JPH0739833A - Detergent - Google Patents

Detergent

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Publication number
JPH0739833A
JPH0739833A JP18651993A JP18651993A JPH0739833A JP H0739833 A JPH0739833 A JP H0739833A JP 18651993 A JP18651993 A JP 18651993A JP 18651993 A JP18651993 A JP 18651993A JP H0739833 A JPH0739833 A JP H0739833A
Authority
JP
Japan
Prior art keywords
cleaning
cleaning tank
cleaned
pressure
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18651993A
Other languages
Japanese (ja)
Inventor
Tamiyoshi Yasunaga
民好 安永
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP18651993A priority Critical patent/JPH0739833A/en
Publication of JPH0739833A publication Critical patent/JPH0739833A/en
Pending legal-status Critical Current

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  • Cleaning By Liquid Or Steam (AREA)

Abstract

PURPOSE:To increase cleaning effect by positively removing gaseous portion from the surface of a material to be cleaned or a cleaning solution and penetrating the cleaning solution into the fine gap of the material to be cleaned. CONSTITUTION:The gaseous portion is positively removed from the surface of the material 16 to be cleaned or the cleaning solution 15 and the cleaning solution 15 is penetrated into the fine gap of the material 16 to be cleaned by constituting so as to be provided with a controller 6 for operating a pump 7 to charge or discharge the cleaning solution 15 based on a pressure detected by a pressure sensor 5 for detecting the pressure in the cleaning vessel 1 and a nozzle 13 for injecting the cleaning solution 15 into the cleaning vessel 1.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は液体の洗浄剤を用いて、
微小な隙間を表面に有する精密部品などを洗浄する洗浄
装置に関する。
BACKGROUND OF THE INVENTION The present invention uses a liquid detergent to
The present invention relates to a cleaning device for cleaning precision parts and the like having minute gaps on the surface.

【0002】[0002]

【従来の技術】近年、洗浄剤として高性能であるフロン
が使用できなくなり、様々な代替洗浄が提案されるな
か、水だけによる洗浄に期待がかけられている。
2. Description of the Related Art In recent years, chlorofluorocarbon, which has a high performance, cannot be used as a cleaning agent, and various alternative cleaning methods have been proposed.

【0003】しかしながら、水は、洗浄液として扱い易
い長所があるが、非常に高い表面張力を有し、微小な隙
間に浸透しにくいという欠点を有している。一方、製品
の小型化によって使用される部品も小型化され、部品が
微小な隙間を多く有するようになってきており、通常の
表面張力を低下させるような洗浄剤によっても、微小な
隙間に洗浄剤を浸透させることが困難になってきてい
る。
However, although water has an advantage that it can be easily handled as a cleaning liquid, it has a drawback that it has a very high surface tension and does not easily penetrate into minute gaps. On the other hand, due to the miniaturization of products, the parts used are also miniaturized, and the parts have many small gaps. Even cleaning agents that reduce normal surface tension can be used to clean small gaps. It has become difficult to penetrate the agent.

【0004】また、洗浄を行うときには、機械的・物理
接触的な補助力を洗浄剤と被洗浄物に加えて洗浄の効果
を高めるのが一般的である。この補助力を用いる方法の
一つに、気泡を被洗浄物に当てて汚れを排除しようとす
る方法があり、たとえば、密閉された洗浄槽を減圧する
と同時に、洗浄槽を加熱することにより、洗浄槽内及び
被洗浄物の表面より気泡を発生させてこれを洗浄の補助
力とした方法がある(特開昭61−109567号公報
参照)。
Further, when cleaning is performed, it is general to add a mechanical / physical contact assisting force to the cleaning agent and the object to be cleaned to enhance the cleaning effect. One of the methods of using this auxiliary force is to remove bubbles by applying air bubbles to the object to be cleaned. For example, by depressurizing the sealed cleaning tank and heating the cleaning tank at the same time, cleaning is performed. There is a method in which air bubbles are generated in the tank and on the surface of the object to be cleaned and used as an assisting force for cleaning (see JP-A-61-109567).

