JPH02223015A - Magnetic disk and production thereof - Google Patents
Magnetic disk and production thereofInfo
- Publication number
- JPH02223015A JPH02223015A JP4221889A JP4221889A JPH02223015A JP H02223015 A JPH02223015 A JP H02223015A JP 4221889 A JP4221889 A JP 4221889A JP 4221889 A JP4221889 A JP 4221889A JP H02223015 A JPH02223015 A JP H02223015A
- Authority
- JP
- Japan
- Prior art keywords
- zone
- magnetic disk
- head slider
- data zone
- floating head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 3
- 238000007667 floating Methods 0.000 claims abstract description 41
- 230000003746 surface roughness Effects 0.000 claims abstract description 33
- 238000000034 method Methods 0.000 claims description 5
- 238000007517 polishing process Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 15
- 239000010408 film Substances 0.000 description 9
- 239000010410 layer Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 239000000725 suspension Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 229910018134 Al-Mg Inorganic materials 0.000 description 2
- 229910018467 Al—Mg Inorganic materials 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 238000007790 scraping Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- 229910018104 Ni-P Inorganic materials 0.000 description 1
- 229910018536 Ni—P Inorganic materials 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野コ
この発明は、磁気ディスク装置に搭載される磁気ディス
ク及び製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic disk mounted in a magnetic disk device and a manufacturing method.
［従来の技術］
コンピュータの外部記憶装置の一つである固定磁気ディ
スク装置は、主に磁気ディスクと浮動ヘッドスライダで
構成され、側光ば第２図のように三矢保永「磁気ディス
ク装置における超精密技術」日本機械学会誌ＶＯＬ、
８７． Ｎｏ、 ７９１． Ｐ、 ７９．昭和５９年
１０月に示されている。図において（５）は基板に形成
された磁気記録媒体層に情報が記録される磁気ディスク
、（６〉は磁気ディスク（５）に情報を書込んだり読出
したりする浮動ヘッドスライダ、（７）は浮動ヘッドス
ライダ（６）を磁気ディスク〈５〉に押し付けるサスベ
ンジ目ン、（８）は磁気ディスク（５）を図中矢印方向
に回転させるスピンドルである。[Prior Art] A fixed magnetic disk drive, which is one of the external storage devices for computers, mainly consists of a magnetic disk and a floating head slider. "Precision Technology" Journal of the Japan Society of Mechanical Engineers VOL,
87. No. 791. P, 79. Shown in October 1981. In the figure, (5) is a magnetic disk on which information is recorded on a magnetic recording medium layer formed on a substrate, (6> is a floating head slider that writes and reads information on the magnetic disk (5), and (7) is a magnetic disk that records information on a magnetic recording medium layer formed on a substrate. A suspension device (8) is used to press the floating head slider (6) against the magnetic disk (5), and a spindle (8) rotates the magnetic disk (5) in the direction of the arrow in the figure.
このように構成された磁気ディスク装置において、磁気
ディスクに情報を書込んだり読出したりする場合、磁気
ディスクを矢印方向に高速回転（例えば３６００ ｒｐ
ｍ）させる。 この回転により生じる空気流で、浮動ヘ
ッドスライダ（６）は空気軸受けの原理で、磁気ディス
ク（５〉の表面よりサブミクロンの隙間を保って浮上す
る。すなわち、サスベンジーン（７）の押付力と空気流
の押上刃が釣り合って、浮動ヘッドスライダ（６）は安
定浮上する。In a magnetic disk device configured in this way, when writing or reading information to or from a magnetic disk, the magnetic disk is rotated at high speed in the direction of the arrow (for example, 3600 rpm).
m) let. Due to the air flow generated by this rotation, the floating head slider (6) floats above the surface of the magnetic disk (5) with a submicron gap on the principle of air bearing.In other words, the pressing force of the suspension gene (7) and the air The floating head slider (6) floats stably as the push-up blades of the current are balanced.
磁気ディスク装置を使用しないときは、スピンドル（８
〉の回転は停止し、浮動ヘッドスライダ（６）はサスベ
ンジ日ン（７）により押し付けられて磁気ディスクク５
）上に接触した状態となる。第２図（０）は磁気ディス
ク装置の側面図で、（ｂ）は稼働時（磁気ディスクは回
転している）、（Ｃ）は停止時（磁気ディスクは静止し
ている）をそれぞれ示す浮動ヘッドスライダ付近の拡大
図である。When the magnetic disk drive is not in use, the spindle (8
> stops rotating, and the floating head slider (6) is pressed by the suspension head (7) and the magnetic disk 5
) is in contact with the top. Figure 2 (0) is a side view of the magnetic disk device, (b) is a floating state when it is in operation (the magnetic disk is rotating), and (C) is when it is stopped (the magnetic disk is stationary). FIG. 3 is an enlarged view of the vicinity of the head slider.
磁気ディスク装置は以上のような構成を有するため、磁
気ディスクの始動時には浮動ヘッドスライダは磁気ディ
スク表面を擦りながら浮上し、停止時には同様に擦りな
がら着陸する。この動作をコンタクト令スタート・スト
ップ（ＣＳ Ｓ）という。Ｃ８Ｓ方式の磁気ディスクで
は、通常表面粗さはＲｚ５００Å以上に仕上げられてい
る。これは停止時に浮動ヘッドスライダと磁気ディスク
との吸着を防ぐためである。例えば塗布型ディスクでは
、塗布膜に含まれたアルミナ粒子が突起上にとび出して
おり、通常表面粗さはＲＺ＞１０００人である（用久保
洋−はか：塗布型磁気ディスクのＣ８／Ｓ時のへッドク
ラッシ４発生過程の検討、精密工学会誌、 ５４−５
． Ｐ、７３（１９８８））。Since the magnetic disk drive has the above configuration, the floating head slider flies up while scraping the surface of the magnetic disk when the magnetic disk is started, and lands while scraping in the same manner when the magnetic disk is stopped. This operation is called contact command start/stop (CSS). C8S type magnetic disks are usually finished with a surface roughness of Rz 500 Å or more. This is to prevent the floating head slider from adhering to the magnetic disk when stopped. For example, in coated type disks, the alumina particles contained in the coated film protrude onto the protrusions, and the surface roughness is usually RZ>1000 (Hiroshi Yakubo: C8/S of coated type magnetic disks). Study on the generation process of head crush 4, Journal of the Japan Society for Precision Engineering, 54-5
．． P, 73 (1988)).
また、薄膜磁気ディスクでは媒体を成膜する前に基板に
研磨テープで同心円状に溝をつくるが、基板の表面粗さ
Ｒｚ５００〜１０００人に仕上げると、基板の上に媒体
及び保護膜をつけた後も表面粗さは５０ＯＮ１０００人
となる（例えばＥ、 Ｍ、 Ｒｏｓｓｉ、 ｅｔ ａｌ
：Ｖａｃｕｕｍ−ｄｅｐｏｓｉｔｅｄ ｔｈｉｎ−＊
ｅｔａｌ−ｆｉ１ｍ ｄｉｓｋ。In addition, for thin-film magnetic disks, concentric grooves are created on the substrate using abrasive tape before the medium is deposited, but if the surface roughness of the substrate is finished to Rz 500 to 1000, it is possible to attach the medium and protective film on the substrate. After that, the surface roughness remains 50ON1000 (for example, E, M, Rossi, et al.
:Vacuum-deposited thin-*
etal-fi1m disk.
Ｊ、 Ａｐｐｌ、 Ｐｈｙｓ、 ５５（６＞、 １５１
１ａｒｃｈ ｐ、 ２２５４＜１９８４））。J, Appl, Phys, 55(6>, 151
1arch p, 2254<1984)).
