JPH0773808A - Method and device for correcting crt black film - Google Patents

Abstract

PURPOSE:To provide a CRT black film correcting device with which a laser beam for correction is cast correctly to a position with defect. CONSTITUTION:A panel 11 is put in plane movement using an X-Y table 21, and the defect P is moved to under an objective lens. The lens and a camera 24 are moved up and down so that focusing is conducted. The table 21 is located by a control device 39, and judgement is made which sort of defect pattern it concerns using an image processing function. A rotation mechanism 34 is accordingly controlled, and from a plurality of holes 33 provided in an aperture 32, a one 33 having the corresponding shape is selected. A laser generating device 29 is actuated to oscillate laser beam. The wavelength of YAG laser (1064nm) is passed through a wavelength converter 30 to be turned into half the wavelength (532nm), and the while illumination light is permitted to penetrate a green filter 23 to make the wavelength around 532nm. The wavelength of the defect sensing illumination light is made approx. equal to that of the defect correcting laser beam, and the sensing point and correcting point can be made identical.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for repairing a black film of a cathode ray tube and an apparatus for repairing defects in a pattern of a black film formed on an inner surface of the cathode ray tube with regularity.

[0002]

2. Description of the Related Art Generally, in a manufacturing process of a color cathode ray tube panel, as shown in FIGS.
The black film 12 having a predetermined pattern is provided on the curved inner surface of the glass constituting the. And this black film 12
As shown in FIGS. 13 to 15, the pattern is a pattern in which a large number of circular holes 13 having a predetermined shape are regularly arranged. The resist coating step, the exposure step using the shadow mask, and the shadow mask are performed. It is formed on the inner surface of the panel 11 as described above, after the developing process after removal and the applying process of the doug.

In the process of forming such a pattern, as shown in FIGS.
Small-diameter holes P1, deformed holes P2, and non-holes P3 that are defects may occur. That is, FIG. 13 is a small hole P1 having a smaller diameter than the other holes 13 having a predetermined shape, FIG. 14 is a deformed hole P2, and FIG. 15 is a non-hole P3 in which the hole 13 is not formed in the portion where the hole 13 is formed. .

Such a small hole P1, a deformed hole P2 and a non-hole
Most of P3 is generated in the exposure process. That is, since exposure is performed through the shadow mask in the exposure step, for example, when the diameter of part of the holes of the shadow mask is smaller than the diameter of other normal holes, as shown in FIG.
Occurs. Further, if there is a foreign matter or the like during exposure, a deformed hole P2 is generated as shown in FIG. Further, if no holes are partially formed in the shadow mask, non-holes P3 occur as shown in FIG. As is well known, since three dots for each of the blue, green, and red phosphors are formed in one hole of the shadow mask, a defect occurs in the state shown in the figure.

The quality of the black film 12 thus constructed is usually inspected at the exit portion of the fluorescent screen coating machine. This inspection work is performed manually on the panel conveyor on the panel conveyor or on the light table unloaded from the panel conveyor. In this inspection work, for example, in the case of a normal display tube, the diameter of the hole 13 of the black film 12 is 90 μm to 1 μm.
Since it is 50 μm and the hole pitch is very thin from 120 μm to 220 μm, it takes a lot of time to find the small diameter hole P1, the deformed hole P2, or the non-hole P3, which is a defect, and the work is difficult, which puts a heavy burden on the operator. There is. Moreover, although the operator manually corrects the found defect using a correction needle or the like, it is difficult to correct and requires a lot of working time and skill.

As described above, since the manual defect detection work and the repair work require a great deal of labor, a camera such as a CCD is used to image the pattern of the black film 12 from the outer surface side of the panel 11 to detect the above-mentioned defects. Then, a method of irradiating the defective portion with laser light from the outer surface side to correct the defective portion is described in, for example, Japanese Patent Laid-Open No. 5-67431.

In the case of the method disclosed in Japanese Patent Application Laid-Open No. 5-67431, the panel 11 has its face surface facing upward, and the optical system provided below illuminates the panel 11 with visible light. The pattern of the black film 12 is imaged from the outer surface side of 11 and the defect is detected by inspecting the imaged image. In addition, the defective portion is irradiated with the laser light from the same direction as the imaging direction of the camera.

