CN101276742A - Substrate processing apparatus - Google Patents

Abstract

A substrate treating apparatus includes a treating tank having an inner tank for storing the treating liquid, and an outer tank for collecting the treating liquid overflowing the inner tank. A supply pipe interconnects the inner tank and the outer tank for circulating the treating liquid. A first branch pipe is shunted from the supply pipe, and a separator is mounted on the first branch pipe for separating deionized water and a solvent in the treating liquid, and discharging the deionized water. A second branch pipe interconnects positions upstream and downstream of the separator, and a deionized water remover is mounted on the second branch pipe for adsorbing and removing deionized water from the treating liquid. An injection pipe is connected to the supply pipe for injecting deionized water in a position downstream of the separator. A solvent injector injects the solvent into the injection pipe. A controller carries out a deionized water cleaning process for supplying deionized water from the injection pipe and cleaning the substrates inside the cleaning tank with deionized water, then a replacing process for injecting the solvent from the solvent injector and replacing the deionized water with the solvent, a separating and removing process for switching to the first branch pipe and causing the separator to remove the deionized water from the treating liquid, and an adsorbing and removing process for switching to the second branch pipe and causing the deionized water remover to adsorb and remove the deionized water from the treating liquid.

Description

Substrate board treatment

Technical field

The present invention relates to the substrate board treatment that a kind of glass substrate of semiconductor wafer or liquid crystal display being used by treatment fluid (hereinafter referred to as substrate) is handled.

Background technology

In the past, as this device, for example had treatment trough that stockpiles treatment fluid and ccontaining substrate and the nozzle (for example Japanese kokai publication hei 10-22257 communique) that isopropyl alcohol (IPA:Isopropyl Alcohol) gas is provided to the upper space of treatment trough.In this device, after treatment trough provides pure water and cleaning base plate, IPA gas is provided and forms the IPA gaseous environment to the upper space of treatment trough.Then, in the IPA gas that substrate is picked up and moves to treatment trough top, the pure water that adheres on the substrate is replaced by IPA, thereby promote its drying.

But, in the example that in the past has this spline structure, have following such problem.

Promptly, on the one hand, device in the past, by from pure water, picking up the substrate that cleaned with pure water, and move in the IPA gaseous environment, can promote the drying of substrate to a certain extent, but on the other hand, can not dryly fully be formed at pure water accompanying between the fine pattern of substrate, might produce the underdry of substrate.

Yet in nearest semiconductor equipment, as more in the past than the technology that had significantly improved integrated level, it is the capacitor of cylindrical shape that memory area begins to adopt capacitor arrangement.The capacitor aspect ratio of such cylindrical structure is very big, be difficult to make the pure water intensive drying that enters between its slit, thereby the problems referred to above becomes more outstanding.In addition, even the relevant equipment of so-called MEMS (micro electro mechanical system) (MEMS:Micro ElectroMechanical Systems) also may produce same problem.

Therefore, consider not use pure water as picking up last treatment fluid before the substrate, and picked up the method for substrate after with the solvent exchange pure water.But, in this case,,, can not make that the concentration of pure water drops to below the certain value in the solvent in pure water, can not fully replace pure water with solvent even a large amount of solvents is provided though it is very important fully to replace pure water with solvent.Therefore, still might produce this problem of underdry because of pure water.

In addition, after using the solvent exchange pure water as mentioned above, when picking up substrate, even a large amount of solvents is provided in pure water, the pure water that enters in the fine structure of substrate dissolves in the treatment fluid lentamente, also can produce the phenomenon that the pure water concentration in the treatment fluid increases gradually.Therefore, still can might the surface tension because of pure water take place by collapsing of fine structure simultaneously because of pure water produces underdry when picking up substrate.

In addition,, have a plurality of treatment troughs and the carrying mechanism of striding each treatment trough carrying substrate, have and manage the device of handling in proper order with different treatment fluids in the groove (for example, Japanese kokai publication hei 10-22257 communique) throughout in the past as this device.Order moving substrate in such device, carry out a series of processing simultaneously, for example, in first treatment trough, use buffered hydrofluoric acid (BHF:Buffered HydrofluoricAcid) etching surface gently, in second treatment trough, clean with pure water, in the 3rd treatment trough pure water is replaced into IPA, the gaseous environment that forms solvent vapour in the 4th treatment trough makes drying substrates.

But, under the situation of example in the past, have following such problem with this spline structure.

That is, under the situation that is formed with fine pattern on the substrate, between treatment trough during moving substrate, because the surface tension of residual pure water between this fine pattern, and there is the fine pattern that is formed on the substrate this problem that collapses that makes in device in the past.

Summary of the invention

In view of the foregoing, the objective of the invention is to, a kind of substrate board treatment is provided, can prevent the underdry that causes because of pure water with doing one's utmost by reducing the pure water concentration in the solvent.

In addition, In view of the foregoing, the objective of the invention is to, a kind of substrate board treatment is provided, can prevent collapsing of underdry and fine structure with doing one's utmost by removing the pure water in the treatment fluid of crossing with solvent exchange.

In addition, In view of the foregoing, the objective of the invention is to, a kind of substrate board treatment is provided, can be by improving the clearance of pure water, prevent to be formed at the collapsing of fine pattern of substrate.

The invention provides a kind of substrate board treatment, it utilizes the treatment fluid treatment substrate, it is characterized in that, has with lower member: treatment trough, its have the inside groove that stockpiles treatment fluid and, reclaim the water jacket of the treatment fluid that overflows from inside groove; Supplying tubing, it is communicated with above-mentioned inside groove and above-mentioned water jacket, makes the treatment fluid circulation; First branch's pipe arrangement, it shunts above-mentioned supplying tubing; Separator, it is equipped on first branch's pipe arrangement, pure water in the separating treatment liquid and solvent, and discharge pure water; Second branch's pipe arrangement, it is communicated with the upstream and downstream of above-mentioned separator; The pure water removal device, it is equipped on above-mentioned second branch's pipe arrangement, and the pure water in the treatment fluid is removed in absorption; Ascending pipe, it is equipped on above-mentioned supplying tubing, at the downstream part injection pure water of above-mentioned separator; The solvent injection device, it is injected into solvent in the above-mentioned ascending pipe; Control device, it is execution provides pure water and the pure water clean with the substrate in the pure water clean groove from above-mentioned ascending pipe after, execution is injected solvent and is replaced the replacement Treatment of pure water with solvent from above-mentioned solvent injection device, afterwards, switch to above-mentioned first branch's pipe arrangement, carry out the separation of from treatment fluid, removing pure water by above-mentioned separator and remove processing, switch to above-mentioned second branch's pipe arrangement again, carry out the absorption of the pure water in absorption and the removal treatment fluid by above-mentioned pure water removal device and remove processing.

According to the present invention, control device carry out provide pure water and pure water clean from ascending pipe with the substrate in the pure water clean groove after, carry out from the solvent injection device and inject solvent and replace the replacement Treatment of pure water with solvent.Though the most pure water of this replacement Treatment enough solvent exchange of energy can not make the pure water concentration in the treatment fluid be reduced to below the certain value.Therefore, stream to the first branch pipe arrangement of hand-off process liquid, carry out the separation removal processing of removing pure water from treatment fluid by separator after, stream to the second branch pipe arrangement of hand-off process liquid is carried out absorption by the pure water removal device and is removed processing.Therefore, can only adsorb by the pure water removal device and remove the pure water of sneaking in the solvent, can reduce the pure water concentration in the solvent with doing one's utmost.Its result can prevent the underdry that causes because of the pure water in the solvent.

In addition, as above-mentioned absorption removal device, illustration molecular sieve (Molecular sieve), active carbon and alumina etc.

In addition, the preferred following structures of the present invention promptly has: mixing arrangement, and it is positioned on above-mentioned first branch's pipe arrangement of upstream of above-mentioned separator, is used to mix pure water and solvent; The 3rd branch's pipe arrangement, its upstream that is communicated with above-mentioned mixing arrangement is again the position of the upstream of above-mentioned separator with the downstream that is above-mentioned mixing arrangement.Above-mentioned control device is under the water miscible situation at solvent, carries out to separate and removes when handling, and the stream of hand-off process liquid is to above-mentioned the 3rd branch's pipe arrangement; Above-mentioned control device is under the non-water-soluble situation at solvent, carries out to separate and removes when handling, and makes treatment fluid pass through above-mentioned mixing arrangement.

The characteristic of separator is: compare easier separation pure water and solvent under the state that mixes with the state that pure water and solvent separate fully.Therefore, control device is when separating the removal processing under the non-water-soluble situation at solvent, flowing of treatment fluid switched to second branch's pipe arrangement from the 3rd branch's pipe arrangement, carry out the mixed processing of mixed solvent and pure water by mixing arrangement, so can separate the pure water in the solvent efficiently.Particularly under the situation of water-insoluble solvent such as fluorine series solvent, because pure water and solvent are not easy to mix, so can improve the separative efficiency of separator by the mixing of mixing arrangement.

In addition, the preferred following structures of the present invention, promptly above-mentioned separator has: filter, it is used to separate profit; Shell, it surrounds above-mentioned filter; Inflow portion, it is arranged on the above-mentioned shell, is used for treatment fluid and flows into; Outflow portion, it is arranged on the above-mentioned shell, is used for passing through the treatment fluid outflow of above-mentioned filter; Discharge portion, it is arranged on the above-mentioned shell, is used for discharging utilizing the isolated pure water of above-mentioned filter; Cooling device, it is used to cool off above-mentioned filter.

Because it is just low more that the low more pure water of temperature is dissolved in the solubility of solvent, so cool off the separative efficiency that can improve solvent and pure water by cooling device.

