JPH078147Y2 - 吸着装置 - Google Patents
吸着装置Info
- Publication number
- JPH078147Y2 JPH078147Y2 JP11703890U JP11703890U JPH078147Y2 JP H078147 Y2 JPH078147 Y2 JP H078147Y2 JP 11703890 U JP11703890 U JP 11703890U JP 11703890 U JP11703890 U JP 11703890U JP H078147 Y2 JPH078147 Y2 JP H078147Y2
- Authority
- JP
- Japan
- Prior art keywords
- suction
- adsorption
- suction device
- vacuum pump
- decompression chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001179 sorption measurement Methods 0.000 title claims description 19
- 230000006837 decompression Effects 0.000 claims description 14
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11703890U JPH078147Y2 (ja) | 1990-11-07 | 1990-11-07 | 吸着装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11703890U JPH078147Y2 (ja) | 1990-11-07 | 1990-11-07 | 吸着装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0473483U JPH0473483U (en, 2012) | 1992-06-26 |
JPH078147Y2 true JPH078147Y2 (ja) | 1995-03-01 |
Family
ID=31864911
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11703890U Expired - Lifetime JPH078147Y2 (ja) | 1990-11-07 | 1990-11-07 | 吸着装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH078147Y2 (en, 2012) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6829383B2 (ja) * | 2017-02-17 | 2021-02-10 | 三菱電機株式会社 | 把持装置、把持システム及び制御装置 |
-
1990
- 1990-11-07 JP JP11703890U patent/JPH078147Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0473483U (en, 2012) | 1992-06-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |