JPH0792185A - Piezoelectric acceleration sensor - Google Patents

Abstract

PURPOSE:To provide a piezoelectric acceleration sensor for detecting the acceleration accurately. CONSTITUTION:One end of a piezoelectric element 1 is inserted into the inserting part 3 of a support 2 and supported in place. The support 2 is insert-molded integrally with a pair of output terminals 4 and provided with a recess 5 communicating with the inserting part 3. One end of the output terminals 4 are exposed to the vicinity of the bottom face of the recess 5. The piezoelectric element 1 is then set in a bottomed tubular metal shield case 6 connected with an earth terminal 7. The recess 5 is filled with a conductive adhesive 30 thus connecting an electrode 1a with the output terminal 4. Respective one ends of the output terminals 4 and the earth terminal 7 are projected outward, and the shield case 6 is resin-molded along with the support 2 thus constituting a piezoelectric acceleration sensor S. Since the support 2 for the piezoelectric element 1 is secured rigidly to a molded part 11, the detecting direction of acceleration is prevented from shifting due to inclination of the piezoelectric element 1.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric acceleration sensor for detecting acceleration of shock or vibration.

[0002]

2. Description of the Related Art Conventionally, as shown in FIG. 11, a lead 13 is joined by soldering or the like to each electrode 12a on both sides of a back surface of a piezoelectric element 12 so as to be electrically connected thereto, and a bottomed cylindrical shape is formed. In the metal shield case 14, only the lead 13 is projected outside from the opening of the shield case 14,
The piezoelectric element 12 is housed inside a shield case 14, and a lid 15 in which the lead 13 is inserted is attached to the opening and fixed to the shield case 14 by welding or soldering to seal the lead 13 and the lid 15. There is a piezoelectric acceleration sensor 16 in which the gap is sealed with glass and the piezoelectric element 12 is housed and fixed in a shield case 14.

In the above structure, when mounting the piezoelectric acceleration sensor 16 on the substrate 17, the leads 13 are bent at a substantially right angle and soldered to the substrate 17 as shown in FIG. 12, and the shield case 14 is connected to the ground. To this end, the shield case 14 is directly soldered to the board 17. As another conventional example, as shown in FIGS. 13 to 16, a cylindrical metal is formed on the peripheral surface of a fixing portion 18 formed of glass or resin that holds the lead 13 joined to the electrode 12a of the piezoelectric element 12. A header 19 made of metal is formed, and only the lead 13 is projected to the outside from the opening of the shield case 14 in the bottomed cylindrical shield case 14, and the piezoelectric element 12 is housed in the shield case 14. The header 19 is attached and sealed by a method such as press-fitting, the plate-shaped ground terminal 20 is joined to the outer surface of the shield case 14 by laser welding, and the lead 13 is laser-welded with the plate-shaped output terminal 21. And the output terminal 21 and the ground terminal 20 are protruded to the outside.
4 and the header 19 are resin-molded.

The manufacturing process of the latter conventional example will be briefly described. First, as shown in FIG. 17, a hoop-shaped thin metal plate is processed to form a terminal piece 22 in which an output terminal 21 and an earth terminal 20 are connected in a strip shape. And the end portions of the pair of ground terminals 20 are bent at substantially right angles in the same direction to form the connecting portion 20.
a is formed. Next, the sensor body 23 in which the piezoelectric element 12 is housed in the shield case 14 and sealed by the header 19 is arranged so as to be sandwiched between the output terminal 21 and the ground terminal 20, and is led out from the sensor body 23. Lead 1
3 and the output terminal 21, the outer peripheral surface of the shield case 14 and the connecting portion 20a of the ground terminal 20 are joined by laser welding (see FIG. 18), and unnecessary portions of the terminal piece 22 are cut off and resin-molded. Thus, the piezoelectric acceleration sensor is formed.

