JP4841484B2 - Substrate processing equipment - Google Patents

Description

  The present invention relates to a substrate processing apparatus for processing a semiconductor wafer or a glass substrate for a liquid crystal display device (hereinafter simply referred to as a substrate) with a processing liquid.

Conventionally, this type of apparatus includes, for example, a processing tank that stores a processing liquid and accommodates a substrate, and a nozzle that supplies isopropyl alcohol (IPA) gas to an upper space of the processing tank (for example, Patent Document 1). In this apparatus, pure water is supplied to the processing tank to clean the substrate, and then an IPA gas is supplied to the upper space of the processing tank to form an IPA atmosphere. Then, the substrate is lifted and moved to the IPA atmosphere at the top of the processing tank, whereby the pure water adhering to the substrate is replaced with IPA, and drying is promoted.
Japanese Patent Laid-Open No. 10-22257

However, the conventional example having such a configuration has the following problems.
That is, the conventional apparatus can accelerate the drying of the substrate to some extent by lifting the substrate that has been cleaned with pure water from the pure water and moving it into the IPA atmosphere, while the fine pattern formed on the substrate. The pure water adhering to the substrate cannot be sufficiently dried, and the substrate may be poorly dried.

  By the way, among recent semiconductor devices, in the memory field, as a technology for significantly increasing the degree of integration compared to the conventional technology, a capacitor having a cylinder shape has begun to be adopted. Such a cylinder structure has an extremely large aspect ratio, and it is particularly difficult to sufficiently dry the pure water that has entered the gap, and the above-described problem is remarkable. In addition, even a device related to a so-called micromachine (MEMS (Micro Electro Mechanical Systems)) may cause the same problem.

  Therefore, a method of lifting the substrate after replacing the pure water with a solvent instead of using pure water as the final treatment liquid before lifting the substrate is conceivable. However, in this case, although it is important to sufficiently replace the pure water with a solvent, even if a large amount of solvent is supplied to the pure water, the concentration of the pure water in the solvent cannot be reduced to a certain level, Pure water cannot be sufficiently replaced with a solvent. Therefore, there is a problem that poor drying due to pure water may occur.

  This invention is made in view of such a situation, Comprising: The substrate processing apparatus which can prevent the dry defect resulting from a pure water by making the pure water density | concentration in a solvent low as much as possible is provided. For the purpose.

In order to achieve such an object, the present invention has the following configuration.
That is, the invention described in claim 1 is a substrate processing apparatus for processing a substrate with a processing liquid, a processing tank comprising an inner tank for storing the processing liquid and an outer tank for recovering the processing liquid overflowing from the inner tank. A supply pipe that connects the inner tank and the outer tank in communication and circulates the processing liquid, a first branch pipe that divides the supply pipe, and the first branch pipe. The separation means for separating the pure water and the solvent therein and discharging the pure water, the second branch pipe communicating with the upstream side and the downstream side of the separation means, and the second branch pipe A deionized water removing unit that adsorbs and removes deionized water in the processing liquid; an injection pipe that is disposed in the supply pipe and injects pure water downstream from the separating unit; and a solvent is injected into the injection pipe Solvent injection means for supplying pure water from the injection pipe and cleaning the substrate in the processing tank with pure water After the treatment, after performing a replacement process of injecting the solvent from the solvent injection means and replacing the pure water with the solvent, the process is switched to the first branch pipe, and the pure water is removed from the processing liquid by the separation means. Control means for performing separation and removal processing, switching to the second branch pipe, and performing adsorption removal processing for adsorbing and removing pure water in the treatment liquid by the pure water removal means. It is what.

  [Operation / Effect] According to the invention described in claim 1, the control means supplies the pure water from the injection pipe and cleans the substrate in the processing tank with pure water, and then the solvent injection means. A replacement treatment is performed in which pure solvent is replaced with a solvent by injecting a solvent. In this replacement treatment, most of pure water can be replaced with a solvent, but the concentration of pure water in the treatment liquid cannot be reduced below a certain level. Therefore, the flow of the processing liquid is switched to the first branch pipe, and after the separation and removal process for removing pure water from the processing liquid by the separation means, the flow of the processing liquid is switched to the second branch pipe and the pure water removal means is used. Adsorption removal processing is performed. Therefore, only pure water mixed in the solvent can be adsorbed and removed by the pure water removing means, and the concentration of pure water in the solvent can be made as low as possible. As a result, it is possible to prevent poor drying due to pure water in the solvent.

  In addition, as said adsorption removal means, a molecular sieve, activated carbon, an alumina, etc. are illustrated.

  In the present invention, the first branch pipe on the upstream side of the separation means, a mixer for mixing pure water and a solvent, the upstream side of the mixer, the downstream side of the mixer, and the separation means And a third branch pipe that communicates with the upstream side of the first and second control pipes, and when the solvent is water-soluble, the control means allows the flow of the processing liquid to flow through the third branch pipe during the separation and removal process. When the solvent is insoluble in water, it is preferable to pass the treatment liquid through the mixer during the separation and removal treatment (claim 2). The separating means has a characteristic that it is easier to separate the pure water and the solvent in a well-mixed state than in a state where the pure water and the solvent are completely separated. Therefore, when the solvent is water-insoluble, the control means switches the processing liquid flow from the third branch pipe to the second branch pipe and separates the solvent and pure water from the mixer during the separation and removal process. Since the mixing process to mix is performed, the pure water in a solvent can be isolate | separated efficiently. In particular, in the case of a water-insoluble solvent such as a fluorinated solvent, pure water and the solvent are difficult to mix, so that the separation efficiency by the separation means can be increased by mixing with a mixer.

  In the present invention, it is preferable that the mixer includes an injection portion for injecting pure water. If the concentration of pure water in the solvent is below a certain value, the separation efficiency between the pure water and the solvent by the separating means will decrease, so that pure water will be injected and mixed positively into the solvent whose pure water concentration has decreased. As a result, the deionized water that has become a certain value or less can be separated by the separating means so as to be drawn out with pure water.

  In the present invention, the separation means includes a filter that separates oil and water, a housing that surrounds the filter, an inflow portion that is provided in the housing and into which processing liquid flows, and is provided in the housing and passes through the filter. It is preferable to include an outflow part through which the treated liquid flows out, a discharge part that is provided in the housing and discharges pure water separated by the filter, and a cooling unit that cools the filter. 4). The lower the temperature, the lower the solubility of pure water in the solvent, so that the efficiency of separating pure water and the solvent can be increased by cooling with a cooling means.

  Further, in the present invention, it comprises an ultrasonic wave application unit that applies ultrasonic vibration to the processing liquid stored in the inner tank, and a concentration meter that measures a pure water concentration of the processing liquid, and the control unit includes: It is preferable that the ultrasonic wave applying means is operated after the concentration of pure water measured by the densitometer becomes a predetermined value or less. Since pure water that has entered the fine structure formed on the substrate is not easily replaced with a solvent, it is possible to replace the pure water in the fine structure with a solvent by applying ultrasonic vibration by means of applying ultrasonic waves. Can do. However, if the pure water concentration in the solvent is in a high state, the fine structure of the substrate may be damaged. Therefore, ultrasonic waves should be applied after the pure water concentration in the solvent falls below the predetermined value. Thus, such inconvenience can be avoided.

  In the present invention, it is preferable that the predetermined value is 10,000 ppm. If the pure water concentration is 10,000 ppm or less, damage to the fine structure of the substrate can be suppressed.

  In the present invention, the solvent injection means preferably injects HFE (hydrofluoroether) or IPA (isopropyl alcohol). As the water-insoluble solvent, HFE is preferable, and as the water-soluble solvent, IPA is preferable.

  According to the substrate processing apparatus of the present invention, the control means injects the solvent from the solvent injection means after the pure water cleaning process of supplying pure water from the injection pipe and cleaning the substrate in the processing tank with pure water. Then, a replacement process for replacing pure water with a solvent is performed. In this replacement treatment, most of the pure water can be replaced with a solvent, but the concentration of pure water in the treatment liquid cannot be driven below a certain level. Next, the flow of the treatment liquid is switched to the first branch pipe, and after the separation / removal process for removing pure water from the treatment liquid by the separation means, the flow of the treatment liquid is switched to the second branch pipe, and the pure water removal means The adsorption removal process is performed. Therefore, only a small amount of pure water that cannot be removed by the separation and removal process can be adsorbed and removed by the pure water removal process, and the concentration of pure water in the solvent can be made as low as possible. As a result, it is possible to prevent poor drying due to pure water in the solvent.

