JP3303292B2 - Surface mount type piezoelectric vibration device - Google Patents

Surface mount type piezoelectric vibration device

Info

Publication number
JP3303292B2
JP3303292B2 JP19373398A JP19373398A JP3303292B2 JP 3303292 B2 JP3303292 B2 JP 3303292B2 JP 19373398 A JP19373398 A JP 19373398A JP 19373398 A JP19373398 A JP 19373398A JP 3303292 B2 JP3303292 B2 JP 3303292B2
Authority
JP
Japan
Prior art keywords
vibrating plate
piezoelectric
plate
side direction
bonding material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP19373398A
Other languages
Japanese (ja)
Other versions
JP2000013178A (en
Inventor
宏嘉 松浦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daishinku Corp
Original Assignee
Daishinku Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daishinku Corp filed Critical Daishinku Corp
Priority to JP19373398A priority Critical patent/JP3303292B2/en
Publication of JP2000013178A publication Critical patent/JP2000013178A/en
Application granted granted Critical
Publication of JP3303292B2 publication Critical patent/JP3303292B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は水晶振動子、水晶フィル
タをはじめとする表面実装型圧電振動デバイス子のパッ
ケージ構造に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a package structure of a surface mount type piezoelectric vibrating device such as a crystal unit and a crystal filter.

【0002】[0002]

【従来の技術】水晶振動子等の圧電振動デバイスは、回
路基板への自動搭載が可能な表面実装化、搭載される電
子機器の小型化に伴う、急速な小型化が求められてお
り、また機能面でも周波数変動が小さく、電気的特性の
安定した、高性能で高信頼性のものが要求されている。
2. Description of the Related Art Piezoelectric vibrating devices such as quartz oscillators are required to be surface-mounted so that they can be automatically mounted on a circuit board, and to be rapidly downsized as electronic devices to be mounted are downsized. In terms of function, there is a demand for a high-performance and highly-reliable one with a small frequency fluctuation, stable electric characteristics.

【0003】水晶振動子は表面実装型のものに限定して
も、その用途等によって多種多様の支持形態が採用され
ている。例えば、水晶振動板をパッケージ内の電極パッ
ドに直接搭載し、導電性接合材で固定するもの、あるい
は緩衝機能のない固体支持体により支持するもの、ある
いは緩衝機能がある支持体により支持するもの等があ
る。パッケージ内に余裕があれば緩衝機能のある支持体
を用いることが、耐衝撃性の面から一般的に好ましい
が、水晶振動子の小型化、水晶振動板の搭載の容易さと
いった観点からは、パッケージ内の電極パッドに直接搭
載する構成の方がむしろ望ましい。
[0003] Even if the crystal unit is limited to a surface mount type, a variety of support forms are adopted depending on the application and the like. For example, a crystal vibration plate is directly mounted on the electrode pad in the package and fixed with a conductive bonding material, or a solid support having no buffer function, or a support having a buffer function There is. If there is room in the package, it is generally preferable to use a support having a buffer function from the viewpoint of impact resistance, but from the viewpoint of miniaturization of the crystal unit and easy mounting of the crystal plate, It is rather desirable to directly mount on the electrode pads in the package.

【0004】しかし、パッケージ内の電極パッドに直接
搭載する構成は、緩衝機能を有していないゆえに、水晶
振動板の搭載位置、水晶振動板と電極パッドを電気的機
械的に接続する導電性接合材の塗布状態ついて、より精
度よく行う必要性がある。特に、前記水晶振動板が、長
辺方向の一端部のみに電極が導出された、片持ち保持構
造のものは、その処方により、問題点が顕著に現れやす
い。例えば、水晶振動板の搭載位置が、水晶振動板の傾
き等により、パッケージに接触した状態でずれたまま搭
載されると、製品化後の水晶振動子に外部衝撃が加わっ
た場合、パッケージに受けた衝撃が、直接、水晶振動板
にもつたわり、水晶振動板の割れや、欠け等の電気的特
性の劣化を招くという問題点を有していた。また、水晶
振動板と電極パッドを電気的機械的に接続する導電性接
合材の塗布量が多すぎたり、当該導電性接合材の塗布量
がバラツクことにより、短絡事故や、CI値が劣化する
等の電気的特性の劣化を招くという問題点も有してい
た。また、水晶振動板と電極パッドを電気的機械的に接
続する導電性接合材の塗布量が少なすぎると、CI値が
劣化するだけでなく、導電性接合材にクラックが生じ、
水晶振動板がはずれるなどの問題点があった。さらに、
導電性接合材としてはんだを用いた場合、いも付け(い
もはんだ)、はんだ流れすぎ、はんだ不足といったはん
だ付け不良を招くことがあった。いも付けとは、はんだ
の中に気泡が入ったり、はんだが完全に溶けきらない状
態のまま塗布されたものである。この状態ではんだが塗
布されると、はんだの機械的強度が弱く、衝撃や振動に
より離脱しやすくなり、導通不良の原因となる。はんだ
流れすぎになると、短絡などの不具合が生じやすい。は
んだ不足になると、いもはんだと同じように、衝撃や振
動により離脱しやすくなり、導通不良の原因となる。
However, since the structure in which the crystal vibration plate is directly mounted on the electrode pad in the package does not have a buffer function, the mounting position of the crystal vibration plate and the conductive bonding for electrically and mechanically connecting the crystal vibration plate and the electrode pad are not provided. There is a need to perform the application of the material more accurately. In particular, in the case of the cantilever holding structure in which the electrode is led out only at one end in the long side direction, the quartz vibrating plate is liable to have a problem due to its prescription. For example, if the mounting position of the crystal oscillator is shifted while being in contact with the package due to the inclination of the crystal oscillator, etc., if an external impact is applied to the crystal oscillator after commercialization, it will not be applied to the package. In addition, there is a problem that the shock directly adheres to the quartz vibrating plate and causes deterioration of electrical characteristics such as cracking or chipping of the quartz vibrating plate. In addition, the applied amount of the conductive bonding material that electrically and mechanically connects the crystal vibration plate and the electrode pad is too large, or the applied amount of the conductive bonding material varies, thereby causing a short circuit accident and a deterioration in CI value. However, there is also a problem that the electrical characteristics such as the above are deteriorated. Also, if the amount of the conductive bonding material that electrically and mechanically connects the crystal diaphragm and the electrode pad is too small, not only the CI value is deteriorated, but also the conductive bonding material is cracked,
There were problems such as the detachment of the quartz diaphragm. further,
When solder is used as the conductive bonding material, soldering defects such as potato (potato solder), too much solder flow, and insufficient soldering may be caused. The potting is applied in a state where air bubbles enter the solder or the solder is not completely melted. If the solder is applied in this state, the mechanical strength of the solder is weak, and the solder is easily detached by impact or vibration, which causes poor conduction. If the solder flows too much, problems such as short circuits tend to occur. When solder is insufficient, like solder, it is easily detached due to impact or vibration, which causes poor conduction.

