JPH0755616A - Manufacture of capacitance type pressure detector - Google Patents

Abstract

PURPOSE:To provide a method for manufacturing a capacitance type pressure detector in which multiple manufacture can be easily performed. CONSTITUTION:In a method for manufacturing a capacitance type pressure detector, when electrodes 3, 4, 5 for plural pieces and electrode taking parts 3a, 4a, 5a from the respective electrodes through lead wires 3b, 4b, 5b are printed between the opposed surfaces of a large size ceramic diaphragm 1 capable of plural manufacture of pressure detector and a support member 2, and the outer circumferential parts of the electrodes are bonded by a glass paste 6, at least a horizontal groove 9 in the direction of crossing the root part with the electrode taking part of each lead wire 3b, 4b, 5b is preliminarily provided on the inner surface of the diaphragm or support member 2 opposed to the root part of each lead wire. After the diaphragm 1 is bonded to the support member 2 by the glass paste 6, each pressure detector is cut into a prescribed size and divided, and the diaphragm 1 or support member 2 is cut from the outside of the groove 9 to simultaneously manufacture a plurality of pressure detectors having each electrode taking part 3a, 4a, 5b exposed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a capacitance type pressure detector which detects a displacement of a diaphragm which bends in response to a pressure as a change in capacitance.

[0002]

2. Description of the Related Art The structure of a conventional capacitance type pressure detector (hereinafter referred to as "pressure detector") is shown in a perspective view of FIG.
As shown in the exploded perspective view of FIG. 1, one side (lower side) is a diaphragm 1 having a flexural elasticity according to pressure and having a plate thickness of 0.7 to 1 mm and a 20 × 25 mm square, and the other side (upper side) has a plate thickness of 3 mm. ~ 4 mm
Is composed of a pair of upper and lower ceramic members that are 25 mm square support members 2.
A circular thin-film electrode 3 having a thickness of 1 μm or less for detecting pressure and a ring-shaped electrode 4 for detecting the reference capacitance are provided outside the electrode 3, while the lower surface of the supporting member 2 is provided. Is a circular electrode 5 having the same diameter as the outer diameter of the electrode 4.
And the outer peripheral portions of the opposing surfaces of the diaphragm 1 and the supporting member 2 are joined and integrated with the glass paste 6 so as to keep the distance between the electrodes 1 and 3 and 5 and 4 and 5 of the diaphragm 1 and the supporting member 2 at about 20 μm. Capacitance is generated between the electrodes 3 and 5 and 4 and 5, and the front of the diaphragm 1 is exposed by about 5 mm as shown in FIG. 1. Electrode lead-out portions 3a and 4a independently extended from the electrodes 3 and 4 on 1 via lead wires 3b and 4b, respectively, and electrically from the electrode 5 of the supporting member 2 via the lead wire 5b and a conductive material 8. An electrode lead-out portion 5a that can be connected to each of the electrodes 3a, 4 of the exposed portion 7 is formed.
Capacitance can be taken out from a and 5a to the outside.

A conventional manufacturing method of this type of pressure sensor is as follows.
As shown in FIG. 2, first, a ceramic material is pressed by a press to form a diaphragm 1 and a supporting member 2 shorter than the diaphragm 1 by the length of the exposed portion, and then fired. To obtain a strong ceramic, then adjust the plate thickness to a predetermined size through polishing and remove the deformation and warp, and use a conductive metal paste to form electrodes 3 on the opposing surfaces of the diaphragm 1 and the supporting member 2. , 4, 5, lead wires 3b, 4b, 5b and electrode lead-out portions 3a, 4a, 5a are formed by screen printing, baked after printing and baked, and spacers are provided on the outer peripheral portions of the electrodes 3, 4 of the diaphragm 1. The glass paste 6 mixed with is printed, the electrode forming surfaces of the diaphragm 1 and the supporting member 2 are opposed to each other, the glass paste 6 is heated and melted, and both members are integrally joined. It was produced by.

Another example is the perspective view of FIG. 3 and FIG.
As shown in the exploded perspective view of FIG. 1, the diaphragm 1 and the support member 2 have the same size, and they are slightly deviated in the front-rear direction to form an exposed portion 7 of the diaphragm 1 on the front upper surface on the upper surface of the diaphragm 1. The electrode lead-out portions 3a and 4a of the electrodes 3 and 4 are provided via the lead wires 3b and 4b, and the electrode lead-out portion 5a of the electrode 5 formed on the lower surface of the support member is formed in the exposed portion 7 of the support member 2 on the rear rear surface. Lead wire 5b
Other configurations may be the same as those shown in FIGS. 1 and 2.

[0005]

SUMMARY OF THE INVENTION In the above-mentioned conventional manufacturing method for each piece, the ceramic raw material is pressed, fired, polished, electrodes 3, 4, 5, lead wires 3b, 4b, 5b and electrode lead-out portions 3a, 4a, 5a, etc., firing of printed electrodes, printing of glass paste 6, melting and heating of glass paste, etc. It was necessary, complicated, poor in productivity, and high in cost.

Therefore, in order to manufacture a plurality of pressure detectors using a pair of large-sized ceramic plates, a plurality of electrodes 3, 4, 5 and lead wires 3b are provided between the pair of large-sized ceramic plates. , 4b, 5b and the electrode lead-out parts 3a, 4a, 5a were printed, and a method of cutting and separating the pressure detectors from the members joined with the glass paste 6 was also tried. In order to obtain the exposed portion 7 having the electrode lead-out portions 3a, 4a, 5a for each pressure detector to be separated into two, as shown in FIG. 16, it corresponds to the base portion of the lead wire electrode lead-out portions 3a, 4a, 5a. It is necessary to cut the supporting member 2 side to be cut by the cutting cutter 10. At this time, the work of completely cutting only the support member 2 side is required, but the lead wires 3b, 4b, 5 are formed on the surface of the exposed portion 7 on the side of the diaphragm 1 facing each other at intervals of 20 μm.
Since the electrode lead-out portions 3a, 4a, 5a are provided via the lead wire b, the cutting wire 10 is used by the cutting cutter 10.
It is necessary to prevent b and 5b from being scratched.

However, since the joining distance between the diaphragm 1 and the support member 2 is as narrow as about 20 μm, only the support member 2 side is cut and the lead wires 3b, 4b, 5 on the surface of the diaphragm 1 are cut.
In order to avoid scratching b, the cutting edge of the cutting cutter at the time of cutting must have a positioning accuracy of micron unit,
In addition, this machining work was practically impossible due to wear of the blade during machining.

[0008]

According to the present invention, a plurality of electrodes, lead wires, and electrode lead-out portions are bonded with a glass paste between a pair of large-sized ceramic members, and then a plurality of electrodes are joined to each other. Provides a manufacturing method that enables multiple pressure detectors to be cut by cutting and dividing and exposing the electrode extraction part so that it can be easily cut without damaging the root of the lead wire. Therefore, the number of processing steps per piece is reduced and the processing is facilitated to solve the problems of the conventional technology.

That is, in the method of manufacturing a capacitance type pressure detector according to the present invention, a ceramic plate-like supporting member 2 having an electrode 5 on the lower surface of the center, an electrode 3 on the upper surface of the center and a ring on the outer peripheral portion thereof. A ceramic plate-shaped diaphragm 1 having a circular electrode 4 is arranged with the electrode 5 and the electrodes 3 and 4 facing each other, and the outer peripheral portions of the electrodes 4 and 5 are separated by a glass paste 6 at a predetermined distance. The displacement amount of the gap between the diaphragm 1 and the support member 2 due to the pressure applied to the outer surface of the diaphragm 1 is bonded to the diaphragm 1 side or the support from the electrodes 3, 4, 5 via the lead wires 3b, 4b, 5b. Electrode extraction portions 3a, 4a, 5a provided on the exposed portion 7 on the member 2 side
Therefore, in the method of manufacturing a capacitance-type pressure detector that detects changes in the capacitance between the electrodes 3 and 5 and between the electrodes 4 provided on the joint surface of the support member 2 and the diaphragm 1, Between the facing surfaces of the large-sized ceramic diaphragm 1 and the support member 2 which can take a plurality of detectors,
A plurality of electrodes 3, 4, 5 and electrode lead-out portions 3a, 4a, 5a from these electrodes via lead wires 3b, 4b, 5b.
Is printed, and at the time of bonding the outer peripheral portion of the electrode with the glass paste 6, at least the lead wires 3b, 4b,
A horizontal groove 9 is formed in advance on the inner surface of the diaphragm 1 or the support member 2 facing the base of the electrode lead-out portion of 5b, and the glass paste 6 is used to form the diaphragm 1 and the support member 2. After joining and, each pressure detector is cut into a predetermined size and divided, and the diaphragm 1 or the support member 2 is cut from the outside of the lateral groove 9 to expose each electrode extraction portion 3a, 4a, 5a. It is characterized in that a plurality of pressure detectors thus produced are manufactured simultaneously.