An embodiment of the present invention will be described below with reference to the drawings.
FIG. 1 is a block diagram illustrating a schematic configuration of a substrate processing apparatus according to an embodiment.

  The processing tank 1 includes an inner tank 3 and an outer tank 5. The inner tank 3 stores the processing liquid and can accommodate the substrate W held by the holding arm 7. The holding arm 7 includes a support member that is in contact with the lower edge of the substrate W and supports the substrate W in an upright posture at the bottom of the plate-like arm. The holding arm 7 can be moved up and down over a processing position corresponding to the inside of the inner tank 3 and a standby position corresponding to the upper side of the inner tank 3. The inner tank 3 stores pure water, a solvent, or a mixed solution thereof as a processing liquid, and the processing liquid overflowing from the inner tank 3 is recovered by an outer tank 5 provided so as to surround the upper outer periphery of the inner tank 3. . On both sides of the bottom of the inner tank 3, two jet pipes 9 for supplying the processing liquid are disposed.

  One end side of the supply pipe 11 is connected to the ejection pipe 9 and the discharge port 13 of the outer tub 5 is connected to the other end side. The supply pipe 11 includes a three-way valve 15, a pump 17, a three-way valve 19, and an inline heater 21 in order from the upstream side corresponding to the outer tank 5 side. The three-way valve 15 switches between processing liquid circulation and drainage, the pump 17 causes the processing liquid to flow, and the three-way valve 19 switches between processing liquid circulation and pure water removal (details will be described later). The inline heater 21 heats the processing liquid flowing through the supply pipe 11 to a predetermined temperature.

  One end of the injection pipe 23 is connected to a position downstream of the in-line heater 21 and upstream of the ejection pipe 9. The other end side of the injection pipe 23 is connected to the pure water supply source 25 in communication. In the injection pipe 23, a control valve 27, a mixing valve 29, and a flow rate control valve 31 are arranged in this order from the downstream side. The control valve 27 controls supply / cutoff of pure water, a solvent, and a processing liquid in which a solvent is mixed with pure water. One end side of the two chemical liquid pipes 33 and 35 is connected to the mixing valve 29, and the other end side thereof is connected to the HFE supply source 37 and the IPA supply source 39. The two chemical liquid pipes 33 and 35 are provided with flow rate control valves 41 and 43 for adjusting the flow rate, respectively. The mixing valve 29 has a function of mixing one or both of HFE (hydrofluoroether) which is a water-insoluble fluorine-based solvent and water-soluble IPA (isopropyl alcohol) with pure water.

  The above mixing valve 29 corresponds to the solvent injection means in the present invention.

  A bat 45 is disposed at the bottom of the inner tank 3. On the bottom surface of the bat 45, a vibration applying unit 47 including an ultrasonic vibrator is attached. The bat 45 is filled with an amount of pure water that can be used by the lower part of the inner tank 3, and the ultrasonic vibration of the ultrasonic wave application unit 47 is passed through the pure water of the bat 45 to the treatment liquid in the inner tank 3. Given to.

  In addition, the said ultrasonic wave provision part 47 is corresponded to the ultrasonic vibration provision means in this invention.

  The supply pipe 11 is provided with a branched first branch pipe 49. The first branch pipe 49 includes an oil / water separation filter 51 for separating pure water and a solvent in the processing liquid. Further, the supply pipe 11 includes a second branch pipe 53 that is in parallel with the first branch pipe 49. The second branch pipe 53 communicates and connects the upstream and downstream portions of the oil / water separation filter 51. The second branch pipe 53 includes an adsorption filter 55 for adsorbing and removing pure water in the processing liquid.

  The adsorption filter 55 is composed of molecular sieve, activated carbon, alumina, or the like, and has a function of adsorbing and removing a small amount of pure water in the treatment liquid.

  The first branch pipe 49 includes a static mixer 57 on the upstream side of the oil / water separation filter 51. The third branch pipe 58 connects the upstream side of the static mixer 57 and the downstream side of the static mixer 57 and the upstream side of the oil / water separation filter 51. The flow of the third branch pipe 58 is controlled by a control valve 59. The static mixer 57 includes an injection unit 60 for injecting pure water into the processing liquid flowing through the first branch pipe 49 at the upstream portion thereof, and a flow rate control for controlling the injection flow rate of the pure water into the injection unit 60. A valve 61 is provided. As will be described in detail later, the static mixer 57 does not have a drive unit, and sequentially stirs and mixes the fluid by the action of division, conversion, and inversion.

  A control valve 63 is disposed between the three-way valve 19 and the first branch pipe 49, and a control valve 65 is disposed between the control valve 63 and the second branch pipe 53. In addition, a control valve 67 is disposed at the most upstream portion of the first branch pipe 49, and a control valve 69 is disposed at the most downstream portion. A control valve 71 is disposed in the second branch pipe 53 on the downstream side of the adsorption filter 55.

  The oil / water separation filter 51 described above corresponds to the separation means in the present invention, the adsorption filter 55 corresponds to the pure water removal means in the present invention, and the static mixer 57 corresponds to the mixer in the present invention.

  Reference is now made to FIG. FIG. 2 is a longitudinal sectional view showing a schematic configuration of the static mixer.

  The static mixer 57 includes a main body portion 73 and a plurality of elements 75 disposed in the main body portion 73. Each element 75 is formed by twisting a rectangular plate member by 180 °, and adjacent elements 75 are formed by twisting in opposite directions. The static mixer 57 includes the above-described injection section 60 in the upstream section, injects pure water into the processing liquid, and stirs and mixes them by the action of division, conversion, and inversion. In particular, when the solvent is water-insoluble, such as HFE (hydrofluoroether), which is not completely soluble in pure water, the pure water and the solvent are mixed by the static mixer 57 before the oil-water separation filter. Separation at 51 can increase the separation efficiency of pure water.

  Reference is now made to FIG. FIG. 3 is a longitudinal sectional view showing a schematic configuration of the oil / water separation filter.

  The oil / water separation filter 51 stores a housing 77, a liquid introduction part 79 at the bottom of the housing 77, a filter 81 for filtering the processing liquid from the liquid introduction part 79, and a liquid having a high specific gravity among the liquids that have passed through the filter 81. The first storage section 83 that stores the second storage section 85 that stores a small specific gravity, the inflow section 87 through which the processing liquid flows into the liquid introduction section 79, and the first storage section 83 that discharges the liquid in the first storage section 83. A discharge portion 89, a second discharge portion 91 for discharging the liquid in the second storage portion 85, and a cooling pipe 93 that is disposed along the outer wall of the housing 77 and indirectly cools the filter 81. ing. The inflow portion 87 is on the upstream side of the first branch pipe 49, and the first discharge portion 89 is on the downstream side of the first branch pipe 49. The above-described filter 81 has a function of capturing finely dispersed free liquid with a super fine fiber filter and aggregating and coarsening it. Instantly disperses into a complete two-layer system.

  The first discharge part 89 corresponds to the outflow part in the present invention, the second discharge part 91 corresponds to the discharge part in the present invention, and the cooling pipe 93 corresponds to the cooling means in the present invention.

  Further, the inner tank 3 is provided with a densitometer 95 for measuring the concentration of pure water in the treatment liquid in the vicinity of the upper part. An example of the densitometer 95 is an infrared absorption type.

  The raising and lowering of the holding arm 7, the operation / stop of the pump 17, the temperature control of the in-line heater 21, the flow control of the flow control valves 31, 41, 43, the opening / closing control of the control valve 27, and the switching control of the three-way valves 15, 19. The control unit 97 corresponding to the control means in the present invention controls the vibration control of the vibration applying unit 47, the opening / closing control of the control valves 59, 63, 65, 69, 71, the flow control of the flow control valve 61, and the like. To do.