【0005】[0005]

【発明が解決しようとする課題】本発明は上記問題点を
解決するためになされたもので、圧電振動デバイスの小
型化、圧電振動板の搭載が容易に行えるパッケージ内の
電極パッドに直接搭載する構成において、圧電振動板の
搭載位置、導電性接合材の塗布状態ついて、より精度よ
く行え、表面実装型圧電振動デバイスの信頼性を向上さ
せることを目的とする。
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and is directly mounted on an electrode pad in a package in which a piezoelectric vibration device can be miniaturized and a piezoelectric vibration plate can be easily mounted. It is an object of the present invention to improve the reliability of a surface-mount type piezoelectric vibration device by more accurately performing a mounting position of a piezoelectric vibration plate and a coating state of a conductive bonding material.

【0006】[0006]

【課題を解決するための手段】上記課題を解決するため
に、本発明は、圧電振動板を収容するための底面と内側
壁面、ならびに当該圧電振動板の少なくとも長辺方向の
一端が支持される段差部とを有し、上部が開口したパッ
ケージと、前記段差部に形成された電極パッドと導電性
接合材を介して電気的に接続され、表裏面に励振電極が
形成された圧電振動板とからなる表面実装型圧電振動デ
バイスにおいて、 前記段差部の内側壁面には、前記圧
電振動板の短辺方向の中央部に接する凸部と、前記圧電
振動板の短辺幅寸法に対応した幅狭部とが形成されて
り、前記圧電振動板の短辺方向の中央部を、前記幅狭部
により、前記段差部の内側壁面の凸部に位置されるよう
に位置決めし、前記圧電振動板の短辺方向の中央部を、
前記段差部の内側壁面の凸部に接触させることで、当該
圧電振動板の短辺方向の両端に段差部の空隙を形成し、
前記段差部の空隙に、導電性接合材が流れ込み、当該導
電性接合材の塗布状態を確認できるようにしたことを特
徴とする。
In order to solve the above-mentioned problems, the present invention provides a method for supporting a bottom surface and an inner wall surface for accommodating a piezoelectric vibrating plate, and at least one end of the piezoelectric vibrating plate in a long side direction. A package having a stepped portion, a package having an open top, a piezoelectric vibrating plate electrically connected to an electrode pad formed on the stepped portion and a conductive bonding material, and having excitation electrodes formed on the front and back surfaces; In the surface-mount type piezoelectric vibration device comprising:
A convex portion that is in contact with the central portion in the short side direction of the electric diaphragm and a narrow portion corresponding to the short side width of the piezoelectric diaphragm are formed .
The central portion of the piezoelectric diaphragm in the short side direction is defined as the narrow portion.
As a result, the inner wall surface of the step portion is positioned on the convex portion.
And the center of the piezoelectric diaphragm in the short side direction,
By contacting the protrusion on the inner wall surface of the step portion,
Form gaps at the steps on both ends of the piezoelectric diaphragm in the short side direction,
The conductive bonding material flows into the gap of the step portion,
The application state of the electrically conductive bonding material can be confirmed .