In addition, the invention provides a kind of substrate board treatment, it utilizes the treatment fluid treatment substrate, it is characterized in that, has with lower member: treatment trough, its have the inside groove that stockpiles treatment fluid and, reclaim the water jacket of the treatment fluid that overflows from inside groove; Supplying tubing, it is communicated with above-mentioned inside groove and above-mentioned water jacket, makes the treatment fluid circulation; The pure water feedway, it provides the pure water as treatment fluid; Solvent supplying apparatus, it provides the solvent as treatment fluid; Branch's pipe arrangement, it shunts above-mentioned supplying tubing; The pure water removal device, it is equipped on above-mentioned branch pipe arrangement, removes the pure water in the treatment fluid; The solvent injection device, solvent is injected to above-mentioned supplying tubing in its downstream at above-mentioned pure water removal device; Control device, it is execution provides pure water and the pure water clean with the substrate in the pure water clean groove from above-mentioned pure water feedway after, execution provides solvent and replaces the replacement Treatment of pure water with solvent from above-mentioned solvent supplying apparatus, afterwards, switch to above-mentioned branch pipe arrangement, carry out the pure water of from treatment fluid, removing pure water by above-mentioned pure water removal device and remove processing, come supplementing solvent by above-mentioned solvent injection device simultaneously.

According to the present invention, control device carry out provide pure water and pure water clean from the pure water feedway with the substrate in the pure water clean groove after, carrying out from solvent supplying apparatus provides solvent and replaces the replacement Treatment of pure water with solvent.Afterwards, switch to above-mentioned branch pipe arrangement, carry out the pure water of from treatment fluid, removing pure water by above-mentioned pure water removal device and remove processing.Therefore, the pure water owing to doing one's utmost to have removed in the treatment fluid of crossing with solvent exchange can prevent collapsing of underdry and fine structure.In addition, also removed solvent to a certain extent though not only removed the pure water in the treatment fluid by pure water removal processing, thereby solvent reduces, but because by solvent injection device supplementing solvent, is accompanied by the pure water removal and the part of solvent minimizing so can replenish.

In addition, the preferred following structures of the present invention promptly has: first mixing arrangement, and it is positioned on the above-mentioned branch pipe arrangement of upstream of above-mentioned pure water removal device, is used for fluid-mixing; The pure water injection device, it is positioned on the above-mentioned branch pipe arrangement of upstream of above-mentioned first mixing arrangement, is used to inject pure water; Second mixing arrangement, it is positioned on the above-mentioned supplying tubing in downstream of above-mentioned solvent injection device, is used for fluid-mixing.Above-mentioned control device is controlled above-mentioned pure water injection device and above-mentioned solvent injection device, under the low situation of pure water concentration ratio set-point in treatment fluid, inject pure water from above-mentioned pure water injection device, and make on the difference of injection rate that above-mentioned pure water injection device injects pure water and the amount of the treatment fluid that utilizes above-mentioned pure water removal device to remove, add the injection rate of injecting solvent from above-mentioned solvent injection device, and the amount that obtains thus is approximately 0.

In case the pure water concentration ratio set-point in the treatment fluid is low, the efficient that the pure water that is undertaken by the pure water removal device is removed is just low.Therefore, control device injects pure water from the pure water injection device, keeps the removal efficient of pure water by the concentration that keeps pure water.At this moment, by making on the difference of pure water injection rate and the amount of the treatment fluid (solvent+pure water) that utilizes the pure water removal device to remove, add the injection rate of injecting solvent from the solvent injection device, and the amount that obtains thus is approximately 0, can makes the solvent strength in the treatment fluid keep certain.

In addition, the invention provides a kind of substrate board treatment, it utilizes the treatment fluid treatment substrate, it is characterized in that, has with lower member: treatment trough, and it is used to stockpile treatment fluid; Supplying tubing, it will provide to above-mentioned treatment trough from the treatment fluid that above-mentioned treatment trough is discharged, and makes the treatment fluid circulation; First branch's pipe arrangement, it shunts above-mentioned supplying tubing; Cooling device, it is equipped on above-mentioned first branch's pipe arrangement, is used to cool off the treatment fluid of circulation; Second branch's pipe arrangement, its connection are positioned at the above-mentioned supplying tubing of the upstream and downstream of above-mentioned cooling device; Separator, it is equipped on second branch's pipe arrangement, pure water in the separating treatment liquid and solvent, and from treatment fluid, discharge pure water; Ascending pipe, it is connected with above-mentioned supplying tubing, injects pure water in the downstream of above-mentioned separator; The water-soluble solvent injection device, it injects above-mentioned ascending pipe with water-soluble solvent; The water-insoluble solvent injection device, it injects above-mentioned ascending pipe with water-insoluble solvent; Control device, it is after having carried out the pure water clean of cleaning the substrate in the above-mentioned treatment trough with pure water, execution is injected above-mentioned supplying tubing with water-soluble solvent and is replaced the replacement Treatment of pure water with water-soluble solvent from above-mentioned water-soluble solvent injection device, afterwards, switching stream in above-mentioned first branch's pipe arrangement, carry out the cooling processing of cooling processing liquid by above-mentioned cooling device, switching stream in above-mentioned second branch's pipe arrangement, processing is removed in separation by the pure water in the above-mentioned separator execution removal treatment fluid, injects water-insoluble solvent and replaces the promotion processing to above-mentioned supplying tubing from above-mentioned water-insoluble solvent injection device.

According to the present invention, control device is carried out from ascending pipe and is provided pure water and with the pure water clean of the substrate in the pure water clean groove to supplying tubing, removes the soup that adheres on the substrate and spot etc. by pure water.Then, execution is injected water-soluble solvent and is replaced the replacement Treatment of pure water with water-soluble solvent to supplying tubing from the water-soluble solvent injection device, after having replaced the pure water that stockpiles in the treatment trough with water-soluble solvent, when switching stream to the first branch pipe arrangement, carry out the cooling processing of cooling processing liquid by cooling device.Then, when switching stream to the second branch pipe arrangement, carry out the separation of removing the pure water in the treatment fluid by separator and remove processing.Because treatment fluid is cooled by cooling processing, make pure water be not easy to be dissolved in water-soluble solvent, so can from treatment fluid, remove pure water efficiently by separator.Afterwards, inject water-insoluble solvent from above-mentioned water-insoluble solvent injection device to supplying tubing and replace the promotion processing, but because before cooling processing make water-soluble solvent and pure water be difficult for being dissolved in water-insoluble solvent, so can enough water-insoluble solvent almost completely replacing water soluble solvent and pure water.Therefore, can remove the pure water in the treatment trough efficiently, prevent that pure water from remaining in the fine pattern that is formed on the substrate.Its result can prevent collapsing of the fine pattern that forms on substrate.

In addition, the preferred following structures of the present invention promptly has: the 3rd branch's pipe arrangement, and it is communicated with the upstream and downstream of above-mentioned separator; The pure water removal device, it is equipped on above-mentioned the 3rd branch's pipe arrangement, is used for adsorbing the pure water of removing treatment fluid.Above-mentioned control device switches stream to above-mentioned the 3rd branch's pipe arrangement after having carried out above-mentioned separation removal processing.

Can not get rid of the pure water that left behind by separating to remove to handle, adsorb removal, can improve clearance more by the pure water removal device.

Description of drawings

Fig. 1 is the block diagram of structure that schematically shows the substrate board treatment of first execution mode.

Fig. 2 is the longitudinal section that schematically shows the structure of static mixer (static mixer).

Fig. 3 is the longitudinal section that schematically shows the water-oil separating structure of filter.

Fig. 4 is the pure water concentration of expression in the treatment fluid and the figure of the damage ratio of substrate.

Fig. 5 is the flow chart of expression operation.

Fig. 6 is the block diagram of structure that schematically shows the substrate board treatment of second execution mode.

Fig. 7 is the longitudinal section that schematically shows the structure of static mixer.

Fig. 8 is the longitudinal section that schematically shows the water-oil separating structure of filter.

Fig. 9 is the flow chart of expression operation.

Figure 10 is the block diagram of structure that schematically shows the substrate board treatment of the 3rd execution mode.

Figure 11 is the longitudinal section that schematically shows the structure of static mixer.

Figure 12 is the longitudinal section that schematically shows the water-oil separating structure of filter.

Figure 13 is the flow chart of expression operation.

Embodiment

For this invention is described, to thinking that at present suitable several execution modes illustrate, but note that the present invention is not limited in illustrated structure and method.

Below, with reference to accompanying drawing better embodiment of the present invention is elaborated.

First execution mode

Fig. 1 is the block diagram of structure that schematically shows the substrate board treatment of first execution mode.

Treatment trough 1 has inside groove 3 and water jacket 5.Inside groove 3 stockpiles treatment fluid also can the ccontaining substrate W that is kept by keeping arm 7.Keeping arm 7 has supporting member in the bottom of plate-like arms, and this supporting member contacts with the lower limb of substrate W and so that substrate W is in the state of orthostatism that substrate W is supported.This keeping arm 7 can be in processing position and the lifting between the position of readiness above the inside groove 3 in the inside of inside groove 3.Pure water, solvent or their mixed liquor are stockpiled in inside groove 3 as treatment fluid, and the treatment fluid that overflows from inside groove 3 reclaims by the water jacket 5 that the upper periphery round inside groove 3 is provided with.Two bottom sides at inside groove 3 is equipped with two bleed pipes 9 of supplying with treatment fluid.

One end of supplying tubing 11 is connected with bleed pipe 9, and the other end is connected with the outlet 13 of water jacket 5.Supplying tubing 11 has triple valve 15, pump 17, triple valve 19 and straight flow heater 21 successively from being positioned at the upstream of water jacket 5 one sides.The circulation and the discharge opeing of triple valve 15 hand-off process liquid, pump 17 make the treatment fluid circulation, and the circulation of triple valve 19 hand-off process liquid and pure water are removed (being described in detail later).The treatment fluid that straight flow heater 21 will circulate in supplying tubing 11 is heated to fixed temperature.

In the downstream of straight flow heater 21, than bleed pipe 9 position of upstream more, be communicated with an end of ascending pipe 23.The other end of ascending pipe 23 is being communicated with pure water supply source 25.On ascending pipe 23, begin to be equipped with successively control valve 27, mixing valve 29 and flow control valve 31 from the downstream.Control valve 27 controls are supplied with or are cut off pure water, solvent or mixed the treatment fluid of solvent in pure water.One end of two soup pipe arrangements 33,35 is connected with mixing valve 29, and the other end is connected with hydrogen fluorine ether supply source 37, isopropyl alcohol supply source 39 respectively.Two soup pipe arrangements 33,35 have the flow control valve 41,43 that is used to adjust flow respectively.Mixing valve 29 has any one or the two kinds of functions of mixing with pure water with non-water-soluble fluorine series solvent hydrogen fluorine ether (HFE:Hydro Fluoro Ether) or water miscible isopropyl alcohol (IPA).

In addition, above-mentioned mixing valve 29 is equivalent to the solvent injection device among the present invention.

Dispose base 45 in the bottom of inside groove 3.Set up vibration assigning unit 47 with ultrasonic waves vibrating member in the bottom surface of this base 45.Fill the pure water of the amount that can flood inside groove 3 bottoms in base 45, the vibration of the ultrasonic waves of ultrasonic waves assigning unit 47 passes to treatment fluid in the inside groove 3 via the pure water in the base 45.

In addition, above-mentioned ultrasonic waves assigning unit 47 is equivalent to ultrasonic waves vibration feedway of the present invention.

Supplying tubing 11 has first branch's pipe arrangement 49 of being shunted.This first branch pipe arrangement 49 has the pure water that is used for separating treatment liquid and the water-oil separating filter 51 of solvent.In addition, supplying tubing 11 has with first branch's pipe arrangement 49 and is second branch's pipe arrangement 53 of coordination.This second branch pipe arrangement 53 is connected with the part of the upstream and downstream that is positioned at water-oil separating filter 51.Second branch's pipe arrangement 53 has absorption and removes the adsorption filter 55 of the pure water in the treatment fluid.

Above-mentioned adsorption filter 55 is made of molecular sieve, active carbon and alumina etc., has the function that can adsorb and remove the pure water of the trace in the treatment fluid.

Above-mentioned first branch's pipe arrangement 49 has the static mixer 57 that is positioned at water-oil separating filter 51 upstreams.The 3rd branch's pipe arrangement 58 be communicated with these static mixers 57 the upstream and, the downstream that is static mixer 57 is again the position of the upstream of water-oil separating filter 51.The 3rd branch's pipe arrangement 58 is controlled circulation by control valve 59.Static mixer 57, portion has the injection portion 60 that is used for injecting to the treatment fluid that circulates in first branch's pipe arrangement 49 pure water at its upstream, also has the flow control valve 61 of control to the pure water flow of injection portion 60 injections.In detail as hereinafter described, static mixer 57 is not a drive division, but the device that mixes successively by the cutting apart of fluid, conversion and counter-rotating effect.

Between triple valve 19 and first branch's pipe arrangement 49, be equipped with control valve 63, between control valve 63 and second branch's pipe arrangement 53, be equipped with control valve 65.In addition, be equipped with control valve 67, be equipped with control valve 69 at downstream portion at the upstream portion of first branch's pipe arrangement 49.In addition, be equipped with control valve 71 being positioned on second branch's pipe arrangement 53 in adsorption filter 55 downstreams.

In addition, above-mentioned water-oil separating filter 51 is equivalent to separator of the present invention, and adsorption filter 55 is equivalent to pure water removal device of the present invention, and static mixer 57 is equivalent to mixing arrangement of the present invention.

Below, with reference to accompanying drawing 2.In addition, Fig. 2 is the longitudinal section that schematically shows the structure of static mixer.

Static mixer 57 has main part 73 and a plurality of members 75 that are equipped in the main part 73.Each member 75 reverses 180 ° and form with rectangular tabular component, and adjacent member 75 reverses and forms to contrary direction respectively.This static mixer 57 portion at its upstream has above-mentioned injection portion 60, and treatment fluid is injected pure water, and utilize cut apart, conversion and counter-rotating effect mix them.Be under the situation of the such complete water-fast water-insoluble solvent of hydrogen fluorine ether (HFE:Hydro Fluoro Ether) particularly at solvent, after static mixer 57 mixing pure water and solvent, separate by water-oil separating filter 51 again, can improve the separative efficiency of pure water.

Below, with reference to accompanying drawing 3.In addition, Fig. 3 is the longitudinal section that schematically shows the water-oil separating structure of filter.

Water-oil separating filter 51 has: shell 77; The liquid introduction part 79 of shell 77 bottoms; Filtration is from the filter 81 of the treatment fluid of liquid introduction part 79; Stockpile by in the liquid of filter 81, heavy liquid first stockpile portion 83; Stockpile and stockpiling portion 85 by second of liquid in the liquid of filter 81, that proportion is little; Make the inflow portion 87 of treatment fluid influent introduction part 79; Discharge first stockpiles first discharge portion 89 of the liquid in the portion 83; Discharge second stockpiles second discharge portion 91 of the liquid in the portion 85; Outer wall along shell 77 sets, and is used for the cooling water pipe 93 of cooling filter 81 indirectly.Inflow portion 87 is positioned at the upstream of first branch's pipe arrangement 49, and first discharge portion 89 is positioned at the downstream of first branch's pipe arrangement 49.Above-mentioned filter 81, have by the superfine fiber filter and catch the free fluid of small dispersion and the performance of aggegation and thickization, make thickization of free fluid of the small dispersion of micron number magnitude become the millimeter magnitude, be separated into two-layer fully by difference in specific gravity moment.

In addition, above-mentioned first discharge portion 89 is equivalent to outflow of the present invention portion, and second discharge portion 91 is equivalent to discharge portion of the present invention, and cooling water pipe 93 is equivalent to cooling device of the present invention.

In addition, inside groove 3 has the densimeter 95 that is used for measuring treatment fluid pure water concentration at an upper portion thereof.As this densimeter 95, for example can be the device of infrared ray absorbing mode.

The lifting of above-mentioned keeping arm 7, the work of pump 17 and stopping, the temperature control of straight flow heater 21, the flow control of flow control valve 31,41,43, the open and close controlling of control valve 27, the switching controls of triple valve 15,19, the vibration control of vibration assigning unit 47, the open and close controlling of control valve 59,63,65,67,79,71 and the flow control of flow control valve 61 etc. are all together control by the control part 97 that is equivalent to control device of the present invention.

In addition, above-mentioned each one of control part 97 operations, keeping arm 7 is moved to handling the position, supplying with as the pure water of treatment fluid and carrying out " pure water clean " afterwards, carry out in treatment fluid, providing solvent (hydrogen fluorine ether or isopropyl alcohol) and with " replacement Treatment " of solvent exchange pure water and, " separate and remove processing " of removing the pure water in the treatment fluids by water-oil separating filter 51.Then, the pure water concentration in solvent becomes under the situation below first set-point, adsorbs " absorption is removed and handled " (being described in detail later) of the pure water of removing in the treatment fluid by adsorption filter 55.And only the pure water concentration in treatment fluid (solvent) becomes under the situation below second set-point, and operation vibration control portion 47 gives ultrasonic vibration, enters into the pure water of the fine structure of substrate W with solvent exchange.Wherein, in " separate to remove and handle ", at solvent is (for example to be difficult to be dissolved under the non-water-soluble situation of pure water, hydrogen fluorine ether), by static mixer 57, utilization is cut apart, is changed and reverse and is used for mixing pure water and solvent, makes it by water-oil separating filter 51 again, can improve the separative efficiency of utilizing water-oil separating filter 51.

Above-mentioned first set-point is meant, preferably confirms the saturation solubility of the solvent in the treatment fluid, also can substitute with densimeter 95.The concrete value of first set-point is for example below 0.1%.In a single day this is for fear of the following situation improperly of generation, promptly adsorbs to remove when the pure water excessive concentration and handles, adsorption filter 55 just loses water absorbing capacity at short notice, thus necessary frequently replacing adsorption filter 55.

Above-mentioned second set-point is meant that for example the solvent strength in the treatment fluid (mixed liquor of pure water and solvent) is 10000ppm.The substrate W that inventor etc. have implemented trickle processing with the surface is immersed in the treatment fluid of inside groove 3, give ultrasonic vibration in the concentration of the solvent (hydrogen fluorine ether or isopropyl alcohol) in changing treatment fluid, estimate the suffered damage of fine structure of substrate W by experiment.In addition, Fig. 4 is the pure water concentration of expression in the treatment fluid and the figure of the proportionate relationship of the damage of substrate.This experiment condition is, the L and the S (line and spacing) that are formed at the fine structure on the substrate W are 80nm and 150nm, and this structure is formed by polysilicon (poly-silicon).In addition, ultrasonic vibration power is 40W, and frequency is 42kHz, and the time is 5min.

According to above-mentioned result of experiment, discoveries such as inventor are as long as the concentration of solvent (hydrogen fluorine ether or isopropyl alcohol) in the treatment fluid is below the 10000ppm, and the damage that produces for the fine structure of substrate W is just in permissible degree.Therefore, in a series of processing of above-mentioned comprising " pure water clean ", only under the situation below above-mentioned second set-point, just give ultrasonic vibration in solvent strength, by such way, can either enter into the pure water of the fine structure of substrate W with solvent exchange, again can be little in the damage of handling the fine structure of substrate W.

Below, with reference to Fig. 5, the operation of above-mentioned substrate board treatment is described.In addition, Fig. 5 is the flow chart of expression operation.

Step S1

Control part 97 switch three-way valve 15 in circulation side switch three-way valve 19 to supplying tubing 11 sides, in open control valve 27, adjust flow control valve 31, via ascending pipe 23 and supplying tubing 11 pure water is provided to inside groove 3 with given flow from pure water supply source 25.At inside groove 3, water jacket 5 and after in filled with pure water supplying tubing 11, make pump 17 and straight flow heater 21 work heating pure water to giving fixed temperature (for example, 60 ℃).After reaching to fixed temperature, keeping arm 7 drops to from position of readiness handles the position, and only keeps preset time, with the pure water that is heated to substrate W to fixed temperature is carried out clean.

Step S2

Control part 97 switch three-way valve 15 when straight flow heater 21 and pump 17 are stopped and is closed flow control valve 31 simultaneously to the discharge opeing side.Then, regulate flow control valve 41, provide hydrogen fluorine ether to supplying tubing 11 to given flow.After making inside groove 3 and water jacket 5 all fill with hydrogen fluorine ether, in supplying tubing 11 sides, make pump 17 work at switch three-way valve 15.Thus, the most of pure water in the treatment fluid is discharged from, and has mixed hydrogen fluorine ether in the treatment fluid, and pure water is by solvent exchange.

Step S3

Control part 97 is switch three-way valve 19 to first branch's pipe arrangements 49 sides in open control valve 63,67,69.Thus, after utilizing static mixer 57 fully to mix non-water-soluble hydrogen fluorine ether and pure water, treatment fluid is by water-oil separating filter 51.

In addition, at this moment also can adjust flow control valve 61, in the treatment fluid that circulates in static mixer 57, inject pure water.This be because, when the pure water concentration in the solvent is that certain value is when following, the efficient of separating pure water and solvent by water-oil separating filter 51 can reduce, therefore, by in the low treatment fluid of pure water concentration, injecting on one's own initiative and mixing pure water, utilize pure water to draw and become the following pure water of certain value, thereby separate by water-oil separating filter 51.

Step S4

Control part 97 has only carried out after the preset time at above-mentioned steps S3, and open control valve 59 also switches stream to the three branch's pipe arrangements 58, the stream of treatment fluid not by static mixer 57 by bypass.Thus, the treatment fluid that has been lowered of pure water concentration is only by water-oil separating filter 51.

In addition, also can omit step S4, an execution in step S3.

Step S5

Whether control part 97 is that first set-point is selected to handle to get off according to densimeter 95 measured pure water concentration.Specifically, surpass under the situation of first set-point in pure water concentration, repeating step S4 under the situation that is no more than first set-point, begins to carry out the processing of step S5.

Step S6, S7

Control part 97 is closed control valve 67,69 in open control valve 65.Thus, the treatment fluid (major part be hydrogen fluorine ether) of pure water concentration below first set-point flows to second branch's pipe arrangement 53.Thus, a spot of pure water that remains in the treatment fluid is adsorbed removal by adsorption filter 55.The processing that control part 97 continues execution in step S6 reaches below second set-point up to pure water concentration, begins the processing of step S8 in the moment that reaches below second set-point.

Step S8

Control part 97 drives vibration assigning unit 47, gives ultrasonic vibration to the treatment fluid that stockpiles in the inside groove 3 with given output and given time.Thus, can use treatment fluid, promptly hydrogen fluorine ether is replaced the pure water of the fine structure that enters into substrate W.And, extremely low because the pure water concentration in the treatment fluid becomes, so can not cause damage to the fine structure of substrate W.

As mentioned above, device by present embodiment, control part 97 is after the pure water clean of having carried out with pure water cleaning base plate W, inject hydrogen fluorine ether and use hydrogen fluorine ether to replace the replacement Treatment of pure water, the flow direction to the first branch pipe arrangement 49 of hand-off process liquid, after processing was removed in the separation of removing pure water by water-oil separating filter 51 from treatment fluid, the flow direction to the second branch pipe arrangement 53 of hand-off process liquid adsorbed removal by adsorption filter 55 and handles.Therefore,, can adsorb by adsorption filter 55 and get rid of, thereby can reduce pure water concentration in the hydrogen fluorine ether with doing one's utmost even can not remove clean micro-pure water by separate to remove handling.Its result can prevent the underdry that causes because of the pure water in the hydrogen fluorine ether.

In addition, be not easy by hydrogen fluorine ether displacement, so give ultrasonic vibration by vibration assigning unit 47, the pure water in thus can enough hydrogen fluorine ether displacement fine structures because enter into the pure water of the fine structure that on substrate W, forms.And, gives ultrasonic wave after the pure water concentration in hydrogen fluorine ether reaches below the set-point, thereby can avoid under the high state of pure water concentration in hydrogen fluorine ether the fine structure of substrate W being caused the unfavorable condition of damage.Therefore, can improve rate of finished products.

The present invention is not limited in above-mentioned execution mode, also can be following such execution mode.

(1) in the above-described embodiment, be provided with static mixer 57, after fully mixing non-water-soluble solvent and pure water, make it, but under the situation of water miscible solvent, necessity of static mixer 57 just is not set by water-oil separating filter 51.Thus, can the simplification device structure.

(2) in the above-described embodiment, in inside groove 3, set up vibration assigning unit 47, but if not give the structure of ultrasonic vibration, then can omit this structure.Thus, can the simplification device structure.

(3) in the above-described embodiment, as non-water-soluble solvent illustration the hydrogen fluorine ether of fluorine system, as water miscible solvent illustration isopropyl alcohol, even but the solvent of other different with them also can be applicable to the present invention.For example, can use HFC (HFC:Hydro Fluoro Carbon) as fluorine series solvent beyond the hydrogen fluorine ether.

(4) in the above-described embodiment, the structure that is provided with the densimeter 95 of measuring pure water concentration in inside groove 3 is carried out illustration, but also can adopt the structure of measuring the pure water concentration that circulates in the treatment fluid in the supplying tubing 11.

Second execution mode

Fig. 6 is the block diagram of structure that schematically shows the substrate board treatment of second execution mode.

Treatment trough 1 has inside groove 3 and water jacket 5.Inside groove 3 stockpiles treatment fluid also can the ccontaining substrate W that is kept by keeping arm 7.Keeping arm 7 has supporting member in the bottom of plate-like arms, and this supporting member contacts with the lower limb of substrate W and so that substrate W is in the state of orthostatism that substrate W is supported.This keeping arm 7 can be in processing position and the lifting between the position of readiness above the inside groove 3 in the inside of inside groove 3.Pure water, solvent or their mixed liquor are stockpiled in inside groove 3 as treatment fluid, and the treatment fluid that overflows from inside groove 3 reclaims by the water jacket 5 that the upper periphery round inside groove 3 is provided with.Two bottom sides at inside groove 3 is equipped with two bleed pipes 9 of supplying with treatment fluid.

One end of supplying tubing 11 is connected with bleed pipe 9, and the other end is connected with the outlet 13 of water jacket 5.Supplying tubing 11 has triple valve 15, pump 17, triple valve 19, static mixer 101 and straight flow heater 102 successively from being positioned at the upstream of water jacket 5 one sides.The circulation and the discharge opeing of triple valve 15 hand-off process liquid, pump 17 make the treatment fluid circulation, and the circulation of triple valve 19 hand-off process liquid and pure water are removed (being described in detail later).The treatment fluid that straight flow heater 102 will circulate in supplying tubing 11 is heated to fixed temperature.

Supplying tubing 11 has branch's pipe arrangement 103 of being shunted in the part of triple valve 19.This branch's pipe arrangement 103 has the pure water that is used for separating treatment liquid and the water-oil separating filter 104 of solvent.

Above-mentioned in addition water-oil separating filter 104 is equivalent to pure water removal device of the present invention.

Above-mentioned branch's pipe arrangement 103 has the static mixer 105 that is positioned at water-oil separating filter 104 upstreams.Static mixer 105, portion has the injection portion 106 that is used for injecting to the treatment fluid that circulates in branch's pipe arrangement 103 pure water at its upstream, also has the injection flow of pure water is injected in flow control valve 107 from control to injection portion 106.The flowmeter 108 that is used to measure the pure water flow is installed in the upstream of flow control valve 107.In detail as hereinafter described, static mixer 105 is not a drive division, but by utilizing the device that convection cell mixes that is used for cut apart, change and reverse successively.In addition, be equipped with control valve 109 between triple valve 19 and branch's pipe arrangement 103, the downstream portion of branch's pipe arrangement 103 is equipped with control valve 110.

In addition, above-mentioned static mixer 105 is equivalent to first blender of the present invention, and static mixer 101 is equivalent to second blender of the present invention.In addition, injection portion 106 is equivalent to pure water injection device of the present invention.

Above-mentioned static mixer 101 is identical with above-mentioned static mixer 105, has the injection portion 111 that is used for injecting to the treatment fluid that circulates in supplying tubing 11 isopropyl alcohol at its upstream.Injection portion 111 has the flow control valve 112 that flow is injected in control.In addition, at the upstream portion of flow control valve 112, the flowmeter 113 of mensuration from the isopropyl alcohol flow of isopropyl alcohol supply source is installed.

In addition, above-mentioned injection portion 111 is equivalent to solvent injection device of the present invention.

In order to provide pure water, hydrogen fluorine ether and isopropyl alcohol, and be provided with pure water supply source 114, hydrogen fluorine ether supply source 115 and isopropyl alcohol supply source 116 to water jacket 5.Pure water supply source 114 provides pure water via supply pipe 117 to water jacket 5, and its flow is controlled by the flow control valve 118 that is equipped on the supply pipe 117.Hydrogen fluorine ether supply source 115 provides hydrogen fluorine ether via supply pipe 119 to water jacket 5, and its flow is controlled by the flow control valve 120 that is equipped on the supply pipe 119.Isopropyl alcohol supply source 116 provides isopropyl alcohol via supply pipe 121 to water jacket 5, and its flow is controlled by the flow control valve 122 that is equipped on the supply pipe 121.

In addition, above-mentioned pure water supply source 114 and supply pipe 117 are equivalent to pure water feedway of the present invention, and above-mentioned hydrogen fluorine ether supply source 115, isopropyl alcohol supply source 116 and supply pipe 119,121 are equivalent to solvent supplying apparatus of the present invention.

Below, with reference to accompanying drawing 7.In addition, Fig. 7 is the longitudinal section that schematically shows the structure of static mixer.In addition, the structure of above-mentioned static mixer 101,105 is identical.

Static mixer 101 (105) has cylindrical main body portion 123 and a plurality of members 124 that are equipped in the main part 123.Each member 124 reverses 180 ° and form with rectangular tabular component, and adjacent member 124 reverses and forms to contrary direction respectively.This static mixer 101 (105) portion at its upstream has above-mentioned injection portion 111 (106), and treatment fluid is injected isopropyl alcohol (pure water), and utilizes the effect of cutting apart, changing and reverse that they are mixed.Be under the situation of the such complete water-fast water-insoluble solvent of hydrogen fluorine ether particularly, mix pure water and solvent by static mixer 105, and then separate, can improve the separative efficiency of pure water by water-oil separating filter 104 at solvent.

Below, with reference to accompanying drawing 8.In addition, Fig. 8 is the longitudinal section that schematically shows the water-oil separating structure of filter.

Water-oil separating filter 104 has: shell 125; The liquid introduction part 126 of shell 125 bottoms; Filtration is from the filter 127 of the treatment fluid of liquid introduction part 126; Stockpile in the liquid that has passed through filter 127, heavy liquid first stockpile portion 128; Stockpile second of liquid in the liquid that has passed through filter 127, that proportion is little and stockpile portion 129; Make the inflow portion 130 of treatment fluid influent introduction part 126; Discharge first stockpiles first discharge portion 131 of the liquid in the portion 128; Discharge second stockpiles second discharge portion 132 of the liquid in the portion 129; Outer wall along shell 125 sets, and is used for the cooling water pipe 133 of cooling filter 127 indirectly.Inflow portion 130 is positioned at the upstream of first branch's pipe arrangement 103, and first discharge portion 131 is positioned at the downstream of first branch's pipe arrangement 103.Above-mentioned filter 127, have by the superfine fiber filter and catch the free fluid of small dispersion and the performance of aggegation and thickization, make thickization of free fluid of the small dispersion of micron number magnitude become the millimeter magnitude, be separated into two-layer fully by difference in specific gravity moment.The flowmeter 134 that is used to measure delivery flow is installed on second discharge portion 132.

By making coolant flow, can improve the efficient of separating pure water and solvent in above-mentioned cooling water pipe 133.Because the solubility that the low more pure water of temperature dissolves in solvent is just low more.

In addition, above-mentioned first discharge portion 131 is equivalent to outflow of the present invention portion, and second discharge portion 132 is equivalent to discharge portion of the present invention, and cooling water pipe 133 is equivalent to cooling device of the present invention.

In addition, inside groove 3 has the densimeter 135 of the pure water concentration that is used for measuring treatment fluid at an upper portion thereof.As this densimeter 135, for example can be the device of infrared ray absorbing mode.

The lifting of above-mentioned keeping arm 7, the work of pump 17 and stopping, the temperature control of straight flow heater 102, the flow control of flow control valve 107,112,118,120,122, the open and close controlling of control valve 109,110, the switching controls of triple valve 15,19 etc. are all together control by the control part 136 that is equivalent to control device of the present invention.In addition, utilize flowmeter 108,113,134 flow values of being measured to set by control part 136.

In addition, above-mentioned each one of control part 136 operations, keeping arm 7 is moved to handling the position, supplying with as the pure water of treatment fluid and carrying out " pure water clean " afterwards, carry out in treatment fluid, providing solvent (hydrogen fluorine ether or isopropyl alcohol) and with " replacement Treatment " of solvent exchange pure water.Then, remove " pure water is removed and handled " (being described in detail later) of the pure water in the treatment fluid by water-oil separating filter 104.Then, only the pure water concentration in treatment fluid (solvent) becomes under the situation below the set-point, the additional action of carrying out solvent as described below.In " pure water is removed and is handled ", at solvent is (for example to be difficult to be dissolved under the non-water-soluble situation of pure water, hydrogen fluorine ether), by static mixer 105, utilization is cut apart, changed and reverses is used for mixing pure water and solvent, and then make it by water-oil separating filter 104, can improve the separative efficiency of utilizing water-oil separating filter 104.

Above-mentioned set-point is meant that for example the solvent strength in the treatment fluid (mixed liquor of pure water and solvent) is 1000ppm.

Below, with reference to Fig. 9, the operation of above-mentioned substrate board treatment is described.In addition, Fig. 9 is the flow chart of expression operation.

Step S11

Control part 136 is adjusted flow control valve 118 at switch three-way valve 15 switch three-way valve 19 in circulation side to supplying tubing 11 sides, from pure water supply source 114 pure water is provided to water jacket 5 with given flow.After in inside groove 3, water jacket 5 and supplying tubing 11, filling pure water, make pump 17 and straight flow heater 102 work heating pure water to giving fixed temperature (for example, 60 ℃).After reaching to fixed temperature, keeping arm 7 drops to from position of readiness handles the position, and only keeps preset time, with the pure water that is heated to substrate W to fixed temperature is carried out clean.

Step S12

Control part 136 switch three-way valve 15 when pump 17 is stopped and is closed flow control valve 118 simultaneously to the discharge opeing side.Then, regulate flow control valve 120, provide hydrogen fluorine ether to water jacket 5 with given flow.After making inside groove 3 and water jacket 5 all fill with hydrogen fluorine ether, in supplying tubing 11 sides, make pump 17 work at switch three-way valve 15.Thus, the most of pure water in the treatment fluid is discharged from, and has mixed hydrogen fluorine ether in the treatment fluid, and pure water is by solvent exchange.Then, open flows control valve 122 when closing flow control valve 120 provides isopropyl alcohol to water jacket 5, makes the mixed liquor that comprises hydrogen fluorine ether and isopropyl alcohol.

Step S13

Control part 136 is at switch three-way valve 19 open control valve 109,110 in branch's pipe arrangement 103 sides.Thus, after utilizing static mixer 105 fully to mix hydrogen fluorine ether or isopropyl alcohol and pure water, treatment fluid is by water-oil separating filter 104.Major part is that the pure water in the treatment fluid of hydrogen fluorine ether or isopropyl alcohol is separated and discharge from second discharge portion 132.

In addition, at this moment also can adjust flow control valve 107, in the treatment fluid that circulates in static mixer 105, inject pure water.This be because, when the pure water concentration in the treatment fluid is that certain value is when following, the efficient of separating pure water and solvent by water-oil separating filter 104 will reduce, therefore, by in the low treatment fluid of pure water concentration, injecting on one's own initiative and mixing pure water, utilize pure water to draw and become the following pure water of certain value, thereby separate by water-oil separating filter 104.In addition, when water-oil separating filter 104 is removed pure water, also removed a certain amount of water miscible isopropyl alcohol with pure water.

Step S14

Control part 136 receives the output signal from densimeter 135 one by one when the above-mentioned pure water of beginning is removed processing, obtain the pure water concentration in the treatment fluid.Then, the pure water concentration of execution in step S13 in treatment fluid reaches repeatedly, for example below the 1000ppm.That is, carry out pure water removal processing always and reach given concentration up to pure water.Because enter into substrate W fine structure pure water gradually stripping to treatment fluid, so produced the phenomenon that a time pure water concentration increases gradually.

Step S15

In case the pure water concentration ratio set-point in the treatment fluid is low, the pure water removal efficient of being undertaken by water-oil separating filter 104 will reduce.Therefore, control part 136 is adjusted flow control valve 107 and is injected pure water from injection portion 106, keeps the removal efficient of pure water by the concentration that keeps pure water.At this moment, make on the difference of the pure water injection rate DI of flowmeter 108 output and the amount EX of the treatment fluid (solvent+pure water) that utilizes water-oil separating filter 104 to remove, add the injection rate II that injects solvent from injection portion 111, and the amount that obtains thus is approximately 0, can make the solvent strength in the treatment fluid keep certain.

Step S16

Control part 136 utilizes not shown time set to come timing, this time reach preset time during, carry out above-mentioned steps S15 repeatedly.Handle by these, can also replace fully from the pure water of the fine structure stripping of substrate W with solvent.

By above-mentioned a series of processing, cleaned substrate W with pure water, and fully replaced pure water with solvent (hydrogen fluorine ether or isopropyl alcohol), afterwards, promote keeping arm to 7 to position of readiness, finish the clean of substrate W.

As mentioned above, control part 136 is washed after treatment at pure water, and hydrogen fluorine ether or the isopropyl alcohol replacement Treatment of solvent exchange pure water is provided.Afterwards, switch to branch's pipe arrangement 103, carry out removing the pure water removal processing of pure water by water-oil separating filter 104 from treatment fluid.Therefore, by doing one's utmost to remove the pure water in the treatment fluid that utilizes hydrogen fluorine ether or isopropyl alcohol to carry out displacement, can prevent collapsing of underdry and fine structure.In addition, not only remove the pure water in the treatment fluid by pure water removal processing and also removed isopropyl alcohol to a certain extent, the treatment fluid that comprises hydrogen fluorine ether or isopropyl alcohol is reduced, but, be accompanied by the solvent reduction that pure water is removed so can replenish because replenish isopropyl alcohol by injection portion 106.

The present invention is not limited in above-mentioned execution mode, also can be following such execution mode.

(1) in the above-described embodiment, be provided with static mixer 101,105, solvent and pure water are fully mixed, but under the situation that mainly is water-soluble solvent, also static mixer 101,105 can be set.Thus, can the simplification device structure.

(2) in the above-described embodiment, has structure as the water-oil separating filter 104 of pure water removal device, but also can replace this structure and adopt by molecular sieve, active carbon and alumina etc. and constitute, absorption is also removed the absorption removal device (adsorption filter) of the pure water in the treatment fluid.In addition, also can be set up in parallel water-oil separating filter 104 and pure water absorption removal device and switch use.Thus, the characteristic that can bring into play is separately carried out the pure water removal, can remove pure water efficiently.

(3) in the above-described embodiment, as non-water-soluble solvent illustration the hydrogen fluorine ether of fluorine system, as water miscible solvent illustration isopropyl alcohol, even but the solvent of other different with them also can be applicable to the present invention.For example, can use HFC as fluorine series solvent beyond the hydrogen fluorine ether.

(4) in the above-described embodiment, the structure that is provided with the densimeter 135 of measuring pure water concentration in inside groove 3 is carried out illustration, but also can adopt the structure of measuring the pure water concentration that circulates in the treatment fluid in the supplying tubing 11.

(5) in the above-described embodiment, adopt the structure that pure water and solvent are provided to water jacket 5, but also can adopt the structure that pure water and solvent for example directly are provided to supplying tubing 11.

