JPH07504755A - ナノメートル測定法 - Google Patents

ナノメートル測定法

Info

Publication number
JPH07504755A
JPH07504755A JP6515820A JP51582094A JPH07504755A JP H07504755 A JPH07504755 A JP H07504755A JP 6515820 A JP6515820 A JP 6515820A JP 51582094 A JP51582094 A JP 51582094A JP H07504755 A JPH07504755 A JP H07504755A
Authority
JP
Japan
Prior art keywords
signal
acoustic
optical signal
electrical signal
phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6515820A
Other languages
English (en)
Japanese (ja)
Inventor
ルイス，メイリオン・フランシス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Secretary of State for Defence
Original Assignee
UK Secretary of State for Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Secretary of State for Defence filed Critical UK Secretary of State for Defence
Publication of JPH07504755A publication Critical patent/JPH07504755A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/22—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
    • G01L23/221—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines
    • G01L23/225—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines circuit arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/48—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using wave or particle radiation means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02023—Indirect probing of object, e.g. via influence on cavity or fibre
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02097—Self-interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/04—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by beating two waves of a same source but of different frequency and measuring the phase shift of the lower frequency obtained
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/22—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
    • G01L2023/228—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines circuit arrangements therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
JP6515820A 1993-01-13 1994-01-10 ナノメートル測定法 Pending JPH07504755A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB939300556A GB9300556D0 (en) 1993-01-13 1993-01-13 Nanmeter metrology
GB9300556.9 1993-01-13
PCT/GB1994/000039 WO1994016294A1 (en) 1993-01-13 1994-01-10 Nanometer metrology

Publications (1)

Publication Number Publication Date
JPH07504755A true JPH07504755A (ja) 1995-05-25

Family

ID=10728633

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6515820A Pending JPH07504755A (ja) 1993-01-13 1994-01-10 ナノメートル測定法

Country Status (7)

Country Link
EP (1) EP0630467A1 (cs)
JP (1) JPH07504755A (cs)
KR (1) KR950700531A (cs)
CN (1) CN1102288A (cs)
GB (2) GB9300556D0 (cs)
TW (1) TW251347B (cs)
WO (1) WO1994016294A1 (cs)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1006166B (de) * 1956-04-06 1957-04-11 Erich Hoffmann Werkstaetten Fu Verfahren zur Messung von Strecken mittels Schallwellen, insbesondere Ultraschallwellen und Vorrichtung zur Ausuebung des Verfahrens
GB1410152A (en) * 1973-03-28 1975-10-15 Plessey Co Ltd Linear measuring device

Also Published As

Publication number Publication date
GB9300556D0 (en) 1993-03-03
WO1994016294A1 (en) 1994-07-21
GB2280030A (en) 1995-01-18
KR950700531A (ko) 1995-01-16
GB2280030B (en) 1996-08-28
CN1102288A (zh) 1995-05-03
EP0630467A1 (en) 1994-12-28
TW251347B (cs) 1995-07-11
GB9417796D0 (en) 1994-10-26

Similar Documents

Publication Publication Date Title
US6008887A (en) Single beam laser surface velocity and displacement measurement apparatus
CA2368272C (en) Apparatus for measuring physical properties of a sample
US7697195B2 (en) Apparatus for reducing wavefront errors in output beams of acousto-optic devices
US11280669B2 (en) Pulsed laser interferometer and measuring vibrational amplitude and vibrational phase
TW469681B (en) Apparatus for generating linearly-orthogonally polarized light beams
JPH0216419A (ja) 散乱表面からの過渡運動の光学的検出方法及び装置
WO1995019541A1 (en) An interferometric measuring system
JP2005501242A (ja) 入力ビームの方向の動的干渉分光制御
CN104897270A (zh) 基于单声光调制和偏振分光的迈克尔逊外差激光测振仪
CN113126309B (zh) 基于镜面系统的旋转多普勒频移增强装置
CN102353916B (zh) 多光束激光外差二次谐波测量磁致伸缩系数的方法
JP2007285898A (ja) レーザ振動計
Hashimoto et al. A laser probe based on a Sagnac interferometer with fast mechanical scan for RF surface and bulk acoustic wave devices
Nagano et al. Displacement measuring technique for satellite-to-satellite laser interferometer to determine Earth's gravity field
JPH1082609A5 (cs)
CN116298373A (zh) 一种基于旋转多普勒效应测量物体角速度的装置和方法
CN1176346C (zh) 双频激光合成波长干涉仪
JP2004226093A (ja) レーザ振動計
Nakano et al. Visualization of 50 MHz surface acoustic wave propagation using stroboscopic phase-shift interferometry
JPH07504755A (ja) ナノメートル測定法
CN102253002B (zh) 多普勒振镜正弦调制多光束激光外差二次谐波测量电致伸缩系数的方法
RU2658112C1 (ru) Способ измерения наноперемещений
JPH06501547A (ja) 速度計
Shaw et al. A differential optical interferometer for measuring short pulses of surface acoustic waves
CN110823088B (zh) 一种激光动态干涉仪