【0007】前記段差部の内側壁面に、圧電振動板の短
辺方向の中央部で、当該圧電振動板と接する凸部を形成
したことにより、圧電振動板の短辺方向の両端部分に
は、ある一定容量を有する空隙が形成され、当該圧電振
動板は、短辺方向の両端の空隙が形成された状態でパッ
ケージの段差部に位置決めされる。また、前記段差部の
内側壁面に、前記圧電振動板の短辺幅寸法に対応した幅
狭部を形成したことにより、前記圧電振動板の短辺方向
のずれ、傾きが生じにくくなる。前記内側壁面の幅狭部
は、前記圧電振動板の短辺方向の中央部を、前記内側壁
面の凸部に位置されるように位置決めし、前記圧電振動
板の短辺方向の両端部分を、前記空隙にバランスよく位
置決めする。そして、前記空隙には、前記段差部に形成
された電極パッドと前記圧電振動板とを電気的機械的に
接合する導電性接合材が流れ込み、当該導電性接合材の
塗布状態を確認できるようになる。
[0007] By forming a convex portion in contact with the piezoelectric vibrating plate on the inner wall surface of the step portion at the center of the piezoelectric vibrating plate in the short side direction, both end portions in the short side direction of the piezoelectric vibrating plate are provided. A gap having a certain capacity is formed, and the piezoelectric vibrating plate is positioned on the step portion of the package with gaps formed at both ends in the short side direction. Further, by forming a narrow portion corresponding to the width of the short side of the piezoelectric vibrating plate on the inner wall surface of the step portion, it is difficult for the piezoelectric vibrating plate to be shifted or inclined in the short side direction. The narrow portion of the inner wall surface is positioned such that the center of the piezoelectric vibrating plate in the short side direction is positioned on the convex portion of the inner wall surface, and both end portions of the piezoelectric vibrating plate in the short side direction, It is positioned in the gap with good balance. Then, a conductive bonding material for electrically and mechanically bonding the electrode pad formed on the step portion and the piezoelectric vibration plate flows into the gap, so that an application state of the conductive bonding material can be confirmed. Become.

【0008】また請求項2に示すように、前記圧電振動
板が、長辺方向の一端部のみに電極が導出された片側電
気的接続構造であることを特徴とする。
According to a second aspect of the present invention, the piezoelectric vibrating plate has a one-sided electrical connection structure in which electrodes are led out only at one end in the long side direction.

【0009】上記構成により、上記作用効果に加え、前
記内側壁面の凸部は、導電性接合材が両端の空隙間で流
れ出すのを規制し、長辺方向の一端部のみに導出された
電極間の短絡を防止する。
[0009] With the above configuration, in addition to the above-mentioned functions and effects, the convex portion of the inner wall surface restricts the conductive bonding material from flowing out in the gaps at both ends, and the gap between the electrodes led out only at one end in the long side direction. To prevent short circuit.

【0010】また請求項3に示すように、導電性接合材
としてはんだを用いた場合、はんだ塗布状態、あるいは
はんだ溶融状態を認識することにより、いも付け、はん
だ流れすぎ、はんだ不足などのはんだ付け不良を防止で
きる。
According to the present invention, when solder is used as the conductive bonding material, it is possible to recognize the solder application state or the solder melting state, and to determine the soldering state such as squatting, excessive solder flow, insufficient soldering, and the like. Failure can be prevented.

【0011】[0011]

【発明の実施の形態】次に、本発明の第1の実施形態
を、表面実装型の水晶振動子を例にとり、図面を参照し
て説明する。図1は本発明の第1の実施形態を示す分解
斜視図、図2は図1の水晶振動板を搭載した状態の平面
図である。なお、気密封止に用いるフタについては図示
していない。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, a first embodiment of the present invention will be described with reference to the drawings, taking a surface mount type crystal unit as an example. FIG. 1 is an exploded perspective view showing a first embodiment of the present invention, and FIG. 2 is a plan view showing a state where the quartz plate of FIG. 1 is mounted. The lid used for hermetic sealing is not shown.

【0012】水晶振動板1は、ATカット水晶振動板か
らなり、矩形状に加工されている。その表裏面には励振
電極11,12が形成され、これらの励振電極を水晶振
動板の長辺方向の一端部に導出する引出電極11a,1
2aが真空蒸着法等の手段にて形成されている。
The quartz vibrating plate 1 is formed of an AT-cut quartz vibrating plate and has a rectangular shape. Excitation electrodes 11 and 12 are formed on the front and back surfaces, and extraction electrodes 11a and 1 that lead these excitation electrodes to one end in the long side direction of the quartz plate.
2a is formed by means such as a vacuum evaporation method.

【0013】パッケージ2は全体として上部が開口した
直方体形状であり、セラミックからなる底面としてのパ
ッケージ基体20と壁面としてのパッケージ周壁21、
前記水晶振動板を搭載する段差部22とから構成されて
いる。そして、前記段差部が形成された内側壁面は、そ
の長辺方向の端部中央に凸部211が形成され、その短
辺方向の両端部に前記圧電振動板の短辺幅寸法に対応し
て一部分を突出させた幅狭部212,213が形成され
ている。前記幅狭部間の幅寸法は、前記水晶振動板の短
辺方向の幅寸法より若干大きく形成されており、前記水
晶振動板の1.05倍から1.15倍の幅寸法が好まし
い。これは、前記比率より小さくなると、水晶振動板の
パッケージへの挿入、位置決めがきつくなり、作業性も
低下する。一方、前記比率より大きくなると、水晶振動
板の短辺方向のずれ、傾きの悪影響を受けやすくなるた
めである。また、前記段差部の上面には、電極パッド2
21,222が形成されており、前記周壁21の上部に
は、気密接合に用いるコバール等からなる金属リング2
3が形成されている。前記パッケージ2は、セラミック
の積層技術を用いて、一体的に焼成成形されている。な
お、金属リング23にはニッケル等の金属がメッキされ
ている。
The package 2 has a rectangular parallelepiped shape with an opening at the top as a whole, and includes a package base 20 made of ceramic as a bottom surface and a package peripheral wall 21 as a wall surface.
And a step portion 22 on which the quartz vibrating plate is mounted. The inner wall surface on which the step portion is formed has a convex portion 211 formed at the center of the end in the long side direction, and the both ends in the short side direction correspond to the short side width dimension of the piezoelectric vibration plate. Narrow portions 212 and 213 are formed so as to partially protrude. The width between the narrow portions is slightly larger than the width in the short side direction of the quartz plate, and is preferably 1.05 to 1.15 times the width of the quartz plate. If the ratio is smaller than the above-mentioned ratio, the insertion and positioning of the quartz plate into the package become difficult, and the workability is reduced. On the other hand, if the ratio is larger than the above-mentioned ratio, the quartz-crystal vibrating plate is liable to be adversely affected by the displacement and inclination in the short side direction. An electrode pad 2 is provided on the upper surface of the step.
21 and 222, and a metal ring 2 made of Kovar or the like used for hermetic bonding is provided on the upper portion of the peripheral wall 21.
3 are formed. The package 2 is integrally formed by firing using a ceramic lamination technique. The metal ring 23 is plated with a metal such as nickel.