［発明が解決しようとする課題］
磁気ディスク装置では媒体の記録密度を上げようとする
と、浮動ヘッドスライダと磁気ディスクの間隔を小さく
する必要があり、現在、その間隔は ０．２μｍ以下の
ものが求められている。これに対し、従来の磁気ディス
クは、上記のように表面粗さが Ｒｚ５００Å以上に構
成されているため、間隔を少なくすると、間隔に対する
°表面粗さの割合が大きいため、浮動へ９トスライダと
磁気ディスクが接触したり、表面粗さのため電磁変換特
性が劣化する。また、磁気ディスクの表面粗さを小さく
すると、磁気ディスク装置が停止している時に、浮動ヘ
ッドスライダと磁気デ（スフが吸着し、磁気ディスクが
回転を始めても浮動ヘッドスライダが浮上できず、浮動
ヘッドスライダが破損する。[Problem to be solved by the invention] In order to increase the recording density of the medium in a magnetic disk device, it is necessary to reduce the distance between the floating head slider and the magnetic disk, and currently, the distance is 0.2 μm or less. It has been demanded. On the other hand, conventional magnetic disks have a surface roughness of Rz500 Å or more as mentioned above, so if the spacing is reduced, the ratio of the surface roughness to the spacing is large, so the floating slider and magnetic Electromagnetic conversion characteristics deteriorate due to disc contact or surface roughness. In addition, if the surface roughness of the magnetic disk is reduced, the floating head slider and the magnetic disk will stick together when the magnetic disk drive is stopped, and even when the magnetic disk starts rotating, the floating head slider will not be able to fly, causing the floating head slider to stick to the magnetic disk. The head slider is damaged.
また、吸着が解除されても磁気ディスクと浮動ヘッドス
ライダ間の摩擦係数が大きいため、磁気ディスクが回転
を始め、或は停止する時に浮動ヘッドスライダが磁気デ
ィスク表面に傷を付けるという課題があった。Furthermore, even after the adsorption is released, the coefficient of friction between the magnetic disk and the floating head slider is large, so when the magnetic disk starts or stops rotating, the floating head slider may scratch the surface of the magnetic disk. .
二の発明は、上記のような課題を解消するためになされ
たもので、ディスクの記録密度を上げるため、浮動ヘッ
ドスライダと磁気ディスクの間隔を小さくしても、浮動
ヘッドスライダと磁気デイラフが接触したり、表面粗さ
のために電磁変換特性が劣化したりすることがなく、ま
た、停止時に浮動ヘッドスライダと磁気ディスクの吸着
のない磁気ディスクを得ることを目的とする。The second invention was made to solve the above-mentioned problems.In order to increase the recording density of the disk, even if the distance between the floating head slider and the magnetic disk is reduced, the floating head slider and the magnetic day rough do not come into contact with each other. To obtain a magnetic disk that does not cause deterioration of electromagnetic conversion characteristics due to surface roughness, and also does not cause attraction between a floating head slider and the magnetic disk when stopped.
［課題を解決するための手段］
この発明に係わる磁気ディスクは、情報を書込み読出し
を行うヘッドスライダが、接触摺動、又は停止する待避
ゾーンと、情報を記録するデータゾーンとを有し、上記
待避ゾーンの表面粗さを、上記データゾーンのそれより
も粗くし、上記待避ゾーンとデータゾーンのそれぞれに
おける表面の凹凸の凸部の頂上の高さを均一にし、かつ
、上記待避ゾーンとデータゾーンの表面の凹凸の凸部の
頂上の高さを一致させたものである。[Means for Solving the Problems] A magnetic disk according to the present invention has a retreat zone in which a head slider that writes and reads information slides in contact with or stops, and a data zone in which information is recorded. The surface roughness of the evacuation zone is made rougher than that of the data zone, and the height of the top of the convex portion of the surface unevenness in each of the evacuation zone and the data zone is made uniform, and the evacuation zone and the data zone are made uniform. The heights of the tops of the convex and convex portions of the surface are made to match.
また、情報を書込み読出しを行う浮動ヘッドスライダが
、接触摺動、又は停止する待避ゾーンと、情報を記録す
るデータゾーンとを有し、上記待避ゾーンの表面粗さを
、上記データゾーンのそれよりも粗くなるように加工し
た後、遊離砥粒ポリッシング加工により、上記待避ゾー
ンとデータゾーンのそれぞれにおける表面の凹凸の凸部
の頂上の高さを均一にし、かつ、上記待避ゾーンとデー
タゾーンの表面の凹凸の凸部の頂上の高さを一致させた
て製造した。In addition, the floating head slider that writes and reads information has a retraction zone where it contacts, slides or stops, and a data zone where information is recorded, and the surface roughness of the retraction zone is set to be higher than that of the data zone. After processing to make the surface rough, a free abrasive polishing process is performed to make the heights of the tops of the convexities of the surface irregularities in each of the above-mentioned withdrawal zone and data zone uniform, and to make the surfaces of the above-mentioned withdrawal zone and data zone The height of the top of the convex part of the unevenness was made to match.
［作 用］
この発明における磁気ディスクは、浮動へフドスライ、
ダが、接触摺動、又は停止する待避ゾーンと、情報を記
録するデータゾーンとを有し、上記待避ゾーンの表面粗
さを、上記データゾーンのそれよりも粗くすることによ
り、磁気ディスク装置停止時のヘッドスライダと磁気デ
ィスクの吸着を防止することができる。また、浮動ヘッ
ドスライダが実際に浮上し、情報を読み書きする部分（
データゾーン）においては、表面粗さを小さくし、表面
粗さによる記録再生への悪影響を少なくするとともに、
データゾーン浮上時における浮動ヘッドスライダと磁気
ディスクの接触を防止する二とができる。さらに、待避
ゾーンとデータゾーンとの表面高さを一致させることに
より、浮上中のヘッドスライダが待避ゾーンからデータ
ゾーン、データゾーンから待避ゾーンに移動するときの
ヘッドスライダの浮上状態に擾乱を与光ないようにする
ことができる。[Function] The magnetic disk according to the present invention has a floating magnetic disk.
The magnetic disk drive is stopped by making the surface roughness of the evacuation zone rougher than that of the data zone. This can prevent the head slider from adhering to the magnetic disk. Also, the part where the floating head slider actually floats and reads and writes information (
data zone), the surface roughness is reduced to reduce the negative impact of surface roughness on recording and playback.
It is possible to prevent contact between the floating head slider and the magnetic disk when the data zone is flying. Furthermore, by matching the surface heights of the evacuation zone and the data zone, light is applied to the flying state of the head slider when the flying head slider moves from the evacuation zone to the data zone and from the data zone to the evacuation zone. It is possible to avoid this.
また、磁気ディスク基板を加工する際、待避ゾーンとデ
ータゾーンでそれぞれ研磨テープの粗いもの細かいもの
で加工する必要があるが、このようにすると待避ゾーン
の表面凸部の山の高さは、データゾーンの山の高さより
低（なる。そのためこの後でポリッング加工を施すと２
９のゾーンでの山の高さは一致するようになり、この発
明の磁気ディスクが効果的に製造できる。In addition, when processing magnetic disk substrates, it is necessary to process the evacuation zone and data zone with coarse and fine abrasive tape, respectively, but in this way, the height of the peaks of the surface convexities in the evacuation zone will be It is lower than the height of the mountain in the zone. Therefore, if you apply the polishing process after this,
The heights of the peaks in zone 9 are now the same, and the magnetic disk of the present invention can be effectively manufactured.
［実施例コ 以下この発明の一実施例について説明する。[Example code] An embodiment of this invention will be described below.
