JPH0751792Y2 - リニアモ−タ式ステ−ジ - Google Patents

リニアモ−タ式ステ−ジ

Info

Publication number
JPH0751792Y2
JPH0751792Y2 JP1987112479U JP11247987U JPH0751792Y2 JP H0751792 Y2 JPH0751792 Y2 JP H0751792Y2 JP 1987112479 U JP1987112479 U JP 1987112479U JP 11247987 U JP11247987 U JP 11247987U JP H0751792 Y2 JPH0751792 Y2 JP H0751792Y2
Authority
JP
Japan
Prior art keywords
side unit
linear motor
primary side
lpm
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987112479U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6418739U (cg-RX-API-DMAC7.html
Inventor
茂 宇田川
達雄 椿
Original Assignee
神鋼電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 神鋼電機株式会社 filed Critical 神鋼電機株式会社
Priority to JP1987112479U priority Critical patent/JPH0751792Y2/ja
Publication of JPS6418739U publication Critical patent/JPS6418739U/ja
Application granted granted Critical
Publication of JPH0751792Y2 publication Critical patent/JPH0751792Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Machine Tool Units (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1987112479U 1987-07-22 1987-07-22 リニアモ−タ式ステ−ジ Expired - Lifetime JPH0751792Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987112479U JPH0751792Y2 (ja) 1987-07-22 1987-07-22 リニアモ−タ式ステ−ジ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987112479U JPH0751792Y2 (ja) 1987-07-22 1987-07-22 リニアモ−タ式ステ−ジ

Publications (2)

Publication Number Publication Date
JPS6418739U JPS6418739U (cg-RX-API-DMAC7.html) 1989-01-30
JPH0751792Y2 true JPH0751792Y2 (ja) 1995-11-22

Family

ID=31351452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987112479U Expired - Lifetime JPH0751792Y2 (ja) 1987-07-22 1987-07-22 リニアモ−タ式ステ−ジ

Country Status (1)

Country Link
JP (1) JPH0751792Y2 (cg-RX-API-DMAC7.html)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61293741A (ja) * 1985-06-21 1986-12-24 Hiroshi Teramachi テ−ブル移送装置

Also Published As

Publication number Publication date
JPS6418739U (cg-RX-API-DMAC7.html) 1989-01-30

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