In the second method of manufacturing the capacitance type pressure detector according to the present invention, the electrode lead-out portions 3a and 4a on the diaphragm 1 side and the electrode lead-out portion 5a on the support member 2 side are connected to the pressure detector. This is a method of manufacturing separately provided front and rear, and is characterized in that lateral grooves 9 and 9b are provided on a surface facing the root portion of the lead wire in a direction crossing the root portion of each lead wire.

That is, there are provided a ceramic plate-shaped support member 2 having an electrode 5 on the central lower surface, and a ceramic plate-shaped diaphragm 1 having an electrode 3 on the central upper surface and a ring-shaped electrode 4 on its outer peripheral portion. , The electrodes 5 and the electrodes 3 and 4 are opposed to each other, and the outer peripheral portions of the electrodes 4 and 5 are joined at a predetermined interval by the glass paste 6 to form the diaphragm 1 by the pressure applied to the outer surface of the diaphragm 1. The amount of displacement of the distance from the support member 2 is measured from the electrode 5 to the lead wire 5b.
The electrode lead-out portion 5 provided on the exposed portion 7 on the support member 2 side via the
a and the electrode lead-out portion 3 provided on the exposed portion of the diaphragm 1 side from the electrodes 3 and 4 via the lead wires 3b and 4b.
a and 4a, a method of manufacturing a capacitance-type pressure detector that detects changes in the capacitance between the electrodes 3 and 5 and between the electrodes 4 and 5 provided on the joint surface between the support member 2 and the diaphragm 1. In the above, a plurality of electrodes 3, 4, 5 and a plurality of lead wires 3b, 4b, 5b are formed between the opposing surfaces of the large-sized ceramic diaphragm 1 and the supporting member 2 capable of taking a plurality of pressure detectors. Electrode take-out parts 3a, 4
a and 5a are printed, and the outer peripheral portion of the electrode is glass paste 6
At the time of joining with, at least the lead wires 3b,
On the inner surface of the support member 2 facing the root of the electrode lead-out portion of 4b and on the inner surface of the diaphragm 1 facing the root of the lead wire 5b with the electrode lead-out portion, the direction of traversing the root of each lead wire in advance. After the lateral grooves 9 and 9b are provided and the diaphragm 1 and the supporting member 2 are joined with the glass paste 6, when the respective pressure detectors are cut into a predetermined size and divided, the outside of the lateral grooves 9 and 9b. From diaphragm 1
Alternatively, the support member 2 may be cut so that each electrode extraction portion 3a, 4a,
It is characterized in that a plurality of pressure detectors exposing 5a are manufactured at the same time.

In addition, in the third method of manufacturing a capacitance type pressure sensor according to the present invention, in addition to the lateral grooves 9 and 9b facing the respective root portions, each pressure sensor is cut into a predetermined size. The vertical groove 9a, 9c and the horizontal groove 9d are also provided on the inner surfaces of the diaphragm 1 and the supporting member 2 which face each other at the divided portions.

