JPH02137981U - - Google Patents

Info

Publication number
JPH02137981U
JPH02137981U JP4628889U JP4628889U JPH02137981U JP H02137981 U JPH02137981 U JP H02137981U JP 4628889 U JP4628889 U JP 4628889U JP 4628889 U JP4628889 U JP 4628889U JP H02137981 U JPH02137981 U JP H02137981U
Authority
JP
Japan
Prior art keywords
cleaning
ozone
tray
reflector
pores
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4628889U
Other languages
English (en)
Japanese (ja)
Other versions
JPH078061Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4628889U priority Critical patent/JPH078061Y2/ja
Publication of JPH02137981U publication Critical patent/JPH02137981U/ja
Application granted granted Critical
Publication of JPH078061Y2 publication Critical patent/JPH078061Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
JP4628889U 1989-04-21 1989-04-21 洗浄装置におけるオゾン濃度コントロール構造 Expired - Fee Related JPH078061Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4628889U JPH078061Y2 (ja) 1989-04-21 1989-04-21 洗浄装置におけるオゾン濃度コントロール構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4628889U JPH078061Y2 (ja) 1989-04-21 1989-04-21 洗浄装置におけるオゾン濃度コントロール構造

Publications (2)

Publication Number Publication Date
JPH02137981U true JPH02137981U (enrdf_load_stackoverflow) 1990-11-16
JPH078061Y2 JPH078061Y2 (ja) 1995-03-01

Family

ID=31561240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4628889U Expired - Fee Related JPH078061Y2 (ja) 1989-04-21 1989-04-21 洗浄装置におけるオゾン濃度コントロール構造

Country Status (1)

Country Link
JP (1) JPH078061Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH078061Y2 (ja) 1995-03-01

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees