JPH0760675A - Electrostatic attracting hand - Google Patents

Electrostatic attracting hand

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Publication number
JPH0760675A
JPH0760675A JP23547293A JP23547293A JPH0760675A JP H0760675 A JPH0760675 A JP H0760675A JP 23547293 A JP23547293 A JP 23547293A JP 23547293 A JP23547293 A JP 23547293A JP H0760675 A JPH0760675 A JP H0760675A
Authority
JP
Japan
Prior art keywords
work
hand
high voltage
voltage
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23547293A
Other languages
Japanese (ja)
Inventor
Kiyoaki Ouchi
清明 大内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Original Assignee
Tokin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokin Corp filed Critical Tokin Corp
Priority to JP23547293A priority Critical patent/JPH0760675A/en
Publication of JPH0760675A publication Critical patent/JPH0760675A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To provide an electrostatic attracting hand which attracts a work and by which handling of the work is facilitated and the attracted work can be separated speedily from an attracting surface by using static electricity generated by DC high voltage power supply as an attracting source without using a structure of vacuum-suction. CONSTITUTION:An electrostatic attracting hand attracts and separates a work speedily by connecting a hand 23 composed of an electrostatic attracting head 14 by sandwiching an insulator sheet between a protective film and (+ and -) electrodes, a handling arm 4 though which a high voltage cable 5 passes penetratingly, an arm holder 3 and a protective cover 2 by DC high voltage electric power supply 7 or the DC high voltage electric power supply and a slide type transformer 27.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、真空吸着式のハンドで
はハンドリングが困難な、フェライトヘッドコアの如く
微小あるいは吸着面の少ない形状のワークをハンドリン
グするのに好適な静電吸着ハンドに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrostatic adsorption hand suitable for handling a work having a minute shape or a small adsorption surface such as a ferrite head core, which is difficult to handle with a vacuum adsorption type hand.

【0002】[0002]

【従来の技術】従来、ワークのハンドリングに用いられ
ている吸着ハンドは、図5に示す如く、真空吸着式ハン
ドであって、エアを引くパイプ18とノズル19とをア
ーム20にナット17によって固定して、ノズル19の
先端に吸着盤(吸着孔)15を有し、負圧を利用して、
吸着盤15にワーク16を吸着させてハンドリングする
ものである。
2. Description of the Related Art Conventionally, a suction hand used for handling a work is a vacuum suction type hand as shown in FIG. 5, in which a pipe 18 for drawing air and a nozzle 19 are fixed to an arm 20 by a nut 17. Then, the suction plate (suction hole) 15 is provided at the tip of the nozzle 19, and the negative pressure is utilized.
The workpiece 16 is sucked onto the suction plate 15 for handling.

【0003】しかし、真空吸着ハンドの場合、吸着盤1
5(吸着孔)がワーク16のフラットな面に接し、これ
が完全に塞がれてはじめて大きな吸着力が得られるもの
である。例えば図3に示すワーク21のように、切り欠
き22等の凹部があるものは、吸着盤(吸着孔)15が
ワークのフラットな面で完全に塞がれない。この場合に
は、外気を吸引して吸着力が低下し、確実にワークを吸
着できなくなるという問題が生じる。
However, in the case of a vacuum suction hand, the suction plate 1
No. 5 (suction hole) comes into contact with the flat surface of the work 16 and a large suction force is obtained only when the work 16 is completely blocked. For example, in the case of the work 21 shown in FIG. 3 having a recess such as the notch 22, the suction plate (suction hole) 15 is not completely closed by the flat surface of the work. In this case, there is a problem in that the suction force of the outside air is reduced and the suction force is reduced, so that the workpiece cannot be securely sucked.

