JPH0743428A - Alignment apparatus for inspecting substrate - Google Patents

Abstract

PURPOSE:To provide an alignment apparatus for inspecting substrates which enables the alignment of the substrates and a contact probe quickly and easily in the exchange of species. CONSTITUTION:This apparatus is provided with a prober unit 1 on which a contact is fixed and a recognition mark 1B is attached and an alignment base 2 on which a substrate as subject is mounted free to load or unload while the prober unit 1 is mounted free to load or unload. A positional information detection sensor is arranged above the prober unit 1 part of the alignment base 2 to output positional information of the prober unit 1 by reading out the recognition mark 1B of the prober unit 1 and an inspection position setting control section is provided to set or control the prober unit 1 to a specified position predetermined by driving or controlling the alignment base 2 based on the positional information detected with the positional information detection sensor.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a board inspecting alignment device, and more particularly to a board inspecting alignment device having a board / measuring element alignment mechanism.

[0002]

2. Description of the Related Art Conventional alignment related to board inspection is performed by mounting a plurality of boards on a table that can be automatically positioned with respect to the inspection position, as disclosed in Japanese Utility Model Laid-Open No. 62-150677. However, the continuous inspection method, which eliminates the interruption due to the replacement of the substrate, is relatively often used.

[0003]

However, in this type of system, continuous inspection is possible for the same type and rapid processing is possible, but when the type is changed, the alignment between the substrate and the contact probe is adjusted. Therefore, there is a problem in that the alignment of the substrate and the contact probe is complicated and time-consuming when the product type is replaced.

[0004]

It is an object of the present invention to provide an alignment apparatus for inspecting a substrate, which is capable of improving the disadvantages of the conventional example, and in particular, quickly and easily aligning the substrate and the contact probe when exchanging the product type. The purpose is to do.

[0005]

According to the present invention, there is provided a prober unit having a contactor fixed and provided with an identification mark,
A positioning base that allows the prober unit to be detachably mounted and allows arbitrary three-dimensional positioning, a positioning jig that is mounted on the positioning base to position the prober unit, and the above-mentioned recognition mark of the prober unit. And a position information detecting sensor for reading the position information of the prober unit.

Further, there is provided an inspection position setting control section which operates based on the position information detected by the position information detecting sensor to drive and control the position adjusting table and set and control the above-mentioned prober unit to a predetermined position. Is adopted. This aims to achieve the above-mentioned object.

[0007]

When the prober unit 1 is replaced, the prober unit 1 on the mounting table 5 is transported to the alignment table 2 by the transport means 4 and mounted, and the predetermined positioning is performed by the alignment jig 3. Then, the state is read by the position information detection sensor 6, the position shift amount is calculated, and the position is automatically corrected by the position adjustment table 2 to perform a desired position adjustment.
Further, for other types of products, the corresponding prober unit is installed in advance at a predetermined position of the mounting table 5 so that it can be automatically handled by the above method.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. In the embodiment shown in FIGS. 1 to 3, the prober unit 1 to which the contact 1A is fixed and the recognition mark 1B is attached, and the prober unit 1 can be detachably mounted and arbitrary three-dimensional alignment can be performed. The positioning table 2 is provided. In this alignment table 2,
A substrate 7 as an object to be inspected is detachably mounted in advance. A positioning jig 3 for positioning the prober unit 1 is removably mounted on the alignment table 2 described above.

Above the prober unit 1 portion of the alignment table 2, the recognition mark 1 of the prober unit 1 is provided.
A position information detection sensor 6 that reads B and outputs position information of the prober unit 1 is provided. Also,
An inspection position setting control unit 10 is provided which operates based on the position information detected by the position information detection sensor 6 and drives and controls the position adjusting table 2 to set the prober unit 1 to a predetermined position. .

A mounting table 5 for mounting the prober unit 1 is provided near the alignment table 2. And
A transfer means 4 for transferring the prober unit 1 on the mounting table 5 to the above-described alignment table 2 is provided side by side with the mounting table 5, and a predetermined support member (not shown) is provided on the fixed frame 4A portion of the transfer means 4. The position information detection sensor 6 described above is provided via the above.