That is, there are provided a ceramic plate-shaped support member 2 having an electrode 5 on the central lower surface, and a ceramic plate-shaped diaphragm 1 having an electrode 3 on the central upper surface and a ring-shaped electrode 4 on its outer peripheral portion. , The electrodes 5 and the electrodes 3 and 4 are opposed to each other, and the outer peripheral portions of the electrodes 4 and 5 are joined at a predetermined interval by the glass paste 6 to form the diaphragm 1 by the pressure applied to the outer surface of the diaphragm 1. The amount of displacement of the distance from the support member 2 is determined from the electrodes 3, 4, 5 through the lead wires 3b, 4b, 5b on the exposed portion 7 on the diaphragm 1 side or the support member 2 side. ，
From 5a, in the manufacturing method of the capacitance type pressure detector which detects as the change of the capacitance between the electrodes 3 and 5 and between the electrodes 4 provided on the joint surface of the support member 2 and the diaphragm 1, Between a plurality of large-sized ceramic diaphragms 1 capable of taking a plurality of pressure detectors and the supporting surface of the supporting member 2, a plurality of electrodes 3, 4, 5 and lead electrodes 3b, 4b, 5b from these electrodes are provided. Electrode take-out parts 3a, 4a,
5a is printed, and when the outer peripheral portion of the electrode is joined with the glass paste 6, the lateral groove 9 and each pressure detection in the direction crossing the root of the lead wire 3b, 4b, 5b with the electrode lead-out portion are detected. A vertical groove 9c and a horizontal groove 9d for partitioning the container are formed in advance on the inner surface of the support member 2 or the diaphragm 1 at predetermined intervals, and the diaphragm 1 or the support member 2 facing this is formed.
A vertical groove 9a and a horizontal groove 9b are provided in advance on the inner surface of the plate at positions corresponding to the vertical groove 9c and the horizontal groove 9d, and the diaphragm 1 and the support member 2 are bonded with a glass paste. 1 and the supporting member 2 are cut to simultaneously manufacture a plurality of pressure detectors exposing the respective electrode lead-out portions 3a, 4a, 5a.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A most preferred embodiment of the manufacturing method according to the present invention will be described in the order of steps based on the drawings. (1) As shown in FIG. 5, a ceramic material of a size capable of taking a plurality (nine in the figure) is pressed to divide the outer shape of the pressure sensor on one side of the diaphragm 1 having a thickness of 1 mm and a width of 0.5 mm. A vertical groove 9a and a horizontal groove 9b having a depth of 0.6 mm are provided in a grid pattern. (2) On the other hand, as shown in FIG. 6, a ceramic material of the same size as the diaphragm 1 of FIG.
0.5 mm in width and 3 mm in depth on one side of the supporting member 2 having a size of mm, which matches the lattice-shaped vertical grooves 9a and the horizontal grooves 9b of the diaphragm 1.
In addition to the grid-like grooves formed by the vertical grooves 9c and the lateral grooves 9d, the lateral grooves 9 are formed at the positions facing the roots of the lead wires 3b, 4b, 5b at the same distance as the exposed portion 7 so as to cross each root.
To provide. (3) Diaphragm 1 formed in (1) and (2) above
The supporting member 2 is fired to form a strong ceramic plate. (4) Both the front and back surfaces of the fired diaphragm 1 and the supporting member 2 are polished to adjust the plate thickness dimension, and at the same time, the warp of the plate is corrected. (5) As shown in FIG. 7, the vertical groove 9 a of the diaphragm 1
Inside the area surrounded by the groove 9b and the lateral groove 9b, a conductive paste is used to form the electrode lead-out portions 3a and 4a through the electrodes 3 and 4 and the lead wires 3b and 4b and the electrode lead-out portion 5a through the independent lead wire 5b. Formed side by side by screen printing. (6) On the other hand, as shown in FIG. 8, at a position corresponding to the electrodes 3 and 4 of the diaphragm 1 of the support member 2, the electrode 5 and the lead wire 5b are connected to the end portions of the lateral groove 9 with a conductive paste. It is formed by screen printing. (7) Thin film electrodes having a thickness of 1 μm or less by firing and baking the electrodes 3, 4,5, lead wires 3b, 4b, 5b and the electrode lead-out portions 3a, 4a, 5a formed on the diaphragm 1 and the support member 2 To form. (8) As shown in FIG. 7, a glass paste 6 mixed with a spacer having a melting temperature higher than that of glass is screen-printed on the outer peripheral portions of the electrodes 3 and 4 to a thickness of about 20 μm. (9) As shown in FIGS. 9 and 10, the positions of the lateral grooves 9 of the support member 2 are set to the respective lead wires 3 b, 4 b, 5 of the diaphragm 1.
By laminating the electrode forming surfaces of the diaphragm 1 and the supporting member 2 so as to face each other so as to be located above the root of b, and heating to melt the glass paste 6,
The diaphragm 1 and the supporting member 2 are joined so as to maintain a minute gap of about 20 μm. (10) As shown in FIGS. 11 and 12, while cutting the remaining wall portions of the vertical groove 9c, the horizontal grooves 9 and 9d on the outer surface to the inner surface of the support member 2 along the respective grooves with the cutting cutter 10, Also, the remaining wall portions of the vertical groove 9a and the horizontal groove 9b are cut from the inner surface or the outer surface, and a plurality of pressure detectors are cut off one by one as shown in FIG.

