JPH0745021Y2 - Contact structure of probe - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention is a contact point of a probe used for inspecting electrical characteristics, performance, etc. by contacting an input / output terminal of, for example, an electronic circuit component as an object to be measured. It is about structure.

[Prior Art] For example, in the case of contacting an input / output terminal of an electronic circuit component and inspecting its electrical characteristics, as shown in FIGS.
The probe shown in (c) was used.

This probe has a needle portion 21 in which a round bar member 20 made of tungsten is bent at an intermediate position, and a tip portion thereof is tapered to be formed by polishing to make contact with an input / output terminal of an electronic circuit component with a predetermined contact area. The signal conductor 22 is formed on the surface of the
Plate-like dielectrics 24 that fix the needle portion 21 so as to be conductive with 22 are provided corresponding to the number of input / output terminals of the electronic circuit component, and each plate-like dielectric 24 corresponds to the input / output terminals of the electronic circuit component. Corresponding to each position is fixed to the fixing member 25 at a predetermined interval,
When each characteristic test of the electronic circuit component is performed, the contact load with respect to each input / output terminal is obtained by the bending of the needle portion 21.

[Problems to be Solved by the Invention] However, in the above-described conventional probe, the needle portion 21 is formed to be long in order to obtain a proper contact load with the input / output terminals of the electronic circuit component that is the object to be measured so as to remove the deflection. However, there is a problem that the impedance is greatly disturbed because the needle portion 21 is long.

Further, since the needle portions 21 have a large diameter, it is necessary to attach the taper 26 to the tip portions and arrange the needle portions 21 in a fan shape, and therefore it is not possible to mount many needle portions 21 at a high density.

Further, since the contact load with the input / output terminal is determined by the bending of the needle portion 21, the processing accuracy of the needle portion 21 directly affects the contact load.

However, since the needle portion 21 of this type of probe is manufactured through the polishing and bending process, there are many variations in dimensions, and thus there are variations in the contact load.

Further, since the alignment with respect to the input / output is performed by the soldering work, it is very difficult.

In addition, the needle portion 21 is likely to be deformed during use to cause positional displacement, which may result in measurement failure.

When contacting the input / output terminals of the DUT,
Since the 21 needle points hit the input / output terminals, there was a problem that the input / output terminals were very easily damaged. Further, there is a possibility that the needle portion 21 may be misaligned due to bending, resulting in defective inspection.

Therefore, the present invention has been made in view of the above-mentioned problems, and an object thereof is to enable high-density mounting, reduce the disturbance of impedance by forming a small contact, and reduce the inspection surface of an object to be measured. It is an object of the present invention to provide a contact structure for a probe that can inspect the electrical characteristics and performance of an object to be measured without damaging it and causing an inspection failure due to displacement.

[Means for Solving the Problems] In order to achieve the above object, the contact structure of the probe according to claim 1 of the present invention has a signal conductor 5 formed on one surface.
And a ground conductor 6 formed on the other surface, the plate dielectric 1 is disposed perpendicular to the inspection surface 8 of the object to be measured, and is vertically movable with respect to the inspection surface, It is characterized in that it is provided with a contact member made of a metal wire 10 or a ribbon having a contact portion 9 which is fixed to the plate-thickness end face of the plate-shaped dielectric at the tip portion of the signal conductor and contacts the inspection surface.

A probe contact structure according to a second aspect is the probe contact structure according to the first aspect, wherein a contact portion conductor 7 that is conductive with the signal conductor is provided on an end face of the signal conductor including a plate thickness portion of the plate dielectric. The contact member is formed and the contact member is fixed to a plate thickness portion of the contact portion conductor.

[Operation] In the probe contact structure according to claim 1, the plate-shaped dielectric 1 having the signal conductor 5 on one surface and the ground conductor 6 on the other surface is provided above and below the inspection surface 8 of the object to be measured. It is movably arranged vertically to the inspection surface 8. A contact member made of a metal wire 10 (or a ribbon) having a contact portion 9 that contacts the inspection surface 8 is fixed to the plate-thickness end face of the plate-shaped dielectric 1 at the tip of the signal conductor 5. As a result, the contact portion 9 can be made small to reduce the impedance disturbance. Moreover, high density mounting in a limited space is possible. Further, unlike the conventional needle-shaped contact point, the contact point portion 9 makes surface contact with the inspection surface 8 of the object to be measured. There is no danger of inviting.