【0014】その後、水晶振動板1を段差部22に搭載
し、はんだ、導電性樹脂接着剤等の導電性接合材Dによ
り、前記引出電極11aと前記電極パッド221、なら
びに前記引出電極12aと前記電極パッド222を、各
々電気的機械的接合している。そして、図示していない
が金属フタとパッケージの金属リング23とをシーム溶
接等の接合手段により気密的に封止を行う。なお、当該
気密封止手段は、電子ビーム等の溶接法を用いてもよ
い。また、水晶振動板は、矩形状のものに限らず第2の
実施形態に示すような音叉型のものを採用してもよい。
そして、圧電振動板は水晶振動板のみならず、他の圧電
単結晶板、圧電セラミック板を用いてもよい。
Thereafter, the crystal vibrating plate 1 is mounted on the step 22 and the lead-out electrodes 11a and the electrode pads 221 and the lead-out electrodes 12a and the lead-out electrodes 12a are connected by a conductive bonding material D such as solder or conductive resin adhesive. The electrode pads 222 are each electrically and mechanically joined. Then, although not shown, the metal lid and the metal ring 23 of the package are hermetically sealed by joining means such as seam welding. The hermetic sealing means may use a welding method such as an electron beam. Further, the quartz vibrating plate is not limited to a rectangular one, but may be a tuning fork type as shown in the second embodiment.
The piezoelectric vibration plate is not limited to a crystal vibration plate, but may be another piezoelectric single crystal plate or a piezoelectric ceramic plate.

【0015】次に、本発明の第2の実施形態について、
同じく水晶振動子を例にとり、図面を参照して説明す
る。図3は第2の実施の形態を示す分解斜視図、図4は
図3の水晶振動板を搭載した状態の平面図である。第1
の実施の形態と同じ構成部分については同番号を用いて
説明した。
Next, a second embodiment of the present invention will be described.
Similarly, a crystal resonator will be described as an example with reference to the drawings. FIG. 3 is an exploded perspective view showing the second embodiment, and FIG. 4 is a plan view showing a state in which the quartz plate of FIG. 3 is mounted. First
The same components as those of the embodiment have been described using the same numbers.

【0016】水晶振動板3は、屈曲振動する音叉型の水
晶振動片からなり、脚部31,32と基部33とを具備
する構成となっている。前記脚部の周囲には励振電極
(図示せず)が形成され、これらの励振電極を水晶振動
板の長辺方向の一端部に導出する引出電極(図示せず)
が真空蒸着法等の手段にて形成されている。
The quartz vibrating plate 3 is made of a tuning-fork type quartz vibrating piece that bends and vibrates, and is configured to include legs 31, 32 and a base 33. Excitation electrodes (not shown) are formed around the legs, and extraction electrodes (not shown) for leading these excitation electrodes to one end in the long side direction of the quartz plate.
Is formed by means such as a vacuum evaporation method.

【0017】パッケージ2は全体として上部が開口した
直方体形状であり、セラミックからなる底面としてのパ
ッケージ基体20と壁面としてのパッケージ周壁21、
前記水晶振動板を搭載する段差部24,25とから構成
されている。そして、前記各段差部が形成された内側壁
面は、その長辺方向の端部中央に凸部214が形成さ
れ、その短辺方向の両端部に前記圧電振動板の短辺幅寸
法に対応した幅狭部215,216が形成されている。
前記幅狭部間の幅寸法は、前記水晶振動板の短辺方向の
幅寸法より若干大きく形成されており、前記水晶振動板
の1.05倍から1.15倍の幅寸法が好ましい。これ
は、前記比率より小さくなると、水晶振動板のパッケー
ジへの挿入、位置決めがきつくなり、作業性も低下す
る。一方、前記比率より大きくなると、水晶振動板の短
辺方向のずれ、傾きの悪影響を受けやすくなるためであ
る。また、前記各段差部の上面には、電極パッド24
1,251が形成されており、前記周壁21の上部に
は、気密接合に用いるコバール等からなる金属リング2
3が形成されている。前記パッケージ2は、セラミック
の積層技術を用いて、一体的に焼成成形されている。な
お、金属リング23にはニッケル等の金属がメッキされ
ている。
The package 2 has a rectangular parallelepiped shape with an open top as a whole, and includes a package base 20 as a bottom surface made of ceramic and a package peripheral wall 21 as a wall surface.
It is composed of steps 24 and 25 on which the quartz plate is mounted. The inner wall surface on which the step portions are formed has a convex portion 214 formed at the center of the end in the long side direction, and the both end portions in the short side direction correspond to the short side width dimension of the piezoelectric vibration plate. Narrow portions 215 and 216 are formed.
The width between the narrow portions is slightly larger than the width in the short side direction of the quartz plate, and is preferably 1.05 to 1.15 times the width of the quartz plate. If the ratio is smaller than the above-mentioned ratio, the insertion and positioning of the quartz plate into the package become difficult, and the workability is reduced. On the other hand, if the ratio is larger than the above-mentioned ratio, the quartz-crystal vibrating plate is liable to be adversely affected by the displacement and inclination in the short side direction. An electrode pad 24 is provided on the upper surface of each step.
1, 251 are formed, and a metal ring 2 made of Kovar or the like used for hermetic joining is provided on the upper part of the peripheral wall 21.
3 are formed. The package 2 is integrally formed by firing using a ceramic lamination technique. The metal ring 23 is plated with a metal such as nickel.