The separating means for the vertical groove 9a and the horizontal groove 9b on the side of the diaphragm 1 having the thin plate thickness can be easily bent by hand or by applying a simple shock in the bending direction regardless of the cutting cutter 10. And each groove 9, 9a, 9 in the present invention can be separated.
Regarding formation of b, 9c and 9d, it is desirable to form them before firing the ceramics, but they may be formed after firing.

In the above-mentioned embodiment, in order to facilitate the cutting process after firing, the vertical groove and the horizontal groove are formed in advance in all the cut portions of the diaphragm 1 and the supporting member 2, but these grooves are not shown. Not all are required in advance. That is, it is difficult to cut at a predetermined position
Only the cutting of the position facing the root of the lead wires 3b, 4b, 5b to the electrode lead-out portion is performed, and only the portion of the lateral groove 9 in FIGS. 9 and 10 for the pressure detector of the form shown in FIG. .

Therefore, as shown in FIGS. 13, 14 and 15 (electrodes, lead wires and electrode lead-out portions are omitted), the diaphragm 1 and the supporting member 2 are made to face each other by being displaced forward and backward by the size of the exposed portion. At this time, if only the lateral grooves 9 in the direction traversing the root of each lead wire are provided at a predetermined interval on the side of the supporting member 2 facing the root of the lead wires 3b, 4b, 5b, as shown in FIG. By cutting the remaining portion from the upper surface of the lateral groove 9, the exposed portion 7 can be exposed without damaging the root portion of the lead wire or the electrode extraction portion.

In this case, for the other cutting portion for dividing each pressure detector, both the diaphragm 1 and the supporting member 2 may be cut at the same time, and this work is easy.

Further, in the pressure detector of the form shown in FIGS. 3 and 4, the root portions of the lead wires 3b, 4b, 5b are the upper exposed portion 7 of the diaphragm 1 and the lower exposed portion 7 of the support member 2.
There will be two places. Therefore, also in this case, if there is the lateral groove 9 on the supporting member 2 side as shown in FIG. 14 and the lateral groove 9b on the diaphragm 1 side as shown by the two-dot chain line in FIG. 13, the diaphragm 1 and the supporting member 2 are exposed. Since the lateral groove has a positional relationship as shown in FIG. 15 when it is joined back and forth by the dimension of, the electrode lead-out portions 3a, 4a can be attached to the upper surface of the diaphragm 1 without damaging the root of the lead wire. In addition, the take-out portion 5a can be exposed on the lower surface of the support member 2. In this case, the diaphragm 1 and the support member 2 are displaced back and forth by the amount of the exposed portion 7, but the performance as a pressure detector is not hindered.

In each of the above embodiments,
Although the configuration in which the electrodes 3 and 4 are provided on the diaphragm 1 side and the electrode 5 is provided on the support member 2 side has been described, these electrodes may be provided on opposite surfaces.

[0021]

As described above, according to the manufacturing method of the present invention, a plurality of electrodes are printed and fired on the respective facing surfaces of a pair of ceramic plates having a size capable of being taken, and the electrodes are bonded via the glass paste 6. However, since the pressure detectors are cut and divided according to the size of each pressure detector, a plurality of pressure detectors can be obtained all at once with a great labor saving compared to the case where each pressure detector is manufactured individually. Further, when the support member 2 or the diaphragm 1 is cut from the outside to expose the electrode lead-out portions 3a, 4a, 5a to the exposed portion 7 of the diaphragm 1 or the support member 2, the bonding surface facing the lead wire is not exposed. The lateral grooves 9 and 9b in advance
Since the cutting amount of the cutting cutter 10 may be from the outer surface of the support member 2 to the bottom surface of the lateral groove 9, the root portions 3b, 4b, 5b of the lead wire on the upper surface of the diaphragm 1 and the exposed portion of the support member 2 and The electrode extraction parts 3a, 4a, 5a are not damaged.

[0022]

According to the method of the present invention, a plurality of pressure detectors can be simultaneously manufactured by a pair of ceramic plates having a size capable of producing a plurality of them. It can be largely omitted. Further, the cutting device does not require high precision, the work is simple, and since the groove is formed in advance in the cutting portion, the cutting amount of the hard member after ceramic firing is small, and the cutting time can be shortened. It is also advantageous in terms of cost. In addition, it is possible to print electrodes, lead wires, electrode lead-out parts, glass paste, etc., or join the diaphragm and support member for multiple minutes at the same time, so there is more variation than when printing or joining individually. It can be prevented and contributes to stabilizing the quality of the pressure detector.

