JPH078061Y2 - 洗浄装置におけるオゾン濃度コントロール構造 - Google Patents

洗浄装置におけるオゾン濃度コントロール構造

Info

Publication number
JPH078061Y2
JPH078061Y2 JP4628889U JP4628889U JPH078061Y2 JP H078061 Y2 JPH078061 Y2 JP H078061Y2 JP 4628889 U JP4628889 U JP 4628889U JP 4628889 U JP4628889 U JP 4628889U JP H078061 Y2 JPH078061 Y2 JP H078061Y2
Authority
JP
Japan
Prior art keywords
ozone
cleaning
outside
ultraviolet lamp
tray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP4628889U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02137981U (enrdf_load_stackoverflow
Inventor
隆一 杉田
和広 寺田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
iwasakidenki
Original Assignee
iwasakidenki
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by iwasakidenki filed Critical iwasakidenki
Priority to JP4628889U priority Critical patent/JPH078061Y2/ja
Publication of JPH02137981U publication Critical patent/JPH02137981U/ja
Application granted granted Critical
Publication of JPH078061Y2 publication Critical patent/JPH078061Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
JP4628889U 1989-04-21 1989-04-21 洗浄装置におけるオゾン濃度コントロール構造 Expired - Fee Related JPH078061Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4628889U JPH078061Y2 (ja) 1989-04-21 1989-04-21 洗浄装置におけるオゾン濃度コントロール構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4628889U JPH078061Y2 (ja) 1989-04-21 1989-04-21 洗浄装置におけるオゾン濃度コントロール構造

Publications (2)

Publication Number Publication Date
JPH02137981U JPH02137981U (enrdf_load_stackoverflow) 1990-11-16
JPH078061Y2 true JPH078061Y2 (ja) 1995-03-01

Family

ID=31561240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4628889U Expired - Fee Related JPH078061Y2 (ja) 1989-04-21 1989-04-21 洗浄装置におけるオゾン濃度コントロール構造

Country Status (1)

Country Link
JP (1) JPH078061Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH02137981U (enrdf_load_stackoverflow) 1990-11-16

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