JPH0749414Y2 - 光ディスク検査装置 - Google Patents
光ディスク検査装置Info
- Publication number
- JPH0749414Y2 JPH0749414Y2 JP19806687U JP19806687U JPH0749414Y2 JP H0749414 Y2 JPH0749414 Y2 JP H0749414Y2 JP 19806687 U JP19806687 U JP 19806687U JP 19806687 U JP19806687 U JP 19806687U JP H0749414 Y2 JPH0749414 Y2 JP H0749414Y2
- Authority
- JP
- Japan
- Prior art keywords
- guide groove
- optical
- signal
- optical disc
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title claims description 54
- 238000007689 inspection Methods 0.000 title claims description 19
- 238000001514 detection method Methods 0.000 claims description 23
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 230000007547 defect Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000002310 reflectometry Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19806687U JPH0749414Y2 (ja) | 1987-12-26 | 1987-12-26 | 光ディスク検査装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19806687U JPH0749414Y2 (ja) | 1987-12-26 | 1987-12-26 | 光ディスク検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01121838U JPH01121838U (enrdf_load_stackoverflow) | 1989-08-18 |
JPH0749414Y2 true JPH0749414Y2 (ja) | 1995-11-13 |
Family
ID=31488591
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19806687U Expired - Lifetime JPH0749414Y2 (ja) | 1987-12-26 | 1987-12-26 | 光ディスク検査装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0749414Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011237255A (ja) * | 2010-05-10 | 2011-11-24 | Hitachi High-Technologies Corp | パターン形状検査装置及び検査方法並びにパターンドメディアディスク製造ライン |
-
1987
- 1987-12-26 JP JP19806687U patent/JPH0749414Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH01121838U (enrdf_load_stackoverflow) | 1989-08-18 |
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