JPH0760209A - Washing method - Google Patents
Washing methodInfo
- Publication number
- JPH0760209A JPH0760209A JP21150693A JP21150693A JPH0760209A JP H0760209 A JPH0760209 A JP H0760209A JP 21150693 A JP21150693 A JP 21150693A JP 21150693 A JP21150693 A JP 21150693A JP H0760209 A JPH0760209 A JP H0760209A
- Authority
- JP
- Japan
- Prior art keywords
- water
- rinsing
- degassed
- rinse
- article
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Degasification And Air Bubble Elimination (AREA)
- Water Treatment By Sorption (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】部品などの水系洗浄において、リ
ンス用水の量を節約する洗浄方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning method for saving the amount of rinse water in water cleaning of parts and the like.
【0002】[0002]
【従来の技術】従来は金属部品やプラスチック部品など
の洗浄にはフロンを用いていたが、フロンの使用規制に
伴い、水を使用する水系洗浄が行われるようになった。
水系洗浄の場合、洗剤を用いて洗浄を行った後、洗剤を
除去するため水でのリンスが行われる。リンスが、リン
ス槽中で行われかつリンス槽が複数の場合には、後段リ
ンス槽に水を供給し、後段からより前段へとオーバーフ
ローさせて各段に供給する節水方法が実施されている。2. Description of the Related Art Conventionally, chlorofluorocarbon has been used for cleaning metal parts, plastic parts and the like. However, due to restrictions on the use of chlorofluorocarbon, water-based cleaning using water has come to be performed.
In the case of water-based cleaning, after cleaning with a detergent, rinsing with water is performed to remove the detergent. When rinsing is performed in the rinsing tank and there are a plurality of rinsing tanks, a water-saving method is implemented in which water is supplied to the subsequent rinsing tank and overflows from the latter stage to the preceding stage to supply each stage.
【0003】[0003]
【発明が解決すべき課題】しかし、被洗浄品が複雑な形
状を成していると、泡切れ、水切れが悪く、洗剤の捕留
量が多くなるため、リンスの必要段数が増加したり、リ
ンス水量を増す必要があった。However, when the article to be cleaned has a complicated shape, bubbles and water are poorly drained, and the amount of detergent collected increases, so that the required number of rinse steps increases, It was necessary to increase the amount of rinse water.
【0004】[0004]
【課題を解決すべき課題】本発明者等は、水系洗浄を行
なう際、被洗浄品に付着した洗剤の泡切れを良くし、リ
ンス用水の量を節約する方法について鋭意検討し、本発
明に到達した。即ち、本発明は、水系洗浄において、リ
ンス用水として脱気された水を使用することを特徴とす
る洗浄方法にある。DISCLOSURE OF THE INVENTION The inventors of the present invention have diligently studied a method for reducing the amount of rinse water by improving the defoaming of the detergent adhering to the article to be cleaned during the water-based cleaning. Arrived That is, the present invention resides in a cleaning method characterized by using degassed water as rinse water in an aqueous cleaning.
【0005】本発明によるとリンス用水として脱気水を
用いることにより、通常の水よりも表面張力が低下する
ことから、被洗浄品の泡切れ、水切れが向上し、特に複
数のリンス槽で行なう場合、次槽に持ち込まれるリンス
用水が減少し、洗浄が効率的に行われるため、リンス槽
の数を少なくできる等、リンス用水の量を節約すること
が出来る。According to the present invention, by using degassed water as the rinse water, the surface tension becomes lower than that of ordinary water, so that the degreasing of the article to be cleaned is improved, and the dewatering is improved. In this case, since the rinse water brought into the next tank is reduced and the cleaning is efficiently performed, the number of rinse tanks can be reduced and the amount of rinse water can be saved.
【0006】本発明の被洗浄品としては、液晶表示板用
ガラス板、プリント配線板等の電子部品、ベアリング、
磁気ヘッド、ハードディスク(記録材料)、OPCドラ
ム等の金属部品(中間製品や、最終製品も含む)、各種
プラスチック部品(中間製品や、最終製品も含む)等が
挙げられる。The article to be cleaned according to the present invention includes glass plates for liquid crystal display boards, electronic parts such as printed wiring boards, bearings,
Examples thereof include magnetic heads, hard disks (recording materials), metal parts (including intermediate products and final products) such as OPC drums, and various plastic parts (including intermediate products and final products).