【0018】その後、水晶振動板3の基部33を段差部
24,25に搭載し、はんだ、導電性樹脂接着剤等の導
電性接合材Dにより、前記各引出電極(図示しない)と
前記電極パッド241,251とを、各々電気的機械的
接合している。そして、図示していないが金属フタとパ
ッケージの金属リング23とをシーム溶接等の接合手段
により気密的に封止を行う。なお、当該気密封止手段
は、電子ビーム等の溶接法を用いてもよい。また、水晶
振動板は、音叉型のものに限らず第1の実施形態に示す
ような矩形状のものを採用してもよい。そして、圧電振
動板は水晶振動板のみならず、他の圧電単結晶板、圧電
セラミック板を用いてもよい。
Thereafter, the base 33 of the quartz vibrating plate 3 is mounted on the steps 24 and 25, and the respective lead-out electrodes (not shown) and the electrode pads are connected by a conductive bonding material D such as solder or conductive resin adhesive. 241 and 251 are electrically and mechanically connected to each other. Then, although not shown, the metal lid and the metal ring 23 of the package are hermetically sealed by joining means such as seam welding. The hermetic sealing means may use a welding method such as an electron beam. Further, the quartz vibrating plate is not limited to the tuning fork type, but may be a rectangular one as shown in the first embodiment. The piezoelectric vibration plate is not limited to a crystal vibration plate, but may be another piezoelectric single crystal plate or a piezoelectric ceramic plate.

【0019】また、本発明の第2の実施形態では、水晶
振動板3を搭載する段差部を2つに分け、各段差部2
4,25の間の溝26を構成したことにより、前記導電
性接合材Dの毛細管現象を抑制し、各引出端子間の短絡
を防止している。
Further, in the second embodiment of the present invention, the step portion on which the quartz vibrating plate 3 is mounted is divided into two, and each step portion 2
By forming the groove 26 between 4 and 25, the capillary phenomenon of the conductive bonding material D is suppressed, and a short circuit between the lead terminals is prevented.

【0020】次に、本発明の第3の実施形態について、
表面実装型の水晶振動フィルタを例にとり、図面を参照
して説明する。図5は第3の実施の形態を示す分解斜視
図、図6は図5の水晶振動板を搭載した状態の平面図で
ある。第1,第2の実施の形態と同じ構成部分について
は同番号を用いて説明した。
Next, regarding a third embodiment of the present invention,
A description will be given with reference to the drawings, taking a surface mount type crystal vibration filter as an example. FIG. 5 is an exploded perspective view showing the third embodiment, and FIG. 6 is a plan view showing a state where the quartz vibrating plate of FIG. 5 is mounted. The same components as those in the first and second embodiments have been described using the same numbers.

【0021】水晶振動板1は、ATカット水晶振動板か
らなり、矩形状に加工されている。その裏面には入出力
電極(励振電極)13,14が形成され、これらの入出
力電極を水晶振動板の長辺方向の両端部に導出する引出
電極13a,14aが真空蒸着法等の手段にて形成され
ている。また、その表面にはアース電極(励振電極)1
5が形成され、このアース電極を水晶振動板の長辺方向
の両端部に導出する引出電極15a,15bが真空蒸着
法等の手段にて形成されている。
The quartz vibrating plate 1 is formed of an AT-cut quartz vibrating plate and has a rectangular shape. Input / output electrodes (excitation electrodes) 13 and 14 are formed on the back surface, and extraction electrodes 13a and 14a for leading these input / output electrodes to both ends in the long side direction of the quartz plate are formed by means such as a vacuum evaporation method. It is formed. A ground electrode (excitation electrode) 1 is provided on the surface.
The extraction electrodes 15a and 15b for leading the ground electrode to both ends in the long side direction of the quartz vibrating plate are formed by means such as a vacuum evaporation method.