The contact structure for a probe according to claim 2, wherein the plate-shaped dielectric 1
On the end face of the tip end portion of the signal conductor 5 including the plate thickness portion, a contact portion conductor 7 that is electrically connected to the signal conductor 5 is formed. By fixing the contact member to the thick portion of the contact portion conductor 7, a sufficient mounting surface can be provided when fixing the contact member to the plate-shaped dielectric.

[Embodiment] FIG. 1 (a) is a side view showing an embodiment of a probe contact structure according to the present invention, FIG. 1 (b) is a front view of the probe, and FIG. 1 (c) is a view of the same. It is a top view.

The multi-pin probe according to this embodiment is in contact with a plurality of input / output terminals, such as a wafer-shaped electronic circuit component, which is an object to be measured, to inspect the electrical characteristics and performance, and the plate-shaped probe. A plurality of probes 3, each of which is roughly configured to include a dielectric 1 and a guide pin 2, are attached to a fixed plate 4.

The plate-shaped dielectric 1 is arranged perpendicular to the inspection surface of the object to be measured, and is made of, for example, an alumina substrate. On one surface, a signal conductor 5 is formed from a predetermined end toward the tip 1a, and A ground conductor 6 is formed on the surface and has a microstrip structure. Further, on the tip end portion of the signal conductor 5 and on the surface of the ground conductor 6 facing the tip end portion, a contact portion conductor 7 that does not conduct to the ground conductor 6 but conducts to the signal conductor 5
Are formed. Further, the plate-shaped dielectric 1 is provided with a contact portion 9 for contacting the inspection surface 8 of the object to be measured to establish conduction at the tip portion 1a which is the end of the signal conductor 5. This contact part 9
Is a part of the metal wire 10 (or ribbon) which is a bent contact member, and both ends of the metal wire 10 are fixed to the plate thickness end faces of the contact portion conductor 7 by bonding means such as bonding or soldering. ing.

The lower end 1b of the plate-shaped dielectric 1 is inclined so as not to contact the inspection surface 8 when the contact portion 9 is electrically connected to the inspection surface 8.
Further, the guide pin 2 is provided on the upper end 1c of the plate-shaped dielectric 1.
There are two cutouts 11 for attaching the.

The cylindrical guide pin 2 has a cutout recess 2a formed at one end, and the guide pin 2 is plate-shaped by a fixing material such as solder with the cutout recess 2a fitted in the cutout 11 of the plate-shaped dielectric 1. It is fixed to the dielectric 1.

As described above, the probe 3 configured by including the plate-shaped dielectric 1 and the guide pin 2 has two fixing plates 4 formed to have a diameter larger than that of the guide pin 2 according to the mounting position of the guide pin 2. Each guide pin 2 is inserted through a pair of mounting holes 12 and mounted, and the plate-shaped dielectric 1 is slidably held via the guide pins 2. In addition, stopper members 13 for preventing removal are alternately attached to the guide pins 2 of each probe 3,
A predetermined distance is maintained between the lower surface 4a of the fixed plate 4 and the upper end 1c of the plate-shaped dielectric 1. Further, the spring 14 is provided between the mounting holes 12 of the fixing plate 4 to which the guide pin 2 is mounted.
Is formed with a holding hole 15 for holding.

The spring 14 is held in the holding hole 15 with its one end in contact with the upper end 1c of the plate-shaped dielectric 1, and the contact portion 9 comes into contact with the inspection surface 8 of the object to be measured so that each guide pin 2 is attached. When the plate dielectric 1 slides along the hole 12 and moves upward, a constant load is applied to the inspection surface by the elastic force.

In the multi-pin probe configured as described above, when inspecting the electrical characteristics and performance of the DUT, when the inspection surface 8 of the DUT contacts the contact portion 9, the plate-shaped dielectric 1 is pushed up. Each guide pin 2 slides along the mounting hole 12. Then, due to the elastic force of the spring 14 contracted by this sliding action, a constant load is applied to the inspection surface 8 through the contact portion 9, and a signal is guided from the contact portion 9 through the signal conductor 5. The signal of the object to be measured is inspected by a measuring device (not shown).