【0005】さらに、発生させた気泡を積極的に利用す
るべく洗浄槽を加圧・減圧して気泡を制御する方法がい
くつかあり、たとえば、気体をいったん水と混合し、こ
の混合体に圧力をかけることにより水に気体を溶解さ
せ、ついでこの水を減圧させながら水槽に放出させるこ
とにより発生する微細な気泡を、水流と共に被洗浄物に
当てることにより洗浄する方法(特開昭59−1652
7号公報参照)、また、気体をいったん水と混合し、こ
の水を密閉された洗浄槽に供給し、洗浄槽を加圧するこ
とにより、いったん気体を水に溶解させ、ついで減圧さ
せることにより、溶解していた気体を微細な気泡として
析出させて、この気泡を被洗浄物の表面に当てるように
した洗浄装置(特開昭62−191090号公報参照)
等がある。
Further, there are several methods of controlling the bubbles by pressurizing and depressurizing the cleaning tank in order to positively utilize the generated bubbles. For example, a gas is once mixed with water and the mixture is pressurized. A gas is dissolved in water by applying a water vapor, and then fine air bubbles generated by releasing the water into the water tank while decompressing the water are applied to the object to be cleaned together with the water flow to clean the air (Japanese Patent Laid-Open No. 59-1652).
(See Japanese Patent Laid-Open No. 7), the gas is once mixed with water, the water is supplied to a closed cleaning tank, and the cleaning tank is pressurized to once dissolve the gas in water, and then the pressure is reduced. A cleaning device in which dissolved gas is deposited as fine bubbles and the bubbles are applied to the surface of the object to be cleaned (see Japanese Patent Laid-Open No. 62-191090).
Etc.

【0006】[0006]

【発明が解決しようとする課題】しかしながら上記の従
来の洗浄方法や洗浄装置では、発生した気泡を当てる被
洗浄物が平面状であれば、汚れが除去されることが期待
できるが、微小な隙間を有する精密部品などでは、液体
の表面張力の影響で隙間に気泡が入りにくく、また隙間
に気泡が入ったときは、逆に除去しにくく、たとえ気泡
を小さくして用いたとしても、気泡が集まって大きな気
泡を形成して、隙間に空気が閉じこめられ、洗浄液が入
りにくくなることがあり、隙間を洗い残すこととなり、
特に、洗浄液として水を用いたときは、表面張力が大き
いので、この現象が顕著に現れるという問題点、また、
洗浄液中に溶存する気体は、超音波洗浄においてキャビ
テーションの衝撃力を弱め、洗浄の障害となるという問
題点を有していた。
However, in the above-described conventional cleaning method and cleaning apparatus, if the object to be cleaned on which the generated air bubbles are applied is flat, it can be expected that dirt will be removed. In the case of precision parts, etc., where bubbles are unlikely to enter the gap due to the effect of the surface tension of the liquid, and when bubbles are found in the gap, it is difficult to remove them conversely. Collecting them to form large bubbles, the air may be trapped in the gap, and it may become difficult for the cleaning liquid to enter, leaving the gap unwashed.
In particular, when water is used as the cleaning liquid, the surface tension is large, so that this phenomenon is prominent.
The gas dissolved in the cleaning liquid has a problem that the impact force of cavitation is weakened in ultrasonic cleaning, which becomes an obstacle to cleaning.

【0007】本発明は上記従来の問題点を解決するもの
で、被洗浄物の表面あるいは洗浄液中から積極的に気体
分を排除し、被洗浄物の微小な隙間に洗浄液を浸透させ
ることができ、また、超音波洗浄の効果を上げることの
できる洗浄装置を提供することを目的とする。
The present invention solves the above-mentioned problems of the prior art. It is possible to positively remove gas components from the surface of the object to be cleaned or the cleaning liquid, and to permeate the cleaning liquid into minute gaps in the object to be cleaned. It is another object of the present invention to provide a cleaning device that can improve the effect of ultrasonic cleaning.