  In addition, the control unit 97 operates each unit described above to move the holding arm 7 to the processing position, supplies pure water as a processing liquid to perform “pure water cleaning processing”, and then adds a solvent ( HFE or IPA) is supplied to replace the pure water with a solvent, and a “separation removal process” is performed to remove the pure water in the processing liquid by the oil / water separation filter 51. When the concentration of pure water in the solvent becomes equal to or lower than the first predetermined value, an “adsorption removal process” is performed in which the adsorption filter 55 adsorbs and removes pure water in the processing liquid (details will be described later). Then, only when the concentration of pure water in the treatment liquid (solvent) is equal to or lower than the second predetermined value, the vibration applying unit 47 is operated to apply ultrasonic vibrations, and the pure water that has entered the fine structure of the substrate W is obtained. Replace water with solvent. However, in the case of “separation and removal treatment”, if the solvent is insoluble in water (for example, HFE), the pure water and the solvent are separated, converted, and inverted through the static mixer 57. After stirring and mixing, the oil / water separation filter 51 is passed to improve the separation efficiency of the oil / water separation filter 51.

  The first predetermined value is preferably confirmed by the saturation solubility of the solvent in the treatment liquid, but the densitometer 95 can be used instead. A specific value of the first predetermined value is, for example, 0.1 [%] or less. This is to avoid the inconvenience that if the adsorption removal process is performed while the pure water concentration is too high, the adsorption filter 55 loses the water absorption force in a short time, and the adsorption filter 55 needs to be replaced frequently. .

  The second predetermined value is, for example, a solvent concentration of 10,000 [ppm] in the treatment liquid (pure water / solvent mixture). The inventors immerse the substrate W whose surface is finely processed in the treatment liquid of the inner tank 3, and apply ultrasonic vibration while changing the concentration of the solvent (HFE or IPA) in the treatment liquid, The damage received by the fine structure of W was evaluated by experiments. The result is shown in FIG. FIG. 4 is a graph showing the concentration of pure water in the processing solution and the rate of substrate damage. The experimental condition at this time is that the fine structure L & S (line & space) formed on the substrate W is 80 nm / 150 nm, and the structure is formed of polysilicon. The ultrasonic vibration is 40 [W], 42 kHz, and 5 [min].

  Based on the results of the above-described experiment, the inventors are able to tolerate damage caused to the fine structure of the substrate W if the concentration of the solvent (HFE or IPA) in the processing liquid is 10,000 [ppm] or less. I found that it fits. Therefore, in the series of processes including the above-described “pure water cleaning process”, the fine structure of the substrate W is obtained by devising to apply ultrasonic vibration only when the solvent concentration is equal to or lower than the second predetermined value. The pure water that has entered can be replaced with a solvent, and processing can be performed with little damage to the fine structure of the substrate W.

  Next, the operation of the above-described substrate processing apparatus will be described with reference to FIG. FIG. 5 is a flowchart showing the operation.

Step S1
The control unit 97 switches the three-way valve 15 to the circulation side, switches the three-way valve 19 to the supply pipe 11 side, opens the control valve 27 and adjusts the flow rate control valve 31, and supplies the injection pipe from the pure water supply source 25. 23 and pure water are supplied to the inner tank 3 through the supply pipe 11 at a predetermined flow rate. After the inner tub 3 and the outer tub 5 and the supply pipe 11 are filled with pure water, the pump 17 and the in-line heater 21 are operated to heat the pure water to a predetermined temperature (for example, 60 ° C.). After reaching the predetermined temperature, the holding arm 7 is lowered from the standby position to the processing position, and this is maintained for a predetermined time, and the substrate W is cleaned with pure water heated to the predetermined temperature.

Step S2
The control unit 97 stops the in-line heater 21 and the pump 17, switches the three-way valve 15 to the drain side, and closes the flow control valve 31. Then, the flow rate control valve 41 is adjusted to a predetermined flow rate, and HFE is supplied to the supply pipe 11. After the inner tank 3 and the outer tank 5 are filled with HFE, the three-way valve 15 is switched to the supply pipe 11 side and the pump 17 is operated. Thereby, most of the pure water is discharged from the processing liquid, HFE is mixed with the processing liquid, and the pure water is replaced with the solvent.

