GB2280030A - Nanometer metrology - Google Patents

Nanometer metrology

Info

Publication number
GB2280030A
GB2280030A GB9417796A GB9417796A GB2280030A GB 2280030 A GB2280030 A GB 2280030A GB 9417796 A GB9417796 A GB 9417796A GB 9417796 A GB9417796 A GB 9417796A GB 2280030 A GB2280030 A GB 2280030A
Authority
GB
United Kingdom
Prior art keywords
signal
phase
displacement
intermediate signal
generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB9417796A
Other versions
GB9417796D0 (en
GB2280030B (en
Inventor
Meirion Francis Lewis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Secretary of State for Defence
Original Assignee
UK Secretary of State for Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Secretary of State for Defence filed Critical UK Secretary of State for Defence
Publication of GB9417796D0 publication Critical patent/GB9417796D0/en
Publication of GB2280030A publication Critical patent/GB2280030A/en
Application granted granted Critical
Publication of GB2280030B publication Critical patent/GB2280030B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/22—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
    • G01L23/221—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines
    • G01L23/225—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines circuit arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/48—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using wave or particle radiation means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02023—Indirect probing of object, e.g. via influence on cavity or fibre
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02097—Self-interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/04—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by beating two waves of a same source but of different frequency and measuring the phase shift of the lower frequency obtained
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/22—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
    • G01L2023/228—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines circuit arrangements therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

Apparatus for measuring displacements on an object to nanometer accuracy, particularly for use in fabricating modern signal processing components. This coprises a radio frequency source for a primary electrical signal (50), a transducer (24) for generating an intermediate signal of lesser wavelength at least partly therefrom, a phase shifting means (56) interactive with the immediate signal and associated with the object in such a way that a displacement of the object causes the phase shifting means (56) to change the path length of the intermediate signal by an amount directly related to the displacement, a phase transference means (60) for generating a secondary electrical signal using, at least partly, the intermediate signal so that the phase of the intermediate signal is transferred to the secondary signal, and a phase detector (62) for measuring the change of phase of the secondary signal relative to the primary on displacement of the object. <IMAGE>
GB9417796A 1993-01-13 1994-01-10 Nanometer metrology Expired - Fee Related GB2280030B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB939300556A GB9300556D0 (en) 1993-01-13 1993-01-13 Nanmeter metrology
PCT/GB1994/000039 WO1994016294A1 (en) 1993-01-13 1994-01-10 Nanometer metrology

Publications (3)

Publication Number Publication Date
GB9417796D0 GB9417796D0 (en) 1994-10-26
GB2280030A true GB2280030A (en) 1995-01-18
GB2280030B GB2280030B (en) 1996-08-28

Family

ID=10728633

Family Applications (2)

Application Number Title Priority Date Filing Date
GB939300556A Pending GB9300556D0 (en) 1993-01-13 1993-01-13 Nanmeter metrology
GB9417796A Expired - Fee Related GB2280030B (en) 1993-01-13 1994-01-10 Nanometer metrology

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB939300556A Pending GB9300556D0 (en) 1993-01-13 1993-01-13 Nanmeter metrology

Country Status (7)

Country Link
EP (1) EP0630467A1 (en)
JP (1) JPH07504755A (en)
KR (1) KR950700531A (en)
CN (1) CN1102288A (en)
GB (2) GB9300556D0 (en)
TW (1) TW251347B (en)
WO (1) WO1994016294A1 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1006166B (en) * 1956-04-06 1957-04-11 Erich Hoffmann Werkstaetten Fu Method for measuring distances by means of sound waves, in particular ultrasonic waves and apparatus for practicing the method
GB1410152A (en) * 1973-03-28 1975-10-15 Plessey Co Ltd Linear measuring device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1006166B (en) * 1956-04-06 1957-04-11 Erich Hoffmann Werkstaetten Fu Method for measuring distances by means of sound waves, in particular ultrasonic waves and apparatus for practicing the method
GB1410152A (en) * 1973-03-28 1975-10-15 Plessey Co Ltd Linear measuring device

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
MEASUREMENT TECHNIQUES vol 30 no 11 Nov 1987 pgs 1099-1106 *
OPTICS LETTERS vol 18 no 3 1 FEBRUARY 1993 PAGES 232-234 *

Also Published As

Publication number Publication date
GB9417796D0 (en) 1994-10-26
GB9300556D0 (en) 1993-03-03
EP0630467A1 (en) 1994-12-28
CN1102288A (en) 1995-05-03
WO1994016294A1 (en) 1994-07-21
TW251347B (en) 1995-07-11
JPH07504755A (en) 1995-05-25
KR950700531A (en) 1995-01-16
GB2280030B (en) 1996-08-28

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20040110