The 3rd execution mode

Figure 10 is the block diagram of structure that schematically shows the substrate board treatment of the 3rd execution mode.

The substrate board treatment of present embodiment has treatment trough 1, and this treatment trough 1 has inside groove 3 and water jacket 5.Inside groove 3 stockpiles treatment fluid also can the ccontaining substrate W that is kept by keeping arm 7.Keeping arm 7 has supporting member in the bottom of plate-like arms, and this supporting member contacts with the lower limb of substrate W and so that substrate W is in the state of orthostatism that substrate W is supported.This keeping arm 7 can be in processing position and the lifting between the position of readiness above the inside groove 3 in the inside of inside groove 3.Pure water, solvent or their mixed liquor are stockpiled in inside groove 3 as treatment fluid, and the treatment fluid that overflows from inside groove 3 reclaims by the water jacket 5 that the upper periphery round inside groove 3 is provided with.Two bottom sides at inside groove 3 is equipped with two bleed pipes 9 of supplying with treatment fluid.

One end of supplying tubing 11 is connected with bleed pipe 9, and the other end is connected with the outlet 13 of water jacket 5.Supplying tubing 11 has triple valve 15, pump 17, triple valve 19,151,152 and straight flow heater 153 successively from being positioned at the upstream of water jacket 5 one sides.The circulation and the discharge opeing of triple valve 15 hand-off process liquid, pump 17 make the treatment fluid circulation, and the circulation of triple valve 19 hand-off process liquid and pure water are removed (being described in detail later), the circulation of triple valve 151,152 hand-off process liquid and cooling (being described in detail later).The treatment fluid that straight flow heater 153 will circulate in supplying tubing 11 is heated to fixed temperature.

Triple valve 151,152 is provided with the first branch's pipe arrangement 154 that distributes from supplying tubing 11.On this first branch pipe arrangement 154, cooling unit 155 is installed.Cooling unit 155 has the treatment fluid that is used for circulating in first branch's pipe arrangement 154 and is cooled to function to fixed temperature.

In addition, above-mentioned cooling unit 155 is equivalent to " cooling device " of the present invention.

In the downstream of straight flow heater 153, on supplying tubing 11, be positioned at the position of the upstream of bleed pipe 9, be communicated with an end of ascending pipe 156.The other end of ascending pipe 156 is being communicated with pure water supply source 157.On ascending pipe 156, begin to be equipped with successively control valve 158, mixing valve 159 and flow control valve 160 from the downstream.Control valve 158 control is supplied with or is cut off pure water, solvent or mixed the treatment fluid etc. of solvent in pure water.One end of two soup pipe arrangements 161,162 is connected with mixing valve 159, and the other end is connected with hydrogen fluorine ether supply source 163, isopropyl alcohol supply source 164 respectively.Two soup pipe arrangements 161,162 have the flow control valve 165,166 that is used to adjust flow respectively.Mixing valve 159 has any one or two kinds of functions of mixing in non-water-soluble fluorine series solvent hydrogen fluorine ether or the water miscible isopropyl alcohol.

In addition, above-mentioned mixing valve 159 is equivalent to aqueous solvent injection device and the water-insoluble solvent injection device among the present invention.

Supplying tubing 11 has second branch's pipe arrangement 167 with triple valve 152 connections in the triple valve 19 of cooling unit 155 upstreams and downstream.This second branch pipe arrangement 167 has the pure water that is used for separating treatment liquid and the water-oil separating filter 168 of solvent.In addition, supplying tubing 11 has with second branch's pipe arrangement 167 and is the 3rd branch's pipe arrangement 169 of coordination.The 3rd branch's pipe arrangement 169 is connected with the part of the upstream and downstream that is positioned at water-oil separating filter 168.The 3rd branch's pipe arrangement 169 has absorption and removes the adsorption filter 170 of the pure water in the treatment fluid.As this adsorption filter 170, constitute by molecular sieve, active carbon and alumina etc., have the function that can adsorb and remove the pure water of the trace in the treatment fluid.

Above-mentioned second branch's pipe arrangement 167 has the static mixer 171 that is positioned at water-oil separating filter 168 upstreams.The upstream that the 4th branch's pipe arrangement 172 is communicated with this static mixer 171 is again the position of the upstream of water-oil separating filter 168 with the downstream that is static mixer 171.The 4th branch's pipe arrangement 172 comes the circulation of control and treatment liquid by control valve 173.Static mixer 171, portion has the injection portion 174 that is used for injecting to the treatment fluid that circulates in second branch's pipe arrangement 167 pure water at its upstream.In addition, also has the injection flow of pure water is injected in flow control valve 175 from control to injection portion 174.In detail as hereinafter described, static mixer 171 is not a drive division, but the device that convection cell successively mixes that is used for by cutting apart, change and reversing.

Between triple valve 19 and second branch's pipe arrangement 167, be equipped with control valve 176, on the 3rd branch's pipe arrangement 169, be equipped with control valve 177.In addition, be equipped with control valve 178, be equipped with control valve 179 at downstream portion at the upstream portion of second branch's pipe arrangement 167.In addition, be equipped with control valve 180 being positioned on the 3rd branch's pipe arrangement 169 in adsorption filter 170 downstreams.

In addition, above-mentioned water-oil separating filter 168 is equivalent to separator of the present invention, and adsorption filter 170 is equivalent to pure water removal device of the present invention, and static mixer 171 is equivalent to mixing arrangement of the present invention.

Below, with reference to accompanying drawing 11.In addition, Figure 11 is the longitudinal section that schematically shows the structure of static mixer.

Static mixer 171 has main part 181 and a plurality of members 182 that are equipped in the main part 181.Each member 182 reverses 180 ° and form with rectangular tabular component, and adjacent member 182 reverses and forms to contrary direction respectively.This static mixer 171 portion at its upstream has above-mentioned injection portion 174, and treatment fluid is injected pure water, and utilizes the effect of cutting apart, changing and reverse that they are mixed.Be under the situation of the such complete water-fast water-insoluble solvent of hydrogen fluorine ether particularly, after static mixer 171 mixing pure water and solvent, separate by water-oil separating filter 168 again, can improve the separative efficiency of pure water at solvent.

Below, with reference to accompanying drawing 12.In addition, Figure 12 is the longitudinal section that schematically shows the water-oil separating structure of filter.

Water-oil separating filter 168 has: shell 184; The liquid introduction part 185 of shell 184 bottoms; Filtration is from the filter 186 of the treatment fluid of liquid introduction part 185; Stockpile in the liquid that has passed through filter 186, heavy liquid first stockpile portion 187; Stockpile second of liquid in the liquid that has passed through filter 186, that proportion is little and stockpile portion 188; Make the inflow portion 189 of treatment fluid influent introduction part 185; Discharge first stockpiles first discharge portion 190 of the liquid in the portion 187; Discharge second stockpiles second discharge portion 191 of the liquid in the portion 188; Outer wall along shell 184 sets, and is used for the cooling water pipe 192 of cooling filter 186 indirectly.Inflow portion 189 is positioned at the upstream of second branch's pipe arrangement 167, and first discharge portion 190 is positioned at the downstream of second branch's pipe arrangement 167.Above-mentioned filter 186, have by the superfine fiber filter and catch the free fluid of small dispersion and the performance of aggegation and thickization, make thickization of free fluid of the small dispersion of micron number magnitude become the millimeter magnitude, be separated into two-layer fully by difference in specific gravity moment.In addition, come cooling filter 186, can improve the efficient of water-oil separating by cooling water pipe 192.

In addition, inside groove 3 has the densimeter 193 of the pure water concentration that is used for measuring treatment fluid at an upper portion thereof.As this densimeter 193, for example can be the device of infrared ray absorbing mode.

The lifting of above-mentioned keeping arm 7, the work of pump 17 and stopping, the temperature control of straight flow heater 153, the flow control of flow control valve 160,165,166,175, the open and close controlling of control valve 158, the switching controls of triple valve 15,19,151,152, the open and close controlling of control valve 173,176,177,179,180 etc. are all together control by the control part 194 that is equivalent to control device of the present invention.

In addition, above-mentioned each one of control part 194 operations, keeping arm 7 is moved to handling the position, carried out " pure water clean " afterwards at the pure water of having supplied with as treatment fluid, carry out to pure water supply with water-soluble solvent (isopropyl alcohol) come with water-soluble solvent displacement pure water " replacement Treatment ", utilize cooling unit 155 to come " cooling processing " of cooling processing liquid and " separate to remove and handle " that removes the pure water in the treatment fluid by water-oil separating filter 168." absorption is removed and is handled " of adsorbing then, the pure water of removing in the treatment fluid by adsorption filter 170.Then, in treatment fluid, inject water-insoluble solvent, use " displacement promotes to handle " of water-insoluble solvent replacing water soluble solvent.Pure water concentration in treatment fluid becomes under the situation below the set-point, re-injects a small amount of () water-soluble solvent for example, about 5%～10%, " the last processed " of further adsorbing the pure water of removing in the treatment fluid by adsorption filter 170.Wherein, in " replacement Treatment " and " separate remove handle ", by static mixer 171, utilize cut apart, change and reverse be used for mixing pure water and solvent, make it by water-oil separating filter 168 again, can improve the separative efficiency of utilizing water-oil separating filter 168.Be to be difficult to be dissolved under the situation of water-insoluble solvent of pure water particularly, utilize the effect of static mixer 171 obvious for solvent.After " last processed " finishes, make in the never illustrated nozzle of solvent with vaporific ejection, form the solvent gas environment, from treatment trough 1, promote keeping arm 7 again, thus substrate W is carried out dried.

In addition, preferably carrying out " absorption is removed and handled " before, the mode of the saturation solubility of the solvent in the affirmation treatment fluid also can replace with densimeter 193.The concrete value of pure water concentration is for example below 0.1%.This is for fear of the following situation improperly of generation, promptly in a single day carries out " absorption is removed and handled " when the pure water excessive concentration, and adsorption filter 170 just loses water absorbing capacity at short notice, thus the necessary adsorption filter 170 of frequently changing.