Therefore, in the above-described embodiment, since the plate-shaped dielectric 1 is moved, the metal wire or the ribbon having the contact 9 is fixed to the contact-portion conductor 7 which is the plate-thickness end surface of the plate-shaped dielectric 1. The contact portion 9 can be configured to be sufficiently small, so that the disturbance of the impedance can be made smaller than in the conventional case. Further, since the contact portion 9 does not stick out from the end surface of the plate-shaped dielectric body 1, high density mounting in a limited space is possible.

Further, since the contact portion 9 is formed by bending the metal wire 10 which is a contact member, it comes into contact with the inspection surface 8 on a substantially cylindrical side surface, which is similar to the conventional needle type contact. There is no fear of making a deep scratch. Further, since the surface contact is made with the inspection surface 8, the contact is more stable as compared with the conventional needle type contact, there is no displacement due to deformation of the nail, and there is no risk of inspection failure.

By the way, in the above-described embodiment, the contact portion conductor 7 that is electrically connected to the signal conductor 5 is formed on the end face of the plate-shaped dielectric 1, and the contact portion conductor 7 is provided with the metal wire (or ribbon) 10 as the contact member. Although the fixing structure has been described, when the ultrasonic solder can be applied, the metal wire (or ribbon) 10 as the contact member can be directly fixed to the signal conductor 5 without forming the contact portion conductor 7. .

In addition, in the above-described embodiment, the guide pin 2 fixed to the plate-shaped dielectric 1 moves along the mounting hole 12 of the fixing plate 4 in order to make the plate-shaped dielectric 1 movable. However, for example, one end of the plate-shaped dielectric 1 may be held by a member having elasticity.

[Effects of the Invention] As described above, in the contact structure of the probe according to the first aspect of the present invention, the contact member having the contact portion is arranged vertically to the inspection surface and is movable up and down. Since it is fixed to the end face of the plate thickness, the contact can be made small to reduce the impedance disturbance. Moreover, since the plate-shaped dielectric is arranged perpendicular to the inspection surface and the contact portion does not protrude from the plate-shaped dielectric, high density mounting in a limited space becomes possible. Also, unlike the conventional needle-shaped contact point, the contact point comes into surface contact with the inspection surface of the DUT, so the inspection surface is damaged and the needle is deformed, causing misalignment and inspection failure. A stable contact can be always obtained without the possibility of causing

Since the contact structure of the probe according to claim 2 is a structure in which a contact portion conductor that is in conduction with the signal conductor is formed on the end face of the tip portion including the plate portion of the signal conductor, and the contact member is fixed to the plate portion of the contact portion conductor, A sufficient mounting surface can be secured when fixing the contact member to the plate-shaped dielectric.

[Brief description of drawings]

1 (a), (b) and (c) are views showing an embodiment of a contact structure of a probe according to the present invention, and FIG. 2 (a),
(B), (c) is a figure which shows an example of the contact structure of the conventional probe. 1 ... Plate dielectric, 5 ... Signal conductor, 6 ... Ground conductor, 7 ... Contact part conductor, 8 ... Inspection surface, 9 ... Contact part,
10 …… A metal wire (or ribbon) as a contact member.

Claims (2)

[Scope of utility model registration request] 1. A signal conductor (5) formed on one surface,
A plate-shaped dielectric (6) having a ground conductor (6) formed on the other surface, arranged vertically to the inspection surface (8) of the object to be measured, and movable up and down with respect to the inspection surface. 1) and a contact member composed of a metal wire (10) or a ribbon having a contact portion (9) fixed to the plate-thickness end face of the plate-shaped dielectric at the tip of the signal conductor and contacting the inspection surface. A probe contact structure characterized by being provided. 2. A contact portion conductor (7), which is electrically connected to the signal conductor, is formed on an end surface of the tip end portion of the signal conductor including the plate thickness portion of the plate-shaped dielectric, and the contact portion conductor has the thickness portion in the plate thickness portion. The contact structure of the probe according to claim 1, wherein the contact member is fixed.