JPH02237769A - Feeding method for work liquid - Google Patents

Abstract

PURPOSE:To prevent the cohesion of a residue caused at working time and to wash a residual particle efficiently so as to increase the accuracy of a finishing face by giving a high frequency vibration to the work liquid fed to the surface of the body to be worked. CONSTITUTION:A grinding tape 2 is pressed by a rubber roller 3 to the coating face of the magnetic disk 1 under rotation. In this case, the grinding tape 2 is traveled to feed the work liquid to the surface of the magnetic disk 1. Fo this work liquid, a high frequency trembler 4 is vibrated and fed to the coating face as a high frequency vibration water flow 6 by a high frequency vibration nozzle 5. Thus the cohesion of the residue caused at working time can be prevented by giving a high frequency vibration to the work liquid, the residual particle is efficiently washed away and the surface of the magnetic disk 1 can be finished by polishing with good accuracy without accompanying any scratch.

Description

[Detailed description of the invention] [Industrial application field] The present invention relates to machining using machining fluid.

[Conventional technology]

For example, in the conventional manufacturing process of magnetic recording media, when processing the surface of the medium using an abrasive tape, a nozzle is used to inject processing fluid onto the surface of the medium to be processed. Related technologies include:
It is described in Japanese Patent Application Laid-Open No. 57-64332. That is, this is a cleaning method in the surface finishing process in which a polishing cloth made of organic fibers is pressed against the surface of the medium while flowing a large amount of water.

[Problems to be Solved by the Invention] The above-mentioned conventional technology does not give consideration to the method of supplying machining fluid when machining the surface of a workpiece using a machining member such as a grinding tape or a grinding wheel, and it・There were problems in draining the processing residual liquid, clogging, and forming a good finish.

For example, when processing the media surface with a grinding tape, the processing residue, which is made up of magnetic powder, resin, or dropped abrasive grains generated during processing, will aggregate if not washed away efficiently, causing scratches that are caused by scratches. Become.

The purpose of the present invention is to promote removal of residue during processing of the surface of a workpiece, to always perform processing on the surface of the workpiece under a clean surface condition, and to provide a highly accurate finished surface without scratches. There is a particular thing.

[Means to solve the problem]

In order to achieve the above objective, high-frequency vibrations are added to the machining fluid supplied to the machining surface of the workpiece.

[Effect]

By applying high-frequency vibrations to the machining fluid supplied to the machining surface of the workpiece, it is possible to prevent agglomeration of machining residues generated during machining due to the separation effect of the vibrations. Among these, when processing the media surface using abrasive tape,
Submicron-order residual particles that could not be removed by high-pressure water jets, shower brushing, etc. can be efficiently washed away from the medium surface by shaking. 6 Therefore, the surface of the workpiece can always be processed with a clean surface condition. As a result, a highly accurate finished surface without scratches can be obtained.

〔Example〕

A first embodiment of the present invention will be explained below using FIGS. 1 to 4 using coating processing of a magnetic disk. The second embodiment will be explained using FIG. 5 using texture processing of a thin film magnetic disk. As a third embodiment, polishing of a thin film magnetic head will be described with reference to FIG.

First embodiment: A magnetic disk 1 is fixed to a disk fixing shaft (not shown) and rotated. A grinding tape 2 is pressed against the coated surface of the magnetic disk 1 from the back side using a rubber roller 3 which is a pressing member. At this time, the grinding tape 2 is run to supply machining fluid to the surface of the magnetic disk 1. The machining fluid used is either pure water or a water-soluble grinding fluid containing components such as a roughness improver and a synthetic lubricant. A high frequency vibrator 4 is vibrated with respect to these machining liquids, and a high frequency vibrating nozzle 5 supplies the machining liquid to the coating surface as a high frequency vibrating water stream 6. In this example, Q
, 8 MHz to 3 MHz high frequency vibration is applied to the machining fluid, and the tip hole diameter of the high frequency vibration nozzle 5 is φIIllm to φi.
- O m, the distance from the coating surface of the magnetic disk 1 is 5
ws- 10 ua, flow rate is 0. 5 Q/oi
In-3 Q/win.

The high-frequency vibrating nozzle 5 is installed in such a way that a high-frequency vibrating water stream can be supplied to the boundary between the grinding tape 2 pressed from the back side by the rubber roller 3 and the coated surface of the magnetic disk 1 where the grinding tape 2 contacts. Make it. In order to supply the high-frequency vibrating water stream to the coated surface of the magnetic disk 1 not at a constant location but all over the surface, the arm attached to the high-frequency vibrating nozzle 5-1 is moved around the radius by the swinging mechanism of the eccentric cam. be able to move in the direction.