【0004】よって、微少なワークまたは、形状が複雑
なワークのフラットな面を確実に吸着する為には、吸着
盤(吸着孔)を非常に小さくして位置決め精度を高める
必要があり、切り欠き等により吸着面の少ないワークの
場合には、多数の吸着盤(吸着孔)と球弁体を用いて、
吸着力の低下を防止する必要がある。これらの真空吸着
ハンドにおける吸着を確実にするための機構は、高精度
を要したり、複雑な形状となる。また、上述のような対
策を施した真空吸着ハンドであっても、切り欠き等によ
り吸着面の少ないワークを多数個一括して吸着・ハンド
リングするのは極めて困難である。
Therefore, in order to reliably suck a flat surface of a minute work or a work having a complicated shape, it is necessary to make the suction plate (suction hole) very small to improve the positioning accuracy, and the notch is formed. In the case of a work with a small suction surface due to, etc., use a large number of suction plates (suction holes) and ball valve elements.
It is necessary to prevent the decrease in adsorption power. The mechanism for ensuring the suction in these vacuum suction hands requires high accuracy and has a complicated shape. Even with the vacuum suction hand having the above-described countermeasures, it is extremely difficult to collectively suck and handle a large number of workpieces having a small suction surface due to notches or the like.

【0005】[0005]

【発明が解決しようとする課題】従って、本発明の目的
は、上述のような真空吸着式ハンドにおける精密で複雑
な機構を排除した、しかも真空吸着ハンドでは吸着が極
めて困難であるワークの一括ハンドリングを直流高圧印
加によって発生させた静電気を吸着源として用いて、ワ
ークの吸着を容易にして、また吸着したワークを速やか
に吸着面から分離出来る機構をもった静電吸着ハンドを
提供することである。
SUMMARY OF THE INVENTION Therefore, the object of the present invention is to carry out batch handling of workpieces which eliminates the above-mentioned precise and complicated mechanism in the vacuum suction type hand and which is extremely difficult to suck with the vacuum suction type hand. It is to provide an electrostatic adsorption hand having a mechanism capable of facilitating the adsorption of a work by using the static electricity generated by the application of DC high voltage as an adsorption source and quickly separating the adsorbed work from the adsorption surface. .

【0006】[0006]

【課題を解決するための手段】本発明は上述の課題を解
決するため、従来からワークの搬送に用いられている真
空吸着ハンドの改良型ではなく、直流高圧印加によって
発生させた静電気を吸着源として用いたもので、簡単な
構造で、従来、ハンドリングが困難であったワークを容
易に吸着することができ、高圧電源の入力電圧をスライ
ド式変圧器によって徐々に降下させるアナログ制御を行
うことにより、ワークの分離をより速やかにできる静電
吸着ハンドを提供できる。
In order to solve the above problems, the present invention is not an improved type of a vacuum suction hand that has been conventionally used for transporting a work, but an electrostatic source generated by applying a DC high voltage to the suction source. With a simple structure, it can easily adsorb a work that was difficult to handle in the past, and by performing analog control that gradually lowers the input voltage of the high voltage power supply with a slide transformer. Thus, it is possible to provide an electrostatic adsorption hand capable of more quickly separating the work.

【0007】本発明によれば、高圧ケーブルが貫通する
ハンドリングアームと、アームホルダーと、保護カバー
とからなるハンドと保護フィルムとの間の絶縁体のシー
トを電極ではさみこみ、前記電極に直流高電圧を印加す
ることによって生じた静電気を利用して、一個または多
数個のワークを吸着することを特徴とする静電吸着ハン
ドが得られる。
According to the present invention, a sheet of insulating material between a hand and a protective film, which is composed of a handling arm through which a high-voltage cable penetrates, an arm holder, and a protective cover, is sandwiched between electrodes, and a high DC voltage is applied to the electrodes. An electrostatic adsorption hand is obtained which is characterized in that one or a large number of works are attracted by utilizing the static electricity generated by applying.

【0008】本発明によれば、上述した静電吸着ハンド
において絶縁体のシートに直流高電圧を印加して得られ
る静電気を、スライド式変圧器を利用して印加電圧を徐
々に降下させることにより、除電し、吸着しているワー
クを分離させることを特徴とする静電吸着ハンドが得ら
れる。
According to the present invention, static electricity obtained by applying a high DC voltage to a sheet of an insulator in the above electrostatic adsorption hand is gradually reduced by using a slide type transformer. An electrostatic adsorption hand is obtained which is characterized by removing the charge and separating the adsorbed work.