In addition, the preferred control part 194 in " displacement promote handle ", operations flows control valve 165 is the injection that low discharge carries out water-insoluble solvent with the flow set of water-insoluble solvent.Thus, can keep with inside groove 3 under the interfacial state of the water-soluble solvent that stockpiles, make the inside of inside groove 3 become water-insoluble solvent.Therefore, can come the replacing water soluble solvent with water-insoluble solvent efficiently.

Below, with reference to Figure 13, the operation of above-mentioned substrate board treatment is described.In addition, Figure 13 is the flow chart of expression operation.

Step S21

Control part 194 switch three-way valve 15 in circulation side switch three-way valve 19,151,152 to supplying tubing 11 sides, in open control valve 158, adjust flow control valve 160, via ascending pipe 156 and supplying tubing 11 pure water is provided to inside groove 3 with given flow from pure water supply source 157.After in inside groove 3, water jacket 5 and supplying tubing 11, all filling pure water, make pump 17 and straight flow heater 153 work heating pure water to giving fixed temperature (for example, 60 ℃).After reaching to fixed temperature, keeping arm 7 is dropped to from position of readiness handle the position, and only keep preset time, with the pure water that is heated to substrate W to fixed temperature is carried out clean.

Step S22

Control part 194 switch three-way valve 15 when straight flow heater 153 and pump 17 are stopped and is closed flow control valve 160 simultaneously to the discharge opeing side.Then, regulate flow control valve 166, provide isopropyl alcohol to supplying tubing 11 to given flow.After making inside groove 3 and water jacket 5 all fill with isopropyl alcohol, in supplying tubing 11 sides, make pump 17 work at switch three-way valve 15.Thus, the most of pure water in the treatment fluid is discharged from, and has mixed isopropyl alcohol in the treatment fluid, and pure water is replaced by isopropyl alcohol.

Step S23

Control part 194 is extremely given fixed temperature by cooling unit 155 cooling processing liquid in switch three-way valve 151,152 to first branch's pipe arrangement 154 sides.By being cooled to this temperature, can make pure water be not easy to be dissolved in the isopropyl alcohol.

Step S24

Control part 194 is switch three-way valve 19 to second branch's pipe arrangements 167 sides in open control valve 176,178,179.Thus, after utilizing static mixer 171 fully to mix isopropyl alcohol and pure water, treatment fluid is by water-oil separating filter 168.

In addition, at this moment adjust flow control valve 175, also can in the treatment fluid that circulates in static mixer 171, inject a spot of pure water.This be because, when the pure water concentration in the solvent is that certain value is when following, the efficient of separating pure water and solvent by water-oil separating filter 168 will reduce, therefore, by in the low treatment fluid of pure water concentration, injecting on one's own initiative and mixing pure water, utilize pure water to draw and become the following pure water of certain value, thereby separate by water-oil separating filter 168.

In above-mentioned processing execution after the preset time, the open control valves 173 of control part 194 also switch stream to the four branch's pipe arrangements 172, the stream of treatment fluid not by static mixer 171 by bypass.Thus, the treatment fluid that has been lowered of pure water concentration only flows through water-oil separating filter 168.Also can omit the 4th branch's pipe arrangement 172 in addition, and always make treatment fluid pass through static mixer 171.

Step S25

Control part 194 is closed control valve 178,179 in open control valve 177,180.Thus, the treatment fluid (major part is an isopropyl alcohol) that reduced of pure water concentration flows to the 3rd branch's pipe arrangement 169.Thus, a spot of pure water that remains in the treatment fluid is adsorbed removal by adsorption filter 170.

Step S26

After above-mentioned absorption removal processing had only been carried out preset time, in the discharge opeing side, switch three-way valve 19,151,152 was to supplying tubing 11 sides in switching control valve 15 for control part 194.And then, adjust flow control valve 165, provide hydrogen fluorine ether with low discharge to inside groove 3.Thus, isopropyl alcohol can not mix with hydrogen fluorine ether, but is pushed to the top at leisure and discharge from inside groove 3, is replaced into hydrogen fluorine ether simultaneously.But a spot of pure water still remains in the treatment fluid or in the fine pattern of substrate W.After inside groove 3 has filled with hydrogen fluorine ether, in closed control valve 158 and flow control valve 165, switch three-way valve 19 to second branch's pipe arrangements 167 sides, on the one hand open control valve 178,179, closed control valve 173 on the other hand.Thus, as described in above-mentioned step S4, the treatment fluid that comprises hydrogen fluorine ether flows through static mixer 171 and water-oil separating filter 168, thereby removes pure water.Control part 194 switches stream as described in the above-mentioned step S25 after the pure water that has only carried out preset time by water-oil separating filter 168 is removed, adsorb removal by adsorption filter 170.

Step S27

Control part 194 adsorbs removal by adsorption filter 170, and the pure water concentration in reference densimeter 193 treatment fluids becomes below the set-point.Set-point is for example below 0.1%.

Step 28

Control part 194 injects isopropyl alcohol once more and carries out last processed in the lowered treatment fluid of pure water concentration.Specifically, in open control valve 158, adjust flow control valve 166, inject a spot of isopropyl alcohol to treatment fluid.This concentration is for example about 5～10%.Utilize the absorption that adsorption filter 170 carries out to remove under this state by maintaining, account for major part, contain the moisture of removing trace the treatment fluid of a spot of isopropyl alcohol from hydrogen fluorine ether.Thus, can extract and remove the interior pure water of fine pattern that residues in substrate W.

Step S29

After above-mentioned processing had only been carried out preset time, the never illustrated nozzle of control part 194 provided solvent vapour, thereby formed the solvent gas environment around treatment trough 1.Then, thus promoting keeping arm 7 makes the hydrogen fluorine ether volatilization dry substrate W that adheres on the substrate W.

As mentioned above, device by present embodiment, control part 194 provides pure water from ascending pipe 156 to supplying tubing 11, after the pure water clean of having carried out with the substrate W in the pure water clean groove 1, by the soup that adheres on the pure water removal substrate W and spot etc.Then, inject isopropyl alcohols and carry out replacement Treatment via mixing valve 159 with isopropyl alcohol displacement pure water, behind the pure water that in replaced treatment trough 1 with isopropyl alcohol, has stockpiled, when switching stream to the first branch pipe arrangement 154, utilize cooling unit 155 to carry out the cooling processing of cooling processing liquid.Then, when switching stream to the second branch pipe arrangement 167, remove the separation of the pure water in the treatment fluid by water-oil separating filter 168 and remove processing.Because treatment fluid is cooled by cooling processing, pure water is not easy to be dissolved in isopropyl alcohol, so can remove pure water efficiently from treatment fluid.Afterwards, inject hydrogen fluorine ether via mixing valve 159 and replace the promotion processing, but because cooling processing before, isopropyl alcohol and pure water are not easy to be dissolved in hydrogen fluorine ether, so almost can fully displace isopropyl alcohol and pure water with hydrogen fluorine ether, can remove the pure water in the treatment trough 1 efficiently, thus residual pure water in the fine pattern that prevents from substrate W, to form.Its result can prevent collapsing of the fine pattern that forms on substrate W.

The present invention is not limited in above-mentioned execution mode, also can be following such execution mode.

(1) in the above-described embodiment, be provided with static mixer 171, fully make it by water-oil separating filter 168 after mixed solvent and the pure water, but there is no need necessarily to be provided with static mixer 171.Thus, can the simplification device structure.

(2) in the above-described embodiment, as non-water-soluble solvent illustration the hydrogen fluorine ether of fluorine system, as water miscible solvent illustration isopropyl alcohol, even but the solvent of other different with them also can be applicable to the present invention.For example, can use HFC as fluorine series solvent beyond the hydrogen fluorine ether.

(3) in the above-described embodiment, the structure that is provided with the densimeter 193 of measuring pure water concentration in inside groove 3 is carried out illustration, but also can adopt the structure of measuring the pure water concentration that circulates in the treatment fluid in the supplying tubing 11.

(4) in the above-described embodiment, before dried, carried out " last processed ", but, also can omit " last processed " reducing fully under the situation of pure water concentration by " displacement promotes to handle ".

Under the situation that does not break away from thought of the present invention or essence, can also implement the present invention in other concrete mode, therefore, the content as the expression invention scope not only is defined as above explanation, also should be with reference to the content of additional claims qualification.

Claims (20)

1. substrate board treatment, it utilizes treatment fluid that substrate is handled, and it is characterized in that, includes with lower member:

Treatment trough, it has the inside groove that stockpiles treatment fluid and reclaims the water jacket of the treatment fluid that overflows from inside groove;

Supplying tubing, it is connected above-mentioned inside groove with above-mentioned water jacket, and makes the treatment fluid circulation;

First branch's pipe arrangement, it shunts above-mentioned supplying tubing;

Separator, it is equipped on above-mentioned first branch's pipe arrangement, with pure water in the treatment fluid and separated from solvent, and discharges pure water;

Second branch's pipe arrangement, its upstream side with above-mentioned separator is connected with the downstream;

The pure water removal device, it is equipped on above-mentioned second branch's pipe arrangement, is used for adsorbing the pure water of removing treatment fluid;

Ascending pipe, it is equipped on above-mentioned supplying tubing, injects pure water in the downstream of above-mentioned separator;

The solvent injection device, it is injected into solvent in the above-mentioned ascending pipe;

Control device, it is after providing pure water and the pure water clean with the substrate in the pure water clean groove from above-mentioned ascending pipe, execution is injected solvent and is replaced the replacement Treatment of pure water with solvent from above-mentioned solvent injection device, afterwards, switch to above-mentioned first branch's pipe arrangement, carry out the separation of from treatment fluid, removing pure water by above-mentioned separator and remove processing, switch to above-mentioned second branch's pipe arrangement again, carry out the absorption of the pure water in absorption and the removal treatment fluid by above-mentioned pure water removal device and remove processing.