【0008】[0008]

【課題を解決するための手段】この目的を達成するため
に本発明の洗浄装置は、密閉構造の洗浄槽と、洗浄槽内
の圧力を検知する圧力センサーと、圧力センサーが検知
した圧力を基にしてポンプを作動させて洗浄液を送排出
する制御器と、洗浄槽内へ洗浄液を噴射するノズルまた
は被洗浄物に超音波を照射する超音波振動子を備えた構
成としたものである。
In order to achieve this object, a cleaning apparatus of the present invention is based on a cleaning tank having a closed structure, a pressure sensor for detecting the pressure in the cleaning tank, and a pressure sensor for detecting pressure. And a controller for operating the pump to send and discharge the cleaning liquid, and an ultrasonic vibrator for irradiating the nozzle to inject the cleaning liquid into the cleaning tank or the object to be cleaned with ultrasonic waves.

【0009】[0009]

【作用】この構成において、洗浄槽を減圧したときは、
溶存気体の析出、膨張により気体が微小な隙間からはみ
出し、表面張力で被洗浄物の表面に付着した気泡に浮力
を与えて、表面から離れ易くすることとなり、また、洗
浄槽を加圧したときは、洗浄液中の気体を収縮させて、
隙間に入り込んで被洗浄物との接触面積が大きくなって
いる気泡の接触面積を減少させる効果を与え、洗浄液の
撹拌などによって微小気泡を除去することとなる。
In this structure, when the pressure in the cleaning tank is reduced,
Due to the precipitation and expansion of the dissolved gas, the gas protrudes from the minute gaps, and the surface tension imparts buoyancy to the bubbles adhering to the surface of the object to be cleaned, making it easier to separate from the surface. Shrinks the gas in the cleaning liquid,
This has the effect of reducing the contact area of the bubbles that enter the gap and have a large contact area with the object to be cleaned, and the fine bubbles are removed by stirring the cleaning liquid or the like.

【0010】[0010]

【実施例】【Example】

(実施例1)以下、図面を参照しながら本発明の一実施
例について説明する。
(Embodiment 1) An embodiment of the present invention will be described below with reference to the drawings.

【0011】図1に示すように、洗浄槽1は、密閉蓋2
によって密閉することができ、密閉蓋2に配設された排
気弁3から洗浄槽1内の圧力が上昇したとき気体分離膜
4を通過した気体を排出できる構成とされている。
As shown in FIG. 1, the cleaning tank 1 includes a closed lid 2
The gas is passed through the gas separation membrane 4 when the pressure in the cleaning tank 1 rises from the exhaust valve 3 provided on the sealing lid 2 and the gas can be discharged.

【0012】また、洗浄槽1内の壁面には、圧力センサ
ー5が配設され、制御器6に接続されている。制御器6
により作動されるポンプ7は、洗浄槽1に連結されたパ
イプ8に接続され、さらにポンプ7からパイプ9を通じ
て貯水槽10へと連結されている。この貯水槽10に貯
められた液体は、バルブ11の開栓により、パイプ12
を通じて任意に排水できる。また、洗浄槽1内に配設さ
れたノズル13からポンプ14によって洗浄槽1内の洗
浄液15を被洗浄物16に噴射することができる。
A pressure sensor 5 is arranged on the wall surface in the cleaning tank 1 and is connected to a controller 6. Controller 6
The pump 7 operated by is connected to the pipe 8 connected to the cleaning tank 1, and further connected from the pump 7 to the water tank 10 through the pipe 9. The liquid stored in the water storage tank 10 is opened by opening the valve 11 so that the pipe 12
Can be drained arbitrarily. Further, the cleaning liquid 15 in the cleaning tank 1 can be jetted to the object to be cleaned 16 by the pump 14 from the nozzle 13 arranged in the cleaning tank 1.

【0013】図2に示すように、排気弁3は排気口17
内に支柱18によって支えられていて、排気弁3の入口
側の気体分離膜4によって、液体は通過できない構成と
されている。
As shown in FIG. 2, the exhaust valve 3 has an exhaust port 17
It is supported inside by struts 18 and is configured so that liquid cannot pass through by the gas separation membrane 4 on the inlet side of the exhaust valve 3.