This correction method has a great effect in terms of labor saving without depending on the skill of the operator as compared with the conventional manual correction method, but on the other hand, it has the following problems.

First, as a laser used for correction,
Generally, a YAG laser is used, and its wavelength is near infrared rays of 1064 nm at room temperature. On the other hand, the image captured by the CCD camera for detecting defects is visible light, and the wavelength of this visible light is about 400 nm to 740 nm. As described above, when the wavelengths are greatly different, the refractive index of the glass forming the panel 11 is different. Therefore, when correcting the peripheral portion of the panel that is tilted with respect to the incident light, the CCD camera is used due to the difference in the refractive index. A deviation occurs between the detected defect position and the irradiation position of the correction laser light.

That is, as shown in FIG. 8, the normal line N at the point Q ₀ of the outer corner of the glass panel 11 having the thickness t.
, Shows the state of light incident at an incident angle α,
This light travels through the glass at a refraction angle β due to the refractive index n of the glass. The refractive index n differs depending on the wavelength of incident light. For example, wavelength λ = 589n
At m, the refractive index n = 1.536, but the wavelength λ = 10
At 63 nm, the refractive index n = 1.526.

Further, FIG. 9 is an enlarged representation of the relationship of FIG. 8 in an approximate manner, in which it is assumed that the glass having a plate thickness tmm is tilted by α degrees and light is incident from directly above the point Q _0. is doing.

Here, assuming that the point where the light of the incident angle α goes straight through the glass and reaches the inner surface of the panel 11 is A ₀ , it actually reaches the inner surface of the panel 11 due to the refractive index n of the glass. The point is A _{1 at} the wavelength λ = 589 nm and the wavelength λ = 1.
At 063 nm, it becomes A ₂ , and these reaching points do not match. Then, these deviation amounts δ = | A ₂ −A ₁ |
For example, glass thickness t = 10 mm, incident angle α = 16 °
Then, the shift amount δ is about 12 μm.

From the above results, even if a defect is detected by a CCD camera with visible light having a wavelength λ of 400 nm to 740 nm and the defect point is irradiated with laser light, the wavelength of this laser light (λ = 1064 nm) is better. Therefore, the detection point and the correction point are displaced from each other due to the influence of the refractive index n of the glass. Furthermore, panels for color cathode ray tubes
No. 11 has spherical surfaces on both the inner surface and the outer surface, and since the curvature increases toward the panel corner side, the amount of deviation described above also increases, and accurate correction cannot be performed.

The end face of the laser beam, which is a cross section perpendicular to the optical axis, has a circular shape, but since the peripheral portion of the panel 11 is largely inclined, the panel 11 is affected by the refractive index and inclination of the glass. The defective portion on the inner surface of the laser is irradiated with an elliptical laser beam instead of a circular shape.

For example, in FIG. 10, when the defect P in the peripheral portion of the panel 11 is repaired, the laser beam having the diameter φC is changed to that shown in FIG.
As shown by 8, after passing through the objective lens 15, the panel 11
The black film 12 formed inside by refracting is trimmed. At this time, the trimmed range is different between the AA cross section and the BB cross section in FIG. 10. That is, assuming that the trimming length of the AA cross section shown in FIG. 18 having almost no inclination is a, B- shown in FIG.
The trimming length of the B section is shortened to b. For this reason,
As shown in FIG. 20, when the diameter of the laser beam is φC, the trimming shape is, as shown in FIG. 21, the major axis a> the minor axis b.
Becomes an elliptical shape. Therefore, as shown in FIG. 16, when the end face shape of the laser light is made circular and each peripheral portion of the panel 11 is irradiated, the shape of the correction laser light at each defective portion is
As shown in FIG. 17, at each place, the direction connecting the defect position and the center of the panel 11 has a short elliptical shape.

For example, in a laser generator, the hole diameter of the aperture that determines the shape of the end face of laser light is φ1.2 m.
m, the magnification of the objective lens is X10, the distance from the aperture hole to the center of the objective lens is 390 mm, the focal length of the objective lens is 20 mm, and the thickness of the panel 11 is 10 mm. The shape of the panel 11 is a circle with a diameter of about 100 μm at the center of the panel 11, but the major axis is about 100 μm at a corner inclined by about 16 °.
m, the minor axis becomes an ellipse of about 70 to 80 μm.
That is, the panel 11 for the color cathode-ray tube is a spherical surface on both the inner surface and the outer surface, and since this tendency becomes larger particularly toward the corners of the panel 11, the laser light is largely deformed into an elliptical shape as described above. I can't fix it exactly.

[0017]

As described above, since there is a deviation between the defect position detected by the camera and the irradiation position of the correction laser light, or the laser light is deformed into an elliptical shape in the peripheral portion of the panel, It has a problem that cannot be fixed accurately.

An object of the present invention is to provide a method and apparatus for repairing a black film of a cathode ray tube in which a repair laser beam is not correctly irradiated to a defect position or the repair laser beam is not deformed into an elliptical shape. Especially.

[0019]

A black film repairing apparatus for a cathode ray tube according to claim 1 is a cathode ray tube having a black film pattern in which a large number of holes having a predetermined shape are regularly arranged on an inner surface of a face. On the other hand, the pattern is imaged by the imaging means provided on the face outer surface using the illumination light from the face inner surface, the defect of the pattern is detected based on the imaged image, and the position of the defect is specified, In the black film repairing device for a cathode ray tube that irradiates a laser beam from the outer surface of the face to the identified defect position, the wavelength of the illumination light and the wavelength of the laser beam are substantially equal to each other. It is set to the wavelength.

According to a second aspect of the present invention, there is provided a method for repairing a black film of a cathode ray tube, wherein the black film pattern, in which a large number of holes having a predetermined shape are arranged regularly, is formed on the inner surface of the face. In the method of repairing a black film of a cathode ray tube, which detects a defect in the pattern and specifies the position of the defect, irradiates the position of the specified defect with laser light from the outer surface of the face, and corrects the defect in the pattern. , The position of the identified defect is a position inclined with respect to the optical axis of the laser light, if the defect is a position inclined with respect to the optical axis of the laser light, the light of the laser light The cross-sectional shape orthogonal to the axis is an ellipse, and the major axis of the ellipse is set so as to be substantially coincident with the straight line connecting the position of the defect and the center of the surface of the cathode ray tube, and the laser beam is irradiated.

According to a third aspect of the present invention, there is provided a black film repairing device for a cathode ray tube, wherein a black film pattern in which a large number of holes having a predetermined shape are regularly arranged is formed on the inner surface of the face of the cathode ray tube. The defect of the pattern is detected and the position of the defect is specified, and the specified defect position is irradiated with laser light from the outer surface of the face by the laser light irradiation means to correct the defect of this pattern. In the film repair apparatus, a defect position determination means for determining whether the position of the specified defect is a position inclined with respect to the optical axis of the laser light, the laser light irradiation means, the defect is in the optical axis of the laser light. In the case of the inclined position, the cross-sectional shape orthogonal to the optical axis is an ellipse, and the long axis of this ellipse is substantially aligned with the straight line connecting the defect position and the center of the surface of the cathode ray tube. It is intended to irradiate the set laser light.

[0022]

A black film repairing device for a cathode ray tube according to claim 1,
Since the wavelength of the illumination light and the wavelength of the laser light are set to almost the same wavelength, there is no difference in the refractive index at the face of the cathode ray tube.Therefore, the position of the defect detected by the imaging means with the illumination light and the correction It is possible to make an accurate correction without deviating from the irradiation position of the laser beam.

In the method for repairing a black film of a cathode ray tube according to a second aspect of the present invention, it is judged whether the position of the specified defect is a position inclined with respect to the optical axis of the laser light, and the defect is detected with respect to the optical axis of the laser light. In the case of the inclined position, the cross-sectional shape orthogonal to the optical axis of the laser light is an ellipse, and the long axis of this ellipse is set so that it is almost coincident with the straight line connecting the position of the defect and the center of the surface of the cathode ray tube. Since the light is emitted, the correction laser light can be corrected accurately without being deformed into an elliptical shape even in the peripheral portion of the inclined cathode ray tube.

