solvent and difference in thermal expansion coefficient of each layer. it can.

【0010】[0010]

【実施例】温度計、撹拌装置、還流コンデンサー及び乾
燥窒素ガス吹込み口を備えた4つ口セパラブルフラスコ
に、精製した無水のパラフェニレンジアミン108gと4,
4'-ジアミノジフェニルエーテル200gをとり、これに無
水のN-メチル-2-ピロリドン90重量%とトルエン10重量
%の混合溶剤を、全仕込原料中の固形分割合が20重量%
になるだけの量を加えて溶解した。乾燥窒素ガスは反応
の準備段階より生成物取り出しまでの全工程にわたり流
しておいた。次いで、精製した無水の3,3',4,4'-ビフェ
ニルテトラカルボン酸二無水物294gとピロメリット酸
二無水物218gを撹拌しながら少量ずつ添加するが、発
熱反応であるため、外部水槽に約15℃の冷水を循環させ
てこれを冷却した。添加後、内部温度を20℃に設定し、
5時間撹拌し、反応を終了してポリアミック酸溶液を得
た。
[Examples] 108 g of purified anhydrous para-phenylenediamine and 4, 4 g of a separable flask equipped with a thermometer, a stirrer, a reflux condenser and a dry nitrogen gas inlet were provided.
Take 200 g of 4'-diaminodiphenyl ether, and add a mixed solvent of 90% by weight of anhydrous N-methyl-2-pyrrolidone and 10% by weight of toluene, and the solid content ratio in all the charged raw materials is 20% by weight.
It was dissolved by adding an amount as much as. Dry nitrogen gas was allowed to flow in all steps from the reaction preparation stage to the product removal. Next, 294 g of purified anhydrous 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride and 218 g of pyromellitic dianhydride are added little by little with stirring, but since it is an exothermic reaction, it is an external water bath. This was cooled by circulating cold water at about 15 ° C. through. After the addition, set the internal temperature to 20 ° C,
The mixture was stirred for 5 hours, the reaction was completed, and a polyamic acid solution was obtained.

【0011】市販のポリエステルフィルム上に、このポ
リアミック酸溶液をバーコーターでイミド化後の厚みが
25μmになるように塗布し、110℃、15分乾燥を行い、
離型フィルムの付いたポリアミック酸フィルムを得、35
mm幅にスリットした後、金型を用いて孔加工を行い、市
販の35mm幅の銅箔粗化面上にポリアミック酸フィルムを
重ね合わせ、ロール式のラミネータを用いて、90℃、15
kg/cm2、0.2m/分で、加熱・圧着を行い、ポリエステ
ルフィルムを剥離して銅箔テープ上に形成された半硬化
状態のポリアミック酸フィルムを得た。
On a commercially available polyester film, the thickness of the polyamic acid solution after imidization with a bar coater was measured.
Apply to 25 μm and dry at 110 ° C for 15 minutes,
Obtain a polyamic acid film with a release film, 35
After slitting to a width of mm, hole processing is performed using a mold, a polyamic acid film is superposed on a commercially available roughened surface of a copper foil having a width of 35 mm, and using a roll-type laminator, 90 ° C, 15
The polyester film was peeled off by heating and pressure bonding at kg / cm 2 and 0.2 m / min to obtain a semi-cured polyamic acid film formed on the copper foil tape.

【0012】このポリアミック酸フィルム付銅箔テープ
を40mm間隔にコの字型のガイドが螺旋状に入ったステン
レス製の回転する直径20cmの円筒体に、このガイドに沿
ってポリアミック酸フィルム面が外側になるように螺旋
状に巻き付け、円筒体を回転させることによりテープを
前進させながら窒素置換した100℃,200℃,300℃,400℃
の4つの加熱・乾燥ゾーンを有する加熱・乾燥炉を合計
で40分かけて通過させイミド化を完結させることにより
2層TABテープ用基板を得た。
This copper foil tape with a polyamic acid film is rolled into a stainless steel cylindrical body with a diameter of 20 cm in which U-shaped guides are spirally arranged at intervals of 40 mm, and the polyamic acid film surface is outside along this guide. It is spirally wound so that it becomes, and the tape is moved forward by rotating the cylinder, and the nitrogen is replaced. 100 ℃, 200 ℃, 300 ℃, 400 ℃
The two-layer TAB tape substrate was obtained by passing through a heating / drying furnace having four heating / drying zones of 4 for a total of 40 minutes to complete imidization.

