JPH0756000A - Micro x-ray target - Google Patents

Abstract

PURPOSE:To make it possible to control the diffusion of radiated rays by embedding an extrafine tungsten stick into the center of a light-metal plate. CONSTITUTION:A plate made of light metal such as aluminum is about 1 to 2mm in thickness. A tungsten stick whose diameter is about 1 to 10mum is embedded into the center of the plate, or at the point where an electron beam 14 is applied, so that both ends of the stick will match the surface of the light- metal plate 10. Moreover, a cooling passage is formed inside the light-metal plate 10 and a conduit 11 and an exhaust pipe 12 for cooling water are connected to the entrance and the exit of the passage. If the electron beam 14 is applied, it radiates an X-ray 15 by hitting on the tungsten stick 13. Then, the electron beam 14 hitting on the light-metal plate 10 is absorbed, and X-rays are radiated only from the extrafine tungsten stick 13. This realizes an X-ray of point source and restrains the diffusion of the X-ray.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a micro X-ray target for generating X-rays used for nondestructive inspection and the like.

[0002]

2. Description of the Related Art X-rays used for nondestructive inspection are 10 mm
It is generated by irradiating a tungsten target of φ with an electron beam.

In this X-ray generator, the generated X
Since the line spreads conically around the target, it is desirable to suppress the spread as much as possible in order to improve the accuracy of the nondestructive inspection.

[0004]

However, there is a limit to narrowing down the electron beam with which the target is irradiated, and it is also difficult to narrow down the X-rays emitted from the target.

Therefore, an object of the present invention is to solve the above problems and provide a micro X-ray target capable of suppressing the spread of emitted X-rays.

[0006]

In order to achieve the above object, the present invention is a light metal plate of aluminum or the like in which an extremely fine tungsten rod is embedded in the center, and a tungsten rod having a diameter of 1 to 10 μm is used. To use.

[0007]

According to the above construction, a fine metal 1 is formed at the center of the light metal plate.
By embedding a tungsten rod of 10 μm, X-rays are emitted only from an extremely thin tungsten rod even when irradiated with an electron beam, so that X-rays of a point light source can be realized and the spread of X-rays can be suppressed. Become. In this case, if the diameter is 10 μm or more, the X-ray spreads too much, and if the diameter is 1 μm or less, it is difficult to manufacture, and a sufficient X-ray dose cannot be obtained, which is not preferable.

[0008]

An embodiment of the present invention will be described in detail below with reference to the accompanying drawings.

FIG. 1 shows a micro X-ray target according to the present invention.

In the figure, 10 is a light metal plate having a thickness t of 1 to 2 mm, such as aluminum, which has a cooling passage (not shown) formed therein, and cooling water introducing / discharging pipes 11 and 12 at its inlet and outlet. Connected.

A tungsten rod 13 of 1 to 10 μm is embedded at the center of the light metal plate 10, that is, at the position where the electron beam 14 is irradiated. This tungsten rod 13
It is formed to have the same length as the thickness of the light metal plate 10, and both end surfaces thereof are formed to match the surface of the light metal plate 10. For embedding the tungsten rod 13, for example, aluminum is formed to have an appropriate diameter around a tungsten wire that becomes the tungsten rod 13 in the center, and the aluminum cylinder is cut to the same length as the thickness of the metal plate 10. The tungsten rod 1 is formed by embedding it in the light metal plate 10.
3 can be accurately positioned in the center of the light metal plate 10.

Next, the operation of the embodiment will be described.

When the micro X-ray target of the present invention is incorporated into an X-ray generator and the electron beam 14 is irradiated, the electron beam 14 hits the tungsten rod 13 and the X-ray 1 is emitted there.
Release 5. In this case, the electron beam 14 hitting the light metal plate 10 is absorbed, and the tungsten rod 1 of 1 to 10 μm is absorbed.
Since 3 serves as an X-ray source, X-rays of a point light source can always be emitted.

The heat generated by the irradiation of the electron beam 14 can be removed by flowing cooling water through the cooling passage formed in the light metal plate 10.

[0015]

In summary, according to the present invention, by embedding an extremely fine tungsten rod in the center of a light metal plate, X-rays are emitted only from an extremely thin tungsten rod even when irradiated with an electron beam. The X-ray can be realized and the spread of the X-ray can be suppressed.

[Brief description of drawings]

FIG. 1 is a schematic perspective view showing an embodiment of the present invention.

[Explanation of symbols]

 10 Light metal plate 13 Tungsten rod 14 Electron beam

Claims (2)

[Claims] 1. A micro X-ray target characterized in that a very thin tungsten rod is embedded in the center of a light metal plate such as aluminum. 2. The micro X-ray target according to claim 1, wherein the tungsten rod has a diameter of 1 to 10 μm.