In the apparatus for repairing a black film of a cathode ray tube according to a third aspect of the present invention, the defect position judging means judges whether the position of the defect is a position inclined with respect to the optical axis of the laser beam, and the defect is in the optical axis of the laser beam. In the case of the position inclined with respect to the optical axis, the cross-sectional shape orthogonal to the optical axis is an ellipse, and the long axis of the ellipse is adjusted by the laser light irradiation means so that it is substantially coincident with the straight line connecting the defect position and the surface center of the cathode ray tube. Since the set laser light is emitted, the correction laser light can be accurately corrected even in the peripheral portion of the cathode ray tube having an inclination without being deformed into an elliptical shape.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a black film correcting device for a cathode ray tube according to the present invention will be described below with reference to the drawings.

In FIG. 1, a panel 11 for a color cathode ray tube as a cathode ray tube to be corrected is placed on an XY table 21 with its face surface facing upward so that it can be moved to any position on a plane. Supported by. And, this panel 11 has a curved inner surface made of glass,
A black film 12 having a predetermined pattern is formed. Further, as shown in FIGS. 13 to 15, the pattern of the black film 12 is formed by arranging a large number of circular holes 13 having a predetermined shape with regularity. It is formed through the exposure process, the development process without the shadow mask, and the doug coating process.

Further, an illuminating device 22 is arranged below the panel 11, and the illuminating device 22 has a filter 23, and illuminates the panel 11 from the inner surface of the face through the filter 23. . Here, the illumination light from the illumination device 22 is white light, but if green is used as the filter 23,
By passing through the filter 23, green monochromatic light having a peak wavelength around 532 nm is obtained.

Further, a camera 24 as an image pickup means is arranged above the panel 11 and an image pickup device such as a CC is provided.
D is used, and the objective lens 15 is arranged on the optical axis of the image pickup.
And, the pattern of the black film 12 irradiated with the illumination light is imaged through the half mirror 25 set at an angle of 45 degrees with respect to the optical axis. The objective lens 15 is configured to be movable in the vertical direction by a drive mechanism (not shown) so that the defect P on the inner surface of the panel 11 can be focused. The image picked up by the camera 24 is displayed on the monitor 26.

Further, 28 is a laser light irradiating means, which is provided on the optical path in the horizontal direction shown in the drawing which is branched by the half mirror 25, and the correcting laser light is directed toward this optical path. It has a laser generator 29 for outputting. A wavelength converter 30, a collimator lens 31, and an aperture 32 are sequentially arranged on the optical path of the laser light output from the laser generator 29.

Further, the wavelength converter 30 is a second harmonic unit, which halves the wavelength of the laser light emitted from the laser generator 29. That is, a YAG laser is used for correction and its wavelength is 10 at room temperature.
The wavelength is 64 nm, and when this laser light is passed through the wavelength converter 30, the wavelength is halved to 532 nm and becomes green light.

The aperture 32, which determines the cross-sectional area of the laser beam, is disc-shaped and has a plurality of holes 33 of different hole diameters formed along the circumference thereof.
The rotation mechanism 34 is configured to be rotatable so as to select any one of the above. That is, corresponding to the pattern of the black film 12 to be corrected formed on the inner surface of the panel 11, select the hole 33 corresponding to the size of the hole 13, through which the laser light from the collimator lens 31 passes. By doing so, laser light having a corresponding cross-sectional area is obtained.

Further, the laser generator 29 includes a laser power source 36.
And a cooling device 37, and these laser power sources 36
And driven by the cooling device 37. Further, the XY table 21 is connected to the motor driver 38. Then, the laser power supply 36, the motor driver 38, and the monitor 26 are
It is connected to the control device 39 and controlled to perform a predetermined operation.

Reference numeral 40 is a computer for overall control, and this computer 40 controls the control device 39 by inputting the program stored in the floppy disk 41 to the control device 39.

Next, the operation of the above embodiment will be described.