先ず、５．２５インチ磁気ディスク基板の加工方法につ
いて説明する。 Ａｌ−Ｍｇ合金基板上に、下地硬化層
Ｎ１−Ｐを約１５μｍ無電解メツキし、これをポリッ
シュにより表面粗さ Ｒｚｌ ００Å以下に仕上げ、二
の基板面に研磨テープにより、同心円状のうねりをつけ
る。まず基板を ２００ ｒｐｍで回転させながら３０
００番の研磨テープを半径４０ｍｍ以下の部分を表面粗
さ Ｒｚ２０００人に加工する。First, a method for processing a 5.25-inch magnetic disk substrate will be explained. On the Al-Mg alloy substrate, a hardened base layer N1-P of about 15 μm is electrolessly plated, and this is polished to a surface roughness of Rzl 00 Å or less, and concentric undulations are created on the second substrate surface using a polishing tape. . First, while rotating the board at 200 rpm,
Process a No. 00 abrasive tape to a surface roughness of Rz2000 at a radius of 40 mm or less.
次に基板を ２０ Ｏｒｐｍで回転させながら基板表面
全体に４０００番の研磨テープで半径４０ｍｍ以上の部
分が Ｒｚ５００ 人になるようにする。最後に表面を
わずかに遊離砥粒でポリウシ−し、凸部の高さをそろえ
る。この時点で半径４０ｒｎｍ以内は、表面の凹凸の凸
部の頂上の高さが均一で、表面粗さ Ｒｚ１０００人、
半径４０ｍｍ以上では、表面の凹凸の凸部の頂上の高さ
が均一で、表面粗さ Ｒｚ２００人の基板ができ上がり
半径４０ｍｍ内外において、表面の凹凸の凸の部分の頂
上の高さが一致している。最後にポリッシングを施して
いるため、この基板にＣｏ−Ｎｉ からなる金属媒体
膜及びカーボンからなる保護膜をスパッタリングにより
形成する。媒体膜、保護膜をつけても、基板面の面の表
面粗さはそのまま維持される。第１図はこのようにして
作製した薄膜磁気ディスクの断面図である。り１〉はＡ
ｌ−Ｍｇ基板、（２）は下地硬化層（Ｎｉ−Ｐ無電解メ
ツキ膜）、（３〉は媒体層、（４）は保護層、〈９）は
待避ゾーン、（ｌＯ〉はデータゾーンである。Next, while rotating the substrate at 20 rpm, apply No. 4000 abrasive tape over the entire surface of the substrate so that the area with a radius of 40 mm or more has an Rz of 500. Finally, polish the surface slightly with free abrasive grains to make the heights of the convex parts the same. At this point, within a radius of 40 nm, the height of the top of the convex part of the surface unevenness is uniform, and the surface roughness is Rz1000.
At a radius of 40 mm or more, the height of the top of the convex part of the surface unevenness is uniform, and the height of the top of the convex part of the convex part of the surface roughness is the same inside and outside the radius of 40 mm. There is. Since polishing is performed last, a metal medium film made of Co--Ni and a protective film made of carbon are formed on this substrate by sputtering. Even if a medium film and a protective film are applied, the surface roughness of the substrate surface remains unchanged. FIG. 1 is a sectional view of a thin film magnetic disk manufactured in this manner. ri1> is A
l-Mg substrate, (2) is the base hardening layer (Ni-P electroless plating film), (3> is the medium layer, (4) is the protective layer, <9) is the evacuation zone, (lO> is the data zone) be.
浮動ヘッドスライダは通常半径４０ＩＩＩｍ以下の部分
でＣ８Ｓ動作を行う。上記のようにこの磁気デ（六りは
この部分の表面粗さ Ｒｚｌ ０００人と大きいため、
浮動ヘッドスライダ停止時のヘッドスライダと磁気ディ
スクの間の吸着は起こらない。The floating head slider normally performs C8S operation in a portion with a radius of 40 m or less. As mentioned above, this magnetic field has a large surface roughness of Rzl 000, so
Attraction between the head slider and the magnetic disk does not occur when the floating head slider is stopped.
他方通常浮動ヘッドスライダが浮上する半径４０１１ｎ
ｔ以上の部分では、磁気ディスクの表面粗さは、Ｒｚ２
００Å以下と小さく、浮上量が ０．１μｍと小さくと
も表面粗さはその１１５程度の大きさなので、表面粗さ
が電磁変換特性に及ぼす影響は歩な（、かつ、浮動ヘッ
ドスライダと突起が衝突する確率も少ない。On the other hand, the radius at which the floating head slider normally flies is 4011n.
