JPH0744020Y2 - ウエーハ容器におけるウエーハ支持板 - Google Patents

ウエーハ容器におけるウエーハ支持板

Info

Publication number
JPH0744020Y2
JPH0744020Y2 JP1408989U JP1408989U JPH0744020Y2 JP H0744020 Y2 JPH0744020 Y2 JP H0744020Y2 JP 1408989 U JP1408989 U JP 1408989U JP 1408989 U JP1408989 U JP 1408989U JP H0744020 Y2 JPH0744020 Y2 JP H0744020Y2
Authority
JP
Japan
Prior art keywords
wafer
support plate
container
wafers
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1408989U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02106831U (enExample
Inventor
忠三郎 大塚
敏嗣 矢島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Polymer Co Ltd
Original Assignee
Shin-Etsu Polymer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Polymer Co Ltd filed Critical Shin-Etsu Polymer Co Ltd
Priority to JP1408989U priority Critical patent/JPH0744020Y2/ja
Publication of JPH02106831U publication Critical patent/JPH02106831U/ja
Application granted granted Critical
Publication of JPH0744020Y2 publication Critical patent/JPH0744020Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP1408989U 1989-02-10 1989-02-10 ウエーハ容器におけるウエーハ支持板 Expired - Lifetime JPH0744020Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1408989U JPH0744020Y2 (ja) 1989-02-10 1989-02-10 ウエーハ容器におけるウエーハ支持板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1408989U JPH0744020Y2 (ja) 1989-02-10 1989-02-10 ウエーハ容器におけるウエーハ支持板

Publications (2)

Publication Number Publication Date
JPH02106831U JPH02106831U (enExample) 1990-08-24
JPH0744020Y2 true JPH0744020Y2 (ja) 1995-10-09

Family

ID=31224973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1408989U Expired - Lifetime JPH0744020Y2 (ja) 1989-02-10 1989-02-10 ウエーハ容器におけるウエーハ支持板

Country Status (1)

Country Link
JP (1) JPH0744020Y2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6267245B1 (en) * 1998-07-10 2001-07-31 Fluoroware, Inc. Cushioned wafer container
TWI508905B (zh) 2010-03-11 2015-11-21 安堤格里斯公司 晶圓載運器
JP5441797B2 (ja) * 2010-04-05 2014-03-12 信越ポリマー株式会社 リテーナ及び基板収納容器
WO2018185894A1 (ja) 2017-04-05 2018-10-11 ミライアル株式会社 基板収納容器

Also Published As

Publication number Publication date
JPH02106831U (enExample) 1990-08-24

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term