JPH0757251A - Magnetic disk substrate and its working device - Google Patents
Magnetic disk substrate and its working deviceInfo
- Publication number
- JPH0757251A JPH0757251A JP19941093A JP19941093A JPH0757251A JP H0757251 A JPH0757251 A JP H0757251A JP 19941093 A JP19941093 A JP 19941093A JP 19941093 A JP19941093 A JP 19941093A JP H0757251 A JPH0757251 A JP H0757251A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic disk
- disk substrate
- contact start
- container
- stop
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Magnetic Record Carriers (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、コンタクト・スタート
・ストップ形の磁気ディスク装置に用いられる磁気ヘッ
ドと磁気ディスクとの吸着を防止する磁気ディスク基板
とその加工装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic disk substrate for use in a contact start / stop type magnetic disk device and a magnetic disk substrate for preventing the magnetic head from being attracted to the magnetic disk and a processing apparatus therefor.
【０００２】[0002]
【従来の技術】コンタクト・スタート・ストップ形磁気
ディスク装置においては、磁気ディスク停止時に磁気ヘ
ッドと磁気ディスク媒体との間の吸着を軽減するため
に、磁気ディスク媒体の下地となる磁気ディスク基板の
表面粗さを大きくする方法が採用されているが、一方で
表面粗さが大きくなるとデータ領域における電磁変換特
性が悪化する。2. Description of the Related Art In a contact start / stop type magnetic disk device, the surface of a magnetic disk substrate which is the base of the magnetic disk medium is reduced in order to reduce the attraction between the magnetic head and the magnetic disk medium when the magnetic disk is stopped. Although a method of increasing the roughness is adopted, on the other hand, when the surface roughness increases, the electromagnetic conversion characteristics in the data area deteriorate.
【０００３】磁気ディスク媒体のコンタクト・スタート
・ストップ領域の表面粗さをデータ領域よりも粗くする
磁気ディスク媒体（例えば、特開昭５４−２３５０８号
公報）が提案された。その具体的内容は、研磨により精
密仕上げを行った後、粗い研磨紙または研磨布によりコ
ンタクト・スタート・ストップ領域４２の表面粗さをデ
ータ領域４１によりも大きくしている。A magnetic disk medium has been proposed in which the surface roughness of the contact start / stop area of the magnetic disk medium is made rougher than that of the data area (for example, Japanese Patent Laid-Open No. 54-23508). Specifically, the surface roughness of the contact start / stop region 42 is made larger than that of the data region 41 by rough polishing paper or polishing cloth after performing precision finishing by polishing.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、実際に
はコンタクト・スタート・ストップ領域を研磨で削り取
ってしまうため、図５（ａ）に示すように、コンタクト
・スタート・ストップ領域５２の全体が微小へこみとな
る。However, since the contact start / stop region is actually scraped off by polishing, the entire contact start / stop region 52 is slightly dented as shown in FIG. 5 (a). Becomes
【０００５】このため、磁気ヘッドがコンタクト・スタ
ート・ストップ領域を交又して通過するとき、微小へこ
みの箇所で磁気ヘッドが傾斜し浮揚が不安定になり、デ
ィスク媒体面に衝突して損傷させるという欠点がある。Therefore, when the magnetic head crosses and passes through the contact start / stop area, the magnetic head tilts at a minute dent and the levitation becomes unstable, causing collision and damage to the disk medium surface. There is a drawback that.
【０００６】また、特開昭６３−２４９９３３号公報の
提案によれば、あらかじめ磁気ディスク基板全面を粗仕
上げを行った後、データ領域のみ精密研磨仕上げを行い
表面粗さを小さくしている。Further, according to the proposal of Japanese Patent Laid-Open No. 63-249933, the surface of the magnetic disk substrate is rough-finished in advance, and then only the data area is precision-polished to reduce the surface roughness.