【0007】本発明のリンス用水とは、被洗浄品の油分
や切削かす等を取り除くために洗剤を用いて洗浄した後
に、洗剤を落とすために使用される水のことである。本
発明でリンス用水として使用される脱気された水(以
下、脱気水と称す)は、溶存酸素濃度が5重量ppm以
下、好ましくは3重量ppm以下、さらに好ましくは1
重量ppm以下の水である。溶存酸素濃度は経済性の面
から限界はあろうが、低いこと自体に何ら不都合はな
い。The rinsing water of the present invention is water used for removing the detergent after cleaning it with a detergent for removing oil content, cutting dust and the like of the article to be cleaned. Degassed water used as rinse water in the present invention (hereinafter referred to as degassed water) has a dissolved oxygen concentration of 5 wt ppm or less, preferably 3 wt ppm or less, and more preferably 1
Water is less than ppm by weight. Although the dissolved oxygen concentration may be limited in terms of economy, there is no inconvenience in itself because it is low.
【0008】特に被洗浄品の酸化を防止する必要がある
場合には、脱気水の溶存酸素濃度は100重量ppb以
下や10重量ppb以下であることが好ましい。因み
に、25℃、1気圧の空気中における水の飽和酸素濃度
は、8.1重量ppmである(化学便覧による)。窒素
などの酸素以外の溶存気体も空気中での飽和溶存量の8
0%以下に脱気されていることが好ましいが、測定が困
難であるし、酸素が除去されている場合は、他の溶存気
体も除去されることは経験上明らかなので、本発明に於
ては溶存酸素濃度で判定する。Particularly, when it is necessary to prevent the product to be cleaned from being oxidized, the dissolved oxygen concentration of degassed water is preferably 100 weight ppb or less or 10 weight ppb or less. Incidentally, the saturated oxygen concentration of water in air at 25 ° C. and 1 atm is 8.1 ppm by weight (according to the Chemical Handbook). Dissolved gases other than oxygen, such as nitrogen, have a saturated dissolved amount of 8 in air.
It is preferable that the gas is degassed to 0% or less, but it is difficult to measure, and it is empirically clear that when oxygen is removed, other dissolved gas is also removed. Is determined by the dissolved oxygen concentration.
【0009】溶存酸素濃度は、オストワルド法(実験化
学講座1基本操作[I]、241頁、1975年、丸
善)や、マススペクトル法で測定することができるし、
ガルバニ電池型やポ−ラログラフ型などの簡便な酸素濃
度計や比色分析法で測定することができる。The dissolved oxygen concentration can be measured by the Ostwald method (Experimental Chemistry Lecture 1 Basic Operation [I], page 241, 1975, Maruzen) or the mass spectrum method.
It can be measured by a simple oxygen concentration meter such as a galvanic battery type or polarographic type or a colorimetric analysis method.
【0010】脱気方法は任意であり、膜式真空脱気、真
空脱気、加熱脱気、酸素以外の気体のバブリングなどの
方法を採ることができるが、装置が小さいこと、溶存酸
素濃度を低くできることから膜式真空脱気が好ましく、
真空脱気がこれに次いで好ましい。膜式真空脱気は、気
体は透過するが水は透過しない隔膜の一方の側に水を流
し、他の側を減圧する方法であり、真空脱気は充填塔や
シャワー塔の内部を減圧する方法である。これらの方法
は、溶存酸素だけでなく溶存窒素や溶存炭酸ガスも除去
されるため効果が大きく好ましい。The degassing method is arbitrary, and methods such as membrane vacuum degassing, vacuum degassing, heating degassing, and bubbling of gas other than oxygen can be adopted, but the equipment is small and the dissolved oxygen concentration is Membrane-type vacuum degassing is preferred because it can be lowered
Vacuum degassing is preferred next. Membrane-type vacuum degassing is a method in which water is passed through one side of a membrane that is permeable to gas but not water, and the other side is depressurized.Vacuum degassing depressurizes the inside of a packed tower or shower tower. Is the way. These methods are preferable because they are effective in removing not only dissolved oxygen but also dissolved nitrogen and dissolved carbon dioxide gas.
