JPH0779498A - 音響変換器用のｚ−軸導電性積層裏当て層 - Google Patents
音響変換器用のｚ−軸導電性積層裏当て層Info
- Publication number
- JPH0779498A JPH0779498A JP6201298A JP20129894A JPH0779498A JP H0779498 A JPH0779498 A JP H0779498A JP 6201298 A JP6201298 A JP 6201298A JP 20129894 A JP20129894 A JP 20129894A JP H0779498 A JPH0779498 A JP H0779498A
- Authority
- JP
- Japan
- Prior art keywords
- acoustic
- conductor
- transducer
- conductors
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims abstract description 114
- 239000000463 material Substances 0.000 claims abstract description 34
- 239000011248 coating agent Substances 0.000 abstract description 33
- 238000000576 coating method Methods 0.000 abstract description 33
- 239000011159 matrix material Substances 0.000 abstract description 6
- 238000006243 chemical reaction Methods 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 110
- 239000011295 pitch Substances 0.000 description 21
- 238000000034 method Methods 0.000 description 15
- 238000004519 manufacturing process Methods 0.000 description 13
- 239000004593 Epoxy Substances 0.000 description 7
- 238000000059 patterning Methods 0.000 description 7
- 238000003491 array Methods 0.000 description 5
- 238000013016 damping Methods 0.000 description 5
- 230000002238 attenuated effect Effects 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 230000001965 increasing effect Effects 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- YACLQRRMGMJLJV-UHFFFAOYSA-N chloroprene Chemical compound ClC(=C)C=C YACLQRRMGMJLJV-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000002592 echocardiography Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000012285 ultrasound imaging Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
- B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
- B06B1/0681—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface and a damping structure
- B06B1/0685—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface and a damping structure on the back only of piezoelectric elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
- B06B1/0629—Square array
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10300793A | 1993-08-05 | 1993-08-05 | |
| US103,007 | 1993-08-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0779498A true JPH0779498A (ja) | 1995-03-20 |
Family
ID=22292863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6201298A Pending JPH0779498A (ja) | 1993-08-05 | 1994-08-03 | 音響変換器用のｚ−軸導電性積層裏当て層 |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP0637470A3 (fr) |
| JP (1) | JPH0779498A (fr) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005030055A1 (fr) * | 2003-09-30 | 2005-04-07 | Matsushita Electric Industrial Co., Ltd. | Sonde a ultrasons |
| JP2006061696A (ja) * | 2004-08-27 | 2006-03-09 | General Electric Co <Ge> | 熱伝導性を高めた超音波トランスデューサ |
| WO2006038632A1 (fr) * | 2004-10-05 | 2006-04-13 | Kabushiki Kaisha Toshiba | Sonde a ultrasons |
| JP2009153851A (ja) * | 2007-12-27 | 2009-07-16 | Konica Minolta Medical & Graphic Inc | 超音波診断装置およびそれに用いる配線の製造方法 |
| WO2010090095A1 (fr) | 2009-02-05 | 2010-08-12 | 株式会社林原生物化学研究所 | Cellobiose 2-épimérase, procédé de production de celle-ci et utilisation de celle-ci |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5629906A (en) * | 1995-02-15 | 1997-05-13 | Hewlett-Packard Company | Ultrasonic transducer |
| FR2740933B1 (fr) * | 1995-11-03 | 1997-11-28 | Thomson Csf | Sonde acoustique et procede de realisation |
| US5732706A (en) * | 1996-03-22 | 1998-03-31 | Lockheed Martin Ir Imaging Systems, Inc. | Ultrasonic array with attenuating electrical interconnects |
| WO2002040184A2 (fr) * | 2000-11-15 | 2002-05-23 | Koninklijke Philips Electronics N.V. | Reseaux de transducteurs ultrasonores a plusieurs dimensions |
| KR101296244B1 (ko) | 2012-01-31 | 2013-08-13 | 삼성메디슨 주식회사 | 초음파 프로브의 흡음 소자, 초음파 프로브의 흡음층 및 그 제작 방법 |
| CN108461623B (zh) * | 2018-01-23 | 2024-05-14 | 曼图电子(上海)有限公司 | 一种用于阵列探头的背衬材料及其制造方法 |
| JP6876645B2 (ja) * | 2018-03-15 | 2021-05-26 | 株式会社日立製作所 | 超音波プローブ及びその製造方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3412665A1 (de) * | 1984-04-04 | 1985-10-17 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zur auslese eines zweidimensionalen ladungsbildes mittels eines arrays |
| EP0256378B1 (fr) * | 1986-08-11 | 1991-05-02 | Siemens Aktiengesellschaft | Dispositif de lecture d'une image de charge bidimensionnelle |
| JP2545861B2 (ja) * | 1987-06-12 | 1996-10-23 | 富士通株式会社 | 超音波探触子の製造方法 |
| US5329498A (en) * | 1993-05-17 | 1994-07-12 | Hewlett-Packard Company | Signal conditioning and interconnection for an acoustic transducer |
-
1994
- 1994-08-02 EP EP94305729A patent/EP0637470A3/fr not_active Withdrawn
- 1994-08-03 JP JP6201298A patent/JPH0779498A/ja active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005030055A1 (fr) * | 2003-09-30 | 2005-04-07 | Matsushita Electric Industrial Co., Ltd. | Sonde a ultrasons |
| JP2005103078A (ja) * | 2003-09-30 | 2005-04-21 | Matsushita Electric Ind Co Ltd | 超音波探触子 |
| US7755255B2 (en) | 2003-09-30 | 2010-07-13 | Panasonic Corporation | Ultrasonic probe |
| JP4624659B2 (ja) * | 2003-09-30 | 2011-02-02 | パナソニック株式会社 | 超音波探触子 |
| JP2006061696A (ja) * | 2004-08-27 | 2006-03-09 | General Electric Co <Ge> | 熱伝導性を高めた超音波トランスデューサ |
| WO2006038632A1 (fr) * | 2004-10-05 | 2006-04-13 | Kabushiki Kaisha Toshiba | Sonde a ultrasons |
| JP2006102135A (ja) * | 2004-10-05 | 2006-04-20 | Toshiba Corp | 超音波プローブ |
| US7348713B2 (en) | 2004-10-05 | 2008-03-25 | Kabushiki Kaisha Toshiba | Ultrasonic probe |
| JP4693386B2 (ja) * | 2004-10-05 | 2011-06-01 | 株式会社東芝 | 超音波プローブ |
| JP2009153851A (ja) * | 2007-12-27 | 2009-07-16 | Konica Minolta Medical & Graphic Inc | 超音波診断装置およびそれに用いる配線の製造方法 |
| WO2010090095A1 (fr) | 2009-02-05 | 2010-08-12 | 株式会社林原生物化学研究所 | Cellobiose 2-épimérase, procédé de production de celle-ci et utilisation de celle-ci |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0637470A3 (fr) | 1995-11-22 |
| EP0637470A2 (fr) | 1995-02-08 |
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