[0005]

In the former conventional configuration,
Since it is difficult to fix and position the piezoelectric element 12 when connecting the lead 13 to the electrode 12a of the piezoelectric element 12,
There is a problem that the direction of the piezoelectric element 12 is not constant, the detection direction of acceleration varies, and the productivity is poor. Further, as shown in FIG. 12, when the piezoelectric acceleration sensor 16 itself is mounted on the substrate 17, the piezoelectric acceleration sensor 16 itself is tilted and the detection direction varies, and it is difficult to automate the mounting work.

Also in the latter configuration, the piezoelectric element 1
Since the piezoelectric element 12 is supported in a cantilever manner in order to increase the sensitivity of item 2, there is a problem that it is difficult to fix and position the piezoelectric element 1 at the time of joining. SUMMARY OF THE INVENTION The present invention is intended to solve the above problems, and an object thereof is to provide a piezoelectric acceleration sensor which has a constant acceleration detection direction and is capable of accurate detection.

[0007]

In order to achieve the above-mentioned object, the invention of claim 1 has an insertion portion for inserting and supporting one end portion of the piezoelectric element, and the one ends are arranged so as to face each other in this insertion portion. A support made of resin for fixing the pair of exposed output terminals, a piezoelectric element in which one end of the output terminal is connected to electrodes on both sides of the one end inserted in the insertion portion, and a metal containing the piezoelectric element The shield case and the support body are molded with resin so that the other end of the output terminal and the other end of the ground terminal having one end connected to the metal shield case are projected to the outside. It is characterized by consisting of.

According to a second aspect of the present invention, in the first aspect of the present invention, a recess communicating with the insertion portion is provided in the support body, and one end of each of the pair of output terminals is exposed near the bottom surface in the recess, and the inside of the recess is exposed. It is characterized in that the electrodes of the piezoelectric element and the output terminals are connected to each other by filling a conductive adhesive into the.
The invention of claim 3 is characterized in that, in the invention of claim 2, a part of the recess is filled with a non-conductive adhesive having a stronger adhesive force than the conductive adhesive.

According to a fourth aspect of the invention, in the third aspect of the invention, the non-conductive adhesive is filled so as to straddle one end of the piezoelectric element on the opening surface side in the recess. According to a fifth aspect of the invention, in the invention of the fourth aspect, a step is formed on the inner side surface of the recess so as to make the bottom surface of the recess narrower than the opening surface, and an inclined surface that gradually narrows from the opening surface of the recess toward the bottom surface. And at least one of them is formed.

[0010]

According to the structure of the present invention, the piezoelectric element has an insertion portion for inserting and supporting one end portion of the piezoelectric element, and is made of a resin for fixing a pair of output terminals whose one end is exposed so as to face each other in the insertion portion. Of the output terminal, a support, a piezoelectric element in which one end of the output terminal is connected to the electrodes on both side surfaces of the one end inserted into the insertion portion, and a metal shield case containing the piezoelectric element. Since the shield case and the support body are resin-molded so that the other end portion and the other end of the ground terminal connected to the metal shield case at one end are projected to the outside, the support body for supporting the piezoelectric element is a resin-molded body. Because it is securely fixed to the exterior of the
Accurate detection is possible by preventing the piezoelectric element from tilting and deviating in the direction of acceleration detection.The piezoelectric element has one end inserted and supported in the insertion part of the support, and supports both ends of the piezoelectric element. Highly sensitive detection becomes possible as compared with the case.
Furthermore, when mounting on the board, do not solder the shield case directly to the board, but solder the ground terminal protruding outside the exterior of the resin mold to connect to the ground, and connect the piezoelectric element to the board. Can be prevented from being tilted.

According to the second aspect of the present invention, the support is provided with a recess communicating with the insertion portion, and one end of each of the pair of output terminals is exposed in the vicinity of the bottom surface of the recess, so that the recess has conductivity. Since the electrode of the piezoelectric element and the output terminal are connected by being filled with the adhesive, the electrode of the piezoelectric element and the output terminal can be easily connected without applying an external force to the support and the piezoelectric element. .

In the structure of the third aspect of the present invention, since the non-conductive adhesive having a stronger adhesive force than the conductive adhesive is filled in a part of the recess, the piezoelectric material is formed by the non-conductive adhesive having a strong adhesive force. The adhesive strength between the element and the output terminal can be increased.
In the structure of the invention of claim 4, since the non-conductive adhesive is filled so as to straddle one end of the piezoelectric element on the opening surface side in the recess, the strength against external force can be increased and the piezoelectric element and the shield can be increased. Insulation from the case can be secured.

According to the fifth aspect of the invention, on the inner side surface of the recess, there are provided a step for making the bottom surface of the recess narrower than the opening surface, and an inclined surface gradually narrowing from the opening surface of the recess toward the bottom surface. Since at least one is formed, the pool of the non-conductive adhesive can be improved, and the surface tension causes a force toward the bottom surface of the recess to act on the non-conductive adhesive. The adhesive strength can be increased.

[0014]

【Example】

(Embodiment 1) An embodiment of the present invention will be described with reference to the drawings. As shown in FIGS. 1 (a) to 1 (c), a long plate-shaped piezoelectric element 1 has electrodes 1a on both surfaces facing back, and is inserted in an insertion portion 3 provided on a support body 2 made of resin. One end is inserted.

As shown in FIG. 1B, a pair of thin plate-shaped output terminals 4 are integrally fixed to the support 2 by insert molding. Further, a recess 5 communicating with the insertion portion 3 is provided in the support body 2, one end of each output terminal 4, 4 is exposed near the bottom surface in the recess 5, and the electrode 1a of the piezoelectric element 1 is exposed. , 1a and the respective output terminals 4, 4 are filled with a conductive adhesive 30 such as a silver paste in the vicinity of the bottom surface of the recess 5 to connect the piezoelectric element 1 and the output terminal 4 with the conductive adhesive 30.
And the electrode 1a of the piezoelectric element 1 and the output terminal 4
Electrical continuity is obtained between and through the conductive adhesive 30. In addition, the conductive adhesive 3 is formed by straddling one end of the piezoelectric element 1 on the opening surface side in the recess 5 from the opening surface side (upper side).
It is filled with a non-conductive adhesive 31 having a stronger adhesive strength than 0. That is, the non-conductive adhesive 31 filled in the portions located on both sides of the piezoelectric element 1 in the recess 5 separated by the piezoelectric element 1 is made to cross over the upper side of the piezoelectric element 1 and the non-conductive adhesive 31. Can be connected by filling.

The end of the support body 2 is housed inside the shield case 6 made of metal and formed in the shape of a cylinder with a bottom, together with the piezoelectric element 1. Since the piezoelectric element 1 has a high impedance and is easily affected by noise, the shield case 6 shields the piezoelectric element 1 from external noise. Further, on both side surfaces of the outer wall of the shield case 6, a thin plate-shaped member is bent and formed into a substantially L shape, and the ground terminal 7 is formed.
Are connected respectively. Since the support 2 is made of resin, the shield case 6 can be kept insulated from the piezoelectric element 1 and the output terminal 4.

Further, the other end of the output terminal 4 not connected to the electrode 1a of the piezoelectric element 1 and one end of the ground terminal 7 not connected to the shield case 6 are projected to the outside, and the shield case 6 and the support 2 are resin-molded. The piezoelectric acceleration sensor S is formed. In the above configuration, the non-conductive adhesive 31 having a stronger adhesive force than the conductive adhesive 30 is provided so as to straddle one end of the piezoelectric element 1 on the opening surface side in the recess 5.
Since the recesses 5 located on both sides of the piezoelectric element 1 are connected with each other, the adhesive strength between the piezoelectric element 1 and the output terminal 4 can be increased by the non-conductive adhesive 31 having a strong adhesive force. Furthermore, due to the surface tension, the non-conductive adhesive 31
A downward force acts on itself, the adhesive strength of the non-conductive adhesive 31 can be increased, and further the strength against external force can be increased, and also between the electrodes 1a of the piezoelectric element 1 and between the piezoelectric element 1 and the shield case. Insulation from 6 can be secured.