【0011】膜式真空脱気法は、装置が小形であるこ
と、取扱が容易であること、高度の脱気が可能であるこ
と等の点で好ましく、膜が中空糸膜であることで、脱酸
素装置をコンパクトにすることが可能であり、中空糸膜
の内径を250μm以下にすることで、よりコンパクト
化が可能である。また、不均質膜は気体透過速度が高く
水の漏洩の恐れがない為、脱酸素膜として好適であり、
ポリ−4−メチルペンテン−1は疎水性で気体透過速度
が高く強度もあり、膜素材として好適である。The membrane-type vacuum degassing method is preferable in that the apparatus is small in size, easy to handle, and capable of high-level degassing. Since the membrane is a hollow fiber membrane, The deoxidizer can be made compact, and the hollow fiber membrane having an inner diameter of 250 μm or less can be made more compact. Further, since the heterogeneous membrane has a high gas permeation rate and there is no risk of water leakage, it is suitable as a deoxidizing membrane,
Poly-4-methylpentene-1 is hydrophobic and has a high gas permeation rate and strength, and is suitable as a membrane material.
【0012】減圧装置としては、各種真空ポンプやアス
ピレーター、エジェクター等任意のものを使用し得る
が、水封式真空ポンプ、ダイヤフラム式真空ポンプ、ド
ライ型真空ポンプ、水流アスピレーターが、大量の水蒸
気の吸入に耐えるため好ましい。As the decompression device, various vacuum pumps, aspirators, ejectors and the like can be used, but water-sealed vacuum pumps, diaphragm-type vacuum pumps, dry-type vacuum pumps and water-flow aspirators are used for inhaling a large amount of water vapor. It is preferable because it withstands.
【0013】脱気水は、放置すると空気が再溶解し、攪
拌により溶解速度が増大する。したがって脱気水を空気
から遮断して貯蔵できない場合には、脱気水製造後速や
かに使用することが好ましく、また、脱気水を取り扱う
際には、空気の巻き込みや攪拌をなるべく避けることが
好ましい。When deaerated water is left to stand, air is redissolved and the dissolution rate is increased by stirring. Therefore, when degassed water cannot be stored after being cut off from the air, it is preferable to use it immediately after production of degassed water, and when handling degassed water, avoid entrapment and agitation of air as much as possible. preferable.
【0014】リンス方法は洗剤を洗浄出来る方法であれ
ば特に制約はなく、シャワー法や、リンス槽中での攪拌
や超音波法など任意の方法を採ることができる。リンス
が被洗浄品を水槽に浸漬して行われる場合には、脱気水
を水槽に供給することにより実施できる。リンス槽が複
数の場合には、全槽とも脱気水を使用することが好まし
く、後段に脱気水を供給し、後段からより前段へとオー
バーフローさせて各段に供給することも好ましい。The rinsing method is not particularly limited as long as it can wash the detergent, and any method such as a shower method, stirring in a rinsing tank or ultrasonic method can be adopted. When rinsing is performed by immersing the article to be cleaned in a water tank, it can be performed by supplying deaerated water to the water tank. When there are a plurality of rinse tanks, it is preferable to use degassed water for all the tanks, and it is also preferable to supply degassed water to the latter stage and to supply the degassed water to the respective stages by overflowing from the latter stage to the preceding stage.
【0015】[0015]
【実施例】以下実施例を用いて本発明をさらに具体的に
説明する。 [実施例1] <脱気水の調製>特開昭63−258605に開示され
ている方法により、ポリ4メチルペンテン1中空糸不均
質膜を用いた膜面積1m2のモジュールを作製し、中空
糸内側にイオン交換水を流し、中空糸膜外側をダイヤフ
ラム式真空ポンプにて100torrに減圧することに
より、溶存酸素濃度1.5重量ppmの脱気水を調製し
た。 <リンス試験>リンスのモデル試験を実施した。直径約
3mmのボールベアリング1kgをステンレス製の籠に
入れた状態で、ドデシルベンゼンスルホン酸ナトリウム
を主体とする洗剤(2重量%濃度)で超音波洗浄した
後、溶存酸素濃度0.45重量ppmの脱気水を満たし
た容量各1リットルの第1リンス槽および第2リンス槽
にて超音波をかけてリンスした。EXAMPLES The present invention will be described in more detail with reference to the following examples. [Example 1] <Preparation of degassed water> A module having a membrane area of 1 m 2 using a poly (4-methylpentene 1) hollow fiber heterogeneous membrane was prepared by the method disclosed in JP-A-63-258605, and the hollow portion was prepared. Ion-exchanged water was caused to flow inside the yarn, and the outside of the hollow fiber membrane was depressurized to 100 torr by a diaphragm type vacuum pump to prepare deaerated water having a dissolved oxygen concentration of 1.5 ppm by weight. <Rinse test> A rinse model test was performed. 1 kg of ball bearings with a diameter of about 3 mm was placed in a stainless steel basket, ultrasonically washed with a detergent (2 wt% concentration) mainly containing sodium dodecylbenzenesulfonate, and then dissolved oxygen concentration of 0.45 wt ppm Rinsing was performed by applying ultrasonic waves in a first rinse tank and a second rinse tank each having a volume of 1 liter filled with degassed water.