【０００７】しかしながら、この場合、実際には図５
（ｂ）に示すように、コンタクト・スタート・ストップ
領域６２のデータが領域６１に比較し微小凸部になり、
高密度記録化のために磁気ヘッドの浮揚量が微小になる
と、磁気ヘッドがコンタクト・スタート・ストップ領域
６２の微小凸部に衝突してディスク媒体面を損傷すると
いう欠点がある。However, in this case, FIG.
As shown in (b), the data of the contact start / stop area 62 becomes a minute convex portion as compared with the area 61,
If the flying height of the magnetic head becomes small for high-density recording, the magnetic head collides with a small convex portion of the contact start / stop area 62 and damages the disk medium surface.
【０００８】本発明の目的は、このような従来の課題を
解決し、磁気ディスクのコンタクト・スタート・ストッ
プ領域において、磁気ヘッドと磁気ディスク媒体との間
の吸着を防止し、かつコンタクト・スタート・ストップ
領域での磁気ヘッド浮揚安定を実現する磁気ディスク基
板および加工装置を提供することにある。An object of the present invention is to solve such a conventional problem, prevent adsorption between the magnetic head and the magnetic disk medium in the contact start / stop area of the magnetic disk, and prevent contact start / stop. It is an object of the present invention to provide a magnetic disk substrate and a processing device that realize the stability of the floating of the magnetic head in the stop area.
【０００９】[0009]
【課題を解決するための手段】本発明の磁気ディスク基
板は、データ領域とコンタクト・スタート・ストップ領
域とを有する磁気ディスク基板であって、前記コンタク
ト・スタート・ストップ領域に無数の点状微小くぼみを
備え、この点状微細くぼみの上面と前記データ領域の面
とが同一面上にあることを特徴とする。The magnetic disk substrate of the present invention is a magnetic disk substrate having a data area and a contact start / stop area, and innumerable point-like minute depressions in the contact start / stop area. And the upper surface of the dot-shaped fine depression and the surface of the data area are on the same plane.
【００１０】また、本発明の磁気ディスク基板の加工装
置は、被加工磁気ディスク基板を鉛直方向に支持して回
転する工藤軸と、この駆動軸の上方側に配設し前記被加
工磁気ディスク基板に対し砥粒を噴射する砥粒噴射ノズ
ルと、前記駆動軸の下方側に配設し前記被加工磁気ディ
スク基板を洗浄液に浸漬するための容器と、この容器内
に配設し前記洗浄中で前記被加工磁気ディスク基板の両
面に対向する超音波発振器とを備えている。Further, in the magnetic disk substrate processing apparatus of the present invention, a Kudo shaft for supporting and rotating the magnetic disk substrate to be processed and a magnetic disk substrate to be processed which is arranged above the drive shaft. Against the abrasive grain injection nozzle, a container for immersing the magnetic disk substrate to be processed in a cleaning liquid disposed below the drive shaft, and a container disposed in the container during the cleaning. And an ultrasonic oscillator facing both surfaces of the magnetic disk substrate to be processed.
【００１１】[0011]
【実施例】次に、本発明について、図面を参照して説明
する。Next, the present invention will be described with reference to the drawings.
【００１２】図１および図２は、本発明の磁気ディスク
基板の一実施例を示す平面図および断面図である。本発
明の磁気ディスク基板は、図１に示すように、その面上
にデータ領域１１とコンタクト・スタート・ストップ領
域１２とを備える磁気ディスク基板（媒体）である。1 and 2 are a plan view and a sectional view showing an embodiment of a magnetic disk substrate of the present invention. The magnetic disk substrate of the present invention is a magnetic disk substrate (medium) having a data area 11 and a contact start / stop area 12 on its surface, as shown in FIG.
