JPH0737232Y2 - イオンビーム照射装置 - Google Patents
イオンビーム照射装置Info
- Publication number
- JPH0737232Y2 JPH0737232Y2 JP1987195565U JP19556587U JPH0737232Y2 JP H0737232 Y2 JPH0737232 Y2 JP H0737232Y2 JP 1987195565 U JP1987195565 U JP 1987195565U JP 19556587 U JP19556587 U JP 19556587U JP H0737232 Y2 JPH0737232 Y2 JP H0737232Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- beam current
- ion
- density distribution
- current density
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010884 ion-beam technique Methods 0.000 title claims description 35
- 238000000605 extraction Methods 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 claims 4
- 230000001629 suppression Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987195565U JPH0737232Y2 (ja) | 1987-12-22 | 1987-12-22 | イオンビーム照射装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987195565U JPH0737232Y2 (ja) | 1987-12-22 | 1987-12-22 | イオンビーム照射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0198470U JPH0198470U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-06-30 |
| JPH0737232Y2 true JPH0737232Y2 (ja) | 1995-08-23 |
Family
ID=31486240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987195565U Expired - Lifetime JPH0737232Y2 (ja) | 1987-12-22 | 1987-12-22 | イオンビーム照射装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0737232Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004014422A (ja) * | 2002-06-11 | 2004-01-15 | Matsushita Electric Ind Co Ltd | イオン注入装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60258840A (ja) * | 1984-06-04 | 1985-12-20 | Mitsubishi Electric Corp | 反応性イオンビ−ムエツチング装置 |
-
1987
- 1987-12-22 JP JP1987195565U patent/JPH0737232Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0198470U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-06-30 |