In the area above t, the surface roughness of the magnetic disk is Rz2
Even if the flying height is as small as 0.00 Å or less and the flying height is as small as 0.1 μm, the surface roughness is only about 115 μm, so the effect of surface roughness on the electromagnetic conversion characteristics is negligible (and the impact of collision between the floating head slider and the protrusion is negligible). The probability of doing so is also low.
この実施例では磁気ディスクの径は、 ５１八インチと
したが、 １４インチ、３，５インチ、２インチでもよ
く、また媒体は Ｃｏ−Ｎｉスパッタ膜としたが、 γ
−Ｆｅ２０ａ スパッタ膜でもよい。また、加工法と
して待避ゾーンを先に３０００番の研磨テープであらし
、次に全体を４０００番の研磨テープであらしたが、逆
に４０００番の研磨テープで全面を加工し、次に３００
０番の研磨テープで待避ゾーンを加工してもよい。In this example, the diameter of the magnetic disk was 518 inches, but it could be 14 inches, 3.5 inches, or 2 inches, and the medium was a Co-Ni sputtered film, but γ
-Fe20a sputtered film may be used. In addition, as a processing method, first the shelter zone was sanded with No. 3000 abrasive tape, and then the entire surface was sanded with No. 4000 abrasive tape.
The retraction zone may be processed using No. 0 abrasive tape.
［発明の効果］
以上のようにこの発明によれば、浮動ヘッドスライダが
、接触摺動、又は停止する待避ゾーンと、情報を記録す
るデータゾーンとを有し、上記待避ゾーンの表面粗さを
、上記データゾーンのそれよりも粗くすることにより、
磁気ディスク装置停止時の浮動ヘッドスライダと、磁気
ディスクの吸着を防止することができる。 また、浮
動ヘッドスライダが実際に浮上し、情報を読み書きする
部分くデータゾーン）においては１表面粗さを小さくし
たので、表面粗さによる記録再生への悪影響を少なくす
るとともに、表面粗さの突起部が浮動ヘッドスライダと
接触する確率も少なくなる効果がある。さらに、待避ゾ
ーンとデータゾーンの表面の凹凸の凸部の頂上の高さを
一致させたので、待避ソーンとデータゾーンの境界を浮
動ヘッドスライダが通過する時も、浮上量の変化が起こ
らず、浮上状態に擾乱を与えないようにすることができ
る。[Effects of the Invention] As described above, according to the present invention, the floating head slider has a retraction zone in which contact slides or stops, and a data zone in which information is recorded, and the surface roughness of the retraction zone is reduced. , by making it coarser than that of the above data zone,
It is possible to prevent the floating head slider from adhering to the magnetic disk when the magnetic disk device is stopped. In addition, the surface roughness has been reduced in the data zone (the part where the floating head slider actually flies and reads and writes information), which reduces the negative effect of surface roughness on recording and playback, and also reduces the surface roughness of the surface roughness. This also has the effect of reducing the probability that the part will come into contact with the floating head slider. Furthermore, since the heights of the tops of the convex and convex portions on the surfaces of the retraction zone and data zone are made to match, there is no change in the flying height when the floating head slider passes the boundary between the retraction zone and the data zone. It is possible to avoid disturbing the floating state.
第１図はこの発明の一実施例による磁気ディスクの断面
図、第２図は従来の浮動ヘッドスライダと磁気ディスク
で、（ａ）はその概念図、（ｂ）は磁気ディスク装置の
稼働時の拡大図、（ｃ）は磁気ディスク装置の停止時の
拡大図である。
図において（１）はＡｌ−Ｍｇ基板、（２）は下地硬化
層、（３ンは媒体層、（４月よ保護層、（５）は磁気デ
ィスク、〈６）は浮動ヘッドスライダ、〈７）はサスベ
ンジ日ン、（８〉はスピンドル、（９）は待避ゾーン、
（１０）はデータゾーンである。Fig. 1 is a cross-sectional view of a magnetic disk according to an embodiment of the present invention, Fig. 2 is a conventional floating head slider and magnetic disk, (a) is a conceptual diagram thereof, and (b) is a magnetic disk drive during operation. Enlarged view (c) is an enlarged view when the magnetic disk device is stopped. In the figure, (1) is the Al-Mg substrate, (2) is the base hardening layer, (3) is the medium layer, (4) is the protective layer, (5) is the magnetic disk, (6) is the floating head slider, (7) is the ) is the suspension day, (8> is the spindle, (9) is the evacuation zone,
(10) is a data zone.
