JPH0753059Y2 - 高精度移動テーブル装置 - Google Patents

高精度移動テーブル装置

Info

Publication number
JPH0753059Y2
JPH0753059Y2 JP1986015531U JP1553186U JPH0753059Y2 JP H0753059 Y2 JPH0753059 Y2 JP H0753059Y2 JP 1986015531 U JP1986015531 U JP 1986015531U JP 1553186 U JP1553186 U JP 1553186U JP H0753059 Y2 JPH0753059 Y2 JP H0753059Y2
Authority
JP
Japan
Prior art keywords
laser mirror
workpiece
laser
table device
moving table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986015531U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62127515U (pl
Inventor
昭 岩瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP1986015531U priority Critical patent/JPH0753059Y2/ja
Publication of JPS62127515U publication Critical patent/JPS62127515U/ja
Priority to US07/368,150 priority patent/US4953965A/en
Application granted granted Critical
Publication of JPH0753059Y2 publication Critical patent/JPH0753059Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Mounting And Adjusting Of Optical Elements (AREA)
JP1986015531U 1985-12-26 1986-02-05 高精度移動テーブル装置 Expired - Lifetime JPH0753059Y2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1986015531U JPH0753059Y2 (ja) 1986-02-05 1986-02-05 高精度移動テーブル装置
US07/368,150 US4953965A (en) 1985-12-26 1989-06-15 High-accuracy traveling table apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986015531U JPH0753059Y2 (ja) 1986-02-05 1986-02-05 高精度移動テーブル装置

Publications (2)

Publication Number Publication Date
JPS62127515U JPS62127515U (pl) 1987-08-13
JPH0753059Y2 true JPH0753059Y2 (ja) 1995-12-06

Family

ID=30806550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986015531U Expired - Lifetime JPH0753059Y2 (ja) 1985-12-26 1986-02-05 高精度移動テーブル装置

Country Status (1)

Country Link
JP (1) JPH0753059Y2 (pl)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62151783A (ja) * 1985-12-26 1987-07-06 東芝機械株式会社 高精度移動テ−ブル装置

Also Published As

Publication number Publication date
JPS62127515U (pl) 1987-08-13

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