【００１３】そして、図２に示すように、磁気ディスク
基板２４上にはデータを記録する媒体層２３が形成さ
れ、さらに、媒体層２３は、データ領域２１と点状微細
くぼみ２２を形成したコンタクト・スタート・ストップ
領域とからなり、このデータ領域２１の面と点状微細く
ぼみ２２の上面とが同一面上になるように形成されてい
る。As shown in FIG. 2, a medium layer 23 for recording data is formed on a magnetic disk substrate 24. Further, the medium layer 23 has a contact in which a data area 21 and point-like fine recesses 22 are formed. It is composed of a start / stop area, and is formed so that the surface of the data area 21 and the upper surface of the dot-shaped fine recess 22 are flush with each other.
【００１４】続いて、本発明の磁気ディスク基板の加工
装置について説明する。図３は、本発明の磁気ディスク
基板の加工装置の一実施例を示す断面図である。図３に
おいて、本発明の磁気ディスク基板の加工装置は、磁気
ディスク基板３０を鉛直に支持する回転軸３１を設け、
この回転軸３１の下方側にある磁気ディスク基板３０を
洗浄液３４に浸すための容器３５を備えている。そし
て、この磁気ディスク基板３０の両面に対面させて洗浄
液３４中に超音波発振器３６，３７を備えている。Next, the magnetic disk substrate processing apparatus of the present invention will be described. FIG. 3 is a sectional view showing an embodiment of a magnetic disk substrate processing apparatus of the present invention. In FIG. 3, the magnetic disk substrate processing apparatus of the present invention is provided with a rotating shaft 31 for vertically supporting the magnetic disk substrate 30,
A container 35 for immersing the magnetic disk substrate 30 below the rotary shaft 31 in the cleaning liquid 34 is provided. Then, ultrasonic oscillators 36 and 37 are provided in the cleaning liquid 34 so as to face both sides of the magnetic disk substrate 30.
【００１５】次に、磁気ディスク基板加工の一例とし
て、アルミニウム円板にＮｉ−Ｐメッキを施し、研磨仕
上げを行った磁気ディスク基板（表面粗さ０．０１μｍ
を１８０ｒｐｍの回転数で回転させながら、磁気ディス
ク基板面に粒径１μｍのアルミナ砥粒を噴射ノズルから
圧力０．５ｋｇ／ｃｍ2 で噴射し、かつ洗浄液（純水）
中の超音波発振器からの超音波（２０ｋＨｚ）を発信さ
せた。Next, as an example of processing a magnetic disk substrate, a magnetic disk substrate (surface roughness: 0.01 μm) obtained by plating an aluminum disk with Ni-P and polishing and finishing.
While rotating at a rotation speed of 180 rpm, alumina abrasive grains having a particle diameter of 1 μm are sprayed from the spray nozzle at a pressure of 0.5 kg / cm 2 onto the magnetic disk substrate surface, and a cleaning liquid (pure water) is also used.
An ultrasonic wave (20 kHz) was emitted from the ultrasonic oscillator inside.
【００１６】すなわち、砥粒噴射ノズル３２，３３から
の噴射した噴射砥粒３８，３９により磁気ディスク基板
３０の両面のコンタクト・スタート・ストップ・領域に
無数の点状微細くぼみが形成され、超音波による洗浄液
の膨張・圧縮運動の撹拌現象を利用して磁気ディスク基
板面に付着した砥粒が除去される。加工中においては、
この微細くぼみの形成と付着砥粒の除去とが交互に複数
回（例えば本実施例の場合、加工時間１０秒で３０回）
繰り替えされ、データ領域の平面んと点状微細のくぼみ
の上面とを一致させて、コンタクト・スタート・ストッ
プ・領域に無数の点状微細くぼみが形成された。That is, the spray abrasive particles 38, 39 sprayed from the abrasive spray nozzles 32, 33 form a myriad of point-shaped fine recesses in the contact start / stop regions on both sides of the magnetic disk substrate 30, and ultrasonic waves are generated. Abrasive particles adhering to the magnetic disk substrate surface are removed by utilizing the stirring phenomenon of the expansion / compression motion of the cleaning liquid due to. During processing,
The formation of the fine depressions and the removal of the adhered abrasive grains are alternately performed a plurality of times (for example, in the case of the present embodiment, the processing time is 10 seconds and 30 times).