Next, by adjusting the set angle of the high-frequency vibrating water nozzle 5-1 with respect to the coating surface, it is possible to supply the water to the surface of the abrasive tape 2 that is run to process the coating surface. With this mechanism, it is possible to remove metallic foreign matter or dirt such as dust that adheres to the surface of the grinding tape 2, which is one of the causes of scratches, and to perform processing with a clean surface of the grinding tape 2. I can do it.

Furthermore, high frequency vibration nozzle 5-1. Also attach it to the opposite side of the grinding tape 2 by 1780 degrees. This high-frequency vibrating nozzle 5-2 is designed to efficiently wash away residues from processing, so that the coating surface can always be kept clean during processing.

FIGS. 3 and 4 show the incidence of scratches and microscratches in the present invention. Note that a scratch is a scratch whose size exceeds the permissible limit for visual inspection, and a minute scratch is a small scratch that does not exceed the permissible limit for visual inspection.

The present invention, which applies high-frequency vibrations to the machining fluid supplied to the media machining machine, has made it possible to form highly accurate finished surfaces by reducing scratches and microscratches.Second Example Workpiece, workpiece, and machining fluid As a second example in which surface accuracy is required in a processing apparatus using the lithography method, texture processing of a thin film magnetic disk will be explained with reference to FIG.

In order to prevent adsorption with the magnetic head, the Ni-P substrate is subjected to fine surface roughening in concentric circles in the circumferential direction of the substrate to the extent that the electromagnetic characteristics are not degraded, and the texture processing to form fine irregularities is as follows. Based on the schematic configuration.

That is, the substrate 7 is fixed to a disk fixing shaft (not shown) and rotated. As an abrasive, a polishing liquid having diamond abrasive grains is vibrated by a high-frequency vibrator 4, and a high-frequency vibrating nozzle 5 converts the polishing liquid into a high-frequency vibrating water stream 6 to a polishing tape 8.
supply to. This is a mechanism in which the polishing tape 8 that has absorbed the polishing liquid and has the polishing agent attached thereto is pressed by a pressure guide 9 to contact the surface of the substrate 7, and is run at a predetermined feed rate to process the surface of the substrate 7. Note that in this example, high frequency vibration of 0.8 to 3 M I{z is applied to the polishing slurry and polishing liquid, as in the first example.

Similar to the coating process for magnetic disks, high-frequency vibrations are applied to the abrasive and polishing liquid to form a highly accurate machined surface that does not generate scratches.

Third Embodiment As a third embodiment, a method of polishing a thin film head for a magnetic disk drive will be described with reference to FIG.

To polish a thin-film magnetic head, a slider block 10 carrying a plurality of thin-film magnetic heads is attached to a jig 1-1, and the floating body of the block 10 and a polishing surface plate 12 having a predetermined shape are connected with a diamond or other polishing plate. This is a method of machining the above-mentioned floating surface to a predetermined gap depth/t method by causing relative movement while supplying abrasive grains and machining liquid such as oil through a nozzle. Here, as in the first and second embodiments, diamond or other abrasive grains and machining liquid such as oil
．． By applying high-frequency vibrations of 8 to 3 MHz, highly accurate processed surface formation without scratches can be obtained.

〔Effect of the invention〕

According to the present invention, it is possible to prevent the agglomeration of residue generated when processing the surface of a workpiece and to efficiently wash away the residue particles, so that a highly accurate finished surface without scratches can be formed.

[Brief explanation of drawings]

Fig. 1 is a schematic explanatory diagram of a coating film processing device according to an example of the present invention, Fig. 2 is a detailed explanatory diagram of a high-frequency vibrating water jet nozzle, and Figs. 3 and 4 show the incidence of scratches and minute scratches. FIG. 5 is a schematic illustration of texturing of a thin film magnetic disk, and FIG. 6 is a schematic illustration of polishing of a thin film magnetic head. 1. Magnetic disk, 2.. Grinding tape, 3.. Rubber roller, 4.. High frequency vibration, 5. (5-1.5-2)
...High frequency vibration nozzle, 6..High frequency vibration water flow, 7.
... Substrate, 8... Polishing tape, 9... Pressure guide,
10...Slider block, ]1,...Jig, 12
... Polishing surface plate. 3rd figure 4th grader

Claims (1)

[Claims] 1. In the processing process of a workpiece, in a processing device that processes the surface of the workpiece using a processing member such as a grinding tape or a grinding wheel, high-frequency vibrations are applied to the machining fluid supplied to the surface of the workpiece. Characteristic machining fluid supply method.