【0014】以上のように構成された洗浄装置につい
て、以下その動作を説明する。洗浄槽1中に洗浄液15
を満たして、被洗浄物16を入れて、密閉蓋2を閉じ
て、洗浄槽1内を密閉し、洗浄槽1内の洗浄液15を、
制御器6により作動させたポンプ7によって、貯水槽1
0へ排出する。排出と同時に、ポンプ14によりノズル
13へ洗浄液15を送り、ノズル13から高速水流を被
洗浄物16に噴射する。制御器6は、圧力センサー5に
よって洗浄槽1内の圧力を検出し、所定圧力になった
ら、貯水槽10への排出を停止する。このとき、図3
(a)に示すように、被洗浄物16の微小な隙間19に
残っていた空気20は、圧力の低下により図3(b)に
示すように膨張し、隙間19からはみ出すようになる。
はみ出した空気20は、ノズル13からの高速水流によ
って図3(c)に示すように除去される。除去された空
気20は、洗浄液15内を上昇し、その表面に浮上す
る。
The operation of the cleaning apparatus constructed as above will be described below. Cleaning solution 15 in the cleaning tank 1
Is filled with the material 16 to be cleaned, the sealing lid 2 is closed, the inside of the cleaning tank 1 is sealed, and the cleaning liquid 15 in the cleaning tank 1 is
By the pump 7 operated by the controller 6, the water tank 1
Discharge to 0. Simultaneously with the discharge, the cleaning liquid 15 is sent to the nozzle 13 by the pump 14, and the high-speed water stream is jetted from the nozzle 13 to the object to be cleaned 16. The controller 6 detects the pressure in the cleaning tank 1 by the pressure sensor 5, and when the pressure reaches a predetermined pressure, the controller 6 stops the discharge to the water storage tank 10. At this time,
As shown in FIG. 3A, the air 20 remaining in the minute gap 19 of the object to be cleaned 16 expands as shown in FIG.
The protruding air 20 is removed by the high-speed water flow from the nozzle 13, as shown in FIG. The removed air 20 rises in the cleaning liquid 15 and floats on the surface thereof.

【0015】次に、貯水槽10内の洗浄液15を、制御
器6により作動させたポンプ7によって、洗浄槽1へ送
る。この間ノズル13からは、高速水流が送り続けられ
ている。制御器6は、圧力センサー5によって洗浄槽1
内の圧力を検出し、所定圧力になったら、洗浄槽1への
送出を停止する。このとき、図4(a)に示すように、
被洗浄物16の微小な隙間19に残っていた空気20
は、圧力の増加により収縮し、洗浄液15を隙間19へ
引き込む。図4(b)に示すように隙間19の大きさよ
りも小さく収縮した空気21は、隙間19の壁面を離れ
易くなり、高速水流によって除去される。この空気21
は、洗浄液15内を上昇し、その表面上に浮上する。
Next, the cleaning liquid 15 in the water storage tank 10 is sent to the cleaning tank 1 by the pump 7 operated by the controller 6. During this time, the high-speed water stream is continuously sent from the nozzle 13. The controller 6 uses the pressure sensor 5 to wash the washing tank 1
The internal pressure is detected, and when it reaches a predetermined pressure, the delivery to the cleaning tank 1 is stopped. At this time, as shown in FIG.
The air 20 remaining in the minute gaps 19 of the object to be cleaned 16
Contracts due to an increase in pressure and draws the cleaning liquid 15 into the gap 19. As shown in FIG. 4B, the air 21 contracted smaller than the size of the gap 19 easily leaves the wall surface of the gap 19 and is removed by the high-speed water flow. This air 21
Rises in the cleaning liquid 15 and floats on the surface thereof.

【0016】上述のようにして除去されて洗浄液15の
表面上に浮上した空気20,21は、加圧の過程で排気
弁3を抜けて洗浄槽1外へ排出される。
The air 20, 21 that has been removed as described above and floated above the surface of the cleaning liquid 15 passes through the exhaust valve 3 in the process of pressurization and is discharged to the outside of the cleaning tank 1.

【0017】上述のような、洗浄槽1内の減圧と加圧の
過程を所定の回数繰り返すことにより、隙間19の空気
は、被洗浄物16の表面より除去され、代わりに隙間1
9には、洗浄液15が浸入し、隙間19内を洗浄でき
る。
By repeating the process of depressurizing and pressurizing the cleaning tank 1 as described above a predetermined number of times, the air in the gap 19 is removed from the surface of the article 16 to be cleaned, and instead the gap 1 is replaced.
The cleaning liquid 15 permeates into 9 to clean the inside of the gap 19.