2. substrate board treatment as claimed in claim 1 is characterized in that,

Also have:

Mixing arrangement, it is set in place on above-mentioned first branch's pipe arrangement of the upstream side of above-mentioned separator, is used to mix pure water and solvent;

The 3rd branch's pipe arrangement, it is connected the upstream side of above-mentioned mixing arrangement and the upstream side of the above-mentioned separator that is in above-mentioned mixing arrangement downstream,

Above-mentioned control device is under the water miscible situation at solvent, carries out to separate and removes when handling, and the stream of hand-off process liquid is to above-mentioned the 3rd branch's pipe arrangement; Above-mentioned control device is under the non-water-soluble situation at solvent, carries out to separate and removes when handling, and makes treatment fluid pass through above-mentioned mixing arrangement.

3. substrate board treatment as claimed in claim 2 is characterized in that,

Above-mentioned mixing arrangement has the injection portion of injecting pure water.

4. substrate board treatment as claimed in claim 1 is characterized in that,

Above-mentioned separator has:

Filter, it is used for water-oil separating;

Shell, it surrounds above-mentioned filter;

Inflow portion, it is arranged on the above-mentioned shell, is used to make treatment fluid to flow into;

Outflow portion, it is arranged on the above-mentioned shell, is used to make the treatment fluid that passes through above-mentioned filter to flow out;

Discharge portion, it is arranged on the above-mentioned shell, is used for utilizing above-mentioned filter and the discharge of isolated pure water;

Cooling device, it is used to cool off above-mentioned filter.

5. substrate board treatment as claimed in claim 2 is characterized in that,

Above-mentioned separator has:

Filter, it is used for water-oil separating;

Shell, it surrounds above-mentioned filter;

Inflow portion, it is arranged on the above-mentioned shell, is used to make treatment fluid to flow into;

Outflow portion, it is arranged on the above-mentioned shell, is used to make the treatment fluid that passes through above-mentioned filter to flow out;

Discharge portion, it is arranged on the above-mentioned shell, is used for utilizing above-mentioned filter and the discharge of isolated pure water;

Cooling device, it is used to cool off above-mentioned filter.

6. substrate board treatment as claimed in claim 1 is characterized in that,

Have:

The ultrasonic wave applicator, it gives ultrasonic vibration to the treatment fluid that stockpiles in above-mentioned inside groove;

Densimeter, it is used to measure the pure water concentration of treatment fluid,

Above-mentioned control device after the pure water concentration of being measured by above-mentioned densimeter reaches below the set-point, makes the work of above-mentioned ultrasonic wave applicator.

7. substrate board treatment as claimed in claim 6 is characterized in that,

Above-mentioned set-point is 10000ppm.

8. substrate board treatment as claimed in claim 1 is characterized in that,

Above-mentioned solvent injection device is used to inject hydrogen fluorine ether or isopropyl alcohol.

9. substrate board treatment, it utilizes treatment fluid that substrate is handled, and it is characterized in that, includes with lower member:

Treatment trough, it has the inside groove that stockpiles treatment fluid and reclaims the water jacket of the treatment fluid that overflows from inside groove;

Supplying tubing, it is connected above-mentioned inside groove with above-mentioned water jacket, and makes the treatment fluid circulation;

The pure water feedway, it is used to provide pure water as treatment fluid;

Solvent supplying apparatus, it provides solvent as treatment fluid;

Branch's pipe arrangement, it shunts above-mentioned supplying tubing;

The pure water removal device, it is equipped on above-mentioned branch pipe arrangement, is used for removing the pure water of treatment fluid;

The solvent injection device, solvent is injected to above-mentioned supplying tubing in its downstream at above-mentioned pure water removal device;

Control device, it is after providing pure water and the pure water clean with the substrate in the pure water clean groove from above-mentioned pure water feedway, execution provides solvent and replaces the replacement Treatment of pure water with solvent from above-mentioned solvent supplying apparatus, afterwards, switch to above-mentioned branch pipe arrangement, carry out the pure water of from treatment fluid, removing pure water by above-mentioned pure water removal device and remove processing, and come supplementing solvent by above-mentioned solvent injection device.

10. substrate board treatment as claimed in claim 9 is characterized in that,

Have:

First mixing arrangement, it is set in place on the above-mentioned branch pipe arrangement of above-mentioned pure water removal device upstream side, is used for fluid-mixing;

The pure water injection device, it is set in place on the above-mentioned branch pipe arrangement of the above-mentioned first mixing arrangement upstream side, is used to inject pure water;

Second mixing arrangement, it is set in place on the above-mentioned supplying tubing in above-mentioned solvent injection device downstream, is used for fluid-mixing,

Above-mentioned control device is controlled above-mentioned pure water injection device and above-mentioned solvent injection device, make under the low situation of pure water concentration ratio set-point in treatment fluid, inject pure water from above-mentioned pure water injection device, and make on the difference of injection rate that above-mentioned pure water injection device injects pure water and the amount of the treatment fluid that utilizes above-mentioned pure water removal device to remove, add the injection rate of injecting solvent from above-mentioned solvent injection device, the amount that obtains thus is approximately 0.

11. substrate board treatment as claimed in claim 9 is characterized in that,

Above-mentioned pure water removal device has:

Filter, it is used for water-oil separating;

Shell, it surrounds above-mentioned filter;

Inflow portion, it is arranged on the above-mentioned shell, is used to make treatment fluid to flow into;

Outflow portion, it is arranged on the above-mentioned shell, is used to make the treatment fluid that passes through above-mentioned filter to flow out;

Discharge portion, it is arranged on the above-mentioned shell, is used for utilizing above-mentioned filter and the discharge of isolated pure water;

Cooling device, it is used to cool off above-mentioned filter.

12. substrate board treatment as claimed in claim 10 is characterized in that,

Above-mentioned pure water removal device has:

Filter, it is used for water-oil separating;

Shell, it surrounds above-mentioned filter;

Inflow portion, it is arranged on the above-mentioned shell, is used to make treatment fluid to flow into;

Outflow portion, it is arranged on the above-mentioned shell, is used to make the treatment fluid that passes through above-mentioned filter to flow out;

Discharge portion, it is arranged on the above-mentioned shell, is used for utilizing above-mentioned filter and the discharge of isolated pure water;

Cooling device, it is used to cool off above-mentioned filter.

13. substrate board treatment as claimed in claim 9 is characterized in that,

Above-mentioned pure water removal device is the pure water absorption removal device that solvent is passed through and adsorb pure water.

14. substrate board treatment as claimed in claim 9 is characterized in that,

Above-mentioned solvent supplying apparatus is used to provide hydrogen fluorine ether,

Above-mentioned solvent injection device is used to inject isopropyl alcohol.

15. a substrate board treatment, it utilizes treatment fluid that substrate is handled, and it is characterized in that, includes with lower member:

Treatment trough, it is used to stockpile treatment fluid;

Supplying tubing, it will provide to above-mentioned treatment trough from the treatment fluid that above-mentioned treatment trough is discharged, and makes the treatment fluid circulation;

First branch's pipe arrangement, it shunts above-mentioned supplying tubing;

Cooling device, it is equipped on above-mentioned first branch's pipe arrangement, is used for the treatment fluid of circulation is cooled off;

Second branch's pipe arrangement, it will be positioned at the upstream side of above-mentioned cooling device and the above-mentioned supplying tubing in downstream is connected;

Separator, it is equipped on above-mentioned second branch's pipe arrangement, is used for pure water and separated from solvent with treatment fluid, and discharges pure water from treatment fluid;

Ascending pipe, it is connected with above-mentioned supplying tubing, is used for injecting pure water in the downstream of above-mentioned separator;

The water-soluble solvent injection device, it is used for water-soluble solvent is injected into above-mentioned ascending pipe;

The water-insoluble solvent injection device, it is used for water-insoluble solvent is injected into above-mentioned ascending pipe;

Control device, it is after having carried out the pure water clean of cleaning the substrate in the above-mentioned treatment trough with pure water, execution is injected above-mentioned supplying tubing with water-soluble solvent and is replaced the replacement Treatment of pure water with water-soluble solvent from above-mentioned water-soluble solvent injection device, afterwards, when stream being switched to above-mentioned first branch's pipe arrangement, carry out the cooling processing of cooling processing liquid by above-mentioned cooling device, when stream being switched to above-mentioned second branch's pipe arrangement, processing is removed in separation by the pure water in the above-mentioned separator execution removal treatment fluid, injects water-insoluble solvent and replaces the promotion processing to above-mentioned supplying tubing from above-mentioned water-insoluble solvent injection device.

16. substrate board treatment as claimed in claim 15 is characterized in that,

Also have:

The 3rd branch's pipe arrangement, its upstream side with above-mentioned separator is connected with the downstream;

The pure water removal device, it is equipped on above-mentioned the 3rd branch's pipe arrangement, is used for adsorbing the pure water of removing treatment fluid,

Above-mentioned control device switches to above-mentioned the 3rd branch's pipe arrangement with stream after processing is removed in above-mentioned separation.

17. substrate board treatment as claimed in claim 16 is characterized in that,

Also have:

Mixing arrangement, it is set in place on above-mentioned second branch's pipe arrangement of above-mentioned separator upstream side, is used to mix pure water and solvent;

The 4th branch's pipe arrangement, it is connected the upstream side of above-mentioned mixing arrangement and the upstream side of the above-mentioned separator that is in above-mentioned mixing arrangement downstream,

Above-mentioned control device is removed in processing and the above-mentioned displacement promotion processing in above-mentioned separation, and stream is switched to above-mentioned mixing arrangement side; In the processing beyond processing and above-mentioned displacement promotion processing are removed in above-mentioned separation, stream is switched to above-mentioned the 4th branch's pipe arrangement.

18. substrate board treatment as claimed in claim 15 is characterized in that,

Above-mentioned water-soluble solvent injection device injects isopropyl alcohol as water-soluble solvent.

19. substrate board treatment as claimed in claim 15 is characterized in that,

Above-mentioned water-insoluble solvent injection device injects hydrogen fluorine ether as water-insoluble solvent.

20. substrate board treatment as claimed in claim 15 is characterized in that,

When above-mentioned water-insoluble solvent injection device injects water-insoluble solvent, above-mentioned control device control is carried out with low discharge.

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