When detecting the defect P from the black film 12 having a predetermined pattern formed on the inner surface of the panel 11, first, the panel P
After placing 11 on the XY table 21, this XY table
The panel 11 is planarly moved by 21 and the defect P is detected by the objective lens.
Move below 15. In this state, the objective lens 15 and the camera 24 are moved in the vertical direction to focus. After that, the control device 39 positions the XY table 21, determines what kind of defect pattern the image processing function has, and controls the rotating mechanism 34 according to the result to control the plurality of holes 33 provided in the aperture 32. Select a hole 33 having a shape corresponding to the defect pattern from.

Next, the laser generator 29 is operated to oscillate laser light. This laser light passes through the wavelength converter 30, the collimator lens 31, and the hole 33 selected by the operation on the aperture 32, and then is redirected to the panel 11 side by the half mirror 25, passes through the objective lens 15, and further the panel 11. The black film 12 formed on the inner surface of the panel 11 is irradiated through the inside,
Correct the defective part of the pattern. In this case, the objective lens 15
The quality of the modified shape can be further improved by switching the magnification of 5 to 5 times for detection and 10 times for laser light irradiation.

Here, the half mirror 25 and the objective lens 15
Is used for both the detection of the defect P and the irradiation of the laser light, but if the wavelengths of the illumination light from the illumination device 22 and the laser light are different, the refraction of the glass forming the panel 11 is performed as described above. Due to the influence of the rate, the correction point due to the laser light deviates from the detection point. Therefore, in order to avoid such a problem, the wavelength of the laser light is set to a value almost equal to the wavelength of the illumination light. By doing so, since the respective refractive indexes in the panel 11 become equal to each other, the detection point and the correction point can be made to coincide with each other, and the defect can be corrected correctly.

There are the following two means for setting the wavelength of the laser light and the wavelength of the illumination light to substantially equal values.

First, in the first means, as described above, Y
The wavelength of the AG laser (1064 nm) is reduced to ½ wavelength (532 nm) by passing it through the wavelength converter 30, and the illumination light of white light is transmitted through the green filter 23 to become green monochromatic light. The peak wavelength is around 532 nm. With this setting, the wavelengths of the defect detection illumination light and the defect correction laser light are substantially equal to each other, and accurate correction can be performed by matching the detection point and the correction point.

In the second means, the wavelength converter 30 is not used, and the wavelength of the YAG laser is 1064 nm as it is.
As the illuminating light, a xenon lamp having a wavelength of 200 to 2000 nm is used, and the filter 23 is set to 900 to
The wavelength of 1000 nm is selectively transmitted and set to a value almost equal to the wavelength of laser light.

When a CCD camera is used as the camera 24, the sensitivity varies depending on the wavelength, and the wavelength that can be detected is 400 to 1000 nm. Therefore, the above 2
One of the means is also applicable from the viewpoint of the sensitivity of this CCD camera, and the black film 12 formed on the inner surface of the panel 11 is eliminated by eliminating the deviation between the detection position and the correction position due to the difference in refractive index.
The pattern can be corrected accurately.

Next, another embodiment will be described.

In this embodiment, when the defect generated in the pattern of the black film 12 formed on the inner surface of the panel 11 is corrected in the peripheral portion of the panel 11, the inclination of the panel surface causes This is to solve the problem that the trimming shape by the correction laser light becomes elliptical, and the trimming shape of the correction laser light is made substantially circular at any position on the panel 11.

The basic device structure for this purpose is the same as that shown in FIG. 1, and the correction laser light is oscillated from the laser generator 29, and then the wavelength converter 30, the collimator lens 31, and the aperture. Black film 12 formed on the inner surface of panel 11 through 32, half mirror 25 and objective lens 15.
The pattern is irradiated to correct the defect caused in this pattern.