Claims (2)
込み読出しを行う浮動ヘッドスライダが、接触摺動、又
は停止する待避ゾーンと、情報を記録するデータゾーン
とを有し、上記待避ゾーンの表面粗さを、上記データゾ
ーンのそれよりも粗くし、上記待避ゾーンとデータゾー
ンのそれぞれにおける表面の凹凸の凸部の頂上の高さを
均一にし、かつ、上記待避ゾーンとデータゾーンの表面
の凹凸の凸部の頂上の高さを一致させたことを特徴とす
る磁気ディスク。(1) In a magnetic disk for recording information, a floating head slider for writing and reading information has a withdrawal zone where it slides into contact or stops, and a data zone where information is recorded, and the surface of the withdrawal zone is rough. The height of the tops of the convex and convex portions of the surface irregularities in each of the shelter zone and data zone are made uniform, and the height of the tops of the convex and convex portions of the surface irregularities of the shelter zone and data zone are made rougher than that of the data zone. A magnetic disk characterized in that the heights of the tops of the convex portions are made the same.
、接触摺動、又は停止する待避ゾーンと、情報を記録す
るデータゾーンとを有し、上記待避ゾーンの表面粗さを
、上記データゾーンのそれよりも粗くなるように加工し
た後、遊離砥粒ポリッシング加工により、上記待避ゾー
ンとデータゾーンのそれぞれにおける表面の凹凸の凸部
の頂上の高さを均一にし、かつ、上記待避ゾーンとデー
タゾーンの表面の凹凸の凸部の頂上の高さを一致させた
ことを特徴とする磁気ディスクの製造方法。(2) The floating head slider that writes and reads information has a retraction zone that slides in contact or stops, and a data zone that records information, and the surface roughness of the retraction zone is equal to that of the data zone. After processing to make the surface rougher, a free abrasive polishing process is performed to make the height of the top of the convex portion of the surface unevenness in each of the above-mentioned withdrawal zone and data zone uniform, and to A method for manufacturing a magnetic disk, characterized in that the heights of the tops of the convex portions of the surface irregularities are made the same.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4221889A JPH02223015A (en) | 1989-02-22 | 1989-02-22 | Magnetic disk and production thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4221889A JPH02223015A (en) | 1989-02-22 | 1989-02-22 | Magnetic disk and production thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02223015A true JPH02223015A (en) | 1990-09-05 |
Family
ID=12629902
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4221889A Pending JPH02223015A (en) | 1989-02-22 | 1989-02-22 | Magnetic disk and production thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02223015A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04232614A (en) * | 1990-12-21 | 1992-08-20 | Internatl Business Mach Corp <Ibm> | Magnetic recording hard disk whose surface is roughened and surface roughening method |
| JPH0757251A (en) * | 1993-08-11 | 1995-03-03 | Nec Corp | Magnetic disk substrate and its working device |
-
1989
- 1989-02-22 JP JP4221889A patent/JPH02223015A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04232614A (en) * | 1990-12-21 | 1992-08-20 | Internatl Business Mach Corp <Ibm> | Magnetic recording hard disk whose surface is roughened and surface roughening method |
| JPH0757251A (en) * | 1993-08-11 | 1995-03-03 | Nec Corp | Magnetic disk substrate and its working device |
| JP2643783B2 (en) * | 1993-08-11 | 1997-08-20 | 日本電気株式会社 | Magnetic disk substrate processing equipment |
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