【0022】パッケージ2は全体として上部が開口した
直方体形状であり、セラミックからなる底面としてのパ
ッケージ基体20と壁面としてのパッケージ周壁21、
前記水晶振動板を搭載する段差部22,26とから構成
されている。そして、前記段差部が形成された内側壁面
は、その長辺方向の両端部中央に凸部211,217が
形成され、その短辺方向の両端部に前記圧電振動板の短
辺幅寸法に対応して一部分を突出させた幅狭部212,
213,218,219が形成されている。前記幅狭部
間の幅寸法は、前記水晶振動板の短辺方向の幅寸法より
若干大きく形成されており、前記水晶振動板の1.05
倍から1.15倍の幅寸法が好ましい。これは、前記比
率より小さくなると、水晶振動板のパッケージへの挿
入、位置決めがきつくなり、作業性も低下する。一方、
前記比率より大きくなると、水晶振動板の短辺方向のず
れ、傾きの悪影響を受けやすくなるためである。また、
前記段差部の上面には、電極パッド221,222,2
61,262が形成されており、前記周壁21の上部に
は、気密接合に用いるコバール等からなる金属リング2
3が形成されている。前記パッケージ2は、セラミック
の積層技術を用いて、一体的に焼成成形されている。な
お、金属リング23にはニッケル等の金属がメッキされ
ている。
The package 2 has a rectangular parallelepiped shape with an open top as a whole, and includes a package base 20 made of ceramic as a bottom surface and a package peripheral wall 21 made as a wall surface.
And step portions 22 and 26 on which the quartz plate is mounted. The inner wall surface on which the step portion is formed has convex portions 211 and 217 formed at the centers of both ends in the long side direction, and the both end portions in the short side direction correspond to the short side width dimension of the piezoelectric vibration plate. The narrow part 212 with a part projected,
213, 218 and 219 are formed. The width between the narrow portions is formed to be slightly larger than the width in the short side direction of the quartz plate, and 1.05
Double to 1.15 times the width is preferred. If the ratio is smaller than the above-mentioned ratio, the insertion and positioning of the quartz plate into the package become difficult, and the workability is reduced. on the other hand,
If the ratio is larger than the above-mentioned ratio, the quartz vibrating plate is liable to be adversely affected by displacement and inclination in the short side direction. Also,
The electrode pads 221, 222, 2
61, 262, and a metal ring 2 made of Kovar or the like used for hermetic bonding is provided on the upper part of the peripheral wall 21.
3 are formed. The package 2 is integrally formed by firing using a ceramic lamination technique. The metal ring 23 is plated with a metal such as nickel.

【0023】その後、水晶振動板1を段差部22,26
に搭載し、はんだ、導電性樹脂接着剤等の導電性接合材
Dにより、前記引出電極13aと前記電極パッド22
2、前記引出電極14aと前記電極パッド261、なら
びに前記引出電極15a,15bと前記電極パッド22
1,262を、各々電気的機械的接合している。そし
て、図示していないが金属フタとパッケージの金属リン
グ23とをシーム溶接等の接合手段により気密的に封止
を行う。なお、当該気密封止手段は、電子ビーム等の溶
接法を用いてもよい。また、水晶振動板は水晶フィルタ
用の構成(表裏面のうち、一方の主面に入出力電極、他
方の主面にアース電極)に限らず、第1の実施形態に示
すような水晶振動子用の構成(表裏面のうち、各主面に
励振電極)を採用し、当該水晶振動板の長辺方向両端部
に引出電極を導出した構成であってもよい。そして、圧
電振動板は水晶振動板のみならず、他の圧電単結晶板、
圧電セラミック板を用いてもよい。さらに、前記幅狭部
の平面形状は、図示したような方形状に限らずに、半円
形状、半楕円形状、三角形状であってもよい。
Thereafter, the quartz vibrating plate 1 is connected to the step portions 22, 26.
And the lead-out electrode 13a and the electrode pad 22 are connected by a conductive bonding material D such as solder or conductive resin adhesive.
2. The extraction electrode 14a and the electrode pad 261, and the extraction electrodes 15a and 15b and the electrode pad 22.
1 and 262 are each electrically and mechanically joined. Then, although not shown, the metal lid and the metal ring 23 of the package are hermetically sealed by joining means such as seam welding. The hermetic sealing means may use a welding method such as an electron beam. Further, the crystal vibrating plate is not limited to the configuration for the crystal filter (the input / output electrodes are provided on one main surface and the ground electrode is provided on the other main surface of the front and back surfaces). (Excitation electrodes on each main surface of the front and back surfaces) may be adopted, and the extraction electrodes may be extended to both ends in the long side direction of the quartz plate. And the piezoelectric diaphragm is not only a quartz diaphragm, but also other piezoelectric single crystal plates,
A piezoelectric ceramic plate may be used. Further, the planar shape of the narrow portion is not limited to the rectangular shape as shown, but may be a semicircular shape, a semielliptical shape, or a triangular shape.