In this case, as described above, when the defect position is in the peripheral portion of the panel 11, the trimming shape of the correction laser beam becomes an ellipse. Therefore, in order to solve this, the laser beam to the peripheral portion of the panel 11 is solved. Regarding light, the cross-sectional shape itself orthogonal to the optical axis of the laser light is an ellipse. Further, as shown in FIG. 5, the direction of the ellipse is defined by the direction of the major axis of the ellipse.
It is set so as to be along a straight line connecting the center O1 of the panel 11 from the positions of the defects Pa to Pd in the peripheral portion of the panel 11. By irradiating the laser beam having such a cross-sectional shape, as shown in FIG. 6, the trimming shape of the laser beam for each defect Pa to Pd in the peripheral portion becomes circular.

The laser light having such a cross-sectional shape is formed by the holes 33 of the aperture 32. The aperture 32 is shown in FIG.
As shown in FIG. 3, a plurality of holes 33 having a disk shape and having different shapes are formed along the circumference of the disk, and the holes 33 are rotatable about the rotation axis O2. And these multiple holes
The rotation mechanism 34 drives the rotation of any one of the 33 so as to position it at the laser beam transmission position OL.

Here, elliptical holes 33a, 33b, 33c, and 33d are provided as the holes 33 in order to make the cross-sectional shape of the laser light elliptical. Then, in order to make the directions of these ellipses correspond to the elliptical directions of the laser beams to the defects Pa to Pd in the peripheral portion of the panel shown in FIG. 5, as shown in FIG. 2, elliptical holes 33a, 33b.
, 33c, 33d are arranged in the vertical direction at an angle of 45 ° with respect to the center of rotation O2.

Also, there is little inclination near the center of the panel 11, and even if this portion is irradiated with the correction laser light, the black film 12
Since the trimming shape with respect to the pattern does not change, circular holes 33e, 33f with different hole diameters as in the conventional case are used.
, 33g, ... Are provided, and holes having an appropriate hole diameter corresponding to the pattern shape of the black film 12 are selected. Furthermore, the elliptical holes are not limited to the holes 33a, 33b, 33c, 33d, but may be different in size or different in the major axis direction.
If the various holes 33 are prepared, the correction accuracy is improved accordingly.

Here, various holes 33 provided in the aperture 32 are provided.
From among the elliptical holes 33a, 33b, 33c, 33d, or the circular holes 33e, 33f, 33g, ..., the defect is located in the peripheral portion of the panel 11 or in the other center. It depends on the nearby part. Further, the defect position determination means 43 provided in the control device 39 inputs the defect position information from the XY table 21, so that the defect position is a position inclined with respect to the optical axis of the laser beam, that is, the periphery of the panel 11. Judge whether it is a copy. As a result, in the case of the peripheral portion of the panel 11, the corresponding elliptical hole, for example, the elliptical hole 33a for the defect Pa shown in FIG. 5, should be selected, that is, the elliptical hole 33.
A control signal is output from the control device 39 to the rotation mechanism 34 so that a is located at the laser light transmission position OL. In addition, since the control device 39 has an image processing function, it is possible to determine whether to select the hole 33 having an appropriate shape and size according to the shape of the defect. A control command is output to the rotation mechanism 34 in order to select the appropriate hole 33.

As described above, when the defect of the black film 12 is located in the peripheral portion of the panel 11, an elliptical hole having a corresponding shape and direction, such as the hole 33a, is selected from the aperture 32 based on the positional information. The cross section of the laser beam itself irradiated to the defective portion becomes an ellipse. Therefore, the trimmed shape becomes circular in the inclined defective portion, and accurate correction can be performed.

For example, when the inclination of the panel 11 is 16 °, the thickness of the glass is 10 mm, and the black film 12 formed on the inner surface is to be modified, the hole 33 has a major axis of 1.2 mm and a minor axis of 0.8 to 0.
If a 9 mm ellipse is selected, the corrected shape is approximately φ100μ.
It can be a circle of m.

Although the disk-shaped aperture is illustrated in the above embodiment, an aperture 44 as a rectangular defect position determining means may be used as shown in FIG. In this case, holes of various sizes, oval and circular, 45
Are installed side by side on a straight line. The aperture 44 is movable along the arrangement direction of the holes 45, that is, the X direction so as to position each hole 45 at the laser light transmission position OL, and is positioned at the laser light transmission position OL. It is configured to be rotatable around the hole 45. Also, this aperture 44
The operation of is controlled by an aperture control unit (not shown) based on a command from the control device 39.