[Brief description of drawings]

FIG. 1 is a perspective view of a capacitance type pressure detector according to the present invention.

FIG. 2 is an exploded perspective view of a capacitance type pressure detector according to the present invention.

FIG. 3 is a perspective view of another example of the capacitance type pressure detector according to the present invention.

FIG. 4 is an exploded perspective view of another example of the capacitance type pressure detector according to the present invention.

FIG. 5 is a perspective view showing a state in which a groove is formed on the diaphragm.

FIG. 6 is a perspective view showing a state in which a groove is formed on the support member.

FIG. 7 is a perspective view showing a state in which electrodes, lead wires, electrode lead-out portions and glass paste are printed on the diaphragm.

FIG. 8 is a perspective view showing a state where electrodes and lead wires are printed on a supporting member.

FIG. 9 is a perspective view showing a state in which a diaphragm and a supporting member are joined with glass paste.

10 is a cross-sectional view taken along the line AA of FIG.

FIG. 11 is a sectional view showing a state in which the support member is cut by a cutting cutter.

FIG. 12 is a perspective view showing a state in which the pressure detector is divided by cutting the support member and the diaphragm.

FIG. 13 is a perspective view showing a state in which the diaphragm is not provided with a groove.

FIG. 14 is a perspective view showing a state in which a minimum number of grooves are provided in the support member.

FIG. 15 is a vertical sectional side view of the center of the state in which the members of FIGS. 13 and 14 are combined.

FIG. 16 is a side view of a central longitudinal section of a state in which a supporting member is cut without forming a groove in the related art.

[Explanation of symbols]

1 diaphragm 2 support member 3,
4,5 electrodes 3a, 4a, 5a electrode extraction portions 3b, 4b, 5
b Lead wire 6 Glass paste 7 Exposed part 8
Conductive material 9 Horizontal groove 9a, 9c Vertical groove 9
b, 9d lateral groove 10 cutting cutter

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Osamu Yamaguchi 100 Kutokucho, Ogaki City, Gifu Prefecture Pacific Industrial Co., Ltd. (72) Inventor Shigeo Ohashi 11-15 Takatsujicho, Showa-ku, Aichi Prefecture In-house (72) Inventor Yuji Ito 11-15 Takatsuji-cho, Showa-ku, Nagoya-shi, Aichi Ishizuka Glass Co., Ltd.

Claims (3)

[Claims] 1. A ceramic plate-shaped support member 2 having an electrode 5 on a central lower surface, and a ceramic plate-shaped diaphragm 1 having an electrode 3 on the central upper surface and a ring-shaped electrode 4 on an outer peripheral portion thereof. , The electrodes 5 and the electrodes 3 and 4 are opposed to each other, and the outer peripheral portions of the electrodes 4 and 5 are joined at a predetermined interval by the glass paste 6 to form the diaphragm 1 by the pressure applied to the outer surface of the diaphragm 1. The amount of displacement of the distance from the support member 2 is determined from the electrodes 3, 4, 5 through the lead wires 3b, 4b, 5b on the exposed portion 7 on the diaphragm 1 side or the support member 2 side. , 5a
Therefore, in the manufacturing method of the capacitance type pressure detector which detects as the change in the capacitance between the electrode 3 and the electrode 5 and between the electrode 4 and the electrode 5 provided on the joint surface of the support member 2 and the diaphragm 1, Between the opposing surfaces of the large-sized ceramic diaphragm 1 and the supporting member 2, which can accommodate a plurality of detectors, a plurality of electrodes 3, 4, 5 and lead wires 3b from these electrodes are provided.
At the time of printing the electrode lead-out portions 3a, 4a, 5a via 4b, 5b and joining the outer peripheral portion of the electrodes with the glass paste 6, at least the electrode lead-out portions of the lead wires 3b, 4b, 5b A lateral groove 9 is provided in advance on the inner surface of the diaphragm 1 or the supporting member 2 facing the root portion so as to cross the root portion of each lead wire, and after bonding the diaphragm 1 and the supporting member 2 with a glass paste 6, A plurality of pressure detectors in which the electrode detectors 3a, 4a, 5a are exposed by cutting the pressure detector into a predetermined size and dividing it and cutting the diaphragm 1 or the support member 2 from the outside of the lateral groove 9. A method for manufacturing an electrostatic capacitance type pressure detector, characterized in that the pressure sensors are manufactured all at once. 2. A ceramic plate-shaped support member 2 having an electrode 5 on a central lower surface, and a ceramic plate-shaped diaphragm 1 having an electrode 3 on the central upper surface and a ring-shaped electrode 4 on its outer peripheral portion. , The electrodes 5 and the electrodes 3 and 4 are opposed to each other, and the outer peripheral portions of the electrodes 4 and 5 are joined at a predetermined interval by the glass paste 6 to form the diaphragm 1 by the pressure applied to the outer surface of the diaphragm 1. The distance of displacement from the support member 2 is measured from the electrode 5 via the lead wire 5b from the electrode lead-out portion 5a provided in the exposed portion 7 on the support member 2 side and from the electrodes 3 and 4 to the lead wires 3b and 4b. Electrode lead-out portions 3a, 4 provided on the exposed portion on one side of the diaphragm via
From a, in the manufacturing method of the electrostatic capacity type pressure detector which detects as a change in electrostatic capacity between the electrode 3 and the electrode 5 and between the electrode 4 and the electrode 5 provided on the joint surface of the support member 2 and the diaphragm 1, A plurality of electrodes 3, 4, 5 corresponding to a plurality of electrodes and lead wires 3b from these electrodes are provided between the opposing surfaces of the supporting member 2 and the ceramic diaphragm 1 of a large size capable of taking a plurality of pressure detectors.
At the time of printing the electrode lead-out portions 3a, 4a, 5a through 4b, 5b and joining the outer peripheral portions of the electrodes with the glass paste 6, at least the root portion of the lead wires 3b, 4b with the electrode lead-out portion On the inner surface of the supporting member 2 and the inner surface of the diaphragm 1 facing the root of the lead wire 5b with the electrode lead-out portion, lateral grooves 9 and 9b are provided in advance in the direction crossing the root of each lead wire. Paste 6
After joining the diaphragm 1 and the support member 2 with each other, when each pressure detector is cut into a predetermined size and divided, the diaphragm 1 or the support member 2 is provided from the outside of the lateral grooves 9 and 9b.
And a plurality of pressure detectors exposing the respective electrode lead-out portions 3a, 4a, 5a are manufactured at the same time, and a method for manufacturing a capacitance type pressure detector. 3. A ceramic plate-shaped support member 2 having an electrode 5 on a central lower surface, and a ceramic plate-shaped diaphragm 1 having an electrode 3 on a central upper surface and a ring-shaped electrode 4 on an outer peripheral portion thereof. , The electrodes 5 and the electrodes 3 and 4 are opposed to each other, and the outer peripheral portions of the electrodes 4 and 5 are joined at a predetermined interval by the glass paste 6 to form the diaphragm 1 by the pressure applied to the outer surface of the diaphragm 1. The amount of displacement of the distance from the support member 2 is determined from the electrodes 3, 4, 5 through the lead wires 3b, 4b, 5b on the exposed portion 7 on the diaphragm 1 side or the support member 2 side. , 5a
Therefore, in the manufacturing method of the capacitance type pressure detector which detects as the change in the capacitance between the electrode 3 and the electrode 5 and between the electrode 4 and the electrode 5 provided on the joint surface of the support member 2 and the diaphragm 1, Between the opposing surfaces of the large-sized ceramic diaphragm 1 and the supporting member 2, which can accommodate a plurality of detectors, a plurality of electrodes 3, 4, 5 and lead wires 3b from these electrodes are provided.
When the electrode lead-out portions 3a, 4a, 5a are printed via 4b, 5b and the outer peripheral portions of the electrodes are joined with the glass paste 6, the root portions of the lead wires 3b, 4b, 5b with the electrode lead-out portions are printed. And a vertical groove 9c and a horizontal groove 9d for partitioning the pressure detectors are formed on the inner surface of the support member 2 or the diaphragm 1 at predetermined intervals in advance, and the diaphragm 1 or the support member opposed thereto is formed. Also on the inner surface of 2, the vertical groove 9a and the horizontal groove 9d are previously provided at positions corresponding to the vertical groove 9c and the horizontal groove 9d, respectively.
After forming the lateral groove 9b and joining the diaphragm 1 and the support member 2 with a glass paste, the diaphragm 1 and the support member 2 are cut from the outside of each groove, and each electrode extraction portion 3 is formed.
A method for manufacturing a capacitance type pressure detector, characterized in that a plurality of pressure detectors exposing a, 4a and 5a are simultaneously manufactured.