Next, the manufacturing process of the above-described piezoelectric acceleration sensor S of this embodiment will be described, and the configuration of this embodiment will be described in more detail. First, FIG.
As shown in (c), a hoop-shaped metal thin plate is processed to form a terminal piece 8 in which the output terminal 4 and the ground terminal 7 are connected in a strip shape, and the insert piece is inserted into the output terminal 4 portion of the terminal piece 8. The support 2 is formed integrally with the output terminal 4 by molding.
The tip of the ground terminal 7 is bent into a substantially L shape to form a connecting piece 7a. Further, the insertion portion 3 of the support body 2
The other end of the piezoelectric element 1 whose one end is inserted and supported is held to prevent the piezoelectric element 1 from moving when connecting and connecting the output terminal 4 to the electrode 1a of the piezoelectric element 1, and A holder 9 for positioning the element 1 is formed integrally with the terminal piece 8 by insert molding at a position facing the support 2. The holder 9 is provided with a groove 9a into which the other end of the piezoelectric element 1 is inserted, and the groove 9a faces the support 2. In addition, this holding body 9 is the support body 2
Since they are formed at the same time, they can be formed without increasing the manufacturing process. Further, the support body 2 is notched in a substantially V shape so that the side facing the holding body 9 faces the center direction and communicates with the insertion portion 3, and the upper surface of the insertion portion 3 is opened.

Then, as shown in FIGS. 3A to 3C, the end portions of the piezoelectric element 1 are press-fitted into the insertion portion 3 of the support 2 and the groove 9a of the holding body 9, respectively. The opening end of the insertion portion 3 and the opening end of the groove 9a are provided with inclined surfaces 3a and 9b so that the piezoelectric element 1 can be easily press-fitted. Also,
The recess 5 is formed by making a part of the insertion portion 3 wider than the width of the piezoelectric element 1, and by pouring and filling a conductive adhesive 30 such as silver paste into the recess 5. , The electrode 1a of the piezoelectric element 1 and the output terminal 4 are joined and connected. However, at this time, in order to prevent a short circuit between the electrodes 1a on both side surfaces of the piezoelectric element 1 due to excess adhesive, a groove 3b for accumulating excess adhesive is provided on the bottom surface of the recess 5. . Further, a non-conductive adhesive 31 having a stronger adhesive force than the conductive adhesive 30 is filled so as to straddle one end of the piezoelectric element 1 from the upper side on the opening surface side in the recess 5. Then, the electrode 1 a of the piezoelectric element 1 and the output terminal 4
When the connection with is completed, the part shown by the dotted line in FIGS. 3A and 3C, that is, a part of the terminal piece 8 including the holding body 9 is removed.

Next, as shown in FIGS. 4 (a) to 4 (c),
A metal shield case 6 formed in a bottomed tubular shape with one end opened is attached to the support body 2 so that the ends of the piezoelectric element 1 and the support body 2 are housed in the shield case 6 from the open end. Then, the support body 2 seals the open end of the shield case 6. At this time, the connecting piece 7a of the ground terminal 7 formed into a substantially L-shape is bent outward with respect to the shield case 6 so as to serve as a guide when the shield case 6 is attached to the support body 2. Since the guide portion 7b is provided, the shield case 6 can be easily attached to the support body 2. Then, the connection piece 7a of the ground terminal 7 is connected to the outer wall of the shield case 6 by laser welding to obtain conduction.

A step portion 2a is provided around the output terminal 4 projecting from the side surface of the support 2, and the shield case 6 is cut out along the periphery of the step portion 2a. Therefore, the output terminal 4 is formed by the step portion 2a.
It is possible to prevent a short circuit between the shield case 6 and the shield case 6. Finally, as shown in FIGS. 1 (a) to 1 (c),
The shield case 6 and the support body 2 are resin-molded, and the output terminal 4 and the ground terminal 7 are projected from the back-facing side surface of the molded portion 11 substantially perpendicularly to the side surfaces. The piezoelectric acceleration sensor S is assembled by removing the terminal piece 8 shown by the broken line. As described above, since the steps from the formation of the terminal piece 8 to the final resin molding can be continuously performed, the assembly is easy and the working efficiency is good, and the characteristics of each piezoelectric acceleration sensor are Can be stabilized.