【0024】なお、本発明の第1の実施形態、ならびに
本発明の第3の実施形態でも、前記第2の実施形態に示
すように、水晶振動板1を搭載する各段差部を2つに分
け、各段差部の電極パッド間に溝を構成してもよい。こ
のような構成にすれば、各電極パッド間の表面的な距離
が増して、前記導電性接合材D(はんだ、導電性樹脂接
着剤)の毛細管現象を抑制し、各電極パッド、あるいは
引出端子間の短絡をより一層防止することができる。ま
た、本発明の第1の形態、ならびに本発明の第2の実施
形態に示されるように、前記水晶振動板が、片持ち保持
構造のものは、振動に影響しない範囲にて、前記幅狭部
の長辺方向の長さ寸法を大きく形成し、前記水晶振動板
との接触領域を確保することで、傾きが生じにくくなる
ため、水晶振動板の搭載精度が向上する。
In the first embodiment of the present invention and the third embodiment of the present invention, as shown in the second embodiment, each step portion on which the quartz plate 1 is mounted is reduced to two. Alternatively, a groove may be formed between the electrode pads of each step. According to such a configuration, the surface distance between the electrode pads is increased, the capillary phenomenon of the conductive bonding material D (solder, conductive resin adhesive) is suppressed, and each electrode pad or lead terminal is provided. A short circuit between them can be further prevented. Further, as shown in the first embodiment of the present invention and the second embodiment of the present invention, when the quartz vibrating plate has a cantilever holding structure, the quartz vibrating plate has the narrow width as long as it does not affect vibration. By forming the length dimension of the portion in the long side direction to be large and securing a contact area with the quartz vibrating plate, it becomes difficult for the inclination to occur, so that the mounting accuracy of the quartz vibrating plate is improved.

【0025】[0025]

【発明の効果】請求項1によれば、圧電振動板の短辺方
向のずれ、傾きが生じにくくなるため、パッケージに受
けた衝撃が、直接、圧電振動板につたわることがない。
従って、圧電振動板の割れや、欠け等の電気的特性の劣
化を防止することができる。
According to the first aspect of the present invention, the displacement and inclination of the piezoelectric vibrating plate in the short side direction are less likely to occur, so that the shock received on the package does not directly touch the piezoelectric vibrating plate.
Therefore, it is possible to prevent deterioration of the electrical characteristics such as cracking and chipping of the piezoelectric diaphragm.

【0026】さらに、圧電振動板は、当該圧電振動板の
短辺方向の両端部分を、前記空隙にバランスよく位置決
めされるとともに、前記空隙には、前記段差部に形成さ
れた電極パッドと前記圧電振動板とを電気的機械的に接
合ずる導電性接合材が流れ込み、当該導電性接合材の塗
布状態を認識できるようになる。従って、圧電振動板と
電極パッドを電気的機械的に接続する導電性接合材の塗
布量が多すぎたり、当該導電性接合材の塗布量がバラツ
クことにより起因していた、短絡事故や、CI値の劣化
等、電気的特性の劣化を防止することができる。また、
圧電振動板と電極パッドを電気的機械的に接続する導電
性接合材の塗布量が少なすぎることにより起因してい
た、CI値が劣化等の電気的特性の劣化、ならびに導電
性接合材にクラックが生じ、圧電振動板がはずれるなど
機械的特性の劣化を防止することができる。
In the piezoelectric vibrating plate, both ends in the short side direction of the piezoelectric vibrating plate are positioned with good balance in the gap, and the electrode pad formed in the step portion and the piezoelectric vibrating plate are positioned in the gap. The conductive bonding material that electrically and mechanically bonds to the diaphragm flows in, and the application state of the conductive bonding material can be recognized. Therefore, the amount of the conductive bonding material that electrically and mechanically connects the piezoelectric vibrating plate and the electrode pad is applied too much, or the applied amount of the conductive bonding material varies, resulting in a short circuit accident or CI. It is possible to prevent the electrical characteristics from deteriorating such as the value deteriorating. Also,
Deterioration of electrical characteristics such as deterioration of CI value and cracking of the conductive bonding material, which were caused by too little application amount of the conductive bonding material that electrically and mechanically connects the piezoelectric vibrating plate and the electrode pad. Is generated, and deterioration of mechanical characteristics such as detachment of the piezoelectric diaphragm can be prevented.

【0027】以上、圧電振動デバイスの小型化、圧電振
動板の搭載が容易に行えるパッケージ内の電極パッドに
直接搭載する構成において、圧電振動板の搭載位置決
め、導電性接合材の塗布状態の確認ついて、より精度よ
く行え、表面実装型圧電振動デバイスの信頼性を向上さ
せることができる。
As described above, in the configuration in which the size of the piezoelectric vibration device is reduced and the piezoelectric vibration plate is easily mounted on the electrode pad in the package, the mounting position of the piezoelectric vibration plate and the confirmation of the application state of the conductive bonding material are described. It can be performed more accurately, and the reliability of the surface mount type piezoelectric vibration device can be improved.

【0028】請求項2によれば、上記作用効果に加え、
前記内側壁面の凸部は、導電性接合材が両端の空隙間で
流れ出すのを規制し、長辺方向の一端部のみに導出され
た電極間の短絡を防止することができる。
According to the second aspect, in addition to the above functions and effects,
The protrusion on the inner wall surface restricts the conductive bonding material from flowing out in the gaps at both ends, and can prevent a short circuit between the electrodes led out only to one end in the long side direction.

【0029】請求項3によれば、導電性接合材としては
んだを用いた場合、はんだ塗布状態、あるいははんだ溶
融状態を認識することにより、いも付け、はんだ流れす
ぎ、はんだ不足といったはんだ付け不良を防止すること
ができる。
According to the third aspect, when the solder is used as the conductive bonding material, the solder application state or the molten state of the solder is recognized, thereby preventing defective soldering such as staking, excessive solder flow, and insufficient solder. can do.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明による第1の実施の形態を示す分解斜視
図。
FIG. 1 is an exploded perspective view showing a first embodiment according to the present invention.

【図2】図1の構成において、水晶振動板を搭載した状
態の平面図。
FIG. 2 is a plan view of the configuration of FIG. 1 with a crystal diaphragm mounted.