【0009】[0009]

【作用】本発明では、吸着源として静電気を用いること
により、吸着面のほぼ全面にわたって吸着力が及ぶた
め、真空吸着ハンドのようにワークの形状を選ばず、容
易にワークを吸着することができる。また、ハンド自体
の構造も簡単なものとなる。
In the present invention, by using static electricity as the adsorption source, the adsorption force extends over almost the entire adsorption surface, so that the workpiece can be easily adsorbed without selecting the shape of the workpiece unlike the vacuum adsorption hand. . Also, the structure of the hand itself becomes simple.

【0010】静電吸着ハンドにおいて、ワーク吸着後の
ワーク分離が特別な静電除去装置を用いることなく、電
源部の変更のみで、迅速にできるので、ワークの分離も
容易で、効率よくピック・アンド・プレスなどのハンド
リングを行うことができる。
In the electrostatic adsorption hand, the work can be separated after the work is adsorbed quickly without changing the power supply section without using a special electrostatic removing device. Therefore, the work can be easily separated and picked efficiently. You can handle and press and so on.

【0011】[0011]

【実施例】以下に本発明の実施例を、添付した図面と共
に詳細に説明する。
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

【0012】(実施例1)本発明による静電吸着ハンド
を構成する説明図を図1(a)に示し、吸着ヘッド部の
各部を展開して斜視図としたものを図2に示す。図2に
示すように、本発明の静電吸着ハンドの構成は、ハンド
リングアーム4と、アームホルダー3と、保護カバー2
と、ハンドリングアームを貫通した高圧ケーブル5を有
するハンド23と、+電極11、−電極12と、絶縁体
シート1と、保護フィルム13とを有する静電吸着ヘッ
ド14とからなり、図1(a)に示すように高圧ケーブ
ル5は直流高圧電源7に連結される。本発明の静電吸着
ハンドにおいては、ワーク吸着時に直流高圧電源7のス
イッチオンにより絶縁体シート1に高電圧を印加し、発
生した静電気を利用してワークを吸着し、ワークを吸着
面から分離させる時には、直流高電源のスイッチオフに
より高電圧印加をやめるデジタル制御をとる。図2に於
て、静電吸着ヘッド14は+電極11と、絶縁体シート
1と、アース線6でアースされた−電極12と、保護フ
ィルム13とからなり、絶縁体シート1を+電極11と
−電極12で挟み込んでいる。+電極11には、高圧ケ
ーブル5を介して、直流高電圧が印加されるため、安全
のため+電極11は不導体の保護カバー2で覆われる。
これら静電吸着ヘッド14の各部品は極薄の粘着テープ
により接着されている。−電極12は櫛状にカットされ
ており、アース線6によりアースされる。−電極12の
吸着面側には電極を保護するための保護フィルム13が
貼られる。アームホルダー3、ハンドリングアーム4が
保護カバー2に取付けられる。上述の如き構成によれ
ば、図1に示すように吸着面を複数個のワーク9に接近
させて、+電極11に直流高電圧を印加すれば、ワーク
はすべて吸着面に吸い寄せられる。この際、ワークがセ
ットされているワーク保持台10は不導体とする。この
静電吸着ハンドの吸着力は絶縁体シートの厚みが小さい
ほど、そして電圧が高いほど、大きなものとなる。
(Embodiment 1) FIG. 1 (a) shows an explanatory view which constitutes an electrostatic adsorption hand according to the present invention, and FIG. 2 shows a perspective view in which each portion of the adsorption head portion is developed. As shown in FIG. 2, the electrostatic adsorption hand of the present invention has a handling arm 4, an arm holder 3, and a protective cover 2.
1 (a), the hand 23 having the high voltage cable 5 penetrating the handling arm, the + electrode 11, the − electrode 12, the insulating sheet 1, and the electrostatic attraction head 14 having the protective film 13. The high voltage cable 5 is connected to the DC high voltage power supply 7 as shown in FIG. In the electrostatic adsorption hand of the present invention, a high voltage is applied to the insulator sheet 1 by switching on the DC high-voltage power supply 7 at the time of adsorbing the work, and the generated static electricity is used to adsorb the work to separate the work from the adsorption surface. When this is done, digital control is taken to stop the application of high voltage by switching off the DC high power supply. In FIG. 2, the electrostatic adsorption head 14 includes a + electrode 11, an insulator sheet 1, a − electrode 12 grounded by a ground wire 6, and a protective film 13. And-is sandwiched between electrodes 12. Since a high DC voltage is applied to the + electrode 11 via the high voltage cable 5, the + electrode 11 is covered with a non-conductive protective cover 2 for safety.
Each component of the electrostatic attraction head 14 is adhered by an ultrathin adhesive tape. The electrode 12 is cut in a comb shape and is grounded by the ground wire 6. -A protective film 13 for protecting the electrode is attached to the adsorption surface side of the electrode 12. The arm holder 3 and the handling arm 4 are attached to the protective cover 2. According to the above-described configuration, when the suction surface is brought close to a plurality of works 9 as shown in FIG. 1 and a high DC voltage is applied to the + electrode 11, all the works are attracted to the suction surface. At this time, the work holding table 10 on which the work is set is made non-conductive. The attraction force of the electrostatic attraction hand increases as the thickness of the insulator sheet decreases and the voltage increases.