【0013】得られた2層基板を用い、導体箔上に所定
のレジストパターン及び穴埋め処理を施し、エッチング
処理を施すことにより導体パターンを形成した後、導体
箔上に残留するレジスト及び穴埋め材を除去し、打ち抜
き加工によりスプロケットホールを設けることにより2
層TABテープを得た。
Using the obtained two-layer substrate, a conductor pattern is formed by subjecting a conductor foil to a predetermined resist pattern and a hole filling process, and then performing an etching process to form a conductor pattern. 2 by removing and punching a sprocket hole
A layer TAB tape was obtained.

【0014】[0014]

【発明の効果】本発明によれば、熱処理を施すと収縮や
熱膨張係数の違いによりカールが発生するためにこれま
で難しかった、2層TABテープ、磁気記録テープ等に
使用される複合テープを連続的に熱処理することが可能
となった。また本方法はテープを螺旋状に進行させるた
め、乾燥器内での滞在時間を稼ぐことができるため、乾
燥炉の長さを短くでき装置全体の製造コストを軽減する
こともできる。さらに複数の円筒体を同一の乾燥炉内に
並行して設置することにより複数本のテープを同時に熱
処理できるなど、工業的な複合テープの熱処理方法とし
て好適なものである。
According to the present invention, a composite tape used for a two-layer TAB tape, a magnetic recording tape, etc., which has been difficult until now, because curling occurs due to a difference in shrinkage and a coefficient of thermal expansion when heat treatment is applied. It became possible to heat-treat continuously. Further, in this method, since the tape is spirally advanced, the staying time in the dryer can be increased, so that the length of the drying furnace can be shortened and the manufacturing cost of the entire apparatus can be reduced. Further, by installing a plurality of cylindrical bodies in parallel in the same drying furnace, a plurality of tapes can be heat treated at the same time, which is suitable as an industrial heat treatment method for a composite tape.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 中尾 俊夫 東京都千代田区内幸町1丁目2番2号 住 友ベークライト株式会社内 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Toshio Nakao 1-2-2 Uchisaiwaicho, Chiyoda-ku, Tokyo Sumitomo Bakelite Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 柔軟な複合テープを加熱・乾燥炉の中で
回転する円筒体に螺旋状に巻き付けて曲率を付け、円筒
体の回転に伴って加熱・乾燥炉を通過させ、連続的に熱
処理を行うことを特徴とする複合テープの連続熱処理
法。
1. A flexible composite tape is spirally wound around a rotating cylinder in a heating / drying furnace to give a curvature, and is passed through the heating / drying furnace as the cylinder rotates, and continuously heat treated. A continuous heat treatment method for a composite tape, which comprises:
JP15856993A 1993-06-29 1993-06-29 Continuous heat treatment method for composite tape Expired - Lifetime JP2675251B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15856993A JP2675251B2 (en) 1993-06-29 1993-06-29 Continuous heat treatment method for composite tape

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15856993A JP2675251B2 (en) 1993-06-29 1993-06-29 Continuous heat treatment method for composite tape

Publications (2)

Publication Number Publication Date
JPH079581A true JPH079581A (en) 1995-01-13
JP2675251B2 JP2675251B2 (en) 1997-11-12

Family

ID=15674564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15856993A Expired - Lifetime JP2675251B2 (en) 1993-06-29 1993-06-29 Continuous heat treatment method for composite tape

Country Status (1)

Country Link
JP (1) JP2675251B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11925239B2 (en) 2016-03-15 2024-03-12 Nike, Inc. Foot presence sensing systems for active footwear

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11925239B2 (en) 2016-03-15 2024-03-12 Nike, Inc. Foot presence sensing systems for active footwear

Also Published As

Publication number Publication date
JP2675251B2 (en) 1997-11-12

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