【0018】以上のように本実施例によれば、排気弁3
を有する密閉構造の洗浄槽1に洗浄液15の加圧・減圧
手段と、洗浄槽1内の圧力を検出する圧力センサー5に
よって加圧・減圧手段を制御する制御器6を設けること
により、洗浄液15を加圧・減圧して生じる被洗浄物1
6の表面上の気泡と、洗浄液15中から気泡として析出
した溶存気体とを被洗浄物16の表面の汚れとともに除
去して、洗浄液15中の気泡を除去しながら洗浄を行う
ことができる。
As described above, according to this embodiment, the exhaust valve 3
By providing a pressure / decompression means for the cleaning liquid 15 and a controller 6 for controlling the pressure / decompression means by a pressure sensor 5 for detecting the pressure in the cleaning tank 1, the cleaning liquid 15 having a closed structure having To be cleaned 1 caused by pressurizing and depressurizing
The bubbles on the surface of No. 6 and the dissolved gas deposited as bubbles from the cleaning liquid 15 can be removed together with the dirt on the surface of the object to be cleaned 16, and the cleaning can be performed while removing the bubbles in the cleaning liquid 15.

【0019】なお、本実施例では、汚れと気泡の除去を
高速流で行うとしたが、超音波振動により除去させても
よい。
In this embodiment, the dirt and bubbles are removed at a high speed, but they may be removed by ultrasonic vibration.

【0020】(実施例2)以下本発明の第2の実施例に
ついて説明する。
(Second Embodiment) A second embodiment of the present invention will be described below.

【0021】本実施例の特徴とするところは、上述実施
例1の構成のうち、気体分離膜4を有しない排気弁3と
した点である。
The feature of this embodiment is that the exhaust valve 3 having no gas separation membrane 4 in the structure of the first embodiment is used.

【0022】以上のように構成された洗浄装置につい
て、以下その動作を説明する。貯水槽10内の洗浄液1
5を、制御器6により作動させたポンプ7によって、洗
浄槽1へ送る加圧の過程において、排気弁3を気体が通
過するときと、排気弁3を液体が通過するときでは、気
体と液体の流動抵抗の差異によって、洗浄液15の圧力
が異なるので、この圧力の変化を圧力センサー5によっ
て検知して、排気弁3を洗浄液15が通過した瞬間にポ
ンプ7を停止する。したがって、洗浄槽1内の洗浄液1
5の外部への流出は最小限度に抑えられる。
The operation of the cleaning apparatus constructed as above will be described below. Cleaning liquid 1 in water tank 10
When the gas passes through the exhaust valve 3 and when the liquid passes through the exhaust valve 3 in the process of pressurizing the cleaning tank 5 to the cleaning tank 1 by the pump 7 operated by the controller 6, Since the pressure of the cleaning liquid 15 differs due to the difference in the flow resistance of, the pressure sensor 5 detects this pressure change and stops the pump 7 at the moment when the cleaning liquid 15 passes through the exhaust valve 3. Therefore, the cleaning liquid 1 in the cleaning tank 1
The outflow of 5 is minimized.

【0023】本実施例の効果は、実施例1の効果と同様
であるので説明は省略する。 (実施例3)以下本発明の第3の実施例について説明す
る。
Since the effect of this embodiment is similar to that of the first embodiment, its explanation is omitted. (Embodiment 3) A third embodiment of the present invention will be described below.

【0024】本実施例の特徴とするところは、上述実施
例1の構成のうち、排気弁3を図5に示すように、気体
分離膜4の代わりに、支柱22で支えられた気室23を
有する排気弁3とした点である。
The feature of this embodiment is that, in the structure of the above-described first embodiment, the exhaust valve 3 is, as shown in FIG. 5, an air chamber 23 supported by a column 22 instead of the gas separation membrane 4. The exhaust valve 3 has a point.