【0013】(実施例2)図1(b)は、本発明の別の
静電吸着ハンドを示す説明図である。図1(b)におい
て、実施例1の静電吸着ハンドでは絶縁体に印加されて
いる高電圧の除去をスイッチオフによってデジタル制御
するかわりに、高圧電源の入力電圧をスライド式変圧器
27によって、徐々に降下させるアナログ制御を行うも
のである。直流高圧電源7に連絡される高圧ケーブル5
を介して、静電吸着ヘッド14の絶縁シートに+の直流
高電圧が印加される。また直流高圧電源7の入力側交流
電圧は、スライド式変圧器27により増減可能となり、
出力側の直流高電圧を調節できる。静電吸着ヘッド14
でワーク9を吸着する際は、静電吸着ヘッド14をワー
ク9に接触させた後、スライド式変圧器27の電圧調整
つまみ26に取り付けたモータ25により直流高圧電源
7の入力側交流電圧を上昇させる。入力電圧の上昇に対
応した直流高電圧が出力され、絶縁体シート1に高電圧
が印加され、静電吸着ヘッド14に静電気が発生し、ワ
ーク9が吸着される。実施例においては、吸着時に上述
のように印加電圧を徐々に昇圧(アナログ制御)してい
るが、吸着時に関しては、印加電圧を徐々に昇圧(アナ
ログ制御)しなくても問題はない。ハンドリング後、ワ
ーク分離の際は、スライド式変圧器27の電圧調整つま
み26に取り付けたモータ25により直流高圧電源7の
入力側交流電圧を降下させる。絶縁体シート1に印加さ
れている高電圧が円滑に除去され、吸着されているワー
クは速やかに分離する。静電吸着ハンドへの直流高電圧
印加によって生じた静電気により、本実施例で用いたワ
ークであるフェライトコアを吸着後、印加電圧を除去
し、吸着面からのワークの分離状態を調査した。静電吸
着後のワーク分離の条件は下記の通りである。 ワーク:フェライトコア(シールドリングプレス体)重
量0.0795gf/個 使用ワーク数:25個 印加電圧:3.5KV 印加時間:10sec その結果は、図4に示すように、デジタル制御によっ
て、印加電極を除去した場合は、吸着されている25個
のワークの内、7個が電圧除去直後に吸着面から分離し
たのみで、その後は調査を行った10分後までワークが
保持されたままだった。デジタル制御によって電圧を除
去し、更にワークが吹き飛ばない程度の微風のイオンエ
アーを吸着面に吹き付けた場合は、徐々にワークが分離
し3分後には全てのワークが分離した。本発明によるア
ナログ制御による電圧除去の場合は、電圧除去直後にす
べてのワークが分離した。
(Embodiment 2) FIG. 1B is an explanatory view showing another electrostatic adsorption hand of the present invention. In FIG. 1B, in the electrostatic adsorption hand of the first embodiment, instead of digitally controlling the removal of the high voltage applied to the insulator by switching off, the input voltage of the high voltage power supply is changed by the slide type transformer 27. This is an analog control for gradually lowering. High voltage cable 5 connected to DC high voltage power supply 7
A + DC high voltage is applied to the insulating sheet of the electrostatic attraction head 14 via the. Further, the input side AC voltage of the DC high voltage power supply 7 can be increased or decreased by the slide type transformer 27,
The DC high voltage on the output side can be adjusted. Electrostatic adsorption head 14
When attracting the work 9, the electrostatic attraction head 14 is brought into contact with the work 9 and then the input side AC voltage of the DC high-voltage power supply 7 is increased by the motor 25 attached to the voltage adjusting knob 26 of the slide transformer 27. Let A direct current high voltage corresponding to an increase in the input voltage is output, a high voltage is applied to the insulator sheet 1, static electricity is generated in the electrostatic attraction head 14, and the work 9 is attracted. In the embodiment, the applied voltage is gradually increased (analog control) as described above during adsorption, but there is no problem even when the applied voltage is not gradually increased (analog control) during adsorption. After the handling, when the work is separated, the input side AC voltage of the DC high voltage power supply 7 is dropped by the motor 25 attached to the voltage adjusting knob 26 of the slide type transformer 27. The high voltage applied to the insulator sheet 1 is smoothly removed, and the adsorbed work is quickly separated. After the ferrite core, which is the work used in this example, was attracted by the static electricity generated by the application of the high DC voltage to the electrostatic attraction hand, the applied voltage was removed, and the separation state of the work from the attraction surface was investigated. The conditions for work separation after electrostatic attraction are as follows. Workpiece: Ferrite core (shield ring press body) Weight 0.0795 gf / piece Number of works used: 25 pieces Applied voltage: 3.5 KV Application time: 10 seconds The result is as shown in FIG. In the case of removal, out of the 25 adsorbed works, only 7 were separated from the adsorbed surface immediately after the voltage was removed, and thereafter the works remained held until 10 minutes after the investigation. When the voltage was removed by digital control and a slight amount of ion air that did not blow the work was blown onto the adsorption surface, the work gradually separated, and after 3 minutes, all the work separated. In the case of voltage removal by analog control according to the present invention, all the works were separated immediately after the voltage removal.