Here, as shown in FIG. 7, the control device 39 obtains the coordinates of the defect P generated on the panel 11 and calculates the inclination θ from the panel center O1. That is, the defect coordinate is converted into a music coordinate determined by the distance r from the panel center O1 and the inclination θ. Then, the aperture control unit determines a plurality of holes depending on the type of the panel 11 and the distance r from the center O1 of the defect P.
Select the corresponding one from 45. Then, after the corresponding hole 45 is positioned at the laser beam transmission position OL, the aperture 44 is rotated by θ °, and the laser beam is irradiated after the focus is further adjusted. By rotating the aperture 44 by θ °, the major axis of the ellipse can be aligned with the straight line connecting the defect P and the center of the panel 11.
That is, by selecting the hole 45 of the aperture 44 according to the position of the defect and rotationally positioning the aperture 44 by a predetermined angle, it is possible to correct the entire shape of the panel 11 into a desired shape.

Further, as the aperture, a plate-shaped aperture 47 configured to be movable in the XY directions may be used.
This aperture 47 has elliptical and circular holes in each direction.
48 are regularly arranged in the XY directions. Then, when repairing the defect, the aperture 47 may be moved in the XY directions and the corresponding hole 48 may be selected in accordance with the defect position on the panel 11.

According to any of the above embodiments, the panel 11
For a defect located in the peripheral portion of the laser beam, the laser light itself has an elliptical cross section, so that a circular trimming is performed in the defective portion and the correction accuracy is improved.

[0056]

According to the black film repairing apparatus for a cathode ray tube according to the first aspect of the present invention, since the wavelength of the illumination light and the wavelength of the laser light are set to be substantially equal, the refractive index at the face of the cathode ray tube is set. Since there is no difference, the position of the defect detected by the imaging unit using the illumination light and the irradiation position of the correction laser light can be accurately corrected without deviation, and the correction laser light is correctly irradiated to the defect position. As a result, the defective portion can be corrected correctly and the quality can be improved.

According to the method for repairing a black film of a cathode ray tube according to the second aspect, it is judged whether the position of the specified defect is a position inclined with respect to the optical axis of the laser beam, and the defect is located on the optical axis of the laser beam. In the case of a position inclined with respect to the laser beam, the cross-sectional shape orthogonal to the optical axis of the laser beam is an ellipse, and the long axis of this ellipse is set so as to substantially coincide with the straight line connecting the position of the defect and the center of the surface of the cathode ray tube. Since the laser light for irradiation is irradiated, the correction laser light is not deformed into an elliptical shape even in the peripheral portion of the cathode ray tube having an inclination, so that the defective portion can be corrected correctly and the quality can be improved.

According to the black film repairing apparatus for a cathode ray tube of the third aspect, the defect position judging means judges whether the position of the defect is a position inclined with respect to the optical axis of the laser beam, and the defect is the light of the laser beam. In the case of the position inclined with respect to the axis, the cross-sectional shape orthogonal to the optical axis is an ellipse, and the laser beam is irradiated so that the major axis of this ellipse substantially coincides with the straight line connecting the defect position and the center of the surface of the cathode ray tube. Since the laser light set by the means is applied, the correction laser light is not deformed into an elliptical shape even in the peripheral portion of the cathode ray tube having an inclination, so that the defective portion can be corrected correctly and the quality can be improved.

[Brief description of drawings]

FIG. 1 is a perspective view showing a pattern correcting device for a cathode ray tube panel according to an embodiment of the present invention.

FIG. 2 is a front view showing a configuration example of the same aperture.

FIG. 3 is a front view showing another configuration example of the same aperture.

FIG. 4 is a front view showing still another configuration example of the same aperture.

FIG. 5 is a plan view showing the relationship between the same panel and the cross-sectional shape of the laser light with which the defects located in the periphery thereof are irradiated.

FIG. 6 is a plan view showing a state in which a defect portion is circularly irradiated with the laser light having the cross-sectional shape shown in FIG. 5 above.