【図3】本発明による第2の実施の形態を示す分解斜視
図。
FIG. 3 is an exploded perspective view showing a second embodiment according to the present invention.

【図4】図3の構成において、水晶振動板を搭載した状
態の平面図。
FIG. 4 is a plan view of the configuration of FIG. 3 with a crystal diaphragm mounted.

【図5】本発明による第3の実施の形態を示す平面図。FIG. 5 is a plan view showing a third embodiment according to the present invention.

【図6】図5の構成において、水晶振動板を搭載した状
態の平面図。
FIG. 6 is a plan view showing a state in which a quartz plate is mounted in the configuration of FIG. 5;

【符号の説明】[Explanation of symbols]

1,3・・・水晶振動板(圧電振動板) 2・・・パッケージ 22,24,25,26・・・段差部 211,214,217・・・凸部 212,213,215,216,218,219・・
・幅狭部 D・・・導電性接合材(はんだ、導電性樹脂接着剤)
1, 3: quartz vibrating plate (piezoelectric vibrating plate) 2: package 22, 24, 25, 26: step portion 211, 214, 217: convex portion 212, 213, 215, 216, 218 , 219 ...
・ Narrow part D: Conductive bonding material (solder, conductive resin adhesive)

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 圧電振動板を収容するための底面と内側
壁面、ならびに当該圧電振動板の少なくとも長辺方向の
一端が支持される段差部とを有し、上部が開口したパッ
ケージと、 前記段差部に形成された電極パッドと導電性接合材を介
して電気的に接続され、表裏面に励振電極が形成された
圧電振動板とからなる表面実装型圧電振動デバイスにお
いて、 前記段差部の内側壁面には、前記圧電振動板の短辺方向
の中央部に接する凸部と、前記圧電振動板の短辺幅寸法
に対応した幅狭部とが形成されており、 前記圧電振動板の短辺方向の中央部を、前記幅狭部によ
り、前記段差部の内側壁面の凸部に位置されるように位
置決めし、 前記圧電振動板の短辺方向の中央部を、前記段差部の内
側壁面の凸部に接触させることで、当該圧電振動板の短
辺方向の両端に段差部の空隙を形成し、 前記段差部の空隙に、導電性接合材が流れ込み、当該導
電性接合材の塗布状態を確認できるようにした ことを特
徴とする表面実装型圧電振動デバイス。
1. A package having a bottom surface and an inner wall surface for accommodating a piezoelectric vibrating plate, and a step portion on which at least one end in a long side direction of the piezoelectric vibrating plate is supported; A surface-mount type piezoelectric vibration device electrically connected to an electrode pad formed on the portion via a conductive bonding material, and a piezoelectric vibration plate having excitation electrodes formed on the front and back surfaces, wherein an inner wall surface of the step portion is provided. In the short side direction of the piezoelectric diaphragm
And the convex portion in contact with the central portion of the are and a narrow portion corresponding to the short side width of the piezoelectric vibrating plate is formed, the central portion of the short side of the piezoelectric vibrating plate, the narrow portion
Position so as to be located on the convex portion of the inner wall surface of the step portion.
-Decided tanning, the central portion of the short side of the piezoelectric vibrating plate, of the step portion
By contacting the protrusion on the side wall surface, the short-
A gap at the step is formed at both ends in the side direction, and the conductive bonding material flows into the gap at the step, and
A surface-mount type piezoelectric vibration device characterized in that the application state of an electrically conductive bonding material can be checked .
【請求項2】 前記圧電振動板が、長辺方向の一端部の
みに電極が導出された片側電気的接続構造であることを
特徴とする特許請求項1記載の表面実装型圧電振動デバ
イス。
2. The surface-mounted piezoelectric vibration device according to claim 1, wherein the piezoelectric vibration plate has a one-sided electrical connection structure in which electrodes are led out only at one end in a long side direction.
【請求項3】 前記導電性接合材が、はんだであること
を特徴とする特許請求項1,2記載の表面実装型圧電振
動デバイス。
3. The surface mount type piezoelectric vibration device according to claim 1, wherein the conductive bonding material is solder.
JP19373398A 1998-06-23 1998-06-23 Surface mount type piezoelectric vibration device Expired - Fee Related JP3303292B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19373398A JP3303292B2 (en) 1998-06-23 1998-06-23 Surface mount type piezoelectric vibration device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19373398A JP3303292B2 (en) 1998-06-23 1998-06-23 Surface mount type piezoelectric vibration device

Publications (2)

Publication Number Publication Date
JP2000013178A JP2000013178A (en) 2000-01-14
JP3303292B2 true JP3303292B2 (en) 2002-07-15

Family

ID=16312913

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Application Number Title Priority Date Filing Date
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Country Link
JP (1) JP3303292B2 (en)

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* Cited by examiner, † Cited by third party
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JP4548012B2 (en) * 2003-12-11 2010-09-22 株式会社大真空 Piezoelectric vibration device
JP2006094165A (en) * 2004-09-24 2006-04-06 Citizen Miyota Co Ltd Piezoelectric vibrator
JP2014057236A (en) 2012-09-13 2014-03-27 Seiko Epson Corp Vibration piece, vibrator, oscillator, electronic apparatus and moving body
CN105144578B (en) 2013-05-01 2018-05-11 株式会社村田制作所 Crystal vibrating device and its manufacture method

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