Here, the alignment table 2 is an X-axis that can automatically move the attached prober unit 1 to a predetermined position.
It has a shaft 21, a Y-axis 22, and a rotary shaft 23. The prober unit 1 mounted on this alignment table 2 is
It is fixed by the positioning jig 3. This positioning jig 3
Are operated by being urged by a drive unit 33 fixed on the alignment table 2.

The conveying means 4 is capable of setting the prober unit 1 at a predetermined position and has a structure capable of coping with various kinds of products. The transfer means 4 has a chuck 4A and has a function of automatically transferring the prober unit 1 between the alignment table 2 and the mounting table 5.

Further, the position information detecting sensor 6 is fixed on the conveying means 4 via the predetermined supporting member as described above, and reads the recognition mark 1A of the prober unit 1 and uses it for the inspection position setting control section. Function to send to 10. The inspection position setting control unit 10 compares the position information sent from the position information detection sensor 6 with the reference data to calculate the position deviation, and uses this as a correction value to the X-axis 21 of the position adjustment table 2 described above. , Y-axis 22 and rotary shaft 23
Automatically moves to set the prober unit 1 to the normal measurement position.

On the other hand, the reference data set in the inspection position setting control unit 10 for determining the positional deviation is preliminarily aligned with the target substrate 7 and the prober unit 1, and the recognition mark 1A is read from that state. At the same time, the position data relating to the initial alignment is registered as reference data.

When replacing the prober unit 1,
The prober unit 1 on the mounting table 5 is transported to and mounted on the alignment table 2 by the transport means 4, and the positioning jig 3 performs predetermined positioning. Then, the state is read by the position information detection sensor 6, the position shift amount is calculated, and the position is automatically corrected by the position adjustment table 2 to perform a desired position adjustment. Further, for other types of products, the corresponding prober unit is installed in advance at a predetermined position of the mounting table 5 so that it can be automatically handled by the above method.

[0016]

Since the present invention is constructed and functions as described above, the prober unit is automatically carried in and the setting equipment is automatically set even when inspecting different types of boards. It is possible to provide an unprecedented excellent alignment device for inspecting a substrate, in which the complexity of time is eliminated and the position of the prober unit with respect to the substrate can be quickly and accurately aligned.

[Brief description of drawings]

FIG. 1 is a schematic plan view showing an embodiment of the present invention.

FIG. 2 is a schematic front view showing an alignment table portion of the embodiment shown in FIG.

FIG. 3 is a block diagram for controlling the operation of the alignment table portion of the embodiment shown in FIG.

[Explanation of symbols]

 1 Prober unit 1A Contactor 1B Recognition mark 2 Positioning table 3 Positioning jig 4 Conveying means 5 Mounting table 6 Position information detection sensor 10 Inspection position setting control section

Claims (2)

[Claims] 1. A prober unit to which a contact is fixed and an identification mark is attached, a positioning table on which the prober unit is detachably mounted and which allows arbitrary three-dimensional positioning, and a positioning table on the positioning table. Equipped with a positioning jig for positioning the prober unit, and a position information detection sensor for reading the recognition mark of the prober unit and outputting the position information of the prober unit, and the position detected by the position information detection sensor. A substrate inspection alignment device, comprising: an inspection position setting control unit that operates based on information to drive and control the alignment table to set and control the prober unit at a predetermined position. 2. A prober unit to which a contact is fixed and an identification mark is attached, a positioning table on which the prober unit is detachably mounted and which allows arbitrary three-dimensional positioning, and a positioning table on the positioning table. Equipped with a positioning jig for positioning the prober unit, and a position information detection sensor for reading the recognition mark of the prober unit and outputting the position information of the prober unit, and the position detected by the position information detection sensor. An inspection position setting control section is provided which operates based on information to drive and control the positioning base to set and control the prober unit at a predetermined position. The mounting base for the prober unit is provided on the mounting base. A transfer means for transferring the prober unit of FIG. The position information that has been equipped with a sensor positioning device substrate inspection, wherein the.