GB2280030A - Nanometer metrology - Google Patents
Nanometer metrologyInfo
- Publication number
- GB2280030A GB2280030A GB9417796A GB9417796A GB2280030A GB 2280030 A GB2280030 A GB 2280030A GB 9417796 A GB9417796 A GB 9417796A GB 9417796 A GB9417796 A GB 9417796A GB 2280030 A GB2280030 A GB 2280030A
- Authority
- GB
- United Kingdom
- Prior art keywords
- signal
- phase
- displacement
- intermediate signal
- generating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 abstract 4
- 241000131009 Copris Species 0.000 abstract 1
- 230000002452 interceptive effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/22—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
- G01L23/221—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines
- G01L23/225—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines circuit arrangements therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/48—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using wave or particle radiation means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02023—Indirect probing of object, e.g. via influence on cavity or fibre
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02097—Self-interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/04—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by beating two waves of a same source but of different frequency and measuring the phase shift of the lower frequency obtained
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/30—Grating as beam-splitter
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/22—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
- G01L2023/228—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines circuit arrangements therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Treatment Of Fiber Materials (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Apparatus for measuring displacements on an object to nanometer accuracy, particularly for use in fabricating modern signal processing components. This coprises a radio frequency source for a primary electrical signal (50), a transducer (24) for generating an intermediate signal of lesser wavelength at least partly therefrom, a phase shifting means (56) interactive with the immediate signal and associated with the object in such a way that a displacement of the object causes the phase shifting means (56) to change the path length of the intermediate signal by an amount directly related to the displacement, a phase transference means (60) for generating a secondary electrical signal using, at least partly, the intermediate signal so that the phase of the intermediate signal is transferred to the secondary signal, and a phase detector (62) for measuring the change of phase of the secondary signal relative to the primary on displacement of the object. <IMAGE>
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB939300556A GB9300556D0 (en) | 1993-01-13 | 1993-01-13 | Nanmeter metrology |
PCT/GB1994/000039 WO1994016294A1 (en) | 1993-01-13 | 1994-01-10 | Nanometer metrology |
Publications (3)
Publication Number | Publication Date |
---|---|
GB9417796D0 GB9417796D0 (en) | 1994-10-26 |
GB2280030A true GB2280030A (en) | 1995-01-18 |
GB2280030B GB2280030B (en) | 1996-08-28 |
Family
ID=10728633
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB939300556A Pending GB9300556D0 (en) | 1993-01-13 | 1993-01-13 | Nanmeter metrology |
GB9417796A Expired - Fee Related GB2280030B (en) | 1993-01-13 | 1994-01-10 | Nanometer metrology |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB939300556A Pending GB9300556D0 (en) | 1993-01-13 | 1993-01-13 | Nanmeter metrology |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP0630467A1 (en) |
JP (1) | JPH07504755A (en) |
KR (1) | KR950700531A (en) |
CN (1) | CN1102288A (en) |
GB (2) | GB9300556D0 (en) |
TW (1) | TW251347B (en) |
WO (1) | WO1994016294A1 (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1006166B (en) * | 1956-04-06 | 1957-04-11 | Erich Hoffmann Werkstaetten Fu | Method for measuring distances by means of sound waves, in particular ultrasonic waves and apparatus for practicing the method |
GB1410152A (en) * | 1973-03-28 | 1975-10-15 | Plessey Co Ltd | Linear measuring device |
-
1993
- 1993-01-13 GB GB939300556A patent/GB9300556D0/en active Pending
-
1994
- 1994-01-10 CN CN94190054A patent/CN1102288A/en active Pending
- 1994-01-10 EP EP94903970A patent/EP0630467A1/en not_active Ceased
- 1994-01-10 JP JP6515820A patent/JPH07504755A/en active Pending
- 1994-01-10 GB GB9417796A patent/GB2280030B/en not_active Expired - Fee Related
- 1994-01-10 WO PCT/GB1994/000039 patent/WO1994016294A1/en not_active Application Discontinuation
- 1994-02-08 TW TW083101075A patent/TW251347B/zh active
- 1994-09-13 KR KR1019940703192A patent/KR950700531A/en not_active Application Discontinuation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1006166B (en) * | 1956-04-06 | 1957-04-11 | Erich Hoffmann Werkstaetten Fu | Method for measuring distances by means of sound waves, in particular ultrasonic waves and apparatus for practicing the method |
GB1410152A (en) * | 1973-03-28 | 1975-10-15 | Plessey Co Ltd | Linear measuring device |
Non-Patent Citations (2)
Title |
---|
MEASUREMENT TECHNIQUES vol 30 no 11 Nov 1987 pgs 1099-1106 * |
OPTICS LETTERS vol 18 no 3 1 FEBRUARY 1993 PAGES 232-234 * |
Also Published As
Publication number | Publication date |
---|---|
JPH07504755A (en) | 1995-05-25 |
GB2280030B (en) | 1996-08-28 |
EP0630467A1 (en) | 1994-12-28 |
CN1102288A (en) | 1995-05-03 |
GB9300556D0 (en) | 1993-03-03 |
TW251347B (en) | 1995-07-11 |
KR950700531A (en) | 1995-01-16 |
WO1994016294A1 (en) | 1994-07-21 |
GB9417796D0 (en) | 1994-10-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
732E | Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977) | ||
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20040110 |