【0014】[0014]

【発明の効果】本発明による静電吸着ハンドは、以上述
べたとおり、実施例1においては、真空吸着式のハンド
のように高精度な位置決め機構や、その他の複雑な機構
を必要とせず、またワークの形状を選ばずに、容易にワ
ークを吸着できる。また、従来のハンドによればフェラ
イトコア等の粉末冶金によるワークの場合は、真空吸着
ハンドでは吸着盤(吸着孔)に粉末が詰まる等の悪影響
が生じ、メンテナンスも大変であるが、静電吸着ハンド
では吸着面を拭くのみで良い。また、実施例2において
は、本発明の吸着ハンドは、吸着後のワークを速やかに
分離することができる。また、本発明の吸着ハンドは印
加電圧の調整が可能であるので、静電気(吸着力)の加
減も可能である。
As described above, the electrostatic adsorption hand according to the present invention does not require a highly accurate positioning mechanism or other complicated mechanism unlike the vacuum adsorption type hand in the first embodiment. Further, the work can be easily adsorbed without selecting the shape of the work. Further, according to the conventional hand, in the case of a work made of powder metallurgy such as a ferrite core, the vacuum suction hand has a bad influence such as the suction plate (suction hole) being clogged with powder, and maintenance is difficult, but electrostatic suction is difficult. All you have to do is wipe the suction surface with your hand. Further, in Example 2, the suction hand of the present invention can quickly separate the workpiece after suction. In addition, since the applied voltage of the suction hand of the present invention can be adjusted, static electricity (suction force) can be adjusted.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係わる静電吸着ハンドを構成する説明
図であり、図1(a)は実施例1の本発明の静電吸着ハ
ンドを説明する説明図、図1(b)は実施例2の本発明
の静電吸着ハンドを説明する説明図。
1A and 1B are explanatory views constituting an electrostatic adsorption hand according to the present invention, FIG. 1A is an explanatory view illustrating an electrostatic adsorption hand of the present invention according to a first embodiment, and FIG. Explanatory drawing explaining the electrostatic attraction hand of this invention of Example 2. FIG.