By repeating the above process, the plane of the data area was aligned with the upper surface of the dot-shaped fine recess, and innumerable point-shaped fine recesses were formed in the contact start / stop regions.
【００１７】本実施例の場合、コンタクト・スタート・
ストップ・領域に形成された点状微細くぼみの直径は
０．２〜０．３μｍ、深さは０．０４〜０．０５μｍで
あった。このため、磁気ディスク停止中の磁気ヘッドと
磁気ディスク媒体コンタクト・スタート・ストップ・領
域との間の真実接触面積が無数の点状微細くぼみによっ
て減少し、その吸着靜摩擦係数は０．１５〜０．２０と
なりデータ領域の吸着靜摩擦係数１．０〜１．５と比較
して大幅に低減した。In the case of this embodiment, contact start,
The diameter of the dot-shaped fine depressions formed in the stop region was 0.2 to 0.3 μm, and the depth was 0.04 to 0.05 μm. For this reason, the real contact area between the magnetic head and the magnetic disk medium contact start / stop area when the magnetic disk is stopped is reduced by the innumerable point-like fine depressions, and the friction coefficient of adsorption is 0.15 to 0. The value was 20, and the coefficient of adsorption friction in the data area was significantly reduced compared to 1.0 to 1.5.
【００１８】また、データ領域面と点状微細くぼみの上
面とを一致させて、コンタクト・スタート・ストップ・
領域に無数の点状微細くぼみが形成されているので、磁
気ヘッド浮揚高さ０．０５μｍで安定に浮揚できた。Further, the data area surface and the upper surface of the dot-shaped fine recess are made to coincide with each other, and contact start / stop / stop
Innumerable point-like fine depressions were formed in the region, so that the magnetic head could be stably floated at a floating height of 0.05 μm.
【００１９】これにより、本発明の磁気ディスク基板お
よび加工装置は、コンタクト・スタート・ストップ形磁
気ディスク基板を短時間に生産性よく獲得することがで
きた。As a result, the magnetic disk substrate and the processing apparatus of the present invention were able to obtain the contact start / stop type magnetic disk substrate in a short time with good productivity.
【００２０】[0020]
【発明の効果】以上説明したように、本発明によれば磁
気ディスクのコタクト・スタート・ストップゾーンにお
いて、磁気ヘッドと磁気ディスク媒体との間の吸着を防
止し、かつコンタクト・スタート・ストップ領域での磁
気ヘッド浮揚安定を実現する磁気ディスク基板および加
工装置が得られる。As described above, according to the present invention, in the contact start / stop zone of the magnetic disk, the attraction between the magnetic head and the magnetic disk medium is prevented, and the contact start / stop area is prevented. The magnetic disk substrate and the processing apparatus that realize the floating stability of the magnetic head can be obtained.
【図１】本発明の磁気ディスク基板の一実施例を示す平
面図である。FIG. 1 is a plan view showing an embodiment of a magnetic disk substrate of the present invention.
【図２】図１の断面図である。FIG. 2 is a cross-sectional view of FIG.
【図３】本発明の磁気ディスク基板の加工装置の一実施
例を示す断面図である。FIG. 3 is a sectional view showing an embodiment of a magnetic disk substrate processing apparatus of the present invention.
【図４】従来のコンタクト・スタート・ストップ形磁気
ディスク基板の一例を示す平面図である。FIG. 4 is a plan view showing an example of a conventional contact start / stop type magnetic disk substrate.
【図５】図４の断面図である。5 is a cross-sectional view of FIG.