【0016】それぞれのリンス槽の水を変えることな
く、10籠の被洗浄品をリンスした後、ドデシルベンゼ
ンスルホン酸ナトリウム濃度を液体クロマトグラフによ
り測定したところ、第1リンス槽は293重量ppm、
第2リンス槽は20.8重量ppmであった。 [比較例1]リンス槽に、脱気していないイオン交換水
(溶存酸素濃度8.2重量ppm)を満たしたこと以外
は実施例1と同様のリンス試験を行った。10籠の被洗
浄品をリンスした後、ドデシルベンゼンスルホン酸ナト
リウム濃度は第1リンス槽は293重量ppm、第2リ
ンス槽は28.1重量ppmであった。After rinsing 10 items to be cleaned without changing the water in each rinsing tank, the sodium dodecylbenzenesulfonate concentration was measured by a liquid chromatograph. The first rinsing tank had 293 ppm by weight,
The 2nd rinse tank was 20.8 weight ppm. [Comparative Example 1] The same rinse test as in Example 1 was performed, except that the rinse tank was filled with non-degassed ion-exchanged water (dissolved oxygen concentration: 8.2 weight ppm). After rinsing 10 items to be cleaned, the sodium dodecylbenzenesulfonate concentration was 293 ppm by weight in the first rinse tank and 28.1 ppm by weight in the second rinse tank.
【0017】実施例1、比較例1とも、第1槽中の洗剤
濃度は同程度で洗剤の落ち方は同じであるが、脱気水を
用いた方が泡切れ、水切れが向上し、次槽に持ち込まれ
る洗剤量が減少した。In both Example 1 and Comparative Example 1, the concentration of the detergent in the first tank was about the same and the method of removing the detergent was the same, but the use of degassed water improved foam breakage and water drainage. The amount of detergent brought into the tank has decreased.
【0018】[0018]
【効果】リンス水として脱気水を用いることにより、リ
ンス水の表面張力低下の効果により、リンス時の泡切
れ、水切れが向上し、洗浄が効率的におこなわれるため
リンス用水の量が節約できる。特にすすぎが複数のリン
ス槽で行われる場合は、次槽へ持ち込まれる洗剤量が減
少し、リンス用水の量が節約できる。また、金属製品な
どの場合には、酸化が防止される。[Effect] By using degassed water as the rinse water, the effect of lowering the surface tension of the rinse water improves the bubbles and water loss during the rinse, and the amount of rinse water can be saved because cleaning is performed efficiently. . Especially when rinsing is performed in a plurality of rinse tanks, the amount of detergent brought into the next tank is reduced, and the amount of rinse water can be saved. In addition, in the case of metal products, oxidation is prevented.
Claims (4)
気された水を使用することを特徴とする洗浄方法。1. A cleaning method, wherein deaerated water is used as rinse water in water-based cleaning.
m以下である請求項1記載の洗浄方法。2. The dissolved oxygen concentration of the rinse water is 5 weight pp.
The cleaning method according to claim 1, wherein the cleaning method is m or less.
脱気法で脱気されたものである請求項1または2記載の
洗浄方法。3. The cleaning method according to claim 1, wherein the rinse water is degassed by a membrane vacuum degassing method or a vacuum degassing method.
れるものである請求項1、2または3記載の洗浄方法。4. The cleaning method according to claim 1, wherein the rinsing is performed by immersing the article to be cleaned in a water tank.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21150693A JPH0760209A (en) | 1993-08-26 | 1993-08-26 | Washing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21150693A JPH0760209A (en) | 1993-08-26 | 1993-08-26 | Washing method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0760209A true JPH0760209A (en) | 1995-03-07 |
Family
ID=16607065
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21150693A Pending JPH0760209A (en) | 1993-08-26 | 1993-08-26 | Washing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0760209A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6943115B2 (en) | 2000-06-23 | 2005-09-13 | Fujitsu Limited | Semiconductor device and method of manufacture thereof |
-
1993
- 1993-08-26 JP JP21150693A patent/JPH0760209A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6943115B2 (en) | 2000-06-23 | 2005-09-13 | Fujitsu Limited | Semiconductor device and method of manufacture thereof |
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