【0025】以上のように構成された洗浄装置につい
て、以下その動作を説明する。洗浄槽1内の洗浄液15
の液面が上昇して、排気弁3に近づくと、気室23が持
ち上げられて排気口17を塞いで、内部の洗浄液15が
外部に漏れるのを防ぐことができる。
The operation of the cleaning apparatus having the above structure will be described below. Cleaning solution 15 in cleaning tank 1
When the liquid level rises and approaches the exhaust valve 3, the air chamber 23 is lifted to block the exhaust port 17 and prevent the cleaning liquid 15 inside from leaking to the outside.

【0026】本実施例の効果は、実施例1の効果と同様
であるので説明は省略する。 (実施例4)以下本発明の第4の実施例について説明す
る。
Since the effect of this embodiment is similar to that of the first embodiment, its explanation is omitted. (Fourth Embodiment) A fourth embodiment of the present invention will be described below.

【0027】図6に示すように、本実施例の特徴とする
ところは、上述実施例1の構成のうち、ノズル13とポ
ンプ14の代わりに洗浄槽1内に洗浄槽1の外部の発振
器24によって駆動される超音波振動子25が配設され
ていて、洗浄槽1内の洗浄液15を通じて被洗浄物16
に超音波を照射することができる構成とした点である。
As shown in FIG. 6, the feature of this embodiment lies in that, in the configuration of the above-described first embodiment, the oscillator 24 outside the cleaning tank 1 is provided in the cleaning tank 1 instead of the nozzle 13 and the pump 14. An ultrasonic transducer 25 driven by the
The point is that it is possible to irradiate ultrasonic waves.

【0028】以上のように構成された洗浄装置は、実施
例1と同様の効果に加えて、洗浄液15中の溶存気体が
減少することにより、超音波洗浄を行ったときのキャビ
テーションの効果を上げることができる。
In addition to the same effects as those of the first embodiment, the cleaning apparatus configured as described above reduces the dissolved gas in the cleaning liquid 15 to improve the effect of cavitation when ultrasonic cleaning is performed. be able to.

【0029】[0029]

【発明の効果】以上の説明からも明らかなように本発明
は、洗浄槽内の圧力を検知する圧力センサーと、圧力セ
ンサーが検知した圧力を基にしてポンプを作動させて洗
浄液を送排出する制御器と、洗浄槽内へ洗浄液を噴射す
るノズルまたは被洗浄物に超音波を照射する超音波振動
子を備えた構成により、被洗浄物の表面あるいは洗浄液
中から積極的に気体分を排除し、被洗浄物の微小な隙間
に洗浄液を浸透させることができ、また、超音波洗浄の
効果を上げることのできる優れた洗浄装置を実現できる
ものである。
As is apparent from the above description, according to the present invention, the pressure sensor for detecting the pressure in the cleaning tank and the pump operated based on the pressure detected by the pressure sensor to send and discharge the cleaning liquid. A controller, a nozzle for injecting the cleaning liquid into the cleaning tank, or an ultrasonic vibrator for irradiating ultrasonic waves to the object to be cleaned, actively removes gas from the surface of the object to be cleaned or the cleaning liquid. Thus, it is possible to realize an excellent cleaning device that can allow the cleaning liquid to penetrate into the minute gaps of the object to be cleaned and can enhance the effect of ultrasonic cleaning.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例1の洗浄装置の概略構成図FIG. 1 is a schematic configuration diagram of a cleaning device according to a first embodiment of the present invention.

【図2】同洗浄装置の排気弁の拡大断面図FIG. 2 is an enlarged sectional view of an exhaust valve of the cleaning device.

【図3】同洗浄装置の減圧過程の被洗浄物の表面の微小
な隙間の空気の挙動を示す断面略図
FIG. 3 is a schematic cross-sectional view showing the behavior of air in a minute gap on the surface of the object to be cleaned during the depressurization process of the cleaning device.

【図4】同洗浄装置の加圧過程の被洗浄物の表面の微小
な隙間の空気の挙動を示す断面略図
FIG. 4 is a schematic cross-sectional view showing the behavior of air in a minute gap on the surface of the object to be cleaned during the pressurizing process of the cleaning device.

