JPH077667Y2 - 高真空圧バルブ - Google Patents

高真空圧バルブ

Info

Publication number
JPH077667Y2
JPH077667Y2 JP1990017117U JP1711790U JPH077667Y2 JP H077667 Y2 JPH077667 Y2 JP H077667Y2 JP 1990017117 U JP1990017117 U JP 1990017117U JP 1711790 U JP1711790 U JP 1711790U JP H077667 Y2 JPH077667 Y2 JP H077667Y2
Authority
JP
Japan
Prior art keywords
valve
indenter
high vacuum
jacket
vacuum pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990017117U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03107588U (enrdf_load_stackoverflow
Inventor
健二 藁谷
恒雄 石垣
Original Assignee
エスエムシー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エスエムシー株式会社 filed Critical エスエムシー株式会社
Priority to JP1990017117U priority Critical patent/JPH077667Y2/ja
Publication of JPH03107588U publication Critical patent/JPH03107588U/ja
Application granted granted Critical
Publication of JPH077667Y2 publication Critical patent/JPH077667Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Lift Valve (AREA)
  • Details Of Valves (AREA)
JP1990017117U 1990-02-22 1990-02-22 高真空圧バルブ Expired - Lifetime JPH077667Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990017117U JPH077667Y2 (ja) 1990-02-22 1990-02-22 高真空圧バルブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990017117U JPH077667Y2 (ja) 1990-02-22 1990-02-22 高真空圧バルブ

Publications (2)

Publication Number Publication Date
JPH03107588U JPH03107588U (enrdf_load_stackoverflow) 1991-11-06
JPH077667Y2 true JPH077667Y2 (ja) 1995-02-22

Family

ID=31520348

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990017117U Expired - Lifetime JPH077667Y2 (ja) 1990-02-22 1990-02-22 高真空圧バルブ

Country Status (1)

Country Link
JP (1) JPH077667Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200137371A (ko) * 2019-05-30 2020-12-09 주식회사 원익아이피에스 밸브조립체 및 그가 설치된 기판처리장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5968869U (ja) * 1982-11-01 1984-05-10 富士精工株式会社 環状メタルシ−ル部を有するバルブ
JPS6138270A (ja) * 1984-07-31 1986-02-24 Fuji Seikou Kk メタルシ−ルを有するゲ−ト弁
JPH0244171U (enrdf_load_stackoverflow) * 1988-09-21 1990-03-27

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200137371A (ko) * 2019-05-30 2020-12-09 주식회사 원익아이피에스 밸브조립체 및 그가 설치된 기판처리장치

Also Published As

Publication number Publication date
JPH03107588U (enrdf_load_stackoverflow) 1991-11-06

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term