As a form of actually mounting the piezoelectric acceleration sensor S assembled as described above on a substrate, as shown in FIGS. 5A to 5C, the output terminal 4 and the ground terminal are provided. The so-called JB, which is obtained by bending 7 into a substantially J shape.
END type, or so-called GULL W, which is formed by bending the output terminal 4 and the ground terminal 7 downward as shown in FIGS. 6A to 6C, and further bending the tip end outward.
There is an ING type, and any type can be supported in this embodiment.

With the above structure, the piezoelectric acceleration sensor S can be mounted substantially horizontally on the substrate,
Moreover, since the piezoelectric element 1 can be fixed substantially perpendicular to the output terminal 4, the acceleration detection direction is always constant, the detection accuracy is improved, and accurate detection is possible. In addition,
As a method of connecting the output terminal 4 to the electrode 1a of the piezoelectric element 1, in addition to the method described above, the surface of the electrode 1a of the piezoelectric element 1 and the output terminal 4 may be subjected to solder plating or tin plating to obtain the output terminal 4 The contact area with the electrode 1a is widened by bending the tip of the electrode, and the electrode 1a and the output terminal 4 are exposed by laser light or the like.
You may heat and join the contact part with.

(Embodiment 2) FIG. 7 shows a sectional view of a main part of a support 2 of a piezoelectric acceleration sensor according to another embodiment of the present invention. The structure of the piezoelectric acceleration sensor according to the present embodiment is almost the same as that of the first embodiment, the common parts are denoted by the same reference numerals, and the description thereof will be omitted. Only the characteristic parts of the present embodiment will be described. To do.

The feature of this embodiment is that the electrode 1 of the piezoelectric element 1 is
That is, the step 5a is provided on the inner wall surface of the recess 5 facing the a and 1a, and the step 5a is provided on the inner wall surface of the recess 5 to improve the accumulation of the non-conductive adhesive 31. The adhesive strength can be increased. Furthermore, since the step 5a is provided in the inner wall surface of the recess 5 facing the electrodes 1a, 1a of the piezoelectric element 1 in the direction of the piezoelectric element 1, the bottom surface of the recess 5 becomes smaller than the opening surface thereof, and The thickness of the conductive adhesive 30 in the vicinity of the bottom surface in 5 can be made thinner than that on the opening surface side. Here, as the thickness of the conductive adhesive 30 when cured increases, the number of bubbles and defects generated inside the conductive adhesive 30 increases, and at the same time, the internal volume due to volume contraction when the conductive adhesive 30 hardens. Since the strain also increases, the adhesive strength of the conductive adhesive 30 decreases and the piezoelectric element 1
The adhesive strength between the output terminal 3 and the output terminal 3 becomes weak. However, in this embodiment, as described above, the conductive adhesive 3
Since the thickness of 0 can be reduced, the adhesive strength between the piezoelectric element 1 and the output terminals 4 and 4 in the recess 5 can be increased.

(Embodiment 3) FIG. 9 is a sectional view showing the principal part of a support 2 of a piezoelectric acceleration sensor according to yet another embodiment of the present invention. The structure of the piezoelectric acceleration sensor according to the present embodiment is also almost the same as that of the first embodiment, and the common portions are denoted by the same reference numerals and the description thereof will be omitted. Only explained.

The feature of this embodiment is that the electrode 1 of the piezoelectric element 1 is
Since the inclined surface 5b is provided on the inner wall surface of the recess 5 facing the a and 1a, the non-conductive adhesive 31 can be accumulated well and the adhesive strength can be increased. (Embodiment 4) FIG. 8 is a sectional view showing the principal part of a support 2 of a piezoelectric acceleration sensor according to still another embodiment of the present invention. The structure of the piezoelectric acceleration sensor according to the present embodiment is also almost the same as that of the first embodiment, and the common portions are denoted by the same reference numerals and the description thereof will be omitted. Only explained.

The feature of this embodiment is that the electrode 1 of the piezoelectric element 1 is
A step similar to that of the first embodiment is provided on the inner wall surface of the recess 5 facing a and 1a, and the inner wall surface from the opening surface of the recess 5 to the step is inclined like the third embodiment. Surface 5b
Is formed. The step 5a and the inclined surface 5b in Examples 1 to 3 may be formed on a part of the inner wall surface of the recess 5 facing the electrode 1a of the piezoelectric element 1 as shown in FIG. Alternatively, it may be formed on the entire inner wall surface as shown in FIG.

[0029]

According to the first aspect of the present invention, there is provided an insertion portion for inserting and supporting one end portion of a piezoelectric element, and a resin member for fixing a pair of output terminals whose one end is exposed so as to face each other in the insertion portion. Of the output terminal, a support, a piezoelectric element in which one end of the output terminal is connected to the electrodes on both side surfaces of the one end inserted into the insertion portion, and a metal shield case containing the piezoelectric element. Since the shield case and the support body are resin-molded so that the other end portion and the other end of the ground terminal connected to the metal shield case at one end are projected to the outside, the support body for supporting the piezoelectric element is a resin-molded body. Since it is securely fixed to the exterior of the device, the piezoelectric element is prevented from tilting and the acceleration detection direction is prevented from shifting, and accurate detection is possible.One end of the piezoelectric element is inserted into the insertion part of the support. Are lifting, there is an effect that as compared with the case of supporting both ends of the piezoelectric element highly sensitive detection is possible. Furthermore, when mounting on the board, do not solder the shield case directly to the board, but solder the ground terminal protruding outside the exterior of the resin mold to connect to the ground, and connect the piezoelectric element to the board. There is an effect that it can be prevented from being inclined and mounted.

According to a second aspect of the present invention, the support is provided with a recess communicating with the insertion portion, one end of each of the pair of output terminals is exposed in the vicinity of the bottom surface of the recess, and the conductive adhesive is provided in the recess. Since the electrode of the piezoelectric element and the output terminal are filled by filling, the electrode of the piezoelectric element and the output terminal can be easily connected without applying external force to the support and the piezoelectric element. Has the effect that it becomes easier.

According to the third aspect of the present invention, since the non-conductive adhesive having a stronger adhesive force than the conductive adhesive is filled in a part of the recess, the piezoelectric element and the non-conductive adhesive having a stronger adhesive force are formed. The adhesive strength with the output terminal can be increased. Claim 4
In the invention, since the non-conductive adhesive is filled so as to straddle one end of the piezoelectric element on the opening surface side in the recess, it is possible to increase the strength against external force and to insulate the piezoelectric element from the shield case. Can be secured.

According to a fifth aspect of the present invention, at least one of a step on the inner side surface of the recess, which makes the bottom surface of the recess narrower than the opening surface, and an inclined surface which gradually narrows from the opening surface of the recess toward the bottom surface. Since it is possible to improve the accumulation of the non-conductive adhesive, the surface tension acts on the non-conductive adhesive toward the bottom surface of the recess, and thus the adhesive strength of the non-conductive adhesive is increased. There is an effect that can increase.

[Brief description of drawings]

1A and 1B are views showing a first embodiment, in which FIG. 1A is a partially cutaway plan view of the whole, FIG. 1B is a side sectional view taken along line AA of FIG. 1A, and FIG. Is.

2A and 2B are diagrams showing a terminal piece, a support body, and a holding body in the above manufacturing process, FIG. 2A is a plan view, FIG. 2B is a side sectional view taken along line AA of FIG. 2A, and FIG. ) Is B in FIG.
It is a B-line front sectional view.

FIG. 3 is a diagram showing a terminal piece, a support body, a holding body, and a piezoelectric element in the above manufacturing process, (a) is a plan view,
(B) is a side sectional view taken along the line AA of FIG. (A), and (c) is a front sectional view taken along the line BB of FIG.