FIG. 7 is an explanatory diagram showing a relationship between a defect position in the peripheral portion of the same panel and a central portion.

FIG. 8 is an explanatory diagram showing a correction position which is displaced due to a difference in wavelength between the illumination light and the laser light.

9 is a detailed explanatory diagram of a correction position of FIG. 8 above.

FIG. 10 is an explanatory diagram showing defect positions occurring in the peripheral portion of the panel.

FIG. 11 is a plan view showing the configuration of the panel to be modified above.

FIG. 12 is a side view showing the configuration of the panel to be modified above.

FIG. 13 is an explanatory view showing a small diameter hole which is a defect occurring in the black film of the panel.

FIG. 14 is an explanatory view showing a deformed hole which is a defect generated in the black film of the panel.

FIG. 15 is an explanatory diagram showing a non-hole which is a defect occurring in the black film of the panel.

FIG. 16 is a plan view showing a relationship between a panel of a conventional example and a cross-sectional shape of laser light with which a defect located in the peripheral portion thereof is irradiated.

FIG. 17 shows that the laser beam having the cross-sectional shape shown in FIG.
It is a top view which shows the problem that the defect part is elliptically irradiated.

FIG. 18 is an explanatory diagram showing a state where the glass is not inclined so that the laser light is not deformed.

FIG. 19 is an explanatory diagram showing a state in which the glass has a large inclination and the laser light is deformed to be a minor axis of an ellipse.

FIG. 20 is an explanatory diagram showing a circular laser beam cross section.

FIG. 21 is a diagram showing a relationship with the elliptical cross section obtained by deforming the laser light cross section shown in FIG. 20.

[Explanation of symbols]

 12 Black film 13 Hole 22 Illuminating device for illuminating light 24 Camera as image capturing means 28 Laser light irradiating means for irradiating laser light 44 Aperture as defect position determining means

Claims (3)

[Claims] 1. A cathode ray tube having a black film pattern, in which a large number of holes having a predetermined shape are regularly arranged, formed on the face inner surface, and an image is provided on the face outer surface by using illumination light from the face inner surface. The pattern is picked up by means, the defect of the pattern is detected based on the picked-up image, the position of the defect is specified, and the position of the specified defect is irradiated with laser light from the outer face of the face. A black film repairing device for a cathode ray tube for repairing a pattern defect, wherein the wavelength of the illumination light and the wavelength of the laser light are set to substantially equal wavelengths. 2. A cathode ray tube having a black film pattern, in which a large number of holes having a predetermined shape are regularly arranged, formed on the inner surface of the face, the defect of the pattern is detected from the outer surface of the face and the position of the defect is detected. In the black film repairing method of the cathode ray tube, which specifies the position of the specified defect and irradiates a laser beam from the outer surface of the face to correct the defect of this pattern, the position of the specified defect is the position of the laser beam. Determine whether the position is inclined with respect to the optical axis, if the defect is a position inclined with respect to the optical axis of the laser light, the cross-sectional shape orthogonal to the optical axis of the laser light is an ellipse, A method for repairing a black film of a cathode ray tube, wherein a major axis is set so as to substantially coincide with a straight line connecting the position of the defect and the center of the surface of the cathode ray tube, and a laser beam is irradiated. 3. A cathode-ray tube having a black film pattern in which a large number of holes having a predetermined shape are regularly arranged on the inner surface of the face, and a defect of the pattern is detected from the outer surface of the face and the position of the defect is detected. In the black film repairing device of the cathode ray tube for identifying and identifying the defect position, by irradiating a laser beam from the outer surface of the face by the laser beam irradiating means to correct the defect of this pattern, the position of the identified defect is Defect position determining means for determining whether the position is inclined with respect to the optical axis of the laser light, the laser light irradiation means, if the defect is a position inclined with respect to the optical axis of the laser light, orthogonal to the optical axis The cross-sectional shape is an ellipse, and the major axis of the ellipse is irradiated with laser light set so as to substantially coincide with a straight line connecting the defect position and the center of the surface of the cathode ray tube. Black film correction device of a cathode ray tube.