GB9300556D0 - Nanmeter metrology - Google Patents

Nanmeter metrology

Info

Publication number
GB9300556D0
GB9300556D0 GB939300556A GB9300556A GB9300556D0 GB 9300556 D0 GB9300556 D0 GB 9300556D0 GB 939300556 A GB939300556 A GB 939300556A GB 9300556 A GB9300556 A GB 9300556A GB 9300556 D0 GB9300556 D0 GB 9300556D0
Authority
GB
United Kingdom
Prior art keywords
signal
phase
displacement
intermediate signal
generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB939300556A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Secretary of State for Defence
Original Assignee
UK Secretary of State for Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Secretary of State for Defence filed Critical UK Secretary of State for Defence
Priority to GB939300556A priority Critical patent/GB9300556D0/en
Publication of GB9300556D0 publication Critical patent/GB9300556D0/en
Priority to CN94190054A priority patent/CN1102288A/en
Priority to PCT/GB1994/000039 priority patent/WO1994016294A1/en
Priority to GB9417796A priority patent/GB2280030B/en
Priority to EP94903970A priority patent/EP0630467A1/en
Priority to JP6515820A priority patent/JPH07504755A/en
Priority to TW083101075A priority patent/TW251347B/zh
Priority to KR1019940703192A priority patent/KR950700531A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/22—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
    • G01L23/221—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines
    • G01L23/225—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines circuit arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/48—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using wave or particle radiation means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02023—Indirect probing of object, e.g. via influence on cavity or fibre
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02097—Self-interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/04—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by beating two waves of a same source but of different frequency and measuring the phase shift of the lower frequency obtained
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/22—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
    • G01L2023/228—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines circuit arrangements therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

Apparatus for measuring displacements on an object to nanometer accuracy, particularly for use in fabricating modern signal processing components. This coprises a radio frequency source for a primary electrical signal (50), a transducer (24) for generating an intermediate signal of lesser wavelength at least partly therefrom, a phase shifting means (56) interactive with the immediate signal and associated with the object in such a way that a displacement of the object causes the phase shifting means (56) to change the path length of the intermediate signal by an amount directly related to the displacement, a phase transference means (60) for generating a secondary electrical signal using, at least partly, the intermediate signal so that the phase of the intermediate signal is transferred to the secondary signal, and a phase detector (62) for measuring the change of phase of the secondary signal relative to the primary on displacement of the object. <IMAGE>
GB939300556A 1993-01-13 1993-01-13 Nanmeter metrology Pending GB9300556D0 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
GB939300556A GB9300556D0 (en) 1993-01-13 1993-01-13 Nanmeter metrology
CN94190054A CN1102288A (en) 1993-01-13 1994-01-10 Nanometer metrology
PCT/GB1994/000039 WO1994016294A1 (en) 1993-01-13 1994-01-10 Nanometer metrology
GB9417796A GB2280030B (en) 1993-01-13 1994-01-10 Nanometer metrology
EP94903970A EP0630467A1 (en) 1993-01-13 1994-01-10 Nanometer metrology
JP6515820A JPH07504755A (en) 1993-01-13 1994-01-10 nanometer measurement method
TW083101075A TW251347B (en) 1993-01-13 1994-02-08
KR1019940703192A KR950700531A (en) 1993-01-13 1994-09-13 Nanometer metrology

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB939300556A GB9300556D0 (en) 1993-01-13 1993-01-13 Nanmeter metrology

Publications (1)

Publication Number Publication Date
GB9300556D0 true GB9300556D0 (en) 1993-03-03

Family

ID=10728633

Family Applications (2)

Application Number Title Priority Date Filing Date
GB939300556A Pending GB9300556D0 (en) 1993-01-13 1993-01-13 Nanmeter metrology
GB9417796A Expired - Fee Related GB2280030B (en) 1993-01-13 1994-01-10 Nanometer metrology

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB9417796A Expired - Fee Related GB2280030B (en) 1993-01-13 1994-01-10 Nanometer metrology

Country Status (7)

Country Link
EP (1) EP0630467A1 (en)
JP (1) JPH07504755A (en)
KR (1) KR950700531A (en)
CN (1) CN1102288A (en)
GB (2) GB9300556D0 (en)
TW (1) TW251347B (en)
WO (1) WO1994016294A1 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1006166B (en) * 1956-04-06 1957-04-11 Erich Hoffmann Werkstaetten Fu Method for measuring distances by means of sound waves, in particular ultrasonic waves and apparatus for practicing the method
GB1410152A (en) * 1973-03-28 1975-10-15 Plessey Co Ltd Linear measuring device

Also Published As

Publication number Publication date
CN1102288A (en) 1995-05-03
JPH07504755A (en) 1995-05-25
EP0630467A1 (en) 1994-12-28
TW251347B (en) 1995-07-11
GB2280030B (en) 1996-08-28
GB9417796D0 (en) 1994-10-26
WO1994016294A1 (en) 1994-07-21
KR950700531A (en) 1995-01-16
GB2280030A (en) 1995-01-18

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