4A and 4B are diagrams showing a terminal piece, a support, a piezoelectric element, and a shield case in the same manufacturing process as described above, wherein FIG. 4A is a partially cutaway plan view, FIG. 4B is a side view, and FIG. (A)
2 is a front sectional view taken along line AA of FIG.

5A and 5B are diagrams showing the same terminal shape as the J BEND type, in which FIG. 5A is a plan view and FIG. 5B is a side view.
(C) is a front view.

6A and 6B are diagrams showing the same terminal shape as the GULL WING type, in which FIG. 6A is a plan view, FIG. 6B is a side view, and FIG. 6C is a front view.

FIG. 7 is a side sectional view showing a main part of the second embodiment.

FIG. 8 is a side sectional view showing a main part of the third embodiment.

FIG. 9 is a side sectional view showing a main part of the fourth embodiment.

10 (a) and 10 (b) are plan views showing the shapes of the recesses in Examples 1 to 4, respectively.

FIG. 11 is a plan sectional view showing a conventional example.

FIG. 12 is a diagram showing a board mounting state of the above, FIG.
Is a front view and (b) is a side view.

13A and 13B are views showing another conventional example, in which FIG. 13A is a partially cutaway plan view of the whole, FIG. 13B is a side view, and FIG. 13C is a front sectional view taken along line AA of FIG. It is a figure.

14A and 14B are views showing the header of the same, in which FIG. 14A is a plan sectional view and FIG. 14B is a front view.

FIG. 15 is a diagram showing the header of the above, in which (a) is a plan view, (b) is a front view, and (c) is a side view.

FIG. 16 is a view showing the above shield case,
(A) is a plane sectional view and (b) is a side view.

FIG. 17 is a diagram showing a terminal piece in the manufacturing process same as above, (a) is a plan view, and (b) is a side view.

FIG. 18 is a view showing the terminal piece and the sensor body in the same manufacturing process as the above, FIG.
(B) is a front view and (c) is a side view.

[Explanation of symbols]

 1 Piezoelectric Element 1a Electrode 2 Support 2a Step 3 Insertion 4 Output Terminal 5 Recess 6 Shield Case 7 Earth Terminal 11 Molded Part S Piezoelectric Accelerometer

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Hiroyuki Takami, 1048, Kadoma, Kadoma City, Osaka Prefecture, Matsushita Electric Works Co., Ltd. (72) Hidetoshi Takeyama, 1048, Kadoma, Kadoma City, Osaka Matsushita Electric Works Co., Ltd. 72) Inventor Hirohisa Tanaka 1048, Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Works Co., Ltd. (72) Inventor Masahiro Kodo, 1048, Kadoma, Kadoma City, Osaka Matsushita Electric Works Co., Ltd.

Claims (5)

[Claims] 1. A resin support body having an insertion portion for inserting and supporting one end portion of a piezoelectric element, and fixing a pair of output terminals whose one end is exposed so as to face each other in the insertion portion, and the insertion portion. A piezoelectric element in which one end of the output terminal is connected to the electrodes on both sides of the one end inserted into
A shield case made of a metal that houses the piezoelectric element, and the other end of the output terminal and the other end of the ground terminal having one end connected to the shield case made of metal are projected to the outside. A piezoelectric acceleration sensor, characterized in that a support is molded with a resin. 2. A support is provided with a recess communicating with the insertion portion,
2. The electrodes of the piezoelectric element and the output terminals are connected by exposing one end of each of the pair of output terminals near the bottom surface in the recess and filling the recess with a conductive adhesive. The piezoelectric acceleration sensor described. 3. The piezoelectric acceleration sensor according to claim 2, wherein a part of the recess is filled with a non-conductive adhesive having a stronger adhesive force than the conductive adhesive. 4. The piezoelectric acceleration sensor according to claim 3, wherein a non-conductive adhesive is filled so as to straddle one end of the piezoelectric element on the opening surface side in the recess. 5. An inner side surface of the recess is formed with at least one of a step for making the bottom surface of the recess narrower than the opening surface and an inclined surface for gradually narrowing from the opening surface of the recess toward the bottom surface. The piezoelectric acceleration sensor according to claim 4, which is characterized in that.