Step S3
The control unit 97 opens the control valves 63, 67, and 69 and switches the three-way valve 19 to the first branch pipe 49 side. As a result, after the water-insoluble HFE and pure water are sufficiently mixed by the static mixer 57, the treatment liquid passes through the oil / water separation filter 51.

  At this time, the flow control valve 61 may be adjusted so that pure water is injected into the processing liquid flowing through the static mixer 57. This is because if the concentration of pure water in the solvent is below a certain value, the separation efficiency between the pure water and the solvent by the oil / water separation filter 51 is lowered, so that the pure water is positively treated with respect to the treatment liquid having a reduced pure water concentration. This is because pure water that has become a certain value or less by injecting and mixing water is separated by the oil / water separation filter 51 so as to be drawn out with pure water.

Step S4
After performing step S3 for a predetermined time, the control unit 97 opens the control valve 59 to switch the flow path to the third branch pipe 58, and bypasses the flow of the processing liquid so as not to pass through the static mixer 57. To do. As a result, the treatment liquid having a reduced pure water concentration passes only through the oil / water separation filter 51.

  Note that step S4 described above may be omitted, and only step S3 may be performed.

Step S5
The control unit 97 branches the process depending on whether the pure water concentration from the densitometer 95 is equal to or lower than the first predetermined value. Specifically, when the pure water concentration exceeds the first predetermined value, step S4 is repeated, and when it is less than or equal to the first predetermined value, the process proceeds to step S5.

Steps S6 and S7
The control unit 97 opens the control valve 65 and closes the control valves 67 and 69. As a result, the processing liquid (mostly HFE) having a pure water concentration equal to or lower than the first predetermined value flows to the second branch pipe 53. Thus, the pure water remaining slightly in the processing liquid is removed by adsorption by the adsorption filter 55. The control unit 97 continues the process of step S6 until the pure water concentration becomes equal to or lower than the second predetermined value, and shifts the process to step S8 when the concentration becomes equal to or lower than the second predetermined value.

Step S8
The control unit 97 drives the vibration applying unit 47 to apply ultrasonic vibration to the processing liquid stored in the inner tank 3 with a predetermined output for a predetermined time. Thereby, the pure water that has entered the fine structure of the substrate W can be replaced with the processing liquid, that is, HFE. In addition, since the concentration of pure water in the processing liquid is extremely low, the fine structure of the substrate W is not damaged.

  As described above, according to the apparatus of the present embodiment, the control unit 97 performs a replacement process for injecting HFE and replacing the pure water with HFE after the pure water cleaning process for cleaning the substrate W with pure water. The liquid flow is switched to the first branch pipe 49, and after the separation and removal process in which the pure water is removed from the processing liquid by the oil / water separation filter 51, the processing liquid flow is switched to the second branch pipe 53, and the adsorption filter 55 is used. Adsorption removal processing is performed. Therefore, only a small amount of pure water that cannot be removed by the separation and removal process can be adsorbed and removed by the adsorption filter 55, and the concentration of pure water in the HFE can be made as low as possible. As a result, it is possible to prevent poor drying due to pure water in HFE.

  In addition, since the pure water that has entered the fine structure formed on the substrate W is not easily replaced by HFE, by applying ultrasonic vibration by the vibration applying unit 47, the pure water in the fine structure is converted by HFE. Can be replaced. In addition, by applying the ultrasonic wave after the pure water concentration in the HFE has become a predetermined value or less, the fine structure of the substrate W is damaged if the pure water concentration in the HFE is high. Can be avoided. Therefore, the yield can be improved.

  The present invention is not limited to the above embodiment, and can be modified as follows.

  (1) In the above-described embodiment, the static mixer 57 is provided, and the water-insoluble solvent is sufficiently mixed with pure water and then passed through the oil / water separation filter 51. Need not include the static mixer 57. Thereby, the apparatus configuration can be simplified.

  (2) In the above-described embodiment, the vibration applying portion 47 is attached to the inner tub 3, but this configuration may be omitted as long as the ultrasonic vibration is not applied. Thereby, the apparatus configuration can be simplified.

  (3) In the above-described embodiments, fluorine-based HFE is exemplified as the water-insoluble solvent, and IPA is exemplified as the water-soluble solvent. However, the present invention is applied to other solvents different from these. be able to. For example, HFC (hydrofluorocarbon) may be used as a fluorine-based solvent other than HFE.

  (4) In the above-described embodiment, the configuration in which the inner tank 3 is provided with the densitometer 95 that measures the pure water concentration is illustrated, but the pure water concentration of the processing liquid flowing through the supply pipe 11 is measured. May be.

It is a block diagram which shows schematic structure of the substrate processing apparatus which concerns on an Example. It is a longitudinal cross-sectional view which shows schematic structure of a static mixer. It is a longitudinal cross-sectional view which shows schematic structure of an oil-water separation filter. It is a graph which shows the ratio of the pure water density | concentration in a process liquid, and the damage of a board | substrate. It is a flowchart which shows operation | movement.

Explanation of symbols

W ... Substrate 1 ... Processing tank 3 ... Inner tank 5 ... Outer tank 7 ... Holding arm 9 ... Jet pipe 11 ... Supply pipe 29 ... Mixing valve 47 ... Vibration applying part 49 ... First branch pipe 51 ... Oil-water separation filter 53 ... Second branch pipe 55 ... Suction filter 57 ... Static mixer 58 ... Third branch pipe 97 ... Control section

Claims (7)

In a substrate processing apparatus for processing a substrate with a processing liquid,
A treatment tank comprising an inner tank for storing the treatment liquid, and an outer tank for collecting the treatment liquid overflowing from the inner tank;
A supply pipe for connecting the inner tank and the outer tank in communication and circulating a processing liquid;
A first branch pipe that divides the supply pipe;
A separation means disposed in the first branch pipe, separating pure water and the solvent in the processing liquid, and discharging the pure water;
A second branch pipe connecting the upstream side and the downstream side of the separating means in communication;
A deionized water removing means that is disposed in the second branch pipe and adsorbs and removes deionized water in the treatment liquid;
An injection pipe that is disposed in the supply pipe and injects pure water downstream from the separation means;
A solvent injection means for injecting a solvent into the injection tube;
After the pure water cleaning process of supplying pure water from the injection tube and cleaning the substrate in the processing tank with pure water, a replacement process was performed to inject the solvent from the solvent injection means and replace the pure water with the solvent. Then, the separation is removed by removing the pure water from the processing liquid by the separation means by switching to the first branch pipe, and the second branch pipe is switched to the second branch pipe by the pure water removal means. Control means for performing an adsorption removal process for adsorbing and removing pure water;
A substrate processing apparatus comprising: The substrate processing apparatus according to claim 1,
A mixer for mixing pure water and a solvent in the first branch pipe on the upstream side of the separation means;
Further comprising an upstream side of the mixer and a third branch pipe that is connected downstream from the mixer and upstream of the separating means,
When the solvent is water-soluble, the control means switches the flow of the processing liquid to the third branch pipe during the separation / removal process, and when the solvent is water-insoluble, the separation / removal process is performed. In this case, the substrate processing apparatus is characterized in that the processing liquid is passed through the mixer. The substrate processing apparatus according to claim 2,
The substrate processing apparatus, wherein the mixer includes an injection unit for injecting pure water. In the substrate processing apparatus according to claim 1,
The separation means includes a filter that separates oil and water, a housing that surrounds the filter, an inflow portion that is provided in the housing and into which processing liquid flows, and a processing liquid that is provided in the housing and passes through the filter flows out. A substrate processing apparatus comprising: an outflow portion; a discharge portion that is provided in the housing and discharges pure water separated by the filter; and a cooling unit that cools the filter. In the substrate processing apparatus according to claim 1,
Ultrasonic wave application means for applying ultrasonic vibration to the processing liquid stored in the inner tank, and a concentration meter for measuring the pure water concentration of the processing liquid,
The substrate processing apparatus, wherein the control means operates the ultrasonic wave applying means after a pure water concentration measured by the densitometer becomes a predetermined value or less. The substrate processing apparatus according to claim 5,
The substrate processing apparatus, wherein the predetermined value is 10,000 ppm. In the substrate processing apparatus according to any one of claims 1 to 6,
The substrate processing apparatus, wherein the solvent injection means injects HFE (hydrofluoroether) or IPA (isopropyl alcohol).

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