【図2】吸着ヘッド部の各部を展開した斜視図。FIG. 2 is a perspective view in which each part of the suction head unit is developed.

【図3】本発明の対象となるワーク(一例)の斜視図で
ある。
FIG. 3 is a perspective view of a work (an example) which is a target of the present invention.

【図4】ワークを吸着した後、印加電圧を除去し、吸着
面からワークを分離するまでに要する時間を示す図であ
る。
FIG. 4 is a diagram showing a time required to remove the applied voltage after the work is attracted and to separate the work from the attraction surface.

【図5】従来の真空吸着式ハンドの側面図。FIG. 5 is a side view of a conventional vacuum suction type hand.

【符号の説明】[Explanation of symbols]

1 絶縁体シート 2 保護カバー 3 アームホルダー 4 ハンドリングアーム 5 高圧ケーブル 6 アース線 7 直流高圧電源 8 入力コード 9 ワーク 10 ワーク保持台 11 +電極 12 −電極 13 保護フィルム 14 静電吸着ヘッド 15 吸着盤(吸着孔) 16 ワーク 17 ナット 18 パイプ 19 ノズル 20 アーム 21 ワーク 22 切り欠き 23 ハンド 24 入力カプラ 25 モータ 26 電圧調整つまみ 27 スライド式変圧器 1 Insulator Sheet 2 Protective Cover 3 Arm Holder 4 Handling Arm 5 High Voltage Cable 6 Ground Wire 7 DC High Voltage Power Supply 8 Input Code 9 Workpiece 10 Workholding Stand 11 + Electrode 12-Electrode 13 Protective Film 14 Electrostatic Adhesion Head 15 Adsorption Board ( Adsorption hole) 16 Work 17 Nut 18 Pipe 19 Nozzle 20 Arm 21 Work 22 Notch 23 Hand 24 Input coupler 25 Motor 26 Voltage adjustment knob 27 Sliding transformer

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 高圧ケーブルが貫通する、ハンドリング
アームと、アームホルダーと、保護カバーとからなるハ
ンドと保護フィルムとの間の絶縁体のシートを電極では
さみこみ、前記電極に直流高電圧を印加することによっ
て生じた静電気を利用して、一個または多数個のワーク
を吸着することを特徴とする静電吸着ハンド。
1. A sheet of an insulator between a hand and a protective film, which comprises a handling arm, an arm holder, and a protective cover, through which a high-voltage cable passes, is sandwiched between electrodes, and a high DC voltage is applied to the electrodes. An electrostatic adsorption hand characterized by adsorbing one or a large number of works by utilizing the static electricity generated by this.
【請求項2】 請求項1記載の静電吸着ハンドにおい
て、前記絶縁体のシートに直流高電圧を印加して得られ
る静電気を、スライド式変圧器を利用して印加電圧を徐
々に降下させることにより、除電し、吸着しているワー
クを分離させることを特徴とする静電吸着ハンド。
2. The electrostatic adsorption hand according to claim 1, wherein static electricity obtained by applying a high DC voltage to the sheet of the insulator is gradually reduced by using a slide type transformer. The electrostatic adsorption hand is characterized in that the electrostatically adsorbed work is separated by the means to separate the adsorbed work.
JP23547293A 1993-08-27 1993-08-27 Electrostatic attracting hand Pending JPH0760675A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23547293A JPH0760675A (en) 1993-08-27 1993-08-27 Electrostatic attracting hand

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23547293A JPH0760675A (en) 1993-08-27 1993-08-27 Electrostatic attracting hand

Publications (1)

Publication Number Publication Date
JPH0760675A true JPH0760675A (en) 1995-03-07

Family

ID=16986589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23547293A Pending JPH0760675A (en) 1993-08-27 1993-08-27 Electrostatic attracting hand

Country Status (1)

Country Link
JP (1) JPH0760675A (en)

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