１１，２１，４１，５１，６１ データ領域 １２，４２，５２，６２ コンタクト・スタート・ス
トップ領域 ２２ 点状微細くぼみ ２３，５３，６３ 媒体層 ２４，３０，５４，６４ 磁気ディスク ３１ 回転軸 ３２，３３ 砥粒噴射ノズル ３４ 洗浄液 ３５ 容器 ３６，３７ 超音波発振器 ３８，３９ 噴射砥粒11, 21, 41, 51, 61 Data area 12, 42, 52, 62 Contact start / stop area 22 Point-shaped fine depression 23, 53, 63 Medium layer 24, 30, 54, 64 Magnetic disk 31 Rotation axis 32, 33 Abrasive Grain Injection Nozzle 34 Cleaning Liquid 35 Container 36, 37 Ultrasonic Oscillator 38, 39 Spray Abrasive Grain
Claims (2)
トップ領域とを有する磁気ディスク基板であって、前記
コンタクト・スタート・ストップ領域に無数の点状微細
くぼみを備え、この点状微細くぼみの上面と前記データ
領域の面とが同一面上にあることを特徴とする磁気ディ
スク基板。1. A magnetic disk substrate having a data area and a contact start / stop area, wherein the contact start / stop area is provided with an infinite number of dot-shaped fine recesses, and the upper surface of the dot-shaped fine recesses and the A magnetic disk substrate characterized in that the surface of the data area is on the same surface.
装置であって、被加工磁気ディスク基板を鉛直方向に指
示して回転する駆動軸と、この駆動軸の上方側に配設し
前記被加工磁気ディスク基板に対し砥粒を噴射する砥粒
噴射ノズルと、前記駆動軸の下方側に配設し前記被加工
磁気ディスク基板を洗浄液に浸漬するための容器と、こ
の容器内に配設し前記洗浄液中で前記被加工磁気ディス
ク基板の両面に対向する超音波発振器とを備えることを
特徴をする磁気ディスク基板の加工装置。2. The magnetic disk substrate processing apparatus according to claim 1, wherein the magnetic disk substrate to be processed is directed in a vertical direction to rotate, and a drive shaft is provided above the drive shaft. An abrasive grain injection nozzle for injecting abrasive grains onto the processed magnetic disk substrate, a container for arranging the magnetic disk substrate under the drive shaft to immerse the processed magnetic disk substrate in a cleaning liquid, and a container for arranging the container in the container. An apparatus for processing a magnetic disk substrate, comprising: an ultrasonic oscillator facing both surfaces of the magnetic disk substrate to be processed in the cleaning liquid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5199410A JP2643783B2 (en) | 1993-08-11 | 1993-08-11 | Magnetic disk substrate processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5199410A JP2643783B2 (en) | 1993-08-11 | 1993-08-11 | Magnetic disk substrate processing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0757251A true JPH0757251A (en) | 1995-03-03 |
| JP2643783B2 JP2643783B2 (en) | 1997-08-20 |
Family
ID=16407343
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5199410A Expired - Fee Related JP2643783B2 (en) | 1993-08-11 | 1993-08-11 | Magnetic disk substrate processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2643783B2 (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6476528A (en) * | 1987-09-18 | 1989-03-22 | Toshiba Corp | Magnetic recording medium |
| JPH02223015A (en) * | 1989-02-22 | 1990-09-05 | Mitsubishi Electric Corp | Magnetic disk and production thereof |
| JPH04172616A (en) * | 1990-11-07 | 1992-06-19 | Ricoh Co Ltd | Magnetic disk |
-
1993
- 1993-08-11 JP JP5199410A patent/JP2643783B2/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6476528A (en) * | 1987-09-18 | 1989-03-22 | Toshiba Corp | Magnetic recording medium |
| JPH02223015A (en) * | 1989-02-22 | 1990-09-05 | Mitsubishi Electric Corp | Magnetic disk and production thereof |
| JPH04172616A (en) * | 1990-11-07 | 1992-06-19 | Ricoh Co Ltd | Magnetic disk |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2643783B2 (en) | 1997-08-20 |
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