【図5】本発明の実施例3の洗浄装置の排気弁の拡大断
面図
FIG. 5 is an enlarged sectional view of an exhaust valve of a cleaning device according to a third embodiment of the present invention.

【図6】本発明の実施例4の洗浄装置の概略構成図FIG. 6 is a schematic configuration diagram of a cleaning device according to a fourth embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 洗浄槽 3 排気弁 5 圧力センサー 6 制御器 7 ポンプ 13 ノズル 15 洗浄液 23 気室 24 発振器 25 超音波振動子 1 Cleaning Tank 3 Exhaust Valve 5 Pressure Sensor 6 Controller 7 Pump 13 Nozzle 15 Cleaning Liquid 23 Air Chamber 24 Oscillator 25 Ultrasonic Transducer

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 密閉構造の洗浄槽と、前記洗浄槽内の圧
力を検知する圧力センサーと、前記圧力センサーが検知
した圧力を基にしてポンプを作動させて洗浄液を送排出
する制御器と、前記洗浄槽内へ前記洗浄液を噴射するノ
ズルを備えた洗浄装置。
1. A cleaning tank having a closed structure, a pressure sensor for detecting the pressure in the cleaning tank, and a controller for operating a pump based on the pressure detected by the pressure sensor to send and discharge the cleaning liquid. A cleaning device comprising a nozzle for injecting the cleaning liquid into the cleaning tank.
【請求項2】 密閉構造の洗浄槽と、前記洗浄槽内の圧
力を検知する圧力センサーと、前記圧力センサーが検知
した圧力を基にしてポンプを作動させて洗浄液を送排出
する制御器と、発振器により駆動される前記洗浄槽内に
配設された超音波振動子を備えた洗浄装置。
2. A cleaning tank having a closed structure, a pressure sensor for detecting a pressure in the cleaning tank, and a controller for operating a pump based on the pressure detected by the pressure sensor to send and discharge the cleaning liquid. A cleaning device provided with an ultrasonic transducer arranged in the cleaning tank driven by an oscillator.
【請求項3】 洗浄槽内の上方に滞留した気体を排出
し、前記洗浄槽外の気体が前記洗浄槽内へ侵入するのを
阻止する排気弁を、前記洗浄槽に設けた請求項1または
2に記載の洗浄装置。
3. The cleaning tank is provided with an exhaust valve for discharging the gas accumulated above in the cleaning tank and preventing the gas outside the cleaning tank from entering the cleaning tank. The cleaning device according to 2.
【請求項4】 排気弁は、洗浄槽内の液体が外部へ漏洩
するのを阻止する気室を有する請求項3記載の洗浄装
置。
4. The cleaning apparatus according to claim 3, wherein the exhaust valve has an air chamber that prevents the liquid in the cleaning tank from leaking to the outside.
JP18651993A 1993-07-29 1993-07-29 Detergent Pending JPH0739833A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18651993A JPH0739833A (en) 1993-07-29 1993-07-29 Detergent

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18651993A JPH0739833A (en) 1993-07-29 1993-07-29 Detergent

Publications (1)

Publication Number Publication Date
JPH0739833A true JPH0739833A (en) 1995-02-10

Family

ID=16189923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18651993A Pending JPH0739833A (en) 1993-07-29 1993-07-29 Detergent

Country Status (1)

Country Link
JP (1) JPH0739833A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006249530A (en) * 2005-03-11 2006-09-21 Fujitsu Ltd Method for forming pattern made of metallic film
US7732123B2 (en) 2004-11-23 2010-06-08 Taiwan Semiconductor Manufacturing Company, Ltd. Immersion photolithography with megasonic rinse
JP2010244627A (en) * 2009-04-07 2010-10-28 Alphana Technology Co Ltd Method of manufacturing disk drive device, and disk drive device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7732123B2 (en) 2004-11-23 2010-06-08 Taiwan Semiconductor Manufacturing Company, Ltd. Immersion photolithography with megasonic rinse
JP2006249530A (en) * 2005-03-11 2006-09-21 Fujitsu Ltd Method for forming pattern made of metallic film
JP2010244627A (en) * 2009-04-07 2010-10-28 Alphana Technology Co Ltd Method of manufacturing disk drive device, and disk drive device

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