JPH0754285Y2 - 蒸着装置 - Google Patents

蒸着装置

Info

Publication number
JPH0754285Y2
JPH0754285Y2 JP1989118931U JP11893189U JPH0754285Y2 JP H0754285 Y2 JPH0754285 Y2 JP H0754285Y2 JP 1989118931 U JP1989118931 U JP 1989118931U JP 11893189 U JP11893189 U JP 11893189U JP H0754285 Y2 JPH0754285 Y2 JP H0754285Y2
Authority
JP
Japan
Prior art keywords
filament
vapor deposition
pressing screw
intermediate member
deposition apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989118931U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0359363U (OSRAM
Inventor
和浩 芝本
勉 八重倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pioneer Corp
Original Assignee
Pioneer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Corp filed Critical Pioneer Corp
Priority to JP1989118931U priority Critical patent/JPH0754285Y2/ja
Priority to US07/515,016 priority patent/US4986212A/en
Publication of JPH0359363U publication Critical patent/JPH0359363U/ja
Application granted granted Critical
Publication of JPH0754285Y2 publication Critical patent/JPH0754285Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP1989118931U 1989-10-11 1989-10-11 蒸着装置 Expired - Lifetime JPH0754285Y2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1989118931U JPH0754285Y2 (ja) 1989-10-11 1989-10-11 蒸着装置
US07/515,016 US4986212A (en) 1989-10-11 1990-04-26 Metallizing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989118931U JPH0754285Y2 (ja) 1989-10-11 1989-10-11 蒸着装置

Publications (2)

Publication Number Publication Date
JPH0359363U JPH0359363U (OSRAM) 1991-06-11
JPH0754285Y2 true JPH0754285Y2 (ja) 1995-12-18

Family

ID=14748759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989118931U Expired - Lifetime JPH0754285Y2 (ja) 1989-10-11 1989-10-11 蒸着装置

Country Status (2)

Country Link
US (1) US4986212A (OSRAM)
JP (1) JPH0754285Y2 (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0736611A1 (en) * 1995-04-04 1996-10-09 Sony DADC Austria AG Heater for evaporation and evaporation equipment
CN102031485B (zh) * 2009-09-25 2013-09-25 深圳富泰宏精密工业有限公司 蒸发源及使用该蒸发源的蒸镀装置
DE102010032591A1 (de) * 2010-07-23 2012-01-26 Leybold Optics Gmbh Vorrichtung und Verfahren zur Vakuumbeschichtung
KR20120096788A (ko) * 2011-02-23 2012-08-31 삼성전자주식회사 외관 기구물의 표면 코팅 방법 및 표면 코팅 장치

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3274372A (en) * 1964-07-27 1966-09-20 Electro Optical Systems Inc Solid vaporization
US3517161A (en) * 1967-09-13 1970-06-23 Bendix Corp Sublimation unit and system
NL6713713A (OSRAM) * 1967-10-10 1969-04-14
JPS5842161U (ja) * 1981-09-16 1983-03-19 日東電工株式会社 線状ヒ−タの保持構造
JPS6120558U (ja) * 1984-07-10 1986-02-06 日立マクセル株式会社 真空蒸着装置

Also Published As

Publication number Publication date
JPH0359363U (OSRAM) 1991-